DE102017119387B4 - CMAS-resistente Schutzschicht sowie Gegenstand umfassend eine solche Schutzschicht - Google Patents
CMAS-resistente Schutzschicht sowie Gegenstand umfassend eine solche Schutzschicht Download PDFInfo
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- DE102017119387B4 DE102017119387B4 DE102017119387.1A DE102017119387A DE102017119387B4 DE 102017119387 B4 DE102017119387 B4 DE 102017119387B4 DE 102017119387 A DE102017119387 A DE 102017119387A DE 102017119387 B4 DE102017119387 B4 DE 102017119387B4
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- protective layer
- cmas
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- coating
- turbine
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- 239000011241 protective layer Substances 0.000 title claims abstract description 37
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 6
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 5
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052742 iron Inorganic materials 0.000 claims abstract description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 36
- 238000000576 coating method Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 229910000601 superalloy Inorganic materials 0.000 claims description 7
- 238000002485 combustion reaction Methods 0.000 claims description 2
- 230000007613 environmental effect Effects 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000008595 infiltration Effects 0.000 description 5
- 238000001764 infiltration Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000012720 thermal barrier coating Substances 0.000 description 4
- 239000002318 adhesion promoter Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 238000010290 vacuum plasma spraying Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000007749 high velocity oxygen fuel spraying Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- AKTQKAXQEMMCIF-UHFFFAOYSA-N trioxido(trioxidosilyloxy)silane;yttrium(3+) Chemical class [Y+3].[Y+3].[O-][Si]([O-])([O-])O[Si]([O-])([O-])[O-] AKTQKAXQEMMCIF-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/043—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/18—Layered products comprising a layer of metal comprising iron or steel
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
- C04B35/505—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds based on yttrium oxide
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/12—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on oxides
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
- C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/083—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/10—Glass or silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/14—Metallic material, boron or silicon
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
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Abstract
Schutzschicht gegen CMAS, dadurch gekennzeichnet, dass die Schutzschicht aus Eisen-, Yttrium- und Siliziumoxiden besteht.
Description
- Die vorliegende Erfindung betrifft eine Schutzschicht gegen CMAS sowie einen CMAS-resistenten Gegenstand, der die erfindungsgemäße Schutzschicht umfasst.
- Mit CMAS werden Kalzium-, Magnesium-, Aluminium- und Silizium oder Silikatverbindungen beschrieben, welche insbesondere in der Luft- und Raumfahrttechnik problematisch an heißen Bauteilen sein können. CMAS umschreibt dabei allgemein Verunreinigungen, die typischerweise Kalziumoxid, Magnesiumoxid, Aluminiumoxid und Siliziumoxid aufweisen. Typischerweise handelt es sich hierbei um Sand. Im Sinne der vorliegenden Erfindung sind von CMAS jedoch auch Aschepartikel, die beispielsweise vulkanischen Ursprungs sind, umfasst.
- Im Bereich der Luft- und Raumfahrt werden Turbinen zum Antrieb benutzt. Damit diese Turbinen den herrschenden Temperaturen im Betrieb von 1200 °C oder mehr standhalten und auch um die eigentliche Turbine von äußeren Einflüssen zu schützen, werden dieser üblicherweise mit einer Wärmedammschicht (WDS, engl.: thermal barrier coating, TBC) versehen. Die einzelnen Bauteile von Turbinen weisen eine bestimmte Grundstruktur auf. Diese Grundstruktur, also das entsprechende Bauteil, besteht aus einer Superlegierung, üblicherweise handelt es sich hierbei um eine nickelbasierte Superlegierung. Auf diese wird eine Haftvermittlerschicht aufgebracht, welche Aluminium enthält. Hierbei handelt es sich um ein Aluminiumreservoir, aus welchem sich in Betrieb Al2O3 bildet. Bereits das Al2O3 stellt eine erste Schutzschicht dar und stellt die Verbindung mit der eigentlichen Grundstruktur sicher. Auf die Haftvermittlerschicht wird dann die Wärmedammschicht aufgetragen. Diese weist eine geringe Wärmeleitfähigkeit auf, wodurch sich ein starker Temperaturgradient im Inneren ergibt. Die Wärmedammschicht besteht üblicherweise aus porösen Oxiden. Je nach Art des Beschichtungsvorgangs weisen sie unterschiedlich hohe Porositäten auf. Diese porösen Strukturen sorgen für die thermische Stabilität, da so das Material auf Temperaturschwankungen sowie den im Betrieb herrschenden Temperaturgradienten reagieren kann.
- Kommt im Betrieb die Wärmedammschicht nun in Kontakt mit CMAS, so herrschen an der Außenseite der WDS Temperaturen von deutlich über 1200 °C. Bei diesen Temperaturen schmelzen CMAS-Partikel, sodass diese in die Poren der TBC infiltrieren können. Kühlt die Turbine dann beispielsweise nach dem Betrieb ab, verfestigt sich das CMAS im Inneren der WDS. Somit geht die poröse Struktur der WDS verloren, wodurch die thermische Beständigkeit der WDS abnimmt. Dies führt mittelfristig zum Versagen der WDS.
- Neben Superlegierungen, welche mit einer Wärmedämmschicht versehen sind, werden für Turbinen und vergleichbare Gegenstände auch andere Materialien getestet. Beispielsweise wird Siliziumcarbid (SiC) als geeignetes Material gesehen. Siliziumcarbid hat gegenüber Superlegierungen den Vorteil, dass es gegenüber Temperaturschwankungen deutlich stabiler ist. Allerdings kann es beispielsweise durch die Luftfeuchtigkeit angegriffen werden. Als Schutz werden hier sogenannte „Environmental Barrier Coating“ (EBC) eingesetzt. Entsprechende EBCs weisen, ähnlich wie die zuvor beschriebenen WDS, eine poröse Struktur auf. Auch in diese können im Betrieb CMAS infiltrieren. Auch hier führt dies zu einem Versagen der EBCs und zum Versagen der Turbine. Typische EBCs bestehen aus Yttriummono- oder Yttriumdisilikaten.
- Unterschiedliche Schutzschichten, die die Infiltration von CMAS in die WDS verhindern sollen, sind im Stand der Technik beschrieben, beispielsweise in
US 9,194,242 B2 US 7,785,722 B2 ,US 8,062,759 B2 oderUS 8,859,052 B2 . CMAS-resistente EBCs sind inUS 8,658,291 B2 beschrieben. Die beschriebenen Schichten reagieren mit dem CMAS. Dies führt zu einer Reaktion, bei der Produkte entstehen, die eine höhere Schmelztemperatur als CMAS aufweisen, wodurch das Eindringen von CMAS in die poröse Struktur der WDS zumindest verlangsamt werden kann. Dies führt allerdings gleichzeitig zum Abbau der Schutzschicht, sodass diese regelmäßig erneuert werden muss. - Weiterhin beschrieben sind solche Schichten, die die Benetzung der WDS oder EBC durch das flüssige CMAS verhindern sollen. Geeignet sind hier beispielsweise Pd-Ag, Pd, Pt, MoSi2 oder ZrSiO4. Auch Seltenerd-Zirkonate weisen die Eigenschaften auf. Zirkonate und insbesondere solche in Verbindung mit seltenen Erden sorgen dafür, dass sich kristalline Phasen aus der Mischung von CMAS und den eingesetzten Oxiden bilden. Diese dringen oberflächlich in die WDS oder EBC ein und verhindern dadurch ein vollständiges Infiltrieren des CMAS in die entsprechenden Schutzschichten. Allerdings kann die Infiltration nicht vollständig verhindert werden.
-
EP 1 029 115 B1 offenbart ein hochtemperaturbeständiges Bauteil einer Gasturbine mit einem metallischen Grundkörper, einer darauf aufgebrachten Haftvermittlerschicht und einer keramischen Wärmedämmschicht. Die Wärmedämmschicht weist einen inneren Schichtbereich auf, der einen Spinell der Strukturformel AB2X4 und/oder B(AB)2X4 aufweist. -
DE 196 80 503 B3 offenbart ein mit einer Wärmesperre überzogenes Teil, wobei eine erste dichte Schicht eine äußere Oberfläche des Wärmesperren-Überzugs bedeckt, wobei die erste Schicht ein Metalloxid, ein Metallcarbid, ein Metallnitrid, ein Metallsilizid, ein Edelmetall oder Mischungen derselben enthält. Eine zweite dichte Schicht ist auf der ersten Schicht angeordnet und die zweite Schicht enthält ein Metallcarbid, ein Metallnitrid, ein Metallsilizid oder Mischungen derselben. -
US 2016 / 0 115 819 A1 offenbart einen Gegenstand mit einer Vielzahl an Beschichtungen, nämlich einer Wärmeschutzschicht, die auf dem Substrat angeordnet ist, und eine Schutzschicht auf der Wärmeschutzschicht, wobei die Schutzschicht ein CMAS reaktives Material umfasst. - Die bekannten CMAS-Schutzschichten haben den Nachteil, dass diese nicht langfristig beständig sind. Zudem können sie nur bis zu bestimmten Temperaturen einzusetzen, da sich ansonsten die gebildeten Phasen ebenfalls verflüssigen und die WDS/EBC eidringen.
- Es besteht somit Bedarf an einer Schutzschicht, die die Infiltration von CMAS in poröse Schichten reduziert und möglichst verhindert. Diese Schutzschicht soll auch bei Temperaturen von deutlich über 1200 °C und insbesondere von 1200 °C oder mehr stabil sein und auch bei diesen Temperaturen die Infiltration von CMAS verhindern. Gleichzeitig soll die Schutzschicht eine gute Haftung auf anderen Schichten aufweisen, wobei es sich bei diesen insbesondere um Wärmedammschichten oder EBC handelt.
- Es hat sich gezeigt, dass die der vorliegenden Erfindung zu Grunde liegende Aufgabe gelöst wird durch eine Schutzschicht gegen CMAS, die dadurch gekennzeichnet ist, dass sie aus Oxiden von Eisen, Yttrium und Silicium besteht.
- Es hat sich weiterhin gezeigt, dass eine Schutzschicht, welche ausschließlich Eisenoxid, Yttriumoxid und Siliciumoxid aufweist, Eigenschaften hat, die die Infiltration von CMAS in poröse Schichten, wie insbesondere WDS oder EBC verhindert. Gleichzeitig weist eine erfindungsgemäße Schutzschicht eine gute Haftung auf WDS oder EBC auf, sodass die Schutzschicht über einen langen Zeitraum hinweg stabil ist.
- Dabei besteht die erfindungsgemäße Schutzschicht lediglich aus Eisen-, Yttrium- und Siliziumoxiden. Weitere Oxide oder sonstige Additive, wie seltene Erden wie sie beispielsweise in
US 9,194,242 B2 US 7,785,722 B2 beschrieben sind, sind vorliegend nicht enthalten und auch nicht notwendig um den Schutz gegen CMAS sicherzustellen. - Bevorzugt ist für die hier beschrieben erfindungsgemäße Schicht das Eisenoxid Fe2O3, das Siliziumoxid SiO2 und das Yttriumoxid Y2O3.
- Weiterhin weist die vorliegende Schutzschicht keine besondere Kristallstruktur auf. Dies ermöglicht das Aufbringen der Schutzschicht mit unterschiedlichsten Beschichtungsverfahren, wie sie im Stand der Technik beschrieben sind. Dabei sind keine besonderen Randbedingungen zu beachten. So kann die Beschichtung beispielsweise mit PVD-Techniken wie Magnetronzerstäuben oder Elektronenstrahl verdampfen (EB-PVD), aber auch mittels thermischer Spritzmethoden wie Atmosphärisches Plasmaspritzen (APS) oder Vakuumplasmaspritzen(VPS) aufgetragen werden. Entscheidend für die Wahl des Beschichtungsverfahrens sind dabei gegebenenfalls bauliche Einschränkungen sowie die mit der Methode verbundenen Kosten.
- Die Schutzschicht weist erfindungsgemäß bevorzugt eine Schichtdicke von 10 µm bis 200 µm, insbesondere vom 15 µm bis 150 µm, vorzugsweise von 20 µm bis 100 µm auf. Die erfindungsgemäße Schutzschicht reagiert mit dem flüssigen CMAS und bildet eine kristalline Schicht oberhalb beziehungsweise unmittelbar auf der sich darunter befindlichen Schicht oder Oberfläche aus. Für diese Reaktion wird eine Schichtdicke von wenigstens 5 µm benötigt. Sobald sich eine solche kristalline Schicht unmittelbar auf der sich darunter befindlichen Oberfläche oder Beschichtung ausgebildet hat, findet die Reaktion ausschließlich in den darüber liegenden Bereichen der Schutzschicht statt. In Gegensatz zu den im Stand der Technik beschriebenen Schutzschichten kann somit CMAS nicht in poröse Strukturen unterhalb der erfindungsgemäßen Schutzschicht eindringen. Ist die Reaktion einmal abgeschlossen, findet auch keine weitere Reaktion statt, die in irgendeiner Form die darunterliegenden Bereiche beeinträchtigt. Eine Schichtdicke von 10 µm ist ausreichend um einen langfristigen Schutz zu gewährleisten. Schichtdicken von mehr als 200 µm sorgen dabei für eine starke Zunahme der Gesamtschichtdicke, welche je nach Anwendungsbereich unerwünscht ist. Zudem sind neben der Dicke auch die damit verbundenen Kosten und das Gewicht zu berücksichtigen. Schichtdicken von 10 µm bis 100 µm oder von 15 µm bis 50 µm sind ausreichend, um einen langfristigen Schutz zu ermöglichen.
- In einer weiteren Ausführungsform wird die der vorliegenden Erfindung zu Grunde liegende Aufgabe gelöst durch einen CMAS-resistenten Gegenstand. Erfindungsgemäß umfasst dieser Gegenstand eine Grundstruktur aus einem hochtemperaturfestem Material mit einer Oberfläche, eine erste Beschichtung auf dieser Oberfläche, sowie eine Schutzschicht wie zuvor beschrieben, welche unmittelbar auf die erste Schicht aufgebracht wird. CMAS-resistent bedeutet somit, dass CMAS keinen negativen Einfluss auf den entsprechenden Gegenstand im Betrieb oder der Verwendung haben.
- Ein Gegenstand ist im Sinne der vorliegenden Erfindung ein beliebiger Gegenstand, der bei hohen Temperaturen in Betrieb ist und in unterschiedlichen äußeren Einflüssen ausgesetzt wird. Beispielsweise ist der Gegenstand eine Turbine, insbesondere eine Gasturbine, ein Turbinenblatt oder eine Turbinenschaufel oder Inliner der Brennkammer einer Turbine, insbesondere einer Hochdruckturbine. Aus dem entsprechenden Gegenstand ergibt sich auch die Grundstruktur. Turbine oder Gasturbine oder Hochdruckturbine umfasst dabei alle Bestandteile derselben, welche im Betrieb hohen Temperaturen von 1000 °C oder mehr, insbesondere von 1200 °C oder mehr ausgesetzt sind.
- Der Hochtemperaturwerkstoff ist insbesondere eine Superlegierung, besonders bevorzugt eine nickelbasierte Superlegierung, oder SiC.
- Die erste Beschichtung, welche sich auf dem hochtemperaturfesten Material befindet, ist insbesondere eine Wärmedammschicht WDS (thermal barrier coating, TBC) oder eine EBC. Entsprechende Schutzschichten sind im Stand der Technik beschrieben und dem Fachmann bekannt.
- In einer weiteren Ausführungsform betrifft die vorliegende Erfindung ein Verfahren zum Herstellen eines CMAS-resistenten Gegenstandes, das dadurch gekennzeichnet ist, dass die Schutzschicht mittels Sputter-Technik oder PVD auf die erste Beschichtung aufgebracht wird. Grundsätzlich sind beliebige Arten des Aufbringens der Schutzschicht möglich, wie beispielsweise EB-PVD, APS, VPS, HVOF oder Sputter-Techniken. Unterschiede in der CMAS-Resistenz sind hierdurch nicht zu beobachten.
Claims (6)
- Schutzschicht gegen CMAS, dadurch gekennzeichnet, dass die Schutzschicht aus Eisen-, Yttrium- und Siliziumoxiden besteht.
- Schutzschicht nach
Anspruch 1 , dadurch gekennzeichnet, dass die Schichtdicke der Schutzschicht 10 µm bis 200 µm, insbesondere 15 µm bis 150 µm, vorzugsweise 20 µm bis 100 µm beträgt. - CMAS resistenter Gegenstand, umfassend: - eine Grundstruktur aus einem hochtemperaturfesten Material mit einer Oberfläche, - eine erste Beschichtung auf dieser Oberfläche und - eine Schutzschicht gemäß einem der
Ansprüche 1 oder2 aufgebracht unmittelbar auf diese erste Beschichtung. - Gegenstand nach
Anspruch 3 , dadurch gekennzeichnet, dass er eine Turbine, insbesondere eine Gasturbine, oder deren Bestandteile, wie ein Turbinenblatt oder eine Turbinenschaufel oder Inliner der Brennkammer, insbesondere einer Hochdruckturbine, ist. - Gegenstand nach einem der
Ansprüche 3 oder4 , dadurch gekennzeichnet, dass das hochtemperaturfeste Material eine Ni-basierte Superlegierung oder SiC umfasst. - Gegenstand nach einem der
Ansprüche 3 bis5 , dadurch gekennzeichnet, dass die erste Beschichtung eine Wärmedammschicht (WDS) oder eine Environmental Barrier Coating (EBC) ist.
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US16/104,406 US11512383B2 (en) | 2017-08-24 | 2018-08-17 | CMAS-resistant protective layer |
GB1813513.7A GB2565919B (en) | 2017-08-24 | 2018-08-20 | CMAS-Resistant protective layer |
FR1857559A FR3070400B1 (fr) | 2017-08-24 | 2018-08-21 | Couche protectrice resistante aux materiaux du type cmas |
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- 2017-08-24 DE DE102017119387.1A patent/DE102017119387B4/de active Active
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- 2018-08-17 US US16/104,406 patent/US11512383B2/en active Active
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DE19680503B3 (de) | 1995-06-26 | 2014-01-09 | General Electric Co. | Verbundmaterial mit durch mehrere Überzüge geschütztem Wärmesperren-Überzug und Verfahren zu seiner Herstellung |
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US7785722B2 (en) | 2006-01-20 | 2010-08-31 | United Technologies Corporation | CMAS resistant thermal barrier coating |
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GB2565919B (en) | 2023-02-15 |
US11512383B2 (en) | 2022-11-29 |
FR3070400A1 (fr) | 2019-03-01 |
US20190062898A1 (en) | 2019-02-28 |
DE102017119387A1 (de) | 2019-02-28 |
FR3070400B1 (fr) | 2023-03-10 |
GB201813513D0 (en) | 2018-10-03 |
GB2565919A (en) | 2019-02-27 |
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