DE102011081981A1 - Device and system for processing flat substrates - Google Patents

Abstract

A device for wetting flat substrates on their underside with a fluid during the passage of the substrates along a transport path has a wetting roll transversely to the transport direction, wherein the wetting roller extends from below to just before the transport plane and is immersed in a supply of fluid underneath. The device is a stand-alone assembly together with the wetting roller and an elongated fluid supply container which is elongated in the manner of a closed channel with an elongate opening upwardly, substantially filled by the wetting roller. In this case, the wetting roller extends substantially within the container, wherein the container has in a lower region drain openings down into a disposed below the container gutter.

Description

Field of application and state of the art

The invention relates to a device for wetting flat substrates, wherein a substrate underside is wetted with a fluid during the passage of the substrates along a transport path in a transport plane. Furthermore, the invention relates to a system for treating flat substrates with a transport path in a transport plane, along which transport path a plurality of aforementioned devices are arranged.

From the DE 10 2005 062 527 A1 and the DE 10 2005 062 528 A1 It is known to treat substrates in a basically corresponding manner by running on wetting rollers, which are immersed with their lower part in a large basin with fluid. As a result, it is possible to achieve a full-area or only a partial wetting of the substrate undersides. At the same time, however, on the one hand a large amount of fluid is needed and on the other hand, there are serious problems with the formation of gases from the fluid. These should be replaced by a DE 10 2005 062 527 A1 described gas extraction can be reduced and avoided.

Task and solution

The invention is based on the object to provide an aforementioned device and an aforementioned plant with several such devices, which can be solved with the problems of the prior art and in particular both a good wetting of the substrate undersides can be achieved as well as efficient use of the required fluid is possible.

This object is achieved by a device having the features of claim 1 and a system having the features of claim 13. Advantageous and preferred embodiments of the invention are the subject of further claims and are explained in more detail below. Some of the features described below are only mentioned for the device or only for the system. However, they should be able to apply independently for both the device and the system independently. The wording of the claims is incorporated herein by express reference.

It is envisaged that the device has a wetting roller, in particular a single wetting roller. This wetting roller extends transversely to the transport direction, ranging from below to just before the transport plane. It is at least partially submerged in an underlying supply of fluid, for example, up to one-half or even more.

According to the invention, it is provided that the device is an independently operable and advantageously essentially closed structural unit together with, on the one hand, the wetting roller and, on the other hand, a container for the fluid supply. This container is elongated in the manner of a closed channel or tub with an elongated opening upwards, which is substantially filled by the wetting roller. The wetting roller extends substantially within the container so that it is advantageously only slightly longer and wider than the wetting roller. In its lower region, in particular on or in the bottom, the container has drainage openings downwards. These drain holes go into a gutter located below the container to remove fluid from the container. Advantageously, a supply of fluid is provided, in particular fresh fluid. This will be explained in more detail below.

This makes it possible that, on the one hand, a very large amount or trough of fluid is not necessary and must be filled, but also in the case a considerably smaller total amount of fluid is necessary, that an entire system advantageously has several such devices and thus several wetting rollers , which then preferably have a certain distance from each other along the transport path. Furthermore, the outgassing from the fluid is significantly reduced, in particular because the container has no particularly large opening for outgassing of the fluid, but just the opening is closed upwards substantially through the wetting roller. This advantageously makes it possible to reduce exhaust air problems with harmful constituents in the exhaust air in the case of an existing gas extraction in the system, resulting in an improved life cycle assessment and lower costs. Furthermore, the consumption of slightly outgassing ingredients of the fluid is significantly reduced, which also brings a significant cost savings for volatile components such as HF for etching solar cell wafers as substrates.

In an advantageous embodiment of the invention, the device is closed to the outside except for the elongated opening upwards. Thus, there are also advantageously no lateral openings or the like, through which outgassing from the fluid can take place. Particularly advantageous is the arrangement of the gutter at the bottom of the container closed or the gutter can be a pipe or hose, so no open drainage channel or the like.

In an advantageous embodiment of the invention, the wetting roller, the elongated opening in fill its width to a few mm laterally, this may advantageously be only about 1 mm. Thus, for example, it is possible for the wetting roller to be immersed in the fluid approximately halfway and thus with its greatest width, and thus there is no substantial, overlying and possibly outgassing region of fluid. Furthermore, it is possible, in addition to provide a kind of aperture at the top, through the aperture slot the wetting roller protrudes upward to rest on the substrate undersides, at the same time the aperture is used from the side so close to the wetting roller that only a narrower open slot results. Even so, an outgassing can be reduced. In a further embodiment of the invention, the device may therefore be substantially closed up to the elongated opening, in particular only have the elongated opening upwards.

A supernatant of the wetting roller up over the container or over a container edge is advantageously in the range of a few mm. Even so, an outgassing of the fluid can be reduced.

Advantageously, the wetting roller is slightly shorter than the container or its elongated opening. Particularly advantageously, the wetting roller protrudes laterally out of the container only with axle ends or axle stubs. The storage of these axle ends is provided outside of the container to an abovementioned system for treating the substrates, for example to suitably suitable bearing carriers. These bearing carriers may also comprise drive means for the wetting rollers, for example gears which interact with gears on at least one axle end. Thus, the actual storage and thus the carrying of the weight of the wetting rollers on the plant or said bearing supports can be done. A storage of wetting rollers can also be adjusted here, in particular all wetting rollers of the system at the same time and similar.

In extension of the invention, it is thus possible that the axle ends are arranged to be displaceable relative to a container wall penetrated by them on the end face of the container and thereby sealed. Displaceability may be vertical and / or horizontal such that the bearing function of the wetting rollers is withdrawn from the device but the sealing action of the wetting roller within the container is substantially maintained. Thus, once in the system for all devices, the relative position between wetting roller and container and thus the immersion depth is set in the container of the device, the wetting rollers can be adjusted together, for example by means of the aforementioned bearing carrier, with fixed containers. Thus, an immersion depth in the fluid changes uniformly in all wetting rolls.

Furthermore, a passage of the axle ends of the wetting roller through the container end walls has adjustable seals within a passage opening. As a result, the aforementioned vertical or horizontal displaceability can be maintained while maintaining the sealing function. Laterally outside the seals an outer container outer end wall is advantageously provided as a kind of double end wall. It has a larger clearance on the passage of the axle ends, which allows the said vertical and / or horizontal displaceability of the axle ends and not hindered. Below this free cutting a collecting channel is provided which leads into the aforementioned gutter or in a drain gutter. Thus, fluid exiting the container at the location of the axle ends due to the adjustable seals may be collected and removed in the gutter.

In an advantageous embodiment of the invention can be provided that an inlet to the fluid reservoir is provided, and advantageously through the drainage channel, ie from below into the fluid reservoir. This can preferably be done centrally into the container. Particularly preferred for this purpose in the fluid reservoir and just below the wetting roller an elongated distribution line is provided. It can have approximately the length of the wetting roller or be somewhat shorter. In order to bring as fresh as possible supplied fluid to the wetting roller and thus to the underside of the substrate, it can be provided that the distributor line has upwardly directed outlet openings for the fluid. For example, these may come relatively close to the wetting roller. It can also be provided that the height of the fluid supply, in which the wetting roller runs, is only slightly higher than this distribution line. Thus, the total amount of fluid in the device or the container is limited with the advantages mentioned above.

It is possible that said gutter extends obliquely to the horizontal and has a drain at a lower end. Thus, a fluid connection to the device or the container by means of a single line as an inlet and a single line as a drain can be achieved in a simple manner. Due to the oblique course of the gutter, it is ensured here that the fluid is also moved towards the outlet, and without elaborate aids.

It can be provided that the container bottom located above the fluid supply runs parallel to the gutter. This has the advantage that thereby a simple embodiment or Connection of the gutter to the fluid reservoir or its container is possible.

In an embodiment of the invention can be provided that the aforementioned drain holes are adjustable from the fluid reservoir into the gutter in its cross section. Advantageously, they are adjustable together. As a result, in particular in cooperation with an adjustment of the amount of supplied fluid, the exchange in the fluid reservoir or in the container can be regulated. For such adjustability, a slide may be provided which covers a plurality of drainage openings and, for this purpose, has slide openings which correspond to the drainage openings. Depending on the degree of overlap or displacement to each other thus changes the passage cross-section. Altogether, for example, two slides can be provided, one on each side of a central inlet into the fluid supply or into the aforementioned distribution line.

In addition to adjusting the exchange of fluid in the container, it is advantageous if the level of the fluid in the container can be adjusted directly. For this purpose, an overflow can be provided within the container, which is adjustable in height and thus allows a more direct and precise adjustment of the level height. Such an overflow may, for example, comprise a slide within a rigid container outer wall, which is vertically adjustable and is sealed to the container. Inside it can have channels that extend down into the gutter, so that in the event that the height of the fluid reaches the top of the slider and thus the channels, the fluid drains into the gutter and thus a maximum level height is specified.

In the system according to the invention several of the above-described devices, in particular in an identical embodiment, are provided which are provided in the transverse direction to the transport path and with a certain distance from each other. In order to bridge the distance between the devices for transporting the substrates transport rollers are provided, which are themselves formed without treatment or wetting function. Although they come into contact with the underside of the substrate and thus with the fluid thereon, they are correspondingly insensitive and advantageously very narrow, so that they do not adversely affect the wetting or do not adversely affect it.

Furthermore, a drip pan is provided below the transport path in the system, which is at least so large that all the aforementioned devices are arranged above it, and so outflowing fluid can be collected.

Furthermore, gas extraction openings are provided on the collecting trough, advantageously on its underside, so that even the small amounts of outgassing that arise can be collected from the fluid and removed. Thus, on the one hand, a negative effect of this gas on the substrate tops, which may not be desired, can be avoided. On the other hand, leakage of harmful gases into the environment of the system can be avoided. The advantage of the arrangement of the Gasabsaugöffnung well below the devices or the wetting rollers is that the gas, which is often heavier than air, on the one hand better and more completely exhausted and on the other hand in a direction away from the substrate tops can be sucked ,

The Gasabsaugöffnungen can advantageously lead to a common gas extraction. However, this is known per se.

Furthermore, it is possible for the gas suction openings to be adjustable in their opening cross section. This can be done in the manner of sliding grids with corresponding openings that are adjustable against each other. Thus, an adjustment of all Gasabsaugöffnungen can be done in one step by the coupled sliding grid.

It is advantageously provided in a system that two to four rows of transport rollers are provided between two devices described above. This also depends on how often successively the substrate undersides need to be wetted with fresh fluid or how sensitive the substrates to be transported are.

These and other features will become apparent from the claims but also from the description and drawings, wherein the individual features each alone or more in the form of sub-combination in one embodiment of the invention and in other areas be realized and advantageous and protectable Represent embodiments for which protection is claimed here. The subdivision of the application into individual sections as well as intermediate headings does not restrict the general validity of the statements made thereunder.

Brief description of the drawings

An embodiment of the invention is shown schematically in the drawings and will be explained in more detail below. In the drawings show:

1 a simplified side view of a system according to the invention with transport path for flat substrates and several coating modules,

2 an inventive coating module in an oblique top view from above,

3 the coating module off 2 in a cutaway view,

4 a greatly enlarged view of the lead out of an axle end of the container with sliding seal,

5 a page presentation similar in section 3 .

6 the right part of the illustration 5 in high magnification and

7 a plan view of the right end of the coating module accordingly 6 from above showing an overflow as a slide.

Detailed description of the embodiments

In 1 is highly schematized an entire plant 11 shown with the flat substrates 13 can be treated. The substrates 13 run with their tops 14 pointing upwards and the undersides 15 pointing down on a transport track 17 left to right. The transport railway 17 on the one hand by transport rollers 18 formed, as they are commonly known in the art and can be simple narrow rollers, which only transport function for the substrates 13 exhibit.

Furthermore, the transport path 17 at least three coating modules 20 on, which are provided at the same distance from each other and extending transversely to the transport path. Their concrete structure and function will be explained in more detail later. However, they basically work as described in the introduction DE 10 2005 062 528 A1 describes.

Below the transport track 17 indicates the plant 11 a suction trough 22 on, for example, as a flat pan, the substantially length and width of the transport path 17 having. The suction trough 22 has openings as access 24 towards the top, over which perforated grids 23 slidably arranged, as indicated by the arrow. The holes in the perforated grid 23 basically correspond to the openings 24 , and by moving the perforated grid 23 can be achieved opening or closing with adjustable Absaugquerschnitten. This also allows the suction on the system 11 which are different from the suction pan 22 led to the right. This extraction is used in the aforementioned DE 10 2005 062 527 A1 However, as explained above, it may be considerably lower, because a considerably lower outgassing in the treatment of the substrates 13 he follows. Furthermore, from the suction tray 22 In addition to gaseous components and dripping residues of fluid collected and also removed.

In 2 is a coating module 20 enlarged in oblique view from above. The coating module 20 has an elongated wetting roller 26 up, a short axle end to the rear 27a and to the front a short axle end 27b having. At the end of the axis 27b is a gear 29 provided for the drive.

The wetting roller 26 is in a container 31 of the coating module 20 arranged and is just with the axle ends 27a and 27b laterally over. Like the comparison with the 5 and 6 shows, protrudes the wetting roller 26 just above the edge of the container 31 upwards over, for example a few mm or 2 mm to 5 mm.

The container 31 has two container longitudinal walls 32a and 32b on, which extend over the entire container height. The tank longitudinal wall 32a Although at the bottom of a stepped course, but this is functionally not relevant to the invention here. Furthermore, the container 31 two interior end walls 33a and 33b on which the volume around the wetting roller 26 around along with the tank longitudinal walls 32a and 32b define or limit.

As the 3 in enlargement, are to seal the axle ends 27a and 27b in the interior end walls 33a and 33b sealing inserts 34a and 34b intended. These sealing inserts 34a and 34b are in 3 to recognize in high magnification. They are constructed in several parts and arranged in a larger opening than for the axle end 27 actually necessary. They overlap the inner end wall 31a and 31b each inwardly and outwardly, but are formed smaller than the corresponding openings. So they can be horizontal and vertical in the plane of the inner end walls 33a and 33b Although they are not completely covered, they are still largely dense. In addition to a sealing function, it is essentially also a relatively easy mobility of the wetting roller 26 or their axle ends 27a and 27b opposite the container 31 at low rotational friction on.

Because of the sealing inserts 34a and 34b that are below the fluid level inside the container 31 can and should lie, with a certain probability fluid still exits, is outside of each inner end wall 33a and 33b still a Outer end wall 36a and 36b set. This one is running, like 3 afterwards shows, even further down than the inner end wall 33a and 33b , Interior front wall 33a and 33b and outer end wall 36a and 36b wise, like 6 clearly shows in the side section, in the middle area at a distance to each other, so here is a collection channel 38b is formed. Here is from the Dichtinschüben 34a and 34b leaking fluid in the collection channels 38a and 38b collected and directed down, which will be explained in more detail below. Anyway, occurs over the outer end walls 36a and 36b no fluid over.

At the outer end walls 36a and 36b are screw fasteners 37a and 37b intended. This allows the containers 31 or the coating modules 20 in the plant 11 at the aforementioned supports or the like. be bolted to side walls.

From the 4 . 5 and 6 with the sectional view is the internal structure of a coating module 20 or the container 31 to recognize. Between the interior end walls 33a and 33b runs an inner floor 40 of the container 31 , the side of the container longitudinal walls 32a and 32b is present, ie within the container 31 forms its own volume. This is also the aforementioned volume in which the wetting roller 26 or a fluid supply into which the wetting roller is located 26 is immersed. It can be seen that the inner floor 40 obliquely to the horizontal and to the wetting roller 26 runs and indeed to the axle 27b with the gear 29 falls off. The reason for this is that an outer floor underneath 42 that is between the outer end walls 36a and 36b runs and inside the container longitudinal walls 32a and 32b attached, as well as the inner bottom 40 an aforementioned gutter 43 forms and a rightmost course 44 having. The sequence 44 is with a drain line, not shown, for discharging the fluid from the coating module 20 connected.

It is especially important that the gutter 43 runs obliquely to the horizontal and thus also the outer floor 42 , So it can be ensured that all running fluid to drain 44 as the only place, without having to be led there.

The inner floor 40 containing the fluid supply for the wetting roller 26 and the gutter 43 separates, has drainage holes 46 on, according to the 4 in a row about the same distance. The drainage holes 46 be from on top of the inner floor 40 resting sliders 48a and 48b covered, which in turn pusher holes 49 exhibit. The arrangement of the slide holes 49 corresponds to the drainage holes 46 so easily recognizable by moving the slider 48a and 48b on the inner floor 40 the flow cross-section from the fluid reservoir into the gutter 43 is adjustable in it. So it's, especially from the 4 to 6 , good to see that the container 31 is formed double-walled at its end walls and at the bottom and within the double wall leaking fluid collected and controlled can be derived.

In the fluid supply 51 above the inner floor 40 runs an elongated distribution line 53 , The distribution line 53 has a central fluid supply 45 on. The supplied fluid then flows out of outlet openings 56 the distribution line 53 in the fluid reservoir, along the entire length, including along the entire length of the wetting roller 26 , This ensures that the fresh supply fluid substantially from the wetting roller 26 to the bottoms 15 the substrates 13 is introduced to their wetting or treatment, as has been previously described and from the aforementioned DE 10 2005 062 528 A1 evident. So that can be achieved so that the subpages 15 be wetted with as fresh as possible and possibly treated fluid, while longer in the fluid reservoir 51 displaced fluid is displaced from the fresher supplied and down over the drain holes 46 into the gutter 43 expires and is discharged, in particular to a reprocessing.

In the top view 7 is to realize that a gap 58 between wetting roller 26 and inside of the container longitudinal walls 32a and 32b is relatively narrow. It can be a few mm with roll diameters of a few cm, which can be achieved that there are very few options, such as the fluid in the fluid supply 51 from the container 31 or the coating module 20 can outgas.

Furthermore, can be achieved so that the wetting roller 26 in a very small area of the fluid supply, namely accordingly 5 above the distribution line 53 , moves, so that it is easily possible here, always possible to provide fresh fluid and drain the old fluid.

In 7 is very good the construction of the sealing insert 34b to recognize as well as the arrangement of inner end wall 33b and outer end wall 36b with the collecting channel 38b between.

Furthermore, it is off 7 also an overflow 59 to recognize. This is on the inside of the container 32a into a wide, slot-like depression 61 used as overflow valve 62 , The overflow valve 62 is close to the Inside the tank longitudinal wall 32a guided and by means of screws 65 height-adjustable. Furthermore, the overflow valve 62 an overflow opening 63 on which is channel-like and in the fluid reservoir 51 below the distribution line 53 or even in the gutter 43 extends, wherein the overflow valve 62 Of course it is just as long. By adjusting the height of the overflow valve 62 or its overflow opening 63 in the vertical direction by means of the screws 65 can be set, how high the level of the fluid supply 51 enough. If more fluid were supplied, it flows through the wide overflow opening 63 immediately. As a result, so can the maximum immersion depth of the wetting roller 26 be set very accurately and much easier than by regulating the fluid supply 54 or drain holes 46 by means of the slides 48a and 48b , This immersion depth of the wetting roller 26 into the fluid of the fluid reservoir 51 Namely, determines the amount of fluid that is easily traceable to the undersides 15 the substrates 13 is brought.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102005062527 A1 [0002, 0002, 0036]
• DE 102005062528 A1 [0002, 0035, 0046]

Claims (17)

Apparatus for wetting flat substrates by wetting a substrate base with a fluid during passage of the substrates along a transport path in a transport plane, wherein the device has a wetting roll transversely to the transport direction, wherein the wetting roll extends from below to or until just before the transport plane and at least is partially submerged in an underlying supply of fluid, characterized in that the device is a self-contained assembly together with the wetting roller and a container for the fluid supply, wherein the container is elongated in the manner of a closed channel with an elongated opening upwards which is substantially filled by the wetting roller, wherein the wetting roller extends substantially within the container, wherein the container has in a lower region downflow openings in a disposed below the container Gutter. Apparatus according to claim 1, characterized in that the device is closed to the outside except for the elongated opening upwards, wherein in particular the arrangement of the gutter is closed at the bottom of the container. Apparatus according to claim 1 or 2, characterized in that the wetting roller fills the elongated opening in its width to a few mm laterally, in particular about 1 mm. Device according to one of the preceding claims, characterized in that the device, in particular the container together with drainage channel and drain, is formed substantially closed except for the elongated opening upwards for a closed handling and management of the fluid. Device according to one of the preceding claims, characterized in that the wetting roller protrudes a few mm above the container or a container edge upwards. Device according to one of the preceding claims, characterized in that the wetting roller is slightly shorter than the length of the container or the elongated opening and preferably projects laterally out of the container only with axle ends, wherein in particular a bearing of the axle ends outside of the container at a plant for Treating the substrates is provided. Apparatus according to claim 6, characterized in that the axle ends are arranged vertically and / or horizontally displaceable and sealed relative to a container wall passing through them on the end face of the container. Device according to one of the preceding claims, characterized in that a passage of the axle ends of the wetting roller through the container end walls within a passage opening adjustable seals, wherein laterally outside thereof, an outer container outer end wall is provided with a larger cutout for the passage of the axle ends and a gutter below it , which leads into the gutter or to its expiration. Device according to one of the preceding claims, characterized by an inlet to the fluid supply through the gutter, in particular from the outside centrally into the container inside, wherein preferably in the fluid supply just below the wetting roller an elongated distribution line is provided which is approximately the length of the wetting roller and preferably has upwardly directed outlet openings for the centrally supplied to the fluid reservoir fluid. Device according to one of the preceding claims, characterized in that the gutter extends obliquely to the horizontal with a drain at the lower end, wherein the container bottom of the fluid supply runs parallel to the gutter. Device according to one of the preceding claims, characterized in that the drainage openings from the fluid supply into the gutter are adjustable in cross section, in particular jointly adjustable, preferably by at least one more drain holes covering slide with the drain holes corresponding and adjustable slide openings. Device according to one of the preceding claims, characterized in that the fluid supply within the container has a height-adjustable overflow for adjusting the height of the fluid supply or immersion depth of the wetting roller, wherein preferably a slider is disposed within a rigid container outer wall and sealing with the container is connected and has in its interior down into the gutter reaching channels. Plant for the treatment of flat substrates with a transport path in a transport plane, wherein along the transport path a plurality of devices according to one of the preceding claims in the transverse direction thereto and provided at a distance from each other, wherein between the devices transport rollers for forming the transport path are provided and the transport rollers are formed without a treatment function or wetting function and wherein below the transport path a drip tray of the system is provided with Gasabsaugöffnungen, preferably at the bottom. Plant according to claim 13, characterized in that the Gasabsaugöffnungen lead to a common gas extraction. Installation according to claim 13 or 14, characterized in that the Gasabsaugöffnungen are adjustable in their opening cross section, in particular in the manner of sliding grids with corresponding openings which are adjustable against each other. Installation according to one of claims 13 to 15, characterized in that two to four rows of transport rollers between two devices are provided according to one of claims 1 to 12. Installation according to one of claims 13 to 16, characterized in that along the transport path on the outer sides bearing support for supporting the wetting rollers are provided, wherein preferably on the bearing supports drive means, in particular gears, are provided for the wetting rollers for their drive.

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