DE112009000890T8 - Schutzbeschichtungen für katalytische Metalle verwendende Halbleiter-Gassensoren - Google Patents

Schutzbeschichtungen für katalytische Metalle verwendende Halbleiter-Gassensoren Download PDF

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Publication number
DE112009000890T8
DE112009000890T8 DE112009000890T DE112009000890T DE112009000890T8 DE 112009000890 T8 DE112009000890 T8 DE 112009000890T8 DE 112009000890 T DE112009000890 T DE 112009000890T DE 112009000890 T DE112009000890 T DE 112009000890T DE 112009000890 T8 DE112009000890 T8 DE 112009000890T8
Authority
DE
Germany
Prior art keywords
gas sensors
protective coatings
semiconductor gas
catalytic metals
catalytic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112009000890T
Other languages
English (en)
Other versions
DE112009000890T5 (de
Inventor
Prabhu Calif. Soundarrajan
An T. Calif. Le Nguyen
Todd E. Minn. Wilke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
H2SCAN Corp Calif
H2scan Corp
Original Assignee
H2SCAN Corp Calif
H2scan Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by H2SCAN Corp Calif, H2scan Corp filed Critical H2SCAN Corp Calif
Publication of DE112009000890T5 publication Critical patent/DE112009000890T5/de
Application granted granted Critical
Publication of DE112009000890T8 publication Critical patent/DE112009000890T8/de
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Catalysts (AREA)
DE112009000890T 2008-04-06 2009-04-06 Schutzbeschichtungen für katalytische Metalle verwendende Halbleiter-Gassensoren Expired - Fee Related DE112009000890T8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4275508P 2008-04-06 2008-04-06
US61/042,755 2008-04-06
PCT/US2009/039646 WO2009126568A1 (en) 2008-04-06 2009-04-06 Protective coatings for solid-state gas sensors employing catalytic metals

Publications (2)

Publication Number Publication Date
DE112009000890T5 DE112009000890T5 (de) 2011-03-24
DE112009000890T8 true DE112009000890T8 (de) 2011-06-30

Family

ID=41162207

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112009000890T Expired - Fee Related DE112009000890T8 (de) 2008-04-06 2009-04-06 Schutzbeschichtungen für katalytische Metalle verwendende Halbleiter-Gassensoren

Country Status (5)

Country Link
US (1) US20090301879A1 (de)
JP (1) JP2011519417A (de)
CN (1) CN102037349A (de)
DE (1) DE112009000890T8 (de)
WO (1) WO2009126568A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2550378A4 (de) 2010-03-22 2014-02-19 T3 Scient Llc Wasserstoffselektive schutzbeschichtung, beschichteter artikel und entsprechendes verfahren
CN102012385B (zh) * 2010-09-16 2012-08-15 中国石油大学(华东) 一种具有氢气敏感效应的钯/碳/硅异质结材料
US8707767B2 (en) 2011-03-31 2014-04-29 Qualitrol Company, Llc Combined hydrogen and pressure sensor assembly
US8511160B2 (en) 2011-03-31 2013-08-20 Qualitrol Company, Llc Combined hydrogen and pressure sensor assembly
US8839658B2 (en) 2011-03-31 2014-09-23 Qualitrol Company, Llc Combination of hydrogen and pressure sensors
GB2507042B (en) 2012-10-16 2018-07-11 Schlumberger Holdings Electrochemical hydrogen sensor
US10197519B2 (en) 2013-03-15 2019-02-05 H2Scan Corporation Gas sensing systems and methods
WO2016026803A1 (en) * 2014-08-19 2016-02-25 Abb Technology Ag Hydrogen sensor having a protection layer
CN104749223B (zh) * 2015-04-15 2017-10-20 海卓赛思（苏州）传感技术有限公司 一种用于油浸式变压器氢气浓度在线监测的氢气传感器及其使用方法
JP6829181B2 (ja) * 2017-11-28 2021-02-10 株式会社東芝 ガスセンサ
JP6437689B1 (ja) * 2018-08-07 2018-12-12 新コスモス電機株式会社 Ｍｅｍｓ型半導体式ガス検知素子
CN108956957A (zh) * 2018-08-20 2018-12-07 国网陕西省电力公司电力科学研究院 一种用于油中溶解气体检测的氢气传感器
KR102209269B1 (ko) * 2019-04-16 2021-01-29 연세대학교 산학협력단 고내구성 자가구동 환경센서
CN113406147B (zh) * 2021-05-08 2022-11-29 中北大学 一种氢气敏感元件及制备方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3519410A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
US5672390A (en) * 1990-11-13 1997-09-30 Dancor, Inc. Process for protecting a surface using silicate compounds
JPH06148112A (ja) * 1992-10-30 1994-05-27 Kurabe Ind Co Ltd 水素ガス検知素子
DE19618935C2 (de) * 1996-05-10 2002-11-28 Siemens Ag Gassensor und Verfahren zur Herstellung eines Gassensors
US6041643A (en) * 1998-07-27 2000-03-28 General Electric Company Gas sensor with protective gate, method of forming the sensor, and method of sensing
JP4377004B2 (ja) * 1999-08-26 2009-12-02 ゼネラル・エレクトリック・カンパニイ ゲートが保護されたガスセンサー、センサーの形成法、および検出法
US6634213B1 (en) 2000-02-18 2003-10-21 Honeywell International Inc. Permeable protective coating for a single-chip hydrogen sensor
JP2008050610A (ja) * 2002-02-27 2008-03-06 Hitachi Chem Co Ltd シリカ系被膜形成用組成物、シリカ系被膜及びその製造方法、並びに電子部品
US7287412B2 (en) * 2003-06-03 2007-10-30 Nano-Proprietary, Inc. Method and apparatus for sensing hydrogen gas
US20040093928A1 (en) * 2002-11-20 2004-05-20 Dimeo Frank Rare earth metal sensor
WO2004066415A2 (en) * 2003-01-23 2004-08-05 The Penn State Research Foundation Thin film semi-permeable membranes for gas sensor and catalytic applications
US7028724B2 (en) 2003-05-30 2006-04-18 Air Products And Chemicals, Inc. Fueling nozzle with integral molecular leak sensor
US7416702B2 (en) * 2004-02-27 2008-08-26 Mikuni Corporation Hydrogen sensor and process for production thereof
JP4056987B2 (ja) * 2004-04-28 2008-03-05 アルプス電気株式会社 水素センサ及び水素の検知方法
US20060233701A1 (en) * 2005-03-30 2006-10-19 Thomas Parias Method and apparatus to improve the industrial production of hydrogen-carbon monoxide
JP4355300B2 (ja) * 2005-04-15 2009-10-28 アルプス電気株式会社 水素透過膜、水素センサおよび水素の検知方法
US7992425B2 (en) * 2005-08-25 2011-08-09 University Of South Florida Hydrogen sensor

Also Published As

Publication number Publication date
US20090301879A1 (en) 2009-12-10
DE112009000890T5 (de) 2011-03-24
JP2011519417A (ja) 2011-07-07
WO2009126568A1 (en) 2009-10-15
CN102037349A (zh) 2011-04-27

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20131101