DE112005003758A5 - Auslenkbares mikromechanisches Element - Google Patents

Auslenkbares mikromechanisches Element Download PDF

Info

Publication number
DE112005003758A5
DE112005003758A5 DE112005003758T DE112005003758T DE112005003758A5 DE 112005003758 A5 DE112005003758 A5 DE 112005003758A5 DE 112005003758 T DE112005003758 T DE 112005003758T DE 112005003758 T DE112005003758 T DE 112005003758T DE 112005003758 A5 DE112005003758 A5 DE 112005003758A5
Authority
DE
Germany
Prior art keywords
deflectible
micromechanical element
micromechanical
deflectible micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112005003758T
Other languages
English (en)
Other versions
DE112005003758B4 (de
Inventor
Alexander Dr.-Ing. Wolter
Thomas Dipl.-Ing. Klose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE112005003758A5 publication Critical patent/DE112005003758A5/de
Application granted granted Critical
Publication of DE112005003758B4 publication Critical patent/DE112005003758B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Springs (AREA)
  • Micromachines (AREA)
DE112005003758T 2005-11-25 2005-11-25 Auslenkbares mikromechanisches Element Active DE112005003758B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2005/002182 WO2007059718A1 (de) 2005-11-25 2005-11-25 Auslenkbares mikromechanisches element

Publications (2)

Publication Number Publication Date
DE112005003758A5 true DE112005003758A5 (de) 2008-08-28
DE112005003758B4 DE112005003758B4 (de) 2011-12-08

Family

ID=36686964

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112005003758T Active DE112005003758B4 (de) 2005-11-25 2005-11-25 Auslenkbares mikromechanisches Element

Country Status (4)

Country Link
US (1) US9045329B2 (de)
CN (1) CN101316789B (de)
DE (1) DE112005003758B4 (de)
WO (1) WO2007059718A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008041757B4 (de) * 2008-09-02 2019-01-03 Robert Bosch Gmbh Herstellungsverfahren für eine Rotationssensorvorrichtung und Rotationssensorvorrichtung
US20120056363A1 (en) 2010-09-03 2012-03-08 Greg Alan Ritter Leaf spring
CN102442630B (zh) * 2010-09-30 2015-09-09 贺思源 一种基于双向或多向静电驱动器的平移旋转机构
DE102013225364A1 (de) * 2013-12-10 2015-06-11 Robert Bosch Gmbh Kammantrieb mit einem verschwenkbaren Spiegelelement
US9621775B2 (en) 2014-05-06 2017-04-11 Mems Drive, Inc. Electrical bar latching for low stiffness flexure MEMS actuator
JP6672269B2 (ja) * 2014-05-06 2020-03-25 メムズ ドライブ，インク．Ｍｅｍｓ Ｄｒｉｖｅ，Ｉｎｃ． 低スチフネス曲げ部
FR3046223B1 (fr) * 2015-12-23 2018-02-16 Safran Systeme de suspension d'une masse mobile comprenant des moyens de liaison de la masse mobile a linearite optimisee
WO2019009394A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
WO2019009395A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
EP3650913A4 (de) 2017-07-06 2021-03-31 Hamamatsu Photonics K.K. Optisches modul
US11187872B2 (en) 2017-07-06 2021-11-30 Hamamatsu Photonics K.K. Optical device
CN110799889B (zh) * 2017-07-06 2022-06-03 浜松光子学株式会社 光学装置
WO2019009398A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
WO2019009392A1 (ja) * 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
JP7112876B2 (ja) 2017-07-06 2022-08-04 浜松ホトニクス株式会社 光学デバイス
DE102017219929B4 (de) * 2017-11-09 2019-05-23 Robert Bosch Gmbh Mikromechanischer z-Inertialsensor
WO2019097772A1 (ja) 2017-11-15 2019-05-23 浜松ホトニクス株式会社 光学デバイスの製造方法
DE102018010451B4 (de) * 2018-05-22 2023-11-02 Infineon Technologies Ag MEMS-Bauelement mit Aufhängungsstruktur und Verfahren zum Herstellen eines MEMS-Bauelementes
US11048076B2 (en) 2019-06-28 2021-06-29 Hamamatsu Photonics K.K. Mirror unit, and method for manufacturing the mirror unit
DE102020107180A1 (de) * 2020-03-16 2021-09-16 fos4X GmbH Faseroptischer Beschleunigungssensor

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3076465B2 (ja) * 1992-11-20 2000-08-14 キヤノン株式会社 マイクロアクチュエータおよび光偏向器
US5818227A (en) * 1996-02-22 1998-10-06 Analog Devices, Inc. Rotatable micromachined device for sensing magnetic fields
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
KR100259151B1 (ko) * 1997-08-26 2000-06-15 윤종용 비대칭강성구조를 갖는 광 경로 변환 액츄에이터 및 그의 구동방법
US5963367A (en) * 1997-09-23 1999-10-05 Lucent Technologies, Inc. Micromechanical xyz stage for use with optical elements
KR100263891B1 (ko) * 1997-12-31 2000-08-16 윤종용 가동미러장치
US6242989B1 (en) * 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
DE19941045A1 (de) * 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
FR2798993B1 (fr) * 1999-09-28 2001-12-07 Thomson Csf Sextant Gyrometre de type diapason
DE10043758A1 (de) * 1999-12-15 2001-07-05 Fraunhofer Ges Forschung Durchstimmbarer Hochfrequenzkondensator
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
DE10019408C2 (de) * 2000-04-19 2003-11-13 Bosch Gmbh Robert Feldeffekttransistor, insbesondere zur Verwendung als Sensorelement oder Beschleunigungssensor, und Verfahren zu dessen Herstellung
CN2424450Y (zh) 2000-06-02 2001-03-21 中国科学院上海冶金研究所 微机械梳状电容式加速度传感器
US20020118850A1 (en) * 2000-08-02 2002-08-29 Yeh Jer-Liang (Andrew) Micromachine directional microphone and associated method
US6794793B2 (en) * 2001-09-27 2004-09-21 Memx, Inc. Microelectromechnical system for tilting a platform
CN1620626A (zh) 2002-01-21 2005-05-25 松下电器产业株式会社 光学开关及其制造方法、使用该开关的信息传送装置
US7446911B2 (en) * 2002-11-26 2008-11-04 Brother Kogyo Kabushiki Kaisha Optical scanning apparatus and image forming apparatus
EP1613969B1 (de) * 2003-04-15 2009-07-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement mit einstellbarer resonanzfrequenz
KR100513696B1 (ko) 2003-06-10 2005-09-09 삼성전자주식회사 시이소오형 ｒｆ용 ｍｅｍｓ 스위치 및 그 제조방법
CA2536722A1 (en) * 2005-02-16 2006-08-16 Jds Uniphase Inc. Articulated mems structures
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung

Also Published As

Publication number Publication date
CN101316789B (zh) 2012-07-18
DE112005003758B4 (de) 2011-12-08
US9045329B2 (en) 2015-06-02
US20080284078A1 (en) 2008-11-20
WO2007059718A1 (de) 2007-05-31
CN101316789A (zh) 2008-12-03

Similar Documents

Publication Publication Date Title
DE112005003758A5 (de) Auslenkbares mikromechanisches Element
DE502006003041D1 (de) Anschlusselement
NO20050756D0 (no) Mikroelektromekaniske anordninger
ATE408603T1 (de) Pyrazolylcarboxanilide
CR9974A (es) Gavión
DE502006003394D1 (de) Lehnenklappung
DE602006012066D1 (de) Daraus
DE602006020042D1 (de) Zusammengesetzter sensor
DE502006005667D1 (de) Gelenklager
ATE549324T1 (de) Tetrahydrobenzoxazine
DK1848727T3 (da) Ibandronat polymorf b
DE502006005768D1 (de) Hydrolysestabilisatorformulierungen
FR2878933B1 (fr) Element de raccordement
DE112006002964A5 (de) Zweirichtungsreflektanzverteilungsmessgerät
DE502005005839D1 (de) Feldgeerät
ATE485368T1 (de) Hiv - impfung
DE502006004302D1 (de) Verschlusskappe
DE502006001004D1 (de) Hydrolager
DE102005052834B8 (de) Punktschweißklebverbindung
DE502006003210D1 (de) Nohydrogenpolysiloxanen
AT501523A3 (de) Estrich
DE102006033170A8 (de) Einfassnähmaschine
RU54392U8 (ru) Часовой пакер
DK1846959T3 (da) Piezoelektrisk element
DE112006001399A5 (de) Baueinheit

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R082 Change of representative

Representative=s name: ,

R020 Patent grant now final

Effective date: 20120309