DE112012002616A5 - Apparatus and method for coating a substrate - Google Patents

Apparatus and method for coating a substrate Download PDF

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Publication number
DE112012002616A5
DE112012002616A5 DE112012002616.0T DE112012002616T DE112012002616A5 DE 112012002616 A5 DE112012002616 A5 DE 112012002616A5 DE 112012002616 T DE112012002616 T DE 112012002616T DE 112012002616 A5 DE112012002616 A5 DE 112012002616A5
Authority
DE
Germany
Prior art keywords
coating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112012002616.0T
Other languages
German (de)
Inventor
Franz Ficker
Jörg Krumeich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE112012002616A5 publication Critical patent/DE112012002616A5/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
DE112012002616.0T 2011-06-24 2012-06-22 Apparatus and method for coating a substrate Withdrawn DE112012002616A5 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102011051314.0 2011-06-24
DE102011051314 2011-06-24
DE102011057079 2011-12-28
DE102011057079.9 2011-12-28
PCT/EP2012/062048 WO2012175651A1 (en) 2011-06-24 2012-06-22 Device and method for coating a substrate

Publications (1)

Publication Number Publication Date
DE112012002616A5 true DE112012002616A5 (en) 2014-03-13

Family

ID=46331318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112012002616.0T Withdrawn DE112012002616A5 (en) 2011-06-24 2012-06-22 Apparatus and method for coating a substrate

Country Status (2)

Country Link
DE (1) DE112012002616A5 (en)
WO (1) WO2012175651A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106894252A (en) * 2015-12-17 2017-06-27 睿想科技有限公司 A kind of textile waterless staining technique
DE102016114282A1 (en) * 2016-08-02 2018-02-08 Von Ardenne Gmbh Processing arrangement and method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB796139A (en) * 1954-08-14 1958-06-04 Heberlein & Co Ag Improvements in or relating to processes for producing decoration pliable sheet material by depositing metal from the vapour state thereon
US5206516A (en) * 1991-04-29 1993-04-27 International Business Machines Corporation Low energy, steered ion beam deposition system having high current at low pressure
TW495812B (en) * 2000-03-06 2002-07-21 Semiconductor Energy Lab Thin film forming device, method of forming a thin film, and self-light-emitting device
JP4053209B2 (en) * 2000-05-01 2008-02-27 三星エスディアイ株式会社 Manufacturing method of organic EL display
US7074143B2 (en) 2004-07-20 2006-07-11 New Archery Products Corp. Arrow fletching system and method for attaching arrow fletching system to an arrow shaft
WO2006110667A2 (en) * 2005-04-11 2006-10-19 Intematix Corporation Biased target ion beam deposition (btibd) for the production of combinatorial materials libraries
DE102005058869A1 (en) 2005-12-09 2007-06-14 Cis Solartechnik Gmbh & Co. Kg Method and device for coating strips
US20080011225A1 (en) * 2006-07-11 2008-01-17 Mcclure Donald J Apparatus and methods for continuously depositing a pattern of material onto a substrate
WO2011034011A1 (en) * 2009-09-15 2011-03-24 シャープ株式会社 Vapor deposition method and vapor deposition apparatus

Also Published As

Publication number Publication date
WO2012175651A1 (en) 2012-12-27

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee