DE112012005412A5 - Method for protecting the surface of an optical component and device for processing workpieces - Google Patents

Method for protecting the surface of an optical component and device for processing workpieces Download PDF

Info

Publication number
DE112012005412A5
DE112012005412A5 DE112012005412.1T DE112012005412T DE112012005412A5 DE 112012005412 A5 DE112012005412 A5 DE 112012005412A5 DE 112012005412 T DE112012005412 T DE 112012005412T DE 112012005412 A5 DE112012005412 A5 DE 112012005412A5
Authority
DE
Germany
Prior art keywords
protecting
optical component
processing workpieces
workpieces
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112012005412.1T
Other languages
German (de)
Inventor
Wilfried Behr
Stefan Jakobs
Simon Olschok
Uwe Reisgen
Stefan Longerich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Rheinisch Westlische Technische Hochschuke RWTH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH, Rheinisch Westlische Technische Hochschuke RWTH filed Critical Forschungszentrum Juelich GmbH
Publication of DE112012005412A5 publication Critical patent/DE112012005412A5/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
DE112012005412.1T 2011-12-21 2012-12-21 Method for protecting the surface of an optical component and device for processing workpieces Withdrawn DE112012005412A5 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011056811A DE102011056811A1 (en) 2011-12-21 2011-12-21 Method for protecting the surface of an optical component and device for processing workpieces
DE102011056811.5 2011-12-21
PCT/EP2012/076602 WO2013092981A2 (en) 2011-12-21 2012-12-21 Method for protecting the surface of an optical component and device for processing work pieces

Publications (1)

Publication Number Publication Date
DE112012005412A5 true DE112012005412A5 (en) 2014-09-11

Family

ID=47594621

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102011056811A Withdrawn DE102011056811A1 (en) 2011-12-21 2011-12-21 Method for protecting the surface of an optical component and device for processing workpieces
DE112012005412.1T Withdrawn DE112012005412A5 (en) 2011-12-21 2012-12-21 Method for protecting the surface of an optical component and device for processing workpieces

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102011056811A Withdrawn DE102011056811A1 (en) 2011-12-21 2011-12-21 Method for protecting the surface of an optical component and device for processing workpieces

Country Status (2)

Country Link
DE (2) DE102011056811A1 (en)
WO (1) WO2013092981A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013214925A1 (en) * 2013-07-30 2015-02-05 Bayerische Motoren Werke Aktiengesellschaft Housing for a beam path, processing chamber and method for laser processing
DE102014103635C5 (en) 2014-03-17 2019-12-19 RWTH Aachen - Körperschaft des öffentlichen Rechts Vacuum chamber with a protective housing
DE102014210838A1 (en) * 2014-06-06 2015-12-17 Trumpf Laser Gmbh Einkoppeloptik, laser welding head and laser welding device with vacuum chamber
US9719857B2 (en) 2014-12-31 2017-08-01 Thermo Scientific Portable Analytical Instruments Inc. Laser induced breakdown spectroscopy sample chamber
DE102017222490A1 (en) * 2017-12-12 2019-06-13 KTW Technology GmbH High vacuum chamber
DE102019214742A1 (en) 2019-09-26 2021-04-01 Carl Zeiss Microscopy Gmbh Assembly of a laser ablation device and laser ablation device of such an assembly
CN112692429B (en) * 2020-12-03 2022-03-25 中国工程物理研究院材料研究所 High-vacuum, long-time and high-power laser welding light-transmitting glass protection device
US20220305584A1 (en) * 2021-03-24 2022-09-29 Fei Company In-situ laser redeposition reduction by a controlled gas flow and a system for reducing contamination
DE102021123027A1 (en) 2021-09-06 2023-03-09 LaVa-X GmbH Laser processing device
CN113835310A (en) * 2021-09-29 2021-12-24 深圳市先地图像科技有限公司 Diaphragm and laser

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB949136A (en) * 1962-04-16 1964-02-12 Vakutronik Veb Improvements in or relating to devices for observing processes in high-vacuum apparatus
FR1528680A (en) * 1967-03-21 1968-06-14 Onera (Off Nat Aerospatiale) Device for measuring radiation occurring in an enclosure with a low pressure atmosphere
US4162390A (en) * 1977-10-03 1979-07-24 The International Nickel Company, Inc. Laser welding chamber
JPS5975621A (en) * 1982-10-22 1984-04-28 Mitsubishi Electric Corp Film forming device using photochemical reaction
US5359176A (en) * 1993-04-02 1994-10-25 International Business Machines Corporation Optics and environmental protection device for laser processing applications
DE29518138U1 (en) * 1995-11-15 1996-04-18 Brandstetter Heinz Peter Laser engraving and cutting device
US6071375A (en) * 1997-12-31 2000-06-06 Lam Research Corporation Gas purge protection of sensors and windows in a gas phase processing reactor

Also Published As

Publication number Publication date
DE102011056811A1 (en) 2013-06-27
WO2013092981A3 (en) 2013-10-17
WO2013092981A2 (en) 2013-06-27

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R082 Change of representative

Representative=s name: KOENIG NAEVEN SCHMETZ PATENT- & RECHTSANWAELTE, DE

Representative=s name: KOENIG & NAEVEN PATENT- UND RECHTSANWALTSKANZL, DE

R016 Response to examination communication
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: H01J0037300000

Ipc: H01J0037305000

R081 Change of applicant/patentee

Owner name: FORSCHUNGSZENTRUM JUELICH GMBH, DE

Free format text: FORMER OWNERS: FORSCHUNGSZENTRUM JUELICH GMBH, 52428 JUELICH, DE; RHEINISCH-WESTFAELISCHE TECHNISCHE HOCHSCHULE AACHEN, 52062 AACHEN, DE

R082 Change of representative

Representative=s name: KOENIG NAEVEN SCHMETZ PATENT- & RECHTSANWAELTE, DE

R016 Response to examination communication
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee