DE102016224334A1 - OPTICAL DEVICE, AND ASSEMBLY AND STORAGE AND POSITIONING DEVICE FOR OPTICAL ELEMENTS OF THE OPTICAL DEVICE - Google Patents

Abstract

The present invention relates to a storage and positioning device for supporting and / or positioning at least one optical element in an optical device, wherein the storage and positioning device at least one bearing base body (1) for arrangement in the optical device, at least one support structure (2). for the optical element, a bearing arrangement for arranging the optical element on the support structure and an adjusting device for the adjustable arrangement of the support structure on the bearing body, wherein the bearing assembly comprises three bipods (7), preferably evenly distributed in a circle arrangement with the same arc distance from each other at the Supporting structure and the optical element are arranged and a socket for an optical element with a mounting ring and a receptacle for the optical element in the center of the mounting ring, wherein the receptacle is held by at least two webs, along the Längsric tion of the webs between the receptacle and mounting ring are arranged and connect the receptacle with the mounting ring, wherein the webs are arranged so tangential to the receptacle that when changing the length of the webs to a rotation of the receptacle about a through the center of the mounting ring and a ring plane of the socket ring extending central axis comes. Moreover, the invention relates to an optical device with a socket and / or a storage and positioning device and method for storage and positioning of at least one optical element.

Description

BACKGROUND OF THE INVENTION

FIELD OF THE INVENTION

The present invention relates to a storage and positioning device for storage and / or positioning of at least one optical element in an optical device or a socket for an optical element and an optical device with a corresponding storage and positioning device and / or a corresponding socket. Moreover, the invention relates to a method for positioning and adjustment of optical elements.

STATE OF THE ART

Optical devices are used in many fields of technology, for example as illumination systems or projection objectives in microlithography systems for the production of microstructured or nanostructured components as well as in inspection and inspection devices, for example in wafer inspection systems. In order to achieve the desired optical function, the optical elements of an optical device must be accurately stored and aligned, which is especially true for devices that require very precise imaging, such as microlithography projection exposure equipment or wafer inspection equipment.

Therefore, a large number of devices for mounting and / or positioning optical elements, such as mirrors or optical lenses, or sockets for optical elements are already known from the prior art, which, inter alia, also offer the possibility of adjusting or adjusting the optical element to adjust or otherwise affect such as deforming to change the optical properties. Examples of this are in the documents DE 10 2011 075 316 A1 . DE 10 039 712 A1 . DE 10 344 178 A1 or WO 2012/41462 A2 to find.

Despite the devices known in the prior art, it nevertheless requires a further improvement and optimization of corresponding devices and sockets for the storage and positioning of optical elements in order to ensure the most effective and efficient storage and positioning of the optical as simple as possible construction and easy handling of the device Allow elements with precise alignment.

DISCLOSURE OF THE INVENTION

OBJECT OF THE INVENTION

It is therefore an object of the present invention to provide a storage and positioning device for storage and / or positioning of at least one optical element or a socket for receiving an optical element and a corresponding optical device in which the storage and / or positioning of the optical Elements with simple means in a precise manner is possible. In addition, a corresponding method for storage and positioning or adjustment should be provided.

TECHNICAL SOLUTION

This object is achieved by a storage and positioning device having the features of claim 1, a socket with the features of claim 6, an optical device having the features of claim 9, a wafer inspection device having the features of claim 12 and a method of storage and Positioning at least one optical element with the features of claim 13 or 15. Advantageous embodiments are the subject of the dependent claims.

The present invention proposes a bearing and positioning device in which a bearing base body for arranging the bearing and positioning device is provided in an optical device, wherein additionally a support structure for the optical element is arranged on the bearing base body. On the support structure, the optical element is mounted on a bearing assembly, while the support structure is arranged on the bearing base body via an adjusting device, which allows an adjustable arrangement of the support structure on the bearing main body. The bearing assembly has three bipods, which are arranged on the support structure and the optical element.

