DE10246548B4 - Einrichtung zur Elektronenbeschleunigung - Google Patents

Einrichtung zur Elektronenbeschleunigung Download PDF

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Publication number
DE10246548B4
DE10246548B4 DE2002146548 DE10246548A DE10246548B4 DE 10246548 B4 DE10246548 B4 DE 10246548B4 DE 2002146548 DE2002146548 DE 2002146548 DE 10246548 A DE10246548 A DE 10246548A DE 10246548 B4 DE10246548 B4 DE 10246548B4
Authority
DE
Germany
Prior art keywords
electron acceleration
acceleration
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE2002146548
Other languages
English (en)
Other versions
DE10246548A1 (de
Inventor
Harald F H Warrikhoff
Alexander F A Warrikhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTW ROENTGEN TECHNIK DR WARRIK
Original Assignee
RTW ROENTGEN TECHNIK DR WARRIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RTW ROENTGEN TECHNIK DR WARRIK filed Critical RTW ROENTGEN TECHNIK DR WARRIK
Priority to DE2002146548 priority Critical patent/DE10246548B4/de
Publication of DE10246548A1 publication Critical patent/DE10246548A1/de
Application granted granted Critical
Publication of DE10246548B4 publication Critical patent/DE10246548B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/025—X-ray tubes with structurally associated circuit elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/10—Power supply arrangements for feeding the X-ray tube
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
DE2002146548 2002-09-30 2002-09-30 Einrichtung zur Elektronenbeschleunigung Expired - Lifetime DE10246548B4 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2002146548 DE10246548B4 (de) 2002-09-30 2002-09-30 Einrichtung zur Elektronenbeschleunigung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002146548 DE10246548B4 (de) 2002-09-30 2002-09-30 Einrichtung zur Elektronenbeschleunigung

Publications (2)

Publication Number Publication Date
DE10246548A1 DE10246548A1 (de) 2004-04-15
DE10246548B4 true DE10246548B4 (de) 2005-04-28

Family

ID=32010282

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002146548 Expired - Lifetime DE10246548B4 (de) 2002-09-30 2002-09-30 Einrichtung zur Elektronenbeschleunigung

Country Status (1)

Country Link
DE (1) DE10246548B4 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7885386B2 (en) * 2006-03-31 2011-02-08 General Electric Company Systems and apparatus for a compact low power X-ray generator
DE102009011642A1 (de) * 2009-03-04 2010-09-09 Siemens Aktiengesellschaft Röntgenröhre mit Multikathode
DE102011076912B4 (de) * 2011-06-03 2015-08-20 Siemens Aktiengesellschaft Röntgengerät umfassend eine Multi-Fokus-Röntgenröhre
DE102011081138A1 (de) * 2011-08-17 2012-09-20 Siemens Aktiengesellschaft Röntgenvorrichtung mit einer Multistrahl-Röntgenröhre

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119099A (ja) * 1983-11-30 1985-06-26 Toshiba Corp Ｘ線装置
US4789997A (en) * 1986-07-15 1988-12-06 Andrex Radiation Products As Circuit arrangement for producing high voltages
DE4201616A1 (de) * 1992-01-22 1993-07-29 Philips Patentverwaltung Roentgeneinrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119099A (ja) * 1983-11-30 1985-06-26 Toshiba Corp Ｘ線装置
US4789997A (en) * 1986-07-15 1988-12-06 Andrex Radiation Products As Circuit arrangement for producing high voltages
DE4201616A1 (de) * 1992-01-22 1993-07-29 Philips Patentverwaltung Roentgeneinrichtung

Also Published As

Publication number Publication date
DE10246548A1 (de) 2004-04-15

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8364 No opposition during term of opposition
R071 Expiry of right