DE112023001687T5 - Laserunterstützte plasmalampe mit konischer tasche - Google Patents

Laserunterstützte plasmalampe mit konischer tasche Download PDF

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Publication number
DE112023001687T5
DE112023001687T5 DE112023001687.9T DE112023001687T DE112023001687T5 DE 112023001687 T5 DE112023001687 T5 DE 112023001687T5 DE 112023001687 T DE112023001687 T DE 112023001687T DE 112023001687 T5 DE112023001687 T5 DE 112023001687T5
Authority
DE
Germany
Prior art keywords
plasma
bulb
conical
pocket
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112023001687.9T
Other languages
German (de)
English (en)
Inventor
Sumeet Kumar
Joshua Wittenberg
Mark S. Wang
Rajkeshar SINGH
Yoshio Kagebayashi
Shinichiro NOZAKI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
KLA Corp
Original Assignee
Ushio Denki KK
Ushio Inc
KLA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc, KLA Corp filed Critical Ushio Denki KK
Publication of DE112023001687T5 publication Critical patent/DE112023001687T5/de
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/33—Special shape of cross-section, e.g. for producing cool spot
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE112023001687.9T 2022-05-20 2023-05-15 Laserunterstützte plasmalampe mit konischer tasche Pending DE112023001687T5 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202263344412P 2022-05-20 2022-05-20
US63/344,412 2022-05-20
US17/890,813 US11637008B1 (en) 2022-05-20 2022-08-18 Conical pocket laser-sustained plasma lamp
US17/890,813 2022-08-18
PCT/US2023/022197 WO2023224891A1 (en) 2022-05-20 2023-05-15 Conical pocket laser-sustained plasma lamp

Publications (1)

Publication Number Publication Date
DE112023001687T5 true DE112023001687T5 (de) 2025-01-30

Family

ID=86059995

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112023001687.9T Pending DE112023001687T5 (de) 2022-05-20 2023-05-15 Laserunterstützte plasmalampe mit konischer tasche

Country Status (6)

Country Link
US (1) US11637008B1 (https=)
JP (1) JP2025517440A (https=)
KR (1) KR20250088680A (https=)
CN (1) CN119895528A (https=)
DE (1) DE112023001687T5 (https=)
WO (1) WO2023224891A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11587781B2 (en) * 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5608526A (en) 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US6297880B1 (en) 1998-01-29 2001-10-02 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US7345825B2 (en) 2005-06-30 2008-03-18 Kla-Tencor Technologies Corporation Beam delivery system for laser dark-field illumination in a catadioptric optical system
US7525649B1 (en) 2007-10-19 2009-04-28 Kla-Tencor Technologies Corporation Surface inspection system using laser line illumination with two dimensional imaging
US7957066B2 (en) 2003-02-21 2011-06-07 Kla-Tencor Corporation Split field inspection system using small catadioptric objectives
US9228943B2 (en) 2011-10-27 2016-01-05 Kla-Tencor Corporation Dynamically adjustable semiconductor metrology system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9318311B2 (en) * 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US9390902B2 (en) * 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
JP5947329B2 (ja) 2013-12-06 2016-07-06 浜松ホトニクス株式会社 光源装置
JP6023355B2 (ja) 2013-12-06 2016-11-09 浜松ホトニクス株式会社 発光封体
US9263238B2 (en) * 2014-03-27 2016-02-16 Kla-Tencor Corporation Open plasma lamp for forming a light-sustained plasma
US10119676B2 (en) * 2016-06-10 2018-11-06 Osram Gmbh Lighting device, corresponding lamp and method
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source
US11690162B2 (en) * 2020-04-13 2023-06-27 Kla Corporation Laser-sustained plasma light source with gas vortex flow

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5608526A (en) 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US6297880B1 (en) 1998-01-29 2001-10-02 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US7957066B2 (en) 2003-02-21 2011-06-07 Kla-Tencor Corporation Split field inspection system using small catadioptric objectives
US7345825B2 (en) 2005-06-30 2008-03-18 Kla-Tencor Technologies Corporation Beam delivery system for laser dark-field illumination in a catadioptric optical system
US7525649B1 (en) 2007-10-19 2009-04-28 Kla-Tencor Technologies Corporation Surface inspection system using laser line illumination with two dimensional imaging
US9228943B2 (en) 2011-10-27 2016-01-05 Kla-Tencor Corporation Dynamically adjustable semiconductor metrology system

Also Published As

Publication number Publication date
US11637008B1 (en) 2023-04-25
JP2025517440A (ja) 2025-06-05
WO2023224891A1 (en) 2023-11-23
KR20250088680A (ko) 2025-06-17
CN119895528A (zh) 2025-04-25
TW202347421A (zh) 2023-12-01

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