DE102013200353A8 - Ladungskorrektur für einen piezoelektrischen Aktuator - Google Patents

Ladungskorrektur für einen piezoelektrischen Aktuator Download PDF

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Publication number
DE102013200353A8
DE102013200353A8 DE102013200353A DE102013200353A DE102013200353A8 DE 102013200353 A8 DE102013200353 A8 DE 102013200353A8 DE 102013200353 A DE102013200353 A DE 102013200353A DE 102013200353 A DE102013200353 A DE 102013200353A DE 102013200353 A8 DE102013200353 A8 DE 102013200353A8
Authority
DE
Germany
Prior art keywords
piezoelectric actuator
charge correction
correction
charge
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102013200353A
Other languages
English (en)
Other versions
DE102013200353A1 (de
Inventor
Dale W. Schroeder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keysight Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE102013200353A1 publication Critical patent/DE102013200353A1/de
Publication of DE102013200353A8 publication Critical patent/DE102013200353A8/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
DE102013200353A 2012-02-03 2013-01-14 Ladungskorrektur für einen piezoelektrischen Aktuator Withdrawn DE102013200353A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261594878P 2012-02-03 2012-02-03
US61/594,878 2012-02-03

Publications (2)

Publication Number Publication Date
DE102013200353A1 DE102013200353A1 (de) 2013-09-05
DE102013200353A8 true DE102013200353A8 (de) 2013-12-05

Family

ID=48902291

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013200353A Withdrawn DE102013200353A1 (de) 2012-02-03 2013-01-14 Ladungskorrektur für einen piezoelektrischen Aktuator

Country Status (2)

Country Link
US (1) US8884492B2 (de)
DE (1) DE102013200353A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103472266B (zh) * 2013-09-06 2015-11-18 南开大学 基于压电扫描管阶跃响应曲线的原子力显微镜动态成像方法
US9614463B2 (en) 2014-02-10 2017-04-04 Tdk Corporation Piezoelectric device, piezoelectric actuator, hard disk drive, and inkjet printer apparatus
DE112020000997B4 (de) 2019-04-25 2024-01-11 Murata Manufacturing Co., Ltd. Pumpvorrichtung mit einer ersten und zweiten piezoelektrischen Pumpe mit unterschiedlichen Eingangsleistungen
JP7377180B2 (ja) * 2020-08-31 2023-11-09 株式会社東芝 駆動回路、トランスデューサシステム、及び、検査装置
US11646708B2 (en) * 2020-12-07 2023-05-09 Cirrus Logic, Inc. Driver circuitry
WO2024108301A1 (en) * 2022-11-25 2024-05-30 Boréas Technologies Inc. Charge leakage compensation in piezo-electric transducer circuits

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263527A (en) 1979-05-17 1981-04-21 The Charles Stark Draper Laboratory, Inc. Charge control of piezoelectric actuators to reduce hysteresis effects
KR100396256B1 (ko) 1998-06-15 2003-09-03 시게이트 테크놀로지 엘엘씨 전하 피드백 구동 마이크로 액추에이터를 갖는 디스크드라이브
JP3797300B2 (ja) * 2002-08-30 2006-07-12 セイコーエプソン株式会社 インクジェット式プリンタのヘッド駆動装置
US7352107B2 (en) * 2003-03-31 2008-04-01 Suren Systems, Ltd. Transconductance circuit for piezoelectric transducer
US7141910B2 (en) * 2003-03-31 2006-11-28 Suren Systems, Ltd. Transconductance circuit for piezoelectric transducer
US7728685B2 (en) * 2005-11-07 2010-06-01 Citizen Holdings Co., Ltd. Temperature compensation oscillator and method for manufacturing the same
DE102007014326A1 (de) 2007-03-26 2008-10-02 Robert Bosch Gmbh Verfahren und Vorrichtung zum Laden eines kapazitiven Elements
US9194681B2 (en) * 2007-07-10 2015-11-24 Omnitek Partners Llc Inertially operated electrical initiation devices
JP5581928B2 (ja) 2009-09-18 2014-09-03 株式会社村田製作所 圧電アクチュエーター駆動回路

Also Published As

Publication number Publication date
US20130200751A1 (en) 2013-08-08
DE102013200353A1 (de) 2013-09-05
US8884492B2 (en) 2014-11-11

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Legal Events

Date Code Title Description
R163 Identified publications notified
R163 Identified publications notified

Effective date: 20140326

R082 Change of representative

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE

R082 Change of representative

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE

R081 Change of applicant/patentee

Owner name: KEYSIGHT TECHNOLOGIES, INC. (N.D.GES.D.STAATES, US

Free format text: FORMER OWNER: AGILENT TECHNOLOGIES INC., SANTA CLARA, CALIF., US

Effective date: 20141111

R082 Change of representative

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE

Effective date: 20141111

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE

Effective date: 20140904

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER, SCHE, DE

Effective date: 20140904

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER, SCHE, DE

Effective date: 20141111

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee