DE10345936A1 - Assembly to coat a substrate with a ceramic material, e.g. a turbine vane, has an electron beam physical vapor deposition chamber with a rotating cooled roller near an inner chamber wall to control the interior temperature - Google Patents

Assembly to coat a substrate with a ceramic material, e.g. a turbine vane, has an electron beam physical vapor deposition chamber with a rotating cooled roller near an inner chamber wall to control the interior temperature Download PDF

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Publication number
DE10345936A1
DE10345936A1 DE2003145936 DE10345936A DE10345936A1 DE 10345936 A1 DE10345936 A1 DE 10345936A1 DE 2003145936 DE2003145936 DE 2003145936 DE 10345936 A DE10345936 A DE 10345936A DE 10345936 A1 DE10345936 A1 DE 10345936A1
Authority
DE
Germany
Prior art keywords
electron beam
substrate
ceramic material
assembly
coat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2003145936
Other languages
German (de)
Inventor
Helmut Eberhardt
Josef Hoffmann
Karl-Heinz Grosse
Juergen Hotz
Pavel Seserko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Priority to DE2003145936 priority Critical patent/DE10345936A1/en
Publication of DE10345936A1 publication Critical patent/DE10345936A1/en
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Electron beam coating assembly, to deposit a ceramic material on a substrate (30) in a holder (5), has a coating chamber (3) which can be evacuated through a connected vacuum pump. An electron beam unit (6) is aligned at an evaporation crucible (4). A cylindrical roller (9) rotates (R) on mountings at the chamber side walls, close to an inner wall (7), with a coolant flow (27,28) through it. A scraper (10) is pressed against the roller mantle to detach any deposited material.
DE2003145936 2003-09-30 2003-09-30 Assembly to coat a substrate with a ceramic material, e.g. a turbine vane, has an electron beam physical vapor deposition chamber with a rotating cooled roller near an inner chamber wall to control the interior temperature Ceased DE10345936A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2003145936 DE10345936A1 (en) 2003-09-30 2003-09-30 Assembly to coat a substrate with a ceramic material, e.g. a turbine vane, has an electron beam physical vapor deposition chamber with a rotating cooled roller near an inner chamber wall to control the interior temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003145936 DE10345936A1 (en) 2003-09-30 2003-09-30 Assembly to coat a substrate with a ceramic material, e.g. a turbine vane, has an electron beam physical vapor deposition chamber with a rotating cooled roller near an inner chamber wall to control the interior temperature

Publications (1)

Publication Number Publication Date
DE10345936A1 true DE10345936A1 (en) 2005-04-28

Family

ID=34399197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003145936 Ceased DE10345936A1 (en) 2003-09-30 2003-09-30 Assembly to coat a substrate with a ceramic material, e.g. a turbine vane, has an electron beam physical vapor deposition chamber with a rotating cooled roller near an inner chamber wall to control the interior temperature

Country Status (1)

Country Link
DE (1) DE10345936A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02232369A (en) * 1989-03-07 1990-09-14 Kawasaki Steel Corp Continuous dry plating device for long-sized object, such as metal strip
JPH02282479A (en) * 1989-04-24 1990-11-20 Matsushita Electric Ind Co Ltd Device for producing magnetic recording medium
DE4242800A1 (en) * 1991-12-30 1993-07-22 Nynex Corp
DE19632410C1 (en) * 1996-08-02 1997-04-24 Siemens Ag Coating components with thermal insulation layers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02232369A (en) * 1989-03-07 1990-09-14 Kawasaki Steel Corp Continuous dry plating device for long-sized object, such as metal strip
JPH02282479A (en) * 1989-04-24 1990-11-20 Matsushita Electric Ind Co Ltd Device for producing magnetic recording medium
DE4242800A1 (en) * 1991-12-30 1993-07-22 Nynex Corp
DE19632410C1 (en) * 1996-08-02 1997-04-24 Siemens Ag Coating components with thermal insulation layers

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R002 Refusal decision in examination/registration proceedings
8131 Rejection
R003 Refusal decision now final

Effective date: 20110308