DE1134566B - Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances - Google Patents
Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substancesInfo
- Publication number
- DE1134566B DE1134566B DES52322A DES0052322A DE1134566B DE 1134566 B DE1134566 B DE 1134566B DE S52322 A DES52322 A DE S52322A DE S0052322 A DES0052322 A DE S0052322A DE 1134566 B DE1134566 B DE 1134566B
- Authority
- DE
- Germany
- Prior art keywords
- vapor deposition
- condensation
- production
- metal
- wick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 title claims description 17
- 239000002184 metal Substances 0.000 title claims description 11
- 238000007740 vapor deposition Methods 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000011810 insulating material Substances 0.000 title 1
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000009833 condensation Methods 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 8
- 239000004744 fabric Substances 0.000 claims description 4
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 210000002268 wool Anatomy 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 2
- 238000010025 steaming Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
- H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/002—Inhomogeneous material in general
- H01B3/004—Inhomogeneous material in general with conductive additives or conductive layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Treatment Of Fiber Materials (AREA)
Description
DEUTSCHESGERMAN
PATENTAMTPATENT OFFICE
S52322VIb/48bS52322VIb / 48b
BEKANNTMACHUNG
DER ANMEtPUNG
VNOAUSGABE DERNOTICE
THE APPROPRIATION
VNO ISSUE OF
9. AUGUST 1962AUGUST 9, 1962
Die Erfindung betrifft eine Vorrichtung zum Herstellen von Isolierstoffbändern durch Bedampfen mit Metall, vorzugsweise zum Herstellen selbstheilender Kondensatoren, wobei vorher ein kondensationshindernder Stoff, z. B. Kohlenwasserstoff, aufgedampft wird, um die Unterlage örtlich begrenzt von Metalldampf frei zu halten, und wobei das Aufdampfen des niederschlagshindernden Stoffes im Behandlungsgefäß durch die Wahl der Beheizungstemperatur regelbar gemacht ist.The invention relates to a device for producing insulating strips by means of vapor deposition Metal, preferably for the production of self-healing capacitors, with a condensation-preventing Fabric, e.g. B. hydrocarbon, is evaporated to the substrate locally limited by metal vapor to keep free, and the evaporation of the precipitation-preventing substance in the treatment vessel by the choice of heating temperature is made controllable.
Es ist bereits bekannt, bei der Herstellung gemusterter Metallisierungen auf Unterlagen durch Metallbedampfung die metallfrei zu lassenden Stellen vor der Metallbedampfung im Vakuum mit einem Stoff, z. B. Kohlenwasserstoff, zu bedampfen, der bei der nachfolgenden Metallbedampfung ein Niederschlagen des Metalldampfes verhindert. Es ist weiterhin bekannt, die Wirkung der Aufdampfung innerhalb gewisser Grenzen durch Wahl der Heiztemperatur zu regeln.It is already known to carry out patterned metallizations on substrates in the production Metal vapor deposition the areas to be left free of metal prior to metal vapor deposition in a vacuum with a Fabric, e.g. B. hydrocarbon to vaporize, which precipitates in the subsequent metal vapor deposition of metal vapor prevented. It is also known the effect of vapor deposition within to regulate certain limits by choosing the heating temperature.
Hierdurch wird jedoch noch nicht sichergestellt, daß der kondensationshindernde Stoff auf der Unterlage in konstanter Schichtstärke und ohne Unterbrechungen aufgedampft wird.However, this does not yet ensure that the condensation-preventing substance is on the base is vapor-deposited in a constant layer thickness and without interruptions.
Bei der Aufdampfung der kondensationsverhindernden Stoffe kommt es darauf an, daß über lange Strecken (beispielsweise über 3000 m) der isolierende, also vom Metallbelag frei bleibende Streifen des Isolierstoffbandes in gleichmäßiger Breite und ohne Unterbrechungen hergestellt werden kann.When evaporating the anti-condensation substances, it is important that they last for a long time Stretches (for example over 3000 m) the insulating strips of the Isolierstoffbandes can be produced in a uniform width and without interruptions.
Verwendet man als Bedampfungsvorrichtung ein Vorratsgefäß für die kondensationsverhindernden Stoffe, das über ein kommunizierendes Rohr mit einer Verdampferdüse in Verbindung steht, und erhitzt man in bekannter Weise den Düsenraum, so senkt sich nach einiger Betriebszeit der Flüssigkeitsspiegel im Düsenraum, und überdies treten Siedepunktsverzögerungen ein, die sich in stoßweisem Sieden bemerkbar machen. Als Folge ergibt sich eine ungleichmäßige Bedampfung des Bandes mit unscharfen Rändern.If you use a storage vessel for the condensation prevention device as a steaming device Substances that are in communication with an evaporator nozzle via a communicating pipe and that are heated If you open the nozzle space in a known manner, the liquid level will drop after some operating time in the nozzle area, and, moreover, boiling point delays occur, which are intermittent Make boiling noticeable. As a result, there is an uneven vaporization of the band with unsharp Margins.
Diese Nachteile werden durch eine Vorrichtung beseitigt, bei der erfindungsgemäß das Vorratsgefäß
für den niederschlagshindernden Stoff mit einem Zuführungsstutzen und einem mit einer Düse sowie
einer regelbaren Heizvorrichtung 6 versehenen Verdampfungsgefäß verbunden ist, in denen ein Docht,
vorzugsweise aus Stahlwolle angeordnet ist. Die Kapillarkräfte des Dochtes bewirken, daß unabhängig
von dem Flüssigkeitsspiegel der Docht stets bis zu einem gewissen Grad mit dem kondensationsverhindernden
Stoff benetzt ist. Die Verdampfung Vorrichtung zum Herstellen von Isolierstoffbändern
durch Bedampfen mit Metall
unter Anwendung einer örtlich begrenzten Vorbedampfung mit kondensationshindernden
StoffenThese disadvantages are eliminated by a device in which, according to the invention, the storage vessel for the precipitation-preventing substance is connected to a feed nozzle and an evaporation vessel provided with a nozzle and a controllable heating device 6, in which a wick, preferably made of steel wool, is arranged. The capillary forces of the wick have the effect that, regardless of the liquid level, the wick is always wetted to a certain extent with the condensation-preventing substance. The evaporation Device for the production of insulating tapes by metal vapor deposition
using locally limited pre-steaming with condensation-preventing substances
Anmelder:
Siemens & Halske Aktiengesellschaft,Applicant:
Siemens & Halske Aktiengesellschaft,
Berlin und München,
München 2, Witteisbacherplatz 2Berlin and Munich,
Munich 2, Witteisbacherplatz 2
Dr. Werner Cirkler, München,
ist als Erfinder genannt wordenDr. Werner Cirkler, Munich,
has been named as the inventor
des kondensationsverhindernden Stoffs erfolgt wegen der erfindungsgemäßen Anordnung der Heizvorrichtung im wesentlichen von dem Docht aus. Mit einer solchen Verdampfervorrichtung lassen sich über lange Zeiten und damit über lange Strecken des zu bedampfenden Bandes scharfkantig bedampfte Streifen herstellen.of the condensation-preventing substance takes place because of the arrangement of the heating device according to the invention essentially from the wick. With such an evaporator device can be over long times and thus strips with sharp-edged steaming over long stretches of the strip to be steamed produce.
In weiterer Ausbildung der Erfindung kann man eine weitere Heizvorrichtung vorsehen, die auch die Teile des Dochtes, die sich im kondensationsverhindernden Stoff befinden, erhitzen. Vorzugsweise sind die beiden Heizvorrichtungen unabhängig voneinander regelbar. Durch die letztgenannte Heizvorrichtung kann die Viskosität des kondensationsverhindernden Stoffs und damit die Menge des in den Verdampfungsraum hochsteigenden Stoffs geregelt und auf das gewünschte Maß gebracht werden.In a further embodiment of the invention, you can provide a further heating device that also Heat parts of the wick that are in the anti-condensation fabric. Preferably are the two heating devices can be regulated independently of one another. By the latter heating device can change the viscosity of the anti-condensation substance and thus the amount of in the evaporation space ascending substance can be regulated and brought to the desired level.
