DE102016224951A1 - Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator - Google Patents
Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator Download PDFInfo
- Publication number
- DE102016224951A1 DE102016224951A1 DE102016224951.7A DE102016224951A DE102016224951A1 DE 102016224951 A1 DE102016224951 A1 DE 102016224951A1 DE 102016224951 A DE102016224951 A DE 102016224951A DE 102016224951 A1 DE102016224951 A1 DE 102016224951A1
- Authority
- DE
- Germany
- Prior art keywords
- stator
- transport body
- magnets
- magnet
- actuating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
- H02K41/033—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type with armature and magnets on one member, the other member being a flux distributor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
- H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
- H02P25/06—Linear motors
- H02P25/064—Linear motors of the synchronous type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/006—Controlling linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/14—Electronic commutators
- H02P6/16—Circuit arrangements for detecting position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
- B60L13/04—Magnetic suspension or levitation for vehicles
- B60L13/06—Means to sense or control vehicle position or attitude with respect to railway
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Non-Mechanical Conveyors (AREA)
- Linear Motors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016224951.7A DE102016224951A1 (de) | 2016-12-14 | 2016-12-14 | Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator |
| PCT/EP2017/079112 WO2018108408A1 (de) | 2016-12-14 | 2017-11-14 | Beförderungsvorrichtung mit einem stator zur kontrollierten beförderung eines transportkörpers relativ zum stator |
| JP2019531820A JP6918113B2 (ja) | 2016-12-14 | 2017-11-14 | ステータに対して相対的な搬送体のコントロールされた搬送のためのステータを備えた搬送装置 |
| US16/468,949 US11146160B2 (en) | 2016-12-14 | 2017-11-14 | Transporting device with a stator for the controlled transport of a transport element relative to the stator |
| CN201780077331.7A CN110073589B (zh) | 2016-12-14 | 2017-11-14 | 用于受控地相对定子输送运输体的具有定子的输送装置 |
| EP17800493.3A EP3556007A1 (de) | 2016-12-14 | 2017-11-14 | Beförderungsvorrichtung mit einem stator zur kontrollierten beförderung eines transportkörpers relativ zum stator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016224951.7A DE102016224951A1 (de) | 2016-12-14 | 2016-12-14 | Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102016224951A1 true DE102016224951A1 (de) | 2018-06-14 |
Family
ID=60382198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102016224951.7A Pending DE102016224951A1 (de) | 2016-12-14 | 2016-12-14 | Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11146160B2 (ja) |
| EP (1) | EP3556007A1 (ja) |
| JP (1) | JP6918113B2 (ja) |
| CN (1) | CN110073589B (ja) |
| DE (1) | DE102016224951A1 (ja) |
| WO (1) | WO2018108408A1 (ja) |
Cited By (30)
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| DE102018203667A1 (de) * | 2018-03-12 | 2019-09-12 | Robert Bosch Gmbh | Verfahren zur automatisierten Bewegungsplanung bei einem Planarantrieb |
| EP3582386A1 (de) | 2018-06-13 | 2019-12-18 | Robert Bosch GmbH | Bewegungsvorrichtung mit entkoppelten positionsreglern |
| EP3582376A1 (de) | 2018-06-13 | 2019-12-18 | Robert Bosch GmbH | Beförderungsvorrichtung mit sicherheitsfunktion |
| DE102018209403A1 (de) | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung |
| WO2019238416A1 (de) * | 2018-06-14 | 2019-12-19 | Robert Bosch Gmbh | Beförderungsvorrichtung zum befördern mindestens eines wafers |
| DE102018125471A1 (de) * | 2018-10-15 | 2020-04-16 | Festo Se & Co. Kg | Transportsystem |
| DE102018218666A1 (de) | 2018-10-31 | 2020-04-30 | Robert Bosch Gmbh | Bewegungsvorrichtung mit Positionsbestimmungssystem |
| WO2020239930A1 (de) | 2019-05-28 | 2020-12-03 | B&R Industrial Automation GmbH | Transporteinrichtung |
| WO2020239933A1 (de) | 2019-05-28 | 2020-12-03 | B&R Industrial Automation GmbH | Transporteinrichtung |
| DE102019218497A1 (de) * | 2019-11-28 | 2021-06-02 | Robert Bosch Gmbh | Vorrichtung und Verfahren zum Ansteuern einer Fördereinrichtung |
| WO2021105155A1 (de) * | 2019-11-27 | 2021-06-03 | B&R Industrial Automation GmbH | Transporteinrichtung |
| WO2021105165A1 (de) * | 2019-11-27 | 2021-06-03 | B&R Industrial Automation GmbH | Transporteinrichtung |
| DE102020204749A1 (de) | 2020-04-15 | 2021-10-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Beförderungsvorrichtung |
| DE102020205002A1 (de) | 2020-04-21 | 2021-10-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Transportsystem |
| DE102020212223A1 (de) | 2020-09-29 | 2022-03-31 | Robert Bosch Gesellschaft mit beschränkter Haftung | Berührungslose Beförderungsvorrichtung |
| DE102020212641A1 (de) | 2020-10-07 | 2022-04-07 | Robert Bosch Gesellschaft mit beschränkter Haftung | Berührungslose Beförderungsvorrichtung mit Positionserfassungseinrichtung und Verfahren zur Positionserfassung |
| DE102020212642A1 (de) | 2020-10-07 | 2022-04-07 | Robert Bosch Gesellschaft mit beschränkter Haftung | Berührungslose Beförderungsvorrichtung |
| DE102020212643A1 (de) | 2020-10-07 | 2022-04-07 | Robert Bosch Gesellschaft mit beschränkter Haftung | Bewegungsvorrichtung mit Kommunikationsnetzwerk und Verfahren zum Betrieb eines derartigen Kommunikationsnetzwerkes |
| DE102021201962A1 (de) | 2021-03-02 | 2022-09-08 | Robert Bosch Gesellschaft mit beschränkter Haftung | Zentriervorrichtung zur elektrischen verbindung einer mehrachsmaschine und einer ansteuervorrichtung sowie verfahren zur herstellung einer solchen elektrischen verbindung |
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| WO2022200094A1 (de) | 2021-03-25 | 2022-09-29 | Robert Bosch Gmbh | Berührungslose beförderungsvorrichtung |
| IT202100009569A1 (it) | 2021-04-15 | 2022-10-15 | G Mondini S P A | Apparecchiatura e metodo per il posizionamento di prodotti su supporti |
| US11472638B2 (en) * | 2020-02-07 | 2022-10-18 | Canon Kabushiki Kaisha | Conveyance apparatus, production system, and method for manufacturing article |
| IT202100015857A1 (it) | 2021-06-17 | 2022-12-17 | G Mondini S P A | Apparecchiatura per la termosaldatura di un film di copertura a un elemento di supporto |
| DE102021127039A1 (de) | 2021-10-19 | 2023-04-20 | Beckhoff Automation Gmbh | Verfahren zum Betreiben eines Planarantriebssystems und Planarantriebssystem |
| DE102021130294A1 (de) | 2021-11-19 | 2023-05-25 | M10 Solar Equipment GmbH | Vorrichtung und Verfahren zur Herstellung von Solarmodulen |
| WO2023167588A1 (en) * | 2022-03-03 | 2023-09-07 | Technische Universiteit Eindhoven | Actuator arrangement comprising permanent magnets |
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| US20230286552A1 (en) * | 2020-08-11 | 2023-09-14 | US Positronix Inc. | Apparatus and Applications for Magnetic Levitation and Movement Using Offset Magnetic Arrays |
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| DE19960321A1 (de) * | 1999-12-15 | 2001-07-05 | Daimlerchrysler Aerospace Ag | Vorrichtung zur elektromagnetischen Levitation von Objekten |
| US8803646B2 (en) | 2008-01-22 | 2014-08-12 | George Farber | System and method for magnetic levitation with tilted orientation |
| CA2905783A1 (en) | 2013-03-15 | 2014-09-25 | Arx Pax, LLC | Magnetic levitation of a stationary or moving object |
| WO2015017933A1 (en) | 2013-08-06 | 2015-02-12 | The University Of British Columbia | Displacement devices and methods and apparatus for detecting and estimating motion associated with same |
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| JP3050761B2 (ja) | 1994-10-06 | 2000-06-12 | 財団法人鉄道総合技術研究所 | 磁気浮上機構 |
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| EP3582386A1 (de) | 2018-06-13 | 2019-12-18 | Robert Bosch GmbH | Bewegungsvorrichtung mit entkoppelten positionsreglern |
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| DE102018209401A1 (de) | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Beförderungsvorrichtung mit Sicherheitsfunktion |
| DE102018209403A1 (de) | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung |
| DE102018209402A1 (de) | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Bewegungsvorrichtung mit entkoppelten Positionsreglern |
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| US11430683B2 (en) | 2018-06-14 | 2022-08-30 | Robert Bosch Gmbh | Conveying device for conveying at least one wafer |
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| WO2020239933A1 (de) | 2019-05-28 | 2020-12-03 | B&R Industrial Automation GmbH | Transporteinrichtung |
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| CN113950455A (zh) * | 2019-05-28 | 2022-01-18 | B和R工业自动化有限公司 | 传送装置 |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6918113B2 (ja) | 2021-08-11 |
| EP3556007A1 (de) | 2019-10-23 |
| US11146160B2 (en) | 2021-10-12 |
| CN110073589A (zh) | 2019-07-30 |
| JP2020519217A (ja) | 2020-06-25 |
| US20190348898A1 (en) | 2019-11-14 |
| CN110073589B (zh) | 2021-01-22 |
| WO2018108408A1 (de) | 2018-06-21 |
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