GB827575A - Improvements in or relating to vapour-deposition apparatus - Google Patents

Improvements in or relating to vapour-deposition apparatus

Info

Publication number
GB827575A
GB827575A GB479458A GB479458A GB827575A GB 827575 A GB827575 A GB 827575A GB 479458 A GB479458 A GB 479458A GB 479458 A GB479458 A GB 479458A GB 827575 A GB827575 A GB 827575A
Authority
GB
United Kingdom
Prior art keywords
vapour
relating
deposition apparatus
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB479458A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens AG
Original Assignee
Siemens and Halske AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens and Halske AG, Siemens AG filed Critical Siemens and Halske AG
Publication of GB827575A publication Critical patent/GB827575A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/002—Inhomogeneous material in general
    • H01B3/004—Inhomogeneous material in general with conductive additives or conductive layers
GB479458A 1957-02-13 1958-02-13 Improvements in or relating to vapour-deposition apparatus Expired GB827575A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES52322A DE1134566B (en) 1957-02-13 1957-02-13 Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances

Publications (1)

Publication Number Publication Date
GB827575A true GB827575A (en) 1960-02-10

Family

ID=7488669

Family Applications (1)

Application Number Title Priority Date Filing Date
GB479458A Expired GB827575A (en) 1957-02-13 1958-02-13 Improvements in or relating to vapour-deposition apparatus

Country Status (2)

Country Link
DE (1) DE1134566B (en)
GB (1) GB827575A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1262732B (en) * 1962-07-04 1968-03-07 Siemens Ag Device for the simultaneous vapor deposition of several parallel strips of liquid or grease-like substances with low vapor pressure on tapes intended in particular for the production of electrical capacitors as a covering means for a subsequent metal vapor deposition
DE1269449B (en) * 1960-05-20 1968-05-30 Siemens Ag Device for continuous vapor deposition of layers of liquid or grease-like substances on tapes excluding vacuum vapor deposition with metal layers
EP0361171A1 (en) * 1988-09-30 1990-04-04 Leybold Aktiengesellschaft Process and apparatus for evaporating monomers liquid at room temperature

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE452116A (en) * 1939-02-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1269449B (en) * 1960-05-20 1968-05-30 Siemens Ag Device for continuous vapor deposition of layers of liquid or grease-like substances on tapes excluding vacuum vapor deposition with metal layers
DE1262732B (en) * 1962-07-04 1968-03-07 Siemens Ag Device for the simultaneous vapor deposition of several parallel strips of liquid or grease-like substances with low vapor pressure on tapes intended in particular for the production of electrical capacitors as a covering means for a subsequent metal vapor deposition
EP0361171A1 (en) * 1988-09-30 1990-04-04 Leybold Aktiengesellschaft Process and apparatus for evaporating monomers liquid at room temperature

Also Published As

Publication number Publication date
DE1134566B (en) 1962-08-09

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