DE102020134370A1 - Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling - Google Patents

Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling Download PDF

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Publication number
DE102020134370A1
DE102020134370A1 DE102020134370.1A DE102020134370A DE102020134370A1 DE 102020134370 A1 DE102020134370 A1 DE 102020134370A1 DE 102020134370 A DE102020134370 A DE 102020134370A DE 102020134370 A1 DE102020134370 A1 DE 102020134370A1
Authority
DE
Germany
Prior art keywords
gas
test
vacuum pump
connection
leak detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102020134370.1A
Other languages
German (de)
English (en)
Inventor
Daniel Wetzig
Marcel Ruth
Silvio Decker
Thomas Grellmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to DE102020134370.1A priority Critical patent/DE102020134370A1/de
Priority to PCT/EP2021/083737 priority patent/WO2022135854A1/de
Priority to JP2023534329A priority patent/JP7822383B2/ja
Priority to KR1020237018618A priority patent/KR20230123937A/ko
Priority to CN202180082457.XA priority patent/CN116569015A/zh
Priority to US18/265,164 priority patent/US20240019336A1/en
Priority to EP21835173.2A priority patent/EP4264218B1/de
Priority to TW110147476A priority patent/TWI904305B/zh
Publication of DE102020134370A1 publication Critical patent/DE102020134370A1/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L2019/0053—Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE102020134370.1A 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling Pending DE102020134370A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102020134370.1A DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling
PCT/EP2021/083737 WO2022135854A1 (de) 2020-12-21 2021-12-01 Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling
JP2023534329A JP7822383B2 (ja) 2020-12-21 2021-12-01 試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法
KR1020237018618A KR20230123937A (ko) 2020-12-21 2021-12-01 테스트 대상의 가스 누출을 식별하기 위한 가스 누출 감지 장치 및 가스 누출 감지 방법
CN202180082457.XA CN116569015A (zh) 2020-12-21 2021-12-01 用于识别测试对象中的气体泄漏的气体泄漏检测设备和气体泄漏检测方法
US18/265,164 US20240019336A1 (en) 2020-12-21 2021-12-01 Gas leak detection device and gas leak detection method for identifying a gas leak in a test object
EP21835173.2A EP4264218B1 (de) 2020-12-21 2021-12-01 Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling
TW110147476A TWI904305B (zh) 2020-12-21 2021-12-17 用於辨識測試目標內的漏氣之漏氣偵測裝置及漏氣偵測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102020134370.1A DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling

Publications (1)

Publication Number Publication Date
DE102020134370A1 true DE102020134370A1 (de) 2022-06-23

Family

ID=79170731

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102020134370.1A Pending DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling

Country Status (8)

Country Link
US (1) US20240019336A1 (https=)
EP (1) EP4264218B1 (https=)
JP (1) JP7822383B2 (https=)
KR (1) KR20230123937A (https=)
CN (1) CN116569015A (https=)
DE (1) DE102020134370A1 (https=)
TW (1) TWI904305B (https=)
WO (1) WO2022135854A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022111596A1 (de) 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
US12031885B2 (en) * 2022-03-31 2024-07-09 Applied Materials, Inc. Leak detection for gas sticks

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
DE10156206A1 (de) 2000-11-29 2002-06-13 Heidelberger Druckmasch Ag Vorrichtung und Verfahren zum Messen der Bahnspannung
EP1620706B1 (de) 2003-05-02 2007-05-23 Inficon GmbH Lecksuchgerät
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343740A (en) * 1993-08-27 1994-09-06 Southeastern Universities Research Association High sensitivity leak detection method and apparatus
DE102008037058A1 (de) * 2008-08-08 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verfahren zur Bestimmung einer Gesamt-Leckrate einer Vakuumanlage sowie eine Vakuumanlage

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
DE10156206A1 (de) 2000-11-29 2002-06-13 Heidelberger Druckmasch Ag Vorrichtung und Verfahren zum Messen der Bahnspannung
EP1620706B1 (de) 2003-05-02 2007-05-23 Inficon GmbH Lecksuchgerät
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022111596A1 (de) 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling

Also Published As

Publication number Publication date
EP4264218A1 (de) 2023-10-25
TWI904305B (zh) 2025-11-11
EP4264218B1 (de) 2025-02-19
CN116569015A (zh) 2023-08-08
US20240019336A1 (en) 2024-01-18
WO2022135854A1 (de) 2022-06-30
JP2023554280A (ja) 2023-12-27
KR20230123937A (ko) 2023-08-24
TW202225657A (zh) 2022-07-01
JP7822383B2 (ja) 2026-03-02

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