DE102018209322A1 - Konfokaler Verschiebungssensor - Google Patents

Konfokaler Verschiebungssensor Download PDF

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Publication number
DE102018209322A1
DE102018209322A1 DE102018209322.9A DE102018209322A DE102018209322A1 DE 102018209322 A1 DE102018209322 A1 DE 102018209322A1 DE 102018209322 A DE102018209322 A DE 102018209322A DE 102018209322 A1 DE102018209322 A1 DE 102018209322A1
Authority
DE
Germany
Prior art keywords
light
optical fiber
emission end
emission
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102018209322.9A
Other languages
German (de)
English (en)
Inventor
Hideto Takei
Tomikazu Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keyence Corp Jp
Original Assignee
Keyence Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keyence Corp filed Critical Keyence Corp
Publication of DE102018209322A1 publication Critical patent/DE102018209322A1/de
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
DE102018209322.9A 2017-06-13 2018-06-12 Konfokaler Verschiebungssensor Withdrawn DE102018209322A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017115555A JP6971646B2 (ja) 2017-06-13 2017-06-13 共焦点変位計
JP2017-115555 2017-06-13

Publications (1)

Publication Number Publication Date
DE102018209322A1 true DE102018209322A1 (de) 2018-12-13

Family

ID=64332735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102018209322.9A Withdrawn DE102018209322A1 (de) 2017-06-13 2018-06-12 Konfokaler Verschiebungssensor

Country Status (4)

Country Link
US (1) US10161740B1 (https=)
JP (1) JP6971646B2 (https=)
CN (1) CN109084684B (https=)
DE (1) DE102018209322A1 (https=)

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* Cited by examiner, † Cited by third party
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DE112015003040T5 (de) * 2014-06-27 2017-03-23 Keyence Corporation Fotoelektrisches Multi-Wellenlängen-Messgerät, konfokales Messgerät, Interferenz-Messgerät und Farbmessgerät
DE112016005953T5 (de) 2015-12-25 2018-10-04 Keyence Corporation Konfokaler verschiebungssensor
WO2017110837A1 (ja) 2015-12-25 2017-06-29 株式会社キーエンス 共焦点変位計
JP6939360B2 (ja) * 2017-10-02 2021-09-22 オムロン株式会社 共焦点計測装置
JP7064167B2 (ja) * 2018-01-18 2022-05-10 オムロン株式会社 光学計測装置及び光学計測方法
JP6969459B2 (ja) * 2018-03-15 2021-11-24 オムロン株式会社 センサヘッド
JP7062518B2 (ja) * 2018-05-25 2022-05-06 株式会社キーエンス 共焦点変位計
DE112019004373T5 (de) * 2018-08-28 2021-05-20 Sony Corporation Spektroskopische bildgebungsvorrichtung und fluoreszenzbeobachtungsvorrichtung
CN110044286B (zh) * 2019-04-15 2021-03-05 清华大学深圳研究生院 一种光谱共焦轴向距离检测方法、装置及设备
CN113686439A (zh) * 2021-08-24 2021-11-23 熵智科技(深圳)有限公司 一种线光谱共焦传感器
KR102633654B1 (ko) 2021-09-29 2024-02-06 한국과학기술연구원 광섬유 기반의 센서 모듈 및 이를 구비한 변형 센서 장치
CN116295029B (zh) * 2023-02-16 2024-11-05 哈尔滨工业大学 倾斜耦合式光纤光谱共焦位移测量方法及装置
JP2025006545A (ja) 2023-06-29 2025-01-17 株式会社キーエンス 測定ヘッドおよび共焦点変位計

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JPH0588041A (ja) * 1991-09-30 1993-04-09 Nippon Telegr & Teleph Corp <Ntt> 光フアイバの光学接続回路
US5785661A (en) * 1994-08-17 1998-07-28 Decibel Instruments, Inc. Highly configurable hearing aid
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
JP3350918B2 (ja) * 1996-03-26 2002-11-25 株式会社高岳製作所 ２次元配列型共焦点光学装置
US5737084A (en) * 1995-09-29 1998-04-07 Takaoka Electric Mtg. Co., Ltd. Three-dimensional shape measuring apparatus
EP1139128A3 (en) * 2000-03-24 2004-01-28 Tyco Electronics Corporation Shielded optical connector
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US8096676B2 (en) * 2008-10-21 2012-01-17 Mitutoyo Corporation High intensity pulsed light source configurations
TWI490444B (zh) * 2009-01-23 2015-07-01 Univ Nat Taipei Technology 線型多波長共焦顯微方法與系統
JP5520036B2 (ja) * 2009-07-16 2014-06-11 株式会社ミツトヨ 光学式変位計
US20110104388A1 (en) * 2009-11-02 2011-05-05 Harris Corporation Method for making an optical device including a curable index matching elastomeric solid layer
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統
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JP5790178B2 (ja) * 2011-03-14 2015-10-07 オムロン株式会社 共焦点計測装置
WO2013011778A1 (ja) * 2011-07-15 2013-01-24 オリンパスメディカルシステムズ株式会社 プローブ
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US9541376B2 (en) * 2015-03-02 2017-01-10 Mitutoyo Corporation Chromatic confocal sensor and measurement method

Also Published As

Publication number Publication date
US10161740B1 (en) 2018-12-25
CN109084684A (zh) 2018-12-25
JP6971646B2 (ja) 2021-11-24
JP2019002723A (ja) 2019-01-10
US20180356207A1 (en) 2018-12-13
CN109084684B (zh) 2022-01-11

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Date Code Title Description
R081 Change of applicant/patentee

Owner name: KEYENCE CORPORATION, JP

Free format text: FORMER OWNER: KEYENCE CORPORATION, OSAKA-SHI, JP

R082 Change of representative

Representative=s name: GRUENECKER PATENT- UND RECHTSANWAELTE PARTG MB, DE

R083 Amendment of/additions to inventor(s)
R005 Application deemed withdrawn due to failure to request examination