DE1103034B - Optical precision probe - Google Patents

Optical precision probe

Info

Publication number
DE1103034B
DE1103034B DEL36323A DEL0036323A DE1103034B DE 1103034 B DE1103034 B DE 1103034B DE L36323 A DEL36323 A DE L36323A DE L0036323 A DEL0036323 A DE L0036323A DE 1103034 B DE1103034 B DE 1103034B
Authority
DE
Germany
Prior art keywords
optical precision
mirror
beam splitter
precision probe
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEL36323A
Other languages
German (de)
Inventor
Geza Voeneky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ernst Leitz Wetzlar GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH filed Critical Ernst Leitz Wetzlar GmbH
Priority to DEL36323A priority Critical patent/DE1103034B/en
Publication of DE1103034B publication Critical patent/DE1103034B/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

Optischer Feintaster Es sind optische Feintaster bekannt, bei denen die Verschiebung des Taststiftes durch die Zahl der in einem Michelson-Interferometer durch dessen Okular hindurchgewanderten Interferenzstreifen gemessen wird. Es ist ferner ein Feintaster bekanntgeworden, bei dem die Verschiebung des Tasters durch Verstellung des Referenzspiegels eines Michelson-Interferometers kompensiert wird. Hierbei dienen die Interferenzstreifen geringer Ordnung zur Nullanzeige.Optical precision feeler There are known optical precision feelers in which the displacement of the stylus by the number of in a Michelson interferometer interference fringes that have migrated through its eyepiece are measured. It is Furthermore, a fine button became known in which the displacement of the button by Adjustment of the reference mirror of a Michelson interferometer is compensated. The low-order interference fringes serve to indicate zero.

Die Erfindung betrifft eine besonderes einfache Konstruktion eines Interferenztasters. Sie besteht darin, daß das Interferometer gegenüber dem Taster mit seinem Spiegel mittels einer Feineinstellvorrichtung derart verschiebbar ist, daß die Interferenzstreifen auf ihre Null-Lage zurückgeführt werden können. Die vom Mikroskopbau bekannten Feineinstellvorrichtungen gestatten, Tausendstelmillimeter abzulesen, was für die meisten technischen Zwecke genügt. Die Interferenzen werden mit Weißlicht erzeugt, so daß der weiße Streifen nullter Ordnung sich von den benachbarten zwei schwarzen Streifen abhebt, während alle Streifen höherer Ordnung farbig sind. The invention relates to a particularly simple construction of a Interference button. It consists in that the interferometer opposite the button is displaceable with its mirror by means of a fine adjustment device in such a way that that the interference fringes can be returned to their zero position. the Allow fine adjustment devices known from microscope construction, thousandths of a millimeter read what is sufficient for most technical purposes. The interference will generated with white light, so that the white stripe of the zeroth order differs from the neighboring ones two black stripes stand out, while all higher order stripes are colored.

Daher kann man den Streifen nullter Ordnung als Zeiger gut benutzen.Therefore the zero order strip can be used well as a pointer.

In der Zeichnung sind Ausführungsbeispiele des Interferenztasters nach der Erfindung dargestellt. In Fig. 1 ist mit 1 eine Feineinstellvorrichtung bezeichnet, die von Mikroskopen bekannt ist. Unterhalb einer Linse 2 sind ein Strahlenteilerspiegel 3, ein Referenzspiegel 4 und eine Glühlampe 5 fest angebracht. In the drawing are exemplary embodiments of the interference sensor shown according to the invention. In Fig. 1, 1 is a fine adjustment device known from microscopes. Below a lens 2 are a beam splitter mirror 3, a reference mirror 4 and an incandescent lamp 5 are fixedly attached.

Der Taststift 6 ist mit dem beweglichen Spiegel 7 fest verbunden. Zeigt das Objekt 8 eine Erhöhung, so ändert sich der Abstand zwischen dem Spiegel 7 und der Strahlenteilerfläche, so daß die von der Linse 2 abgebildeten Interferenzstreifen sich verschieben. Durch die Feineinstellung 1. wird die Verschiebung der Streifen kompensiert und die hierzu erforderliche Bewegung an einer Teilung der Feineinstellvorrichtung abgelesen. The stylus 6 is firmly connected to the movable mirror 7. If the object 8 shows an elevation, the distance between the mirror changes 7 and the beam splitter surface, so that the interference fringes imaged by the lens 2 to move. Fine-tuning 1. the movement of the stripes compensated and the movement required for this at a division of the fine adjustment device read.

In Fig. 2 ist ein Gerät zur Abtastung von Innenflächen dargestellt. Hier ist der Taster 10 an dem seitlich beweglichen Referenzspiegel 11 angebracht, während der Referenzspiegel 12 feststeht. Mit 13 ist die Lampe, mit 14 der Strahlenteiler des Interferometers bezeichnet. Die Linse 15 bildet die Interferenzstreifen auf die Mattscheibe 16 ab. Dieses System läßt sich mit der Feineinstellschraube 17 in Richtung des Doppelpfeiles 18 seitlich und mit der Einstellschraube 19 der Höhe nach in Richtung des Doppelpfeiles 20 bewegen. In Fig. 2, a device for scanning inner surfaces is shown. Here the button 10 is attached to the laterally movable reference mirror 11, while the reference mirror 12 is fixed. At 13 is the lamp, at 14 the beam splitter of the interferometer. The lens 15 forms the interference fringes the ground glass 16 off. This system can be adjusted with the fine adjustment screw 17 in Direction of the double arrow 18 laterally and with the adjusting screw 19 of the height to move in the direction of the double arrow 20.

Mit 21 ist ein Priifling, beispielsweise eine Kugellagerfläche, bezeichnet.A test specimen, for example a ball bearing surface, is denoted by 21.

Claims (1)

PATENTANSPRUCH: Optischer Feintaster mit einem Michelson-Interferometer, dadurch gekennzeichnet, daß der Strahlenteiler und der Referenzspiegel des Interferometers mittels einer Feineinstellvorrichtung gemeinsam gegenüber dem beweglich angeordneten, mit dem Tasterstift verbundenen Spiegel derart verstellt werden können, daß ein Tasterausschlag relativ zum Strahlenteiler auf Null reduziert wird und die Interferenzstreifen in die Null-Lage zurückgeführt werden. PATENT CLAIM: Optical precision probe with a Michelson interferometer, characterized in that the beam splitter and the reference mirror of the interferometer by means of a fine adjustment device in common with respect to the movably arranged, connected to the stylus mirror can be adjusted so that a Probe deflection is reduced to zero relative to the beam splitter and the interference fringes be returned to the zero position. In Betracht gezogene Druckschriften: Deutsche Patentschrift Nr. 970 724. Documents considered: German Patent No. 970 724
DEL36323A 1960-06-07 1960-06-07 Optical precision probe Pending DE1103034B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DEL36323A DE1103034B (en) 1960-06-07 1960-06-07 Optical precision probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL36323A DE1103034B (en) 1960-06-07 1960-06-07 Optical precision probe

Publications (1)

Publication Number Publication Date
DE1103034B true DE1103034B (en) 1961-03-23

Family

ID=7267424

Family Applications (1)

Application Number Title Priority Date Filing Date
DEL36323A Pending DE1103034B (en) 1960-06-07 1960-06-07 Optical precision probe

Country Status (1)

Country Link
DE (1) DE1103034B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE970724C (en) * 1955-08-07 1958-10-23 Zeiss Carl Fa Optical precision probe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE970724C (en) * 1955-08-07 1958-10-23 Zeiss Carl Fa Optical precision probe

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