DE10204141A1 - Bandbreiten-Einengungsmodul - Google Patents

Bandbreiten-Einengungsmodul

Info

Publication number
DE10204141A1
DE10204141A1 DE2002104141 DE10204141A DE10204141A1 DE 10204141 A1 DE10204141 A1 DE 10204141A1 DE 2002104141 DE2002104141 DE 2002104141 DE 10204141 A DE10204141 A DE 10204141A DE 10204141 A1 DE10204141 A1 DE 10204141A1
Authority
DE
Germany
Prior art keywords
polarization
light
polarized light
grating
bandwidth narrowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2002104141
Other languages
German (de)
English (en)
Inventor
Bernd Kleemann
Jeffrey Erxmeyer
Johannes Kraus
Klaus Heidemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Laser Optics GmbH
Original Assignee
Carl Zeiss Laser Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Laser Optics GmbH filed Critical Carl Zeiss Laser Optics GmbH
Priority to DE2002104141 priority Critical patent/DE10204141A1/de
Priority to PCT/EP2003/000781 priority patent/WO2003065520A1/fr
Publication of DE10204141A1 publication Critical patent/DE10204141A1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H01S3/2256—KrF, i.e. krypton fluoride is comprised for lasing around 248 nm

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE2002104141 2002-01-29 2002-01-29 Bandbreiten-Einengungsmodul Ceased DE10204141A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE2002104141 DE10204141A1 (de) 2002-01-29 2002-01-29 Bandbreiten-Einengungsmodul
PCT/EP2003/000781 WO2003065520A1 (fr) 2002-01-29 2003-01-27 Module de reduction de la largeur de bande

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002104141 DE10204141A1 (de) 2002-01-29 2002-01-29 Bandbreiten-Einengungsmodul

Publications (1)

Publication Number Publication Date
DE10204141A1 true DE10204141A1 (de) 2003-08-14

Family

ID=27588248

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002104141 Ceased DE10204141A1 (de) 2002-01-29 2002-01-29 Bandbreiten-Einengungsmodul

Country Status (2)

Country Link
DE (1) DE10204141A1 (fr)
WO (1) WO2003065520A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009031688A1 (de) * 2009-06-26 2010-12-30 Carl Zeiss Laser Optics Gmbh Optische Anordnung, Verwendung einer optischen Anordnung sowie Verfahren zum Bestimmen eines Beugungsgitters

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4302378C2 (de) * 1993-01-28 1994-12-01 Lambda Physik Gmbh Abstimmbarer Laseroszillator
DE19603637C1 (de) * 1996-02-01 1997-07-31 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07318996A (ja) * 1994-03-28 1995-12-08 Matsushita Electron Corp 波長変換導波路型レーザ装置
DE19515321A1 (de) * 1995-04-20 1996-10-24 Gos Ges Zur Foerderung Angewan Durchstimmbare, justierstabile Laserlichtquelle mit spektral gefiltertem Ausgang
US5917849A (en) * 1997-09-10 1999-06-29 Cymer, Inc. Line narrowing device with double duty grating
WO2001041270A2 (fr) * 1999-11-04 2001-06-07 Wisconsin Alumni Research Foundation Laser a diode de grande puissance a frequence retrecie presentant une cavite exterieure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4302378C2 (de) * 1993-01-28 1994-12-01 Lambda Physik Gmbh Abstimmbarer Laseroszillator
DE19603637C1 (de) * 1996-02-01 1997-07-31 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009031688A1 (de) * 2009-06-26 2010-12-30 Carl Zeiss Laser Optics Gmbh Optische Anordnung, Verwendung einer optischen Anordnung sowie Verfahren zum Bestimmen eines Beugungsgitters
US8441729B2 (en) 2009-06-26 2013-05-14 Carl Zeiss Laser Optics Gmbh Optical arrangement, method of use, and method for determining a diffraction grating
DE102009031688B4 (de) * 2009-06-26 2013-12-24 Carl Zeiss Laser Optics Gmbh Verfahren zum Bestimmen eines Beugungsgitters

Also Published As

Publication number Publication date
WO2003065520A1 (fr) 2003-08-07

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8131 Rejection