Weitere Einzelheiten der Erfindung ergeben sich aus der nachfolgenden Beschreibung eines Ausführungsbeispiels. Further details of the invention emerge from the following description of an exemplary embodiment.
Der Verdampfungsraum 1 mit dem Zuführungsstutzen 2 steht über einen Schlauch 3 mit dem nicht dargestellten Vorratsgefäß für den kondensationsverhindernden Stoff in Verbindung. Der kondensationsverhindernde Stoff ist vorzugsweise ein Öl oder ein fettähnlicher Stoff. In dem Verdampfungsraum 1 und dem Zuführungsstutzen 2 ist ein Docht 4 eingebracht, der vorzugsweise aus Stahlwolle besteht. Der Verdampfungsraum 1 vor der Düse 5 ist geräu-The evaporation chamber 1 with the supply port 2 is not connected to a hose 3 with the shown storage vessel for the condensation preventing substance in connection. The anti-condensation Substance is preferably an oil or a fat-like substance. A wick 4 is located in the evaporation chamber 1 and the supply port 2 introduced, which preferably consists of steel wool. The evaporation chamber 1 in front of the nozzle 5 is noisy
209 629/154209 629/154
miger als der Zuführungsstutzen 2 und vorzugsweise pistolenförmig ausgebildet.miger than the supply port 2 and preferably designed in the shape of a pistol.
Um den Verdampferraum 1 ist eine Heizwicklung 6 angeordnet, die die im Verdampferraum 1 befindlichen Teile des Dochtes erhitzt. Der Ölstand im Vorratsgefäß 1 ist durch die Linie 7 angedeutet. Bei der erfindungsgemäßen Anordnung des Dochtes ist der Ölstand im Vorratsgefäß nicht wesentlich, solange der untere Teil des Dochtes überhaupt in das im kommunizierenden Rohr (Zuführungsstutzen 2) befindliche Öl eintaucht. Überdies ist eine weitere Heizwicklung 8 vorgesehen, die die Teile des Dochtes erhitzt, die sich im Öl befinden. Die Drähte 9, 10, 11 und 12 sind die Stromzuführungen zu den Heizwicklungen 6 und 8.A heating coil 6 is arranged around the evaporator chamber 1 and heats the parts of the wick located in the evaporator chamber 1. The oil level in the storage vessel 1 is indicated by the line 7. In the arrangement of the wick according to the invention, the oil level in the storage vessel is not essential as long as the lower part of the wick is even immersed in the oil in the communicating pipe (feed nozzle 2). In addition, a further heating coil 8 is provided, which heats the parts of the wick that are in the oil. The wires 9, 10, 11 and 12 are the power supply lines to the heating coils 6 and 8.
Mit der erfindungsgemäßen Vorrichtung können von einem Vorratsgefäß aus mehrere Verdampferdüsen beschickt werden, da der Ölstand in den Verdampfergefäßen unbeachtlich ist, insofern sich nur Teile der Dochte innerhalb des Öls befinden.With the device according to the invention, several evaporator nozzles can be made from one storage vessel be charged, since the oil level in the evaporator vessels is insignificant, insofar as only Parts of the wicks are located within the oil.
Claims (3)
Deutsche Patentschrift Nr. 749 108.Considered publications:
German patent specification No. 749 108.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES52322A DE1134566B (en) | 1957-02-13 | 1957-02-13 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
| GB479458A GB827575A (en) | 1957-02-13 | 1958-02-13 | Improvements in or relating to vapour-deposition apparatus |
| DES57521A DE1160266B (en) | 1957-02-13 | 1958-03-25 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES52322A DE1134566B (en) | 1957-02-13 | 1957-02-13 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1134566B true DE1134566B (en) | 1962-08-09 |
Family
ID=7488669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DES52322A Pending DE1134566B (en) | 1957-02-13 | 1957-02-13 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE1134566B (en) |
| GB (1) | GB827575A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1269449B (en) * | 1960-05-20 | 1968-05-30 | Siemens Ag | Device for continuous vapor deposition of layers of liquid or grease-like substances on tapes excluding vacuum vapor deposition with metal layers |
| DE1262732B (en) * | 1962-07-04 | 1968-03-07 | Siemens Ag | Device for the simultaneous vapor deposition of several parallel strips of liquid or grease-like substances with low vapor pressure on tapes intended in particular for the production of electrical capacitors as a covering means for a subsequent metal vapor deposition |
| DE3833232A1 (en) * | 1988-09-30 | 1990-04-05 | Leybold Ag | METHOD AND DEVICE FOR EVAPORATING MONOMERS LIQUID AT ROOM TEMPERATURE |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE749108C (en) * | 1939-02-10 | 1944-11-23 | Process for making patterned metallizations |
-
1957
- 1957-02-13 DE DES52322A patent/DE1134566B/en active Pending
-
1958
- 1958-02-13 GB GB479458A patent/GB827575A/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE749108C (en) * | 1939-02-10 | 1944-11-23 | Process for making patterned metallizations |
Also Published As
| Publication number | Publication date |
|---|---|
| GB827575A (en) | 1960-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CH333186A (en) | Method and device for applying metal coatings to metal substrates | |
| DE1950126A1 (en) | Process for applying insulating films and electronic components | |
| DE2028949C3 (en) | Getter device for electron tubes | |
| DE2160008A1 (en) | PROCESS FOR THE PRODUCTION OF OXYDIC AREAS IN A METAL LAYER VAPORIZED ON A SUPPORT | |
| DE1134566B (en) | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances | |
| DE2361744B2 (en) | Process for coating surfaces, in particular glass | |
| DE953677C (en) | Evaporator for continuous steaming of strip-shaped material | |
| DE862991C (en) | Process for the production of alloys by condensation from the gas phase | |
| DE767595C (en) | Process for the production of metallized dielectric materials, in particular paper, for the production of so-called self-healing capacitors, the metal coating of which is applied by a vacuum process | |
| DE970970C (en) | Device for the production of surface layers by evaporation or sublimation of the coating material in a high vacuum | |
| DE1790082C3 (en) | Metal film resistor element and method for its manufacture | |
| DE749108C (en) | Process for making patterned metallizations | |
| DE907322C (en) | Process for metal vapor deposition on a dielectric, in particular for the production of coating layers for electrical capacitors | |
| DE976068C (en) | Process for the continuous covering of tape or wire-like structures using the thermal vapor deposition process | |
| DE892023C (en) | Device for achieving uniform evaporation of liquids in a vacuum, in particular for the production of metal 'paper capacitors or the like | |
| DE2039514A1 (en) | Method for the deposition of gallium phosphide resistive layers by cathodic sputtering | |
| DE1263449B (en) | Process for the production of metallized insulating foils | |
| DE871440C (en) | Method and device for evaporating and distilling liquids | |
| DE848287C (en) | Process for vapor deposition, especially for vacuum vapor deposition of insulating foils | |
| DE3114467A1 (en) | Evaporator boat, and method for its manufacture | |
| DE1180215B (en) | Solution of resinates of precious metals and / or base metals in chlorinated hydrocarbons for the production of thin precious metal layers or base metal oxide layers fired onto carrier materials for electrotechnical purposes | |
| DE182910C (en) | ||
| DE2702282A1 (en) | Contacts and/or conductor paths made on semiconductors - where substrate is alternately exposed to vapour from two evaporators | |
| DE720709C (en) | Process for metal leaving certain points on substrates to be metallized by metal vapor deposition | |
| DE892022C (en) | Process for the vapor deposition of substances that are difficult to condense in a vacuum on, in particular, heat-sensitive substrates, in particular for the production of capacitors |