DE10233638A1 - Ein Verfahren zum Eliminieren von Braunschem Rauschen bei mikrobearbeiteten Varaktoren - Google Patents

Ein Verfahren zum Eliminieren von Braunschem Rauschen bei mikrobearbeiteten Varaktoren

Info

Publication number
DE10233638A1
DE10233638A1 DE10233638A DE10233638A DE10233638A1 DE 10233638 A1 DE10233638 A1 DE 10233638A1 DE 10233638 A DE10233638 A DE 10233638A DE 10233638 A DE10233638 A DE 10233638A DE 10233638 A1 DE10233638 A1 DE 10233638A1
Authority
DE
Germany
Prior art keywords
varactor
deflecting
signal path
bar
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10233638A
Other languages
German (de)
English (en)
Inventor
Marvin Glenn Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE10233638A1 publication Critical patent/DE10233638A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
DE10233638A 2001-10-31 2002-07-24 Ein Verfahren zum Eliminieren von Braunschem Rauschen bei mikrobearbeiteten Varaktoren Withdrawn DE10233638A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/004,035 US20040031912A1 (en) 2001-10-31 2001-10-31 Method of eliminating brownian noise in micromachined varactors

Publications (1)

Publication Number Publication Date
DE10233638A1 true DE10233638A1 (de) 2003-07-03

Family

ID=21708807

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10233638A Withdrawn DE10233638A1 (de) 2001-10-31 2002-07-24 Ein Verfahren zum Eliminieren von Braunschem Rauschen bei mikrobearbeiteten Varaktoren

Country Status (5)

Country Link
US (2) US20040031912A1 (enExample)
JP (1) JP2003209027A (enExample)
DE (1) DE10233638A1 (enExample)
GB (1) GB2384622B (enExample)
TW (1) TWI230140B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100464383C (zh) * 2004-09-10 2009-02-25 东南大学 T形梁平行板微机械可变电容及其制造工艺
US7319580B2 (en) * 2005-03-29 2008-01-15 Intel Corporation Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
JP4893112B2 (ja) * 2006-06-03 2012-03-07 株式会社ニコン 高周波回路コンポーネント
JP4910679B2 (ja) * 2006-12-21 2012-04-04 株式会社ニコン 可変キャパシタ、可変キャパシタ装置、高周波回路用フィルタ及び高周波回路
WO2011152192A1 (ja) * 2010-05-31 2011-12-08 株式会社村田製作所 可変容量素子
US9321630B2 (en) * 2013-02-20 2016-04-26 Pgs Geophysical As Sensor with vacuum-sealed cavity

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3139339B2 (ja) * 1995-09-13 2001-02-26 株式会社村田製作所 真空封止デバイスおよびその製造方法
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
JP3045089B2 (ja) * 1996-12-19 2000-05-22 株式会社村田製作所 素子のパッケージ構造およびその製造方法
EP0951069A1 (en) * 1998-04-17 1999-10-20 Interuniversitair Microelektronica Centrum Vzw Method of fabrication of a microstructure having an inside cavity
US6522217B1 (en) * 1999-12-01 2003-02-18 E. I. Du Pont De Nemours And Company Tunable high temperature superconducting filter
US6229684B1 (en) * 1999-12-15 2001-05-08 Jds Uniphase Inc. Variable capacitor and associated fabrication method
WO2002073673A1 (en) * 2001-03-13 2002-09-19 Rochester Institute Of Technology A micro-electro-mechanical switch and a method of using and making thereof
US6597560B2 (en) * 2001-03-13 2003-07-22 Rochester Institute Of Technology Micro-electro-mechanical varactor and a method of making and using thereof

Also Published As

Publication number Publication date
JP2003209027A (ja) 2003-07-25
GB2384622B (en) 2005-07-20
US20050057885A1 (en) 2005-03-17
TWI230140B (en) 2005-04-01
GB2384622A (en) 2003-07-30
GB0223352D0 (en) 2002-11-13
US20040031912A1 (en) 2004-02-19

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8139 Disposal/non-payment of the annual fee