BE665330A - - Google Patents
Info
- Publication number
- BE665330A BE665330A BE665330A BE665330A BE665330A BE 665330 A BE665330 A BE 665330A BE 665330 A BE665330 A BE 665330A BE 665330 A BE665330 A BE 665330A BE 665330 A BE665330 A BE 665330A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL646406599A NL142277B (nl) | 1964-06-11 | 1964-06-11 | Elektronenmicroscoop. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE665330A true BE665330A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-12-13 |
Family
ID=19790277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE665330A BE665330A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1964-06-11 | 1965-06-11 |
Country Status (8)
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3869611A (en) * | 1969-09-19 | 1975-03-04 | Siemens Ag | Particle-beam device of the raster type |
| US4042801A (en) * | 1974-08-31 | 1977-08-16 | British Aircraft Corporation Limited | Electron beam apparatus |
| NL7812540A (nl) * | 1978-12-27 | 1980-07-01 | Philips Nv | Kathodestraalbuis. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL53538C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1937-02-18 | |||
| US2330930A (en) * | 1941-04-30 | 1943-10-05 | Rca Corp | Scanning type of electron microscope |
| US2919381A (en) * | 1956-07-25 | 1959-12-29 | Farrand Optical Co Inc | Electron lens |
-
1964
- 1964-06-11 NL NL646406599A patent/NL142277B/xx unknown
-
1965
- 1965-06-04 US US461379A patent/US3389252A/en not_active Expired - Lifetime
- 1965-06-08 CH CH792765A patent/CH445665A/de unknown
- 1965-06-09 AT AT521765A patent/AT256198B/de active
- 1965-06-09 SE SE07597/65A patent/SE331866B/xx unknown
- 1965-06-10 GB GB24590/65A patent/GB1108366A/en not_active Expired
- 1965-06-10 DE DEN26857A patent/DE1285636B/de not_active Withdrawn
- 1965-06-11 BE BE665330A patent/BE665330A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL142277B (nl) | 1974-05-15 |
| DE1285636B (de) | 1968-12-19 |
| CH445665A (de) | 1967-10-31 |
| AT256198B (de) | 1967-08-10 |
| US3389252A (en) | 1968-06-18 |
| GB1108366A (en) | 1968-04-03 |
| NL6406599A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-12-13 |
| SE331866B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-01-18 |