CN119895528A - 锥形囊激光持续等离子体灯 - Google Patents

锥形囊激光持续等离子体灯 Download PDF

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Publication number
CN119895528A
CN119895528A CN202380053969.2A CN202380053969A CN119895528A CN 119895528 A CN119895528 A CN 119895528A CN 202380053969 A CN202380053969 A CN 202380053969A CN 119895528 A CN119895528 A CN 119895528A
Authority
CN
China
Prior art keywords
plasma
bulb
lamp
capsule
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380053969.2A
Other languages
English (en)
Chinese (zh)
Inventor
S·库马尔
J·维滕贝格
马克·S·王
R·辛格
影林义夫
野崎心一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niuwei Motor Co ltd
KLA Corp
Original Assignee
Niuwei Motor Co ltd
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Niuwei Motor Co ltd, KLA Tencor Corp filed Critical Niuwei Motor Co ltd
Publication of CN119895528A publication Critical patent/CN119895528A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/33—Special shape of cross-section, e.g. for producing cool spot
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN202380053969.2A 2022-05-20 2023-05-15 锥形囊激光持续等离子体灯 Pending CN119895528A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202263344412P 2022-05-20 2022-05-20
US63/344,412 2022-05-20
US17/890,813 US11637008B1 (en) 2022-05-20 2022-08-18 Conical pocket laser-sustained plasma lamp
US17/890,813 2022-08-18
PCT/US2023/022197 WO2023224891A1 (en) 2022-05-20 2023-05-15 Conical pocket laser-sustained plasma lamp

Publications (1)

Publication Number Publication Date
CN119895528A true CN119895528A (zh) 2025-04-25

Family

ID=86059995

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380053969.2A Pending CN119895528A (zh) 2022-05-20 2023-05-15 锥形囊激光持续等离子体灯

Country Status (6)

Country Link
US (1) US11637008B1 (https=)
JP (1) JP2025517440A (https=)
KR (1) KR20250088680A (https=)
CN (1) CN119895528A (https=)
DE (1) DE112023001687T5 (https=)
WO (1) WO2023224891A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11587781B2 (en) * 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150279628A1 (en) * 2014-03-27 2015-10-01 Kla-Tencor Corporation Open Plasma Lamp for Forming a Light-Sustained Plasma
CN107489955A (zh) * 2016-06-10 2017-12-19 欧司朗股份有限公司 照明装置、相应的灯和方法
WO2021211478A1 (en) * 2020-04-13 2021-10-21 Kla Corporation Laser-sustained plasma light source with gas vortex flow

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5608526A (en) 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US6278519B1 (en) 1998-01-29 2001-08-21 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US7957066B2 (en) 2003-02-21 2011-06-07 Kla-Tencor Corporation Split field inspection system using small catadioptric objectives
US7345825B2 (en) 2005-06-30 2008-03-18 Kla-Tencor Technologies Corporation Beam delivery system for laser dark-field illumination in a catadioptric optical system
US7525649B1 (en) 2007-10-19 2009-04-28 Kla-Tencor Technologies Corporation Surface inspection system using laser line illumination with two dimensional imaging
US9318311B2 (en) * 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US9228943B2 (en) 2011-10-27 2016-01-05 Kla-Tencor Corporation Dynamically adjustable semiconductor metrology system
US9390902B2 (en) * 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
JP5947329B2 (ja) 2013-12-06 2016-07-06 浜松ホトニクス株式会社 光源装置
JP6023355B2 (ja) 2013-12-06 2016-11-09 浜松ホトニクス株式会社 発光封体
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150279628A1 (en) * 2014-03-27 2015-10-01 Kla-Tencor Corporation Open Plasma Lamp for Forming a Light-Sustained Plasma
CN107489955A (zh) * 2016-06-10 2017-12-19 欧司朗股份有限公司 照明装置、相应的灯和方法
WO2021211478A1 (en) * 2020-04-13 2021-10-21 Kla Corporation Laser-sustained plasma light source with gas vortex flow

Also Published As

Publication number Publication date
US11637008B1 (en) 2023-04-25
JP2025517440A (ja) 2025-06-05
WO2023224891A1 (en) 2023-11-23
KR20250088680A (ko) 2025-06-17
DE112023001687T5 (de) 2025-01-30
TW202347421A (zh) 2023-12-01

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