DE112023002485T5 - Strahlungsdetektionsvorrichtung, informationsverarbeitungsverfahren und dazugehöriges computerprogramm - Google Patents

Strahlungsdetektionsvorrichtung, informationsverarbeitungsverfahren und dazugehöriges computerprogramm Download PDF

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Publication number
DE112023002485T5
DE112023002485T5 DE112023002485.5T DE112023002485T DE112023002485T5 DE 112023002485 T5 DE112023002485 T5 DE 112023002485T5 DE 112023002485 T DE112023002485 T DE 112023002485T DE 112023002485 T5 DE112023002485 T5 DE 112023002485T5
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DE
Germany
Prior art keywords
radiation detection
unit
detection element
radiation
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112023002485.5T
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German (de)
English (en)
Inventor
Daisuke Matsunaga
Tomoki Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of DE112023002485T5 publication Critical patent/DE112023002485T5/de
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
    • G01T1/40—Stabilisation of spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00—Details of radiation-measuring instruments

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE112023002485.5T 2022-05-31 2023-05-25 Strahlungsdetektionsvorrichtung, informationsverarbeitungsverfahren und dazugehöriges computerprogramm Pending DE112023002485T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-088955 2022-05-31
JP2022088955 2022-05-31
PCT/JP2023/019420 WO2023234154A1 (ja) 2022-05-31 2023-05-25 放射線検出装置、情報処理方法及びコンピュータプログラム

Publications (1)

Publication Number Publication Date
DE112023002485T5 true DE112023002485T5 (de) 2025-05-22

Family

ID=89024849

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112023002485.5T Pending DE112023002485T5 (de) 2022-05-31 2023-05-25 Strahlungsdetektionsvorrichtung, informationsverarbeitungsverfahren und dazugehöriges computerprogramm

Country Status (3)

Country Link
JP (1) JPWO2023234154A1 (https=)
DE (1) DE112023002485T5 (https=)
WO (1) WO2023234154A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4041606B2 (ja) * 1998-12-04 2008-01-30 株式会社堀場製作所 Ｘ線分析装置
JP6082634B2 (ja) * 2013-03-27 2017-02-15 株式会社日立ハイテクサイエンス 蛍光ｘ線分析装置
CN111373287B (zh) * 2017-12-15 2025-01-14 株式会社堀场制作所 放射线检测器和放射线检测装置
JP7008519B2 (ja) * 2018-01-30 2022-01-25 日本電子株式会社 荷電粒子線装置

Also Published As

Publication number Publication date
WO2023234154A1 (ja) 2023-12-07
JPWO2023234154A1 (https=) 2023-12-07

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