DE1285636B - Elektronenmikroskop - Google Patents
ElektronenmikroskopInfo
- Publication number
- DE1285636B DE1285636B DEN26857A DEN0026857A DE1285636B DE 1285636 B DE1285636 B DE 1285636B DE N26857 A DEN26857 A DE N26857A DE N0026857 A DEN0026857 A DE N0026857A DE 1285636 B DE1285636 B DE 1285636B
- Authority
- DE
- Germany
- Prior art keywords
- image
- bundle
- electron microscope
- scanning beam
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000003384 imaging method Methods 0.000 claims description 23
- 238000010894 electron beam technology Methods 0.000 claims description 17
- 238000012634 optical imaging Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000004075 alteration Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000008447 perception Effects 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL646406599A NL142277B (nl) | 1964-06-11 | 1964-06-11 | Elektronenmicroscoop. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1285636B true DE1285636B (de) | 1968-12-19 |
Family
ID=19790277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEN26857A Withdrawn DE1285636B (de) | 1964-06-11 | 1965-06-10 | Elektronenmikroskop |
Country Status (8)
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3869611A (en) * | 1969-09-19 | 1975-03-04 | Siemens Ag | Particle-beam device of the raster type |
| US4042801A (en) * | 1974-08-31 | 1977-08-16 | British Aircraft Corporation Limited | Electron beam apparatus |
| NL7812540A (nl) * | 1978-12-27 | 1980-07-01 | Philips Nv | Kathodestraalbuis. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL53538C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1937-02-18 | |||
| US2330930A (en) * | 1941-04-30 | 1943-10-05 | Rca Corp | Scanning type of electron microscope |
| US2919381A (en) * | 1956-07-25 | 1959-12-29 | Farrand Optical Co Inc | Electron lens |
-
1964
- 1964-06-11 NL NL646406599A patent/NL142277B/xx unknown
-
1965
- 1965-06-04 US US461379A patent/US3389252A/en not_active Expired - Lifetime
- 1965-06-08 CH CH792765A patent/CH445665A/de unknown
- 1965-06-09 AT AT521765A patent/AT256198B/de active
- 1965-06-09 SE SE07597/65A patent/SE331866B/xx unknown
- 1965-06-10 GB GB24590/65A patent/GB1108366A/en not_active Expired
- 1965-06-10 DE DEN26857A patent/DE1285636B/de not_active Withdrawn
- 1965-06-11 BE BE665330A patent/BE665330A/xx unknown
Non-Patent Citations (1)
| Title |
|---|
| None * |
Also Published As
| Publication number | Publication date |
|---|---|
| BE665330A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-12-13 |
| NL142277B (nl) | 1974-05-15 |
| CH445665A (de) | 1967-10-31 |
| AT256198B (de) | 1967-08-10 |
| US3389252A (en) | 1968-06-18 |
| GB1108366A (en) | 1968-04-03 |
| NL6406599A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-12-13 |
| SE331866B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-01-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |