DE10392442T8 - Lichtabtasteinrichtung - Google Patents

Lichtabtasteinrichtung Download PDF

Info

Publication number
DE10392442T8
DE10392442T8 DE2003192442 DE10392442T DE10392442T8 DE 10392442 T8 DE10392442 T8 DE 10392442T8 DE 2003192442 DE2003192442 DE 2003192442 DE 10392442 T DE10392442 T DE 10392442T DE 10392442 T8 DE10392442 T8 DE 10392442T8
Authority
DE
Germany
Prior art keywords
scanning device
light scanning
light
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE2003192442
Other languages
English (en)
Other versions
DE10392442T5 (de
Inventor
Martin Russell Windsor Harris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optiscan Pty Ltd
Pentax Corp
Original Assignee
Optiscan Pty Ltd
Pentax Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optiscan Pty Ltd, Pentax Corp filed Critical Optiscan Pty Ltd
Publication of DE10392442T5 publication Critical patent/DE10392442T5/de
Application granted granted Critical
Publication of DE10392442T8 publication Critical patent/DE10392442T8/de
Active legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/2407Optical details
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Astronomy & Astrophysics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
DE2003192442 2002-03-26 2003-03-26 Lichtabtasteinrichtung Active DE10392442T8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US36727002P 2002-03-26 2002-03-26
US60/367,270 2002-03-26
PCT/AU2003/000379 WO2003081318A1 (en) 2002-03-26 2003-03-26 Light scanning device

Publications (2)

Publication Number Publication Date
DE10392442T5 DE10392442T5 (de) 2005-04-07
DE10392442T8 true DE10392442T8 (de) 2005-07-14

Family

ID=28454845

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003192442 Active DE10392442T8 (de) 2002-03-26 2003-03-26 Lichtabtasteinrichtung

Country Status (5)

Country Link
US (1) US7248390B2 (de)
JP (1) JP2005521098A (de)
AU (1) AU2003215417A1 (de)
DE (1) DE10392442T8 (de)
WO (1) WO2003081318A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4262574B2 (ja) * 2003-10-30 2009-05-13 オリンパス株式会社 光偏向器
US7395967B2 (en) * 2005-07-21 2008-07-08 University Of Washington Methods and systems for counterbalancing a scanning beam device
EP1910883A4 (de) * 2005-07-21 2010-12-22 Univ Washington Verfahren und systeme zum gewichtsausgleich einer rasterstrahleinrichtung
US8854441B2 (en) 2006-02-10 2014-10-07 Freedom Scientific, Inc. Electronic magnification device
US7929013B2 (en) 2006-02-10 2011-04-19 Freedom Scientific, Inc. Desktop electronic magnifier
US8854442B2 (en) * 2006-02-10 2014-10-07 Freedom Scientific, Inc. Retainer for electronic magnification device
JP5121301B2 (ja) * 2006-06-07 2013-01-16 キヤノン株式会社 揺動体装置、光偏向器、及びそれを用いた光学機器
US7557972B2 (en) 2006-06-07 2009-07-07 Canon Kabushiki Kaisha Oscillator device, optical deflector and optical instrument using the same
JP5064864B2 (ja) * 2007-04-02 2012-10-31 キヤノン株式会社 光偏向装置、画像形成装置、及び光偏向装置の駆動方法
JP5065116B2 (ja) * 2007-06-14 2012-10-31 キヤノン株式会社 揺動体装置、光偏向装置、及びその制御方法
US9595757B2 (en) 2013-12-24 2017-03-14 The Boeing Company Integral RF-optical phased array module
JP6771132B2 (ja) * 2016-03-03 2020-10-21 北陽電機株式会社 光偏向装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952217A (en) * 1973-09-25 1976-04-20 The Perkin-Elmer Corporation Drive for scanning mirror
GB1457995A (en) * 1975-05-23 1976-12-08 Perkin Elmer Corp Scanning element assembly
US4902083A (en) 1988-05-31 1990-02-20 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
DE4001242A1 (de) 1990-01-18 1991-07-25 Telefunken Systemtechnik Linearscanner
US5210636A (en) 1991-07-19 1993-05-11 Baer Stephen C Rotational oscillatory optical scanning device
AUPO790197A0 (en) 1997-07-16 1997-08-07 Optiscan Pty Limited Scanning microscope with miniature head
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
US5995264A (en) 1998-01-20 1999-11-30 University Of Washington Counter balanced optical scanner
US6107770A (en) * 1998-01-27 2000-08-22 Lockheed Martin Corporation Control system for counter-oscillating masses
US6172789B1 (en) * 1999-01-14 2001-01-09 The Board Of Trustees Of The Leland Stanford Junior University Light scanning device and confocal optical device using the same
US6057952A (en) 1999-01-14 2000-05-02 Olympus Optical Co., Ltd. Light scanning device and confocal optical device using the same

Also Published As

Publication number Publication date
JP2005521098A (ja) 2005-07-14
US7248390B2 (en) 2007-07-24
US20050162722A1 (en) 2005-07-28
WO2003081318A1 (en) 2003-10-02
DE10392442T5 (de) 2005-04-07
AU2003215417A1 (en) 2003-10-08

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: OPTISCAN PTY LTD., NOTTING HILL, VICTORIA, AU

Owner name: HOYA CORP., TOKIO/TOKYO, JP

8141 Disposal/no request for examination