DE102009035746A1 - Surface probe - Google Patents

Abstract

The invention relates to a roughness and / or profile and / or distance-measuring device with a probe, which contains at least one sensor surface formed as a touch probe, preferably in the form of a stylus tip having a stylus (5, 5 '), for contacting detection or measuring the microsized or macroscopic surface profile of a test object, with a measuring system (4) for detecting or measuring the position of the surface contact element relative to the surface of the test object. At least one further sensor (6, 7) is provided for detecting one or more local physical, chemical, biological and / or geometric properties of the surface of the measurement object and / or a feed device by means of which the sensor can be moved or moved along the surface profile of the measurement object is moved, wherein the measuring device of a plurality of interchangeable modules is modular, comprising a probe module, a measuring module and a feed module.

Description

The The invention relates to a roughness and / or profile and / or distance measuring device a, preferably designed as a suffrage, probe, the at least one as a surface contact element contains trained sensor, preferably in the form of a stylus having a stylus and / or in Shape of a spherical contact body, to the touching Acquisition or measurement of the microscopic and / or macroscopic surface profile a measuring object, in particular also having an irregular shape, in particular a workpiece, preferably under production conditions, and with a measuring system for detecting or measuring the position of the surface sensing element relative to the surface of the measurement object. The invention particularly relates to a surface profile probe.

Roughness and profile probes are proven and widely used measuring instruments for assessing the surface quality of workpieces, for detection the microstