DE1098667B - Ionen-Vakuumpumpe mit Glimmentladung - Google Patents

Ionen-Vakuumpumpe mit Glimmentladung

Info

Publication number
DE1098667B
DE1098667B DEV14707A DEV0014707A DE1098667B DE 1098667 B DE1098667 B DE 1098667B DE V14707 A DEV14707 A DE V14707A DE V0014707 A DEV0014707 A DE V0014707A DE 1098667 B DE1098667 B DE 1098667B
Authority
DE
Germany
Prior art keywords
cathode
anode
arrangement according
magnetic field
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEV14707A
Other languages
German (de)
English (en)
Inventor
Lewis Dana Hall
John Calville Helmer
Robert Lawrence Jepsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US673816A external-priority patent/US2993638A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of DE1098667B publication Critical patent/DE1098667B/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Measuring Fluid Pressure (AREA)
  • Discharge Lamp (AREA)
DEV14707A 1957-07-24 1958-07-14 Ionen-Vakuumpumpe mit Glimmentladung Pending DE1098667B (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US673816A US2993638A (en) 1957-07-24 1957-07-24 Electrical vacuum pump apparatus and method
US801186A US3088657A (en) 1957-07-24 1959-03-23 Glow discharge vacuum pump apparatus

Publications (1)

Publication Number Publication Date
DE1098667B true DE1098667B (de) 1961-02-02

Family

ID=27101017

Family Applications (2)

Application Number Title Priority Date Filing Date
DEV14707A Pending DE1098667B (de) 1957-07-24 1958-07-14 Ionen-Vakuumpumpe mit Glimmentladung
DEV21817A Pending DE1181364B (de) 1957-07-24 1960-03-04 Ionen-Vakuumpumpe mit Glimmentladung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DEV21817A Pending DE1181364B (de) 1957-07-24 1960-03-04 Ionen-Vakuumpumpe mit Glimmentladung

Country Status (6)

Country Link
US (1) US3088657A (it)
CH (2) CH379045A (it)
DE (2) DE1098667B (it)
FR (1) FR1207893A (it)
GB (3) GB883189A (it)
NL (3) NL6504257A (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1268308B (de) * 1961-08-30 1968-05-16 Varian Associates Ionen-Getterzerstaeubungspumpe
DE102009040356A1 (de) * 2009-09-05 2011-03-17 Schmidt, Linda Elktrodenanordnung für eine Ionengetterpumpe

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107844A (en) * 1959-11-12 1963-10-22 Ultek Corp Single cell vacuum apparatus
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
FR1281403A (fr) * 1960-12-01 1962-01-12 Thomson Houston Comp Francaise Système perfectionné de pompe à vide du type à évaporation et à ionisation
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3107045A (en) * 1961-02-02 1963-10-15 Varian Associates Getter ion pump apparatus
US3224664A (en) * 1962-08-08 1965-12-21 Philips Corp Ion pump
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10550829B2 (en) * 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump
US20180306175A1 (en) * 2017-04-25 2018-10-25 Edwards Vacuum Llc Magnetic focusing in an ion pump using internal ferrous materials
CN108194314B (zh) * 2017-12-31 2024-02-20 中国电子科技集团公司第十二研究所 气体捕集型真空泵及其制作方法和使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2413653A (en) * 1943-11-15 1946-12-31 Gen Motors Corp Refrigerant compressor valve arrangement
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1268308B (de) * 1961-08-30 1968-05-16 Varian Associates Ionen-Getterzerstaeubungspumpe
DE102009040356A1 (de) * 2009-09-05 2011-03-17 Schmidt, Linda Elktrodenanordnung für eine Ionengetterpumpe

Also Published As

Publication number Publication date
DE1181364B (de) 1964-11-12
NL229703A (it)
CH379045A (de) 1964-06-30
NL6504257A (it) 1965-06-25
US3088657A (en) 1963-05-07
CH398868A (de) 1966-03-15
GB883190A (en) 1961-11-22
NL131436C (it)
GB942546A (en) 1963-11-27
GB883189A (en) 1961-11-22
FR1207893A (fr) 1960-02-19

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