DE112005003705A5 - Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung - Google Patents

Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung Download PDF

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Publication number
DE112005003705A5
DE112005003705A5 DE112005003705T DE112005003705T DE112005003705A5 DE 112005003705 A5 DE112005003705 A5 DE 112005003705A5 DE 112005003705 T DE112005003705 T DE 112005003705T DE 112005003705 T DE112005003705 T DE 112005003705T DE 112005003705 A5 DE112005003705 A5 DE 112005003705A5
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DE
Germany
Prior art keywords
micro
manufacture
diffraction grating
optical diffraction
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112005003705T
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English (en)
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DE112005003705B4 (de
Inventor
Fabian Zimmer
Harald Schenk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hiperscan De GmbH
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE112005003705A5 publication Critical patent/DE112005003705A5/de
Application granted granted Critical
Publication of DE112005003705B4 publication Critical patent/DE112005003705B4/de
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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
DE112005003705.3T 2005-09-30 2005-09-30 Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung Active DE112005003705B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2005/001799 WO2007036182A1 (de) 2005-09-30 2005-09-30 Mikrooptisches beugungsgitter sowie verfahren zur herstellung

Publications (2)

Publication Number Publication Date
DE112005003705A5 true DE112005003705A5 (de) 2008-06-26
DE112005003705B4 DE112005003705B4 (de) 2017-02-02

Family

ID=36123826

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112005003705.3T Active DE112005003705B4 (de) 2005-09-30 2005-09-30 Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung

Country Status (3)

Country Link
US (1) US20090225424A1 (de)
DE (1) DE112005003705B4 (de)
WO (1) WO2007036182A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010202497A (ja) * 2009-02-04 2010-09-16 Fujifilm Corp 熱線反射膜、並びに熱線反射構造体及びその製造方法
FR2945159B1 (fr) * 2009-04-29 2016-04-01 Horiba Jobin Yvon Sas Reseau de diffraction metallique en reflexion a haute tenue au flux en regime femtoseconde, systeme comprenant un tel reseau et procede d'amelioration du seuil d'endommagement d'un reseau de diffraction metallique
US9911781B2 (en) * 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
US9176282B2 (en) 2011-10-06 2015-11-03 Valorbec S.E.C. High efficiency mono-order concave diffraction grating
US10431706B2 (en) * 2013-02-09 2019-10-01 The Regents Of The University Of Michigan Photoactive device
JP7341907B2 (ja) * 2020-01-10 2023-09-11 株式会社日立エルジーデータストレージ 画像表示素子および装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4281894A (en) * 1980-01-21 1981-08-04 The Perkin-Elmer Corporation Very low absorption, low efficiency laser beamsampler
US4426130A (en) * 1981-02-19 1984-01-17 Rca Corporation Semi-thick transmissive and reflective sinusoidal phase grating structures
US4828356A (en) * 1987-12-22 1989-05-09 Hughes Aircraft Company Method for fabrication of low efficiency diffraction gratings and product obtained thereby
JP3371846B2 (ja) * 1999-04-06 2003-01-27 日本電気株式会社 ホログラム素子
KR100843639B1 (ko) * 1999-10-19 2008-07-07 롤리크 아게 위상 구조화 중합체 필름 또는 피막의 제조방법, 당해 방법으로부터 제조된 필름 또는 피막, 및 당해 필름 또는 피막을 포함하는 광학 제품
US20040196556A1 (en) * 2000-06-02 2004-10-07 Cappiello Gregory G. Diffraction grating for wavelength division multiplexing/demultiplexing devices
JP2002214414A (ja) * 2001-01-22 2002-07-31 Omron Corp マイクロ凹凸パターンを有する樹脂薄膜を備えた光学素子、該光学素子の製造方法及び装置
US7054065B2 (en) * 2003-03-27 2006-05-30 The Regents Of The University Of California Durable silver thin film coating for diffraction gratings
EP1645893A1 (de) * 2004-10-08 2006-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beugungsgitter für elektromagnetische Strahlung sowie Verfahren zur Herstellung

Also Published As

Publication number Publication date
WO2007036182A1 (de) 2007-04-05
DE112005003705B4 (de) 2017-02-02
US20090225424A1 (en) 2009-09-10

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8181 Inventor (new situation)

Inventor name: ZIMMER, FABIAN, DIPL.-ING., 01099 DRESDEN, DE

Inventor name: SCHENK, HARALD, DR.-ING., 01139 DRESDEN, DE

R082 Change of representative

Representative=s name: 24IP LAW GROUP SONNENBERG FORTMANN, 80331 MUENCHEN

Representative=s name: 24IP LAW GROUP SONNENBERG FORTMANN, DE

R082 Change of representative

Representative=s name: 24IP LAW GROUP SONNENBERG FORTMANN, 80331 MUENCHEN

Representative=s name: 24IP LAW GROUP SONNENBERG FORTMANN, DE

R081 Change of applicant/patentee

Owner name: HIPERSCAN GMBH, DE

Free format text: FORMER OWNER: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80686 MUENCHEN, DE

Effective date: 20120118

R082 Change of representative

Representative=s name: 24IP LAW GROUP SONNENBERG FORTMANN, DE

Effective date: 20120118

Representative=s name: 24IP LAW GROUP SONNENBERG FORTMANN, DE

Effective date: 20111025

R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final