Preferably, the bipods can be arranged uniformly distributed in a circle arrangement with the same circular arc distance between the support structure and the optical element. Circular arrangement is here understood to mean the arrangement of the bipods along an imaginary circle, whereby, however, the support structure as well as the bearing base body or the optical element may have a circular shape, but may also have a different shape. Also, the arrangement in a circular array does not mean that the bipods are curved according to a circle, but merely expresses that the location of the arrangement is on a circular path, which arrangement may be tangent to the imaginary circle, for example. The Circular arrangement is preferred and is optimal for storage. But it may also be necessary for space reasons to compromise and leave the optimal circuit arrangement. Then a mirror-symmetrical arrangement in which the bipods form, for example, an isosceles triangle is preferred. Alternatively, an irregular arrangement of the bipods is possible.

By means of such an arrangement of the optical element on the support structure, a statically determined mounting of the optical element can be realized without excessive external forces. In addition, the bipods allow the integration of vibration damping structures and the like. At the same time, the Bidopes also serve for thermal decoupling and easier pre-adjustment.

The adjusting device, which is provided for the adjustable arrangement of the support structure on the bearing body between them, may also have three uniformly distributed in a circle arrangement, with the same distance from one another arranged Linearverstelleinheiten, wherein the angular distance between the adjacent Linearverstelleinheiten along the circular line as in the Bipods each 120 ° can amount. However, the Linearverstelleinheiten can be arranged rotated by an angle of 60 ° about the central axis or optical axis of the storage and positioning device to the Bipods of the bearing assembly.

The Linearverstelleinheiten allow a linear adjustment in one direction, in which case the linear adjustment or displacement of the distance between the bearing body and the support structure is made possible, ie in a direction parallel to the optical axis of the storage and positioning device or the optical element in the optical Device in which the storage and positioning device is provided. The linear adjustment units can be, for example, piezoactuators or other devices that enable a linear movement.

The adjustment with the Linearverstelleinheiten and the bearing assembly with the Bipods can be arranged on the same side of the support structure, so that the Bipods of the bearing assembly and the Linearverstelleinheiten the adjustment can be located in a same plane of the storage and positioning device. This ensures a compact design.

The bipods have - as the name implies - a two-bar structure, with the two bars arranged at an acute angle to each other so that the bars converge at one end and face away from each other at the other end. The bipods can be arranged correspondingly with the converging end on the optical element and with the divergent end on the support structure.

The storage and positioning device may further comprise a socket for at least one further optical element, wherein protection is sought for the socket independently and independently and in combination with the storage and positioning device. The socket can be arranged on the bearing base body via one or more contact surfaces or be arranged on the bearing base body via linear adjustment elements similar to the adjusting device for connecting the bearing base body and support structure, preferably on the side of the bearing base body, which is arranged from the side on which the support structure , is facing away from or facing her.

The socket for an optical element may comprise a mounting ring and a receptacle for the optical element in the center of the mounting ring, wherein the receptacle is held by at least two webs, which are arranged along the longitudinal direction of the webs between the receptacle and the mounting ring, so that they the recording and connect the mounting ring. The webs are arranged tangentially on the receptacle such that, as the length of the webs changes, for example as a result of thermal expansion, the receptacle rotates about a central axis extending through the center of the mounting ring transversely to the ring plane of the mounting ring. As a result, a translational displacement of the recording is avoided in a heat load.

In order to dissipate as much heat as possible, which is generated when the electromagnetic radiation impinges on the optical element in the receptacle, the socket can be formed from a good heat conducting material. In addition, the webs should be kept as short as possible. In addition, the webs may be arranged to have a smaller and, in particular, much smaller width than depth, preferably less than 20% or less than 10% of the depth, the width extending transversely to the length of the webs in the annular plane of the socket ring, while the depth extends transversely to the length of the webs and transverse to the ring plane of the socket ring. This ensures that the socket or the mounting ring has a large opening cross-section around the male optical element, so that in a beam path in which the rays are passed through the socket, little shading occurs.

The receptacle is designed such that an optical element can be glued or soldered on, in particular by direct gluing can. In directional bonding, the optical element is positioned in a desired position and orientation when mounted and fixed in the desired position and orientation by adhesive.

A corresponding optical device may have a storage and positioning device and / or a socket with at least one, preferably two or more mirrors. The mirrors may include a convex aspherical mirror and a concave spherical mirror, wherein the concave spherical mirror may be received in the bearing assembly of the support structure and the convex aspherical mirror may be disposed in the socket which may be disposed on the bearing main body.

A corresponding device can be used in a wafer inspection device.

In the method for storage and positioning can thus be provided at least one storage and positioning device, wherein first of all the bearing body can be aligned. Then, the optical element with the bearing assembly can be attached to the support structure and finally the support structure can be arranged with the adjusting device on the bearing body and the support structure are aligned with respect to the bearing body. However, it is also possible to change the order and, for example, first to arrange the optical element with the bearing arrangement on the support structure, then align the optical element there and then to arrange the bearing base body on the support structure with the adjustment, which finally again the support structure relative to the bearing main body is aligned. After positioning and aligning the optical element by means of the support structure, another optical element which has been arranged in a socket can be arranged in the storage and positioning device by arranging and aligning the socket with the optical element.

Accordingly, in a method for supporting and positioning at least one optical element, initially also a socket can be provided, wherein the socket ring is aligned at a reference position and the optical element is arranged in the receptacle. The optical element can be aligned in the receptacle and glued or soldered or welded into the receptacle.

BRIEF DESCRIPTION OF THE FIGURES

The accompanying drawings show in a purely schematic manner in FIG

1 a representation of an optical device according to the invention,

2 a plan view of the optical device 1 .

3 a plan view of an inventive version for an optical element,

4 a representation of a further embodiment of the optical device according to the invention,

5 a schematic representation of a bipod, as in the embodiment of the 4 Use finds and in

6 a representation of another embodiment of an optical device according to the invention.

EMBODIMENTS

Further advantages, characteristics and features of the present invention will become apparent in the following detailed description of the embodiments. However, the invention is not limited to these embodiments.

The 1 shows a schematic representation of an embodiment of an optical device with a storage and positioning device for a first optical element in the form of a concave mirror 4 and a version 3 for a second optical element in the form of a convex mirror 5 , The storage and positioning device comprises a bearing main body 1 which is formed in the embodiment shown as a ring body. In addition, the storage and positioning device comprises a support structure 2 on which a bearing assembly with three bipods 7 (only two shown) are arranged, which the concave mirror 4 wear. The supporting structure 2 , which may be formed for example as a lattice or truss structure, is via an adjustment with three adjustment units 6 (only two of them are in 1 shown) on the bearing body 1 arranged.

The optical device of 1 with the two mirrors 4 . 5 can be used for example in a wafer inspection device, wherein the light of the wafer inspection device according to the in 1 schematically illustrated light beam 8th through the openings of the grid-like support structure 2 and a central recess of the concave mirror 4 on the convex mirror 5 meets, there in the direction of the concave mirror 4 is reflected and then through corresponding recesses in the socket 3 the optical device leaves. With the optical device, as in 1 is shown is it possible the convex mirror 5 mechanically in three degrees of freedom of movement to the concave mirror 4 to adjust. Optically, this corresponds to 5 degrees of freedom of movement, since in the case of spherical and approximately spherical optical elements, a tilt about an axis corresponds to a displacement along an axis perpendicular thereto. The sixth degree of freedom of movement corresponds to a rotation about the optical axis of the optical device 1 and can be used to compensate for manufacturing errors.

The adjustment with the adjustment units 6 , which are formed in the described embodiment as Linearverstelleinheiten, allows a shift of the support structure 2 relative to the bearing body along in 1 shown Z-direction parallel to the optical axis of in 1 is shown optical device. As several Linearverstelleinheiten along the circumference of the bearing body 1 or the supporting structure 2 are arranged, can also be a tilting of the support structure by an adjustment of a single Linearverstelleinheit 2 and thus the concave mirror 4 be effected about a rotational axis transverse to the optical axis.

As in the embodiment shown, the convex mirror 4 is spherically shaped, can be done by tilting about an axis which is perpendicular to the optical axis, a displacement in the form of a direction transverse to the optical axis. In addition, by the Linearverstelleinheiten 6 , which allow only a linear displacement in the Z direction, including the distance between the concave mirror 4 and the convex mirror 5 be adjusted along the optical axis.

Through the bipode 7 The mirror can be stored statically determined, each bipod defines only two degrees of freedom of the mirror. The mirror itself may be formed of a mirror substrate with a corresponding reflective coating, wherein the mirror substrate is preferably formed of a material with the lowest possible thermal expansion, low density and high rigidity.

The 2 shows the schematic representation of the first embodiment 1 in a plan view, wherein the support structure 2 is shown for simplicity with little detail only with the outer circumference.

Like from the 2 can be seen, are the Linearverstelleinheiten 6 evenly distributed along the circumference of the bearing main body 1 , wherein the Linearverstelleinheiten are arranged on an imaginary circular line with equal arc intervals to each other. The angular distance between the individual linear adjustment units 6 is 120 °. Offset by 60 ° in an appropriate arrangement along an imaginary circular line with equal arc intervals are at the periphery of the mirror 4 three bipodes 7 arranged the mirror 4 with the supporting structure 2 connect.

The 3 shows in a plan view the version 3 from the optical device 1 , The version 3 has a mounting ring 13 at the bottom of the bearing base body 1 is arranged. The version 3 has a recording 14 on which in the optical device the 1 the convex mirror 5 is arranged. The recording 14 is designed so that the mirror 5 by gluing and in particular sticking in a defined position in the receptacle 14 can be arranged. The recording 14 is over four bars with the mounting ring 13 connected, wherein also a different number of webs can be selected.

In the presentation of the 3 is the recording 14 formed as a round disc, wherein the webs 9 each tangent to the disc-shaped receptacle 14 are arranged. This results in a change in length of the longitudinal extension of the webs 9 For example, by thermal expansion, not to a shift of the recording from the center of the mounting ring 13 , but to a rotation about a central axis, which is perpendicular to the ring planes or to the plate plane of the mounting ring 13 runs. Due to the uniform arrangement of the webs 9 , ie uniform distribution of the webs along the circumference of the mounting ring, lift the translational components of a change in length of the webs 9 and are converted into a rotational movement of the recording.

The 4 shows a further embodiment of an optical device according to the invention, which is similar to the schematic representation of 1 is. In addition to the presentation of the 1 is in the 4 another cover 12 above the bearing body 1 arranged. This serves to protect the arrangement. In addition to the mechanical protection against contact and the protection against stray light, the cover serves 12 Also, to keep harmful gases (eg oxygen) from the optical elements by the space enclosed by the cover is constantly flushed with a purge gas (eg nitrogen or a noble gas). In the present case, the cover acts 12 with the bearing body 1 together, but the cover 12 can also be designed so that it provides complete protection. Otherwise, the embodiment corresponds to 4 largely the embodiment of the 1 , Accordingly, identical components of the embodiments will not be described repeatedly.

The basic structure of the bipode 7 also follows from the representation of the 5 in which schematically shows the basic structure of a corresponding bipod 7 is shown.

A bipod 7 accordingly comprises a two-bar structure with two bars 10 which converge at one end and point away from each other at the other end, resulting in a V-structure.

As is clear from the 1 . 4 and 6 results are the bipode 7 so on the support structure 2 and the mirror 4 arranged that the diverging end of the bipod structure of the bipod 7 on the supporting structure 2 is located and the opposite, converging end to the mirror 4 ,

The 6 shows a further embodiment of an optical device, which in turn similar to the embodiments of 1 to 5 is, so that a repeated description of similar or identical components is omitted. However, in this embodiment, the version 3 not directly, as in the embodiment of 4 on the bearing body 1 arranged, but similar to the support structure 2 on the bearing body 1 over several linear adjustment elements 11 , in turn, along the circumference of the bearing body 1 evenly distributed between bearing body 1 and version 3 are provided. So can the version 3 with the convex mirror 5 in the in 6 shown Z-direction, that are parallel to the optical axis of the optical device to be moved or tilted about axes transverse to the Z-direction, so that also an adjustment of the convex mirror 5 via an adjustment of the Linearverstellelemente 11 in relation to the bearing body 1 is possible.

Although the present invention has been described in detail with reference to the embodiments, it will be understood by those skilled in the art that the invention is not limited to these embodiments, but rather modifications are possible in the manner that individual features omitted or other combinations of features can be realized as long as the scope of protection of the appended claims is not abandoned.

LIST OF REFERENCE NUMBERS

1

Bearing body

2

supporting structure

3

version

4

concave mirror

5

convex mirror

6

adjustment

7

bipod

8th

beam of light

9

web

10

Rod

11

Linearverstellelement

12

cover

13

mounting ring

14

admission

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102011075316 A1 [0003]
• DE 10039712 A1 [0003]
• DE 10344178 A1 [0003]
• WO 2012/41462 A2 [0003]

Claims (15)

Bearing and positioning device for supporting and / or positioning at least one optical element in an optical device, wherein the bearing and positioning device at least one bearing body ( 1 ) for placement in the optical device, at least one support structure ( 2 ) for the optical element, a bearing arrangement for arranging the optical element on the support structure and an adjusting device for the adjustable arrangement of the support structure on the bearing base body, characterized in that the bearing arrangement comprises three bipods ( 7 ), which are arranged on the support structure and the optical element. Storage and positioning device according to claim 1, characterized in that the Bipods between the support structure and the optical element in a circular array evenly distributed with the same arc distance from each other are arranged and / or that the adjusting at least one, preferably three evenly distributed in a circular array with the same Circular arc distance from each other on the support structure and the bearing body arranged Linearverstelleinheiten ( 6 ) having. Bearing and positioning device according to claim 1 or 2, characterized in that the adjusting device and the bearing arrangement on the same side of the support structure ( 2 ) are arranged. Bearing and positioning device according to one of the preceding claims, characterized in that the bipods ( 7 ) have a two-bar structure, wherein the two bars are arranged at an acute angle to each other, so that the two-bar structure has a converging end, at which the bars converge, and a diverging end, at which the bars have away from each other, the bipods are arranged with the divergent end to the support structure and can be arranged with the converging end of the optical element. Bearing and positioning device according to one of the preceding claims, characterized in that the bearing and positioning device a socket ( 3 ) for at least one further optical element, in particular a socket according to one of claims 6 to 8, wherein the socket via one or more contact surfaces and / or a manipulator device, in particular with three in a circular array uniformly distributed with the same arc distance from each other on the socket and the bearing body arranged Linearverstellelementen ( 11 ), with the bearing body ( 1 ) connected is. Socket for an optical element with a mounting ring ( 13 ) and a recording ( 14 ) for the optical element in the center of the mounting ring, wherein the receptacle by at least two webs ( 9 ), which are arranged along the longitudinal direction of the webs between the receptacle and the mounting ring and connect the receptacle with the mounting ring, wherein the webs are arranged so tangential to the receptacle that it is at a change in the length of the webs to a rotation of the recording to a central axis passing through the center of the socket ring and a ring plane of the socket ring. Socket according to claim 6, characterized in that the webs ( 9 ) has a width extending transversely to the length in the plane of the ring and having a depth extending transversely to the length and transverse to the plane of the ring, the width being smaller than the depth, in particular much smaller than the depth, preferably less than 20% or less than 10% of the depth. Socket according to claim 6 or 7, characterized in that the receptacle ( 14 ) is formed so that an optical element is aufklebbar, in particular by sticking. Optical device with a storage and positioning device according to one of claims 1 to 5 and / or a socket ( 3 ) according to one of claims 6 to 8 and at least one, preferably two mirrors. Optical device according to Claim 9, characterized in that the optical device has a convex, aspherical mirror ( 5 ) and a concave, spherical mirror ( 4 ) having. Optical device according to one of Claims 9 or 10, characterized in that the optical device has a bearing and positioning device with a socket ( 3 ), wherein on the bearing assembly of the support structure ( 2 ) are arranged a concave, spherical mirror and on the receptacle of the socket, a convex, aspheric mirror. Wafer inspection device with a storage and positioning device according to one of claims 1 to 5 or a socket according to one of claims 6 to 8 or with an optical device according to one of claims 9 to 11. Method for storing and positioning at least one optical element, comprising: providing a storage and positioning device according to one of claims 1 to 5, providing at least one optical element, Aligning the bearing body, arranging the optical element with the bearing assembly on the support structure, arranging the support structure with the adjustment on the bearing body and aligning the support structure relative to the bearing body. A method according to claim 11, characterized in that a further optical element is arranged after storage and positioning in a socket according to claim 15 by arranging and aligning the socket on the storage and positioning device. Method for storing and positioning at least one optical element, which comprises: Provision of a socket according to one of claims 6 to 8, Providing at least one optical element, Aligning the mounting ring, Arranging the optical element in the receptacle, Aligning and gluing the optical element into the receptacle.

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