DE112018003107T5 - Gestapelte batteriestruktur - Google Patents
Gestapelte batteriestruktur Download PDFInfo
- Publication number
- DE112018003107T5 DE112018003107T5 DE112018003107.1T DE112018003107T DE112018003107T5 DE 112018003107 T5 DE112018003107 T5 DE 112018003107T5 DE 112018003107 T DE112018003107 T DE 112018003107T DE 112018003107 T5 DE112018003107 T5 DE 112018003107T5
- Authority
- DE
- Germany
- Prior art keywords
- battery
- layer
- stacked
- layers
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims abstract description 275
- 239000000758 substrate Substances 0.000 claims abstract description 202
- 239000010409 thin film Substances 0.000 claims abstract description 99
- 239000011241 protective layer Substances 0.000 claims abstract description 87
- 238000000034 method Methods 0.000 claims abstract description 69
- 239000012212 insulator Substances 0.000 claims abstract description 59
- 238000005530 etching Methods 0.000 claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 34
- 239000004020 conductor Substances 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 16
- 238000001039 wet etching Methods 0.000 claims description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- 238000011049 filling Methods 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 8
- 238000005553 drilling Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000006870 function Effects 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 28
- 239000003792 electrolyte Substances 0.000 description 15
- 239000012774 insulation material Substances 0.000 description 13
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 9
- 229910052744 lithium Inorganic materials 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000010406 cathode material Substances 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000000227 grinding Methods 0.000 description 5
- -1 silicon nitrides Chemical class 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 239000010405 anode material Substances 0.000 description 3
- 239000003251 chemically resistant material Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000003779 heat-resistant material Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910015643 LiMn 2 O 4 Inorganic materials 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 229910018584 Mn 2-x O 4 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000681 Silicon-tin Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 229910021525 ceramic electrolyte Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- 238000009830 intercalation Methods 0.000 description 1
- LQJIDIOGYJAQMF-UHFFFAOYSA-N lambda2-silanylidenetin Chemical compound [Si].[Sn] LQJIDIOGYJAQMF-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000006138 lithiation reaction Methods 0.000 description 1
- CEMTZIYRXLSOGI-UHFFFAOYSA-N lithium lanthanum(3+) oxygen(2-) titanium(4+) Chemical compound [Li+].[O--].[O--].[O--].[O--].[Ti+4].[La+3] CEMTZIYRXLSOGI-UHFFFAOYSA-N 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910001947 lithium oxide Inorganic materials 0.000 description 1
- 229910001386 lithium phosphate Inorganic materials 0.000 description 1
- GLNWILHOFOBOFD-UHFFFAOYSA-N lithium sulfide Chemical compound [Li+].[Li+].[S-2] GLNWILHOFOBOFD-UHFFFAOYSA-N 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- TWQULNDIKKJZPH-UHFFFAOYSA-K trilithium;phosphate Chemical compound [Li+].[Li+].[Li+].[O-]P([O-])([O-])=O TWQULNDIKKJZPH-UHFFFAOYSA-K 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
- H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0436—Small-sized flat cells or batteries for portable equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
- H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
- H01M10/0562—Solid materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/50—Current conducting connections for cells or batteries
- H01M50/502—Interconnectors for connecting terminals of adjacent batteries; Interconnectors for connecting cells outside a battery casing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/50—Current conducting connections for cells or batteries
- H01M50/502—Interconnectors for connecting terminals of adjacent batteries; Interconnectors for connecting cells outside a battery casing
- H01M50/509—Interconnectors for connecting terminals of adjacent batteries; Interconnectors for connecting cells outside a battery casing characterised by the type of connection, e.g. mixed connections
- H01M50/51—Connection only in series
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2220/00—Batteries for particular applications
- H01M2220/30—Batteries in portable systems, e.g. mobile phone, laptop
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2300/00—Electrolytes
- H01M2300/0017—Non-aqueous electrolytes
- H01M2300/0065—Solid electrolytes
- H01M2300/0068—Solid electrolytes inorganic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Secondary Cells (AREA)
- Battery Mounting, Suspending (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/673,819 | 2017-08-10 | ||
| US15/673,819 US11637325B2 (en) | 2017-08-10 | 2017-08-10 | Large capacity solid state battery |
| PCT/IB2018/055599 WO2019030597A1 (en) | 2017-08-10 | 2018-07-26 | Stacked battery structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112018003107T5 true DE112018003107T5 (de) | 2020-03-26 |
Family
ID=65271087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112018003107.1T Pending DE112018003107T5 (de) | 2017-08-10 | 2018-07-26 | Gestapelte batteriestruktur |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US11637325B2 (enExample) |
| JP (1) | JP7065944B2 (enExample) |
| CN (1) | CN110870127B (enExample) |
| DE (1) | DE112018003107T5 (enExample) |
| GB (1) | GB2578413B (enExample) |
| WO (1) | WO2019030597A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11316143B2 (en) | 2019-05-07 | 2022-04-26 | International Business Machines Corporation | Stacked device structure |
| FR3099292B1 (fr) * | 2019-07-23 | 2021-09-24 | Commissariat Energie Atomique | Procede d’amincissement et d’encapsulation de composants microelectroniques |
| US12087948B2 (en) * | 2019-08-01 | 2024-09-10 | Alliance For Sustainable Energy, Llc | Ternary nitride negative electrode based lithium-ion battery |
| IL293295B2 (en) * | 2019-12-24 | 2025-09-01 | I Ten | Method for producing lithium-ion batteries, in particular high-power batteries, and a battery obtained by this method |
| US11876233B2 (en) | 2020-02-20 | 2024-01-16 | International Business Machines Corporation | Thin film battery stacking |
| CN111342106B (zh) * | 2020-03-11 | 2023-08-29 | 沈阳浩讯微电子科技有限公司 | 堆叠式全固态薄膜电池及其制备方法 |
| FR3116373A1 (fr) | 2020-11-13 | 2022-05-20 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif électrochimique tel une micro batterie |
| US11522243B2 (en) * | 2020-12-21 | 2022-12-06 | International Business Machines Corporation | Hermetic packaging of a micro-battery device |
| TWI774397B (zh) * | 2021-05-28 | 2022-08-11 | 位速科技股份有限公司 | 薄膜光伏結構 |
| WO2023089875A1 (ja) * | 2021-11-16 | 2023-05-25 | パナソニックＩｐマネジメント株式会社 | 電池、電池の製造方法および回路基板 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08250085A (ja) | 1995-03-15 | 1996-09-27 | Seiko Epson Corp | プリント回路基板 |
| WO2004090982A1 (ja) * | 2003-04-04 | 2004-10-21 | Matsushita Electric Industrial Co., Ltd. | 電池搭載集積回路装置 |
| US20080289676A1 (en) | 2007-05-25 | 2008-11-27 | Guidotti Ronald Armand | Electrode for a thermal battery and method of making the same |
| KR101773498B1 (ko) | 2007-10-25 | 2017-09-01 | 어플라이드 머티어리얼스, 인코포레이티드 | 박막 배터리들의 대량 생산을 위한 방법 |
| US10263277B2 (en) | 2008-02-25 | 2019-04-16 | Alliance For Sustainable Energy, Llc | Flexible thin film solid state lithium ion batteries |
| WO2010035197A1 (en) | 2008-09-26 | 2010-04-01 | Koninklijke Philips Electronics, N.V. | Flexible all solid state battery with enhanced deposition freedom |
| WO2010100599A1 (en) | 2009-03-04 | 2010-09-10 | Koninklijke Philips Electronics, N.V. | Large capacity thin film battery and method for making same |
| KR20110115276A (ko) | 2010-04-15 | 2011-10-21 | 김한식 | 박막 배터리를 기반으로 한 회로 기판 |
| US8673473B2 (en) | 2010-08-10 | 2014-03-18 | GM Global Technology Operations LLC | Integrated cooling fin and frame |
| US10770745B2 (en) | 2011-11-09 | 2020-09-08 | Sakti3, Inc. | Monolithically integrated thin-film solid state lithium battery device having multiple layers of lithium electrochemical cells |
| FR2982082B1 (fr) | 2011-11-02 | 2013-11-22 | Fabien Gaben | Procede de fabrication de batteries en couches minces entierement solides |
| US9887429B2 (en) * | 2011-12-21 | 2018-02-06 | Front Edge Technology Inc. | Laminated lithium battery |
| CN104321914B (zh) | 2012-03-01 | 2019-08-13 | 约翰逊Ip控股有限责任公司 | 高容量固态复合正极、固态复合隔膜、固态可充电锂电池及其制造方法 |
| KR101383804B1 (ko) | 2012-06-08 | 2014-04-09 | 지에스에너지 주식회사 | 적층 박막 전지 |
| FR2993101B1 (fr) | 2012-07-06 | 2015-07-17 | Commissariat Energie Atomique | Procede d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenue |
| WO2014099974A1 (en) | 2012-12-19 | 2014-06-26 | Applied Materials, Inc. | Mask-less fabrication of vertical thin film batteries |
| US9368722B2 (en) | 2013-09-06 | 2016-06-14 | Taiwan Semiconductor Manufacturing Company Ltd. | Resistive random access memory and manufacturing method thereof |
| JP6590242B2 (ja) | 2014-05-20 | 2019-10-16 | パナソニックＩｐマネジメント株式会社 | 薄膜全固体電池 |
| CN113904047B (zh) * | 2015-05-06 | 2024-07-26 | A123系统有限责任公司 | 电池挤压保护系统 |
| US9722254B2 (en) | 2015-07-27 | 2017-08-01 | X Development Llc | Graphene application in battery |
| FR3042308B1 (fr) * | 2015-10-13 | 2018-02-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Boitier pour composants microelectroniques |
| US20190165342A1 (en) * | 2016-07-13 | 2019-05-30 | Itn Energy Systems, Inc. | Thin-film battery with adhesive layer |
-
2017
- 2017-08-10 US US15/673,819 patent/US11637325B2/en active Active
- 2017-11-13 US US15/810,344 patent/US11211638B2/en active Active
-
2018
- 2018-07-26 WO PCT/IB2018/055599 patent/WO2019030597A1/en not_active Ceased
- 2018-07-26 JP JP2020505874A patent/JP7065944B2/ja active Active
- 2018-07-26 GB GB2002809.8A patent/GB2578413B/en active Active
- 2018-07-26 DE DE112018003107.1T patent/DE112018003107T5/de active Pending
- 2018-07-26 CN CN201880046518.5A patent/CN110870127B/zh active Active
-
2023
- 2023-01-26 US US18/159,881 patent/US20230170532A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB2578413B (en) | 2020-08-19 |
| GB2578413A (en) | 2020-05-06 |
| GB202002809D0 (en) | 2020-04-15 |
| US11211638B2 (en) | 2021-12-28 |
| US20230170532A1 (en) | 2023-06-01 |
| US20190051944A1 (en) | 2019-02-14 |
| CN110870127B (zh) | 2023-04-07 |
| JP2020529712A (ja) | 2020-10-08 |
| WO2019030597A1 (en) | 2019-02-14 |
| US20190051943A1 (en) | 2019-02-14 |
| JP7065944B2 (ja) | 2022-05-12 |
| CN110870127A (zh) | 2020-03-06 |
| US11637325B2 (en) | 2023-04-25 |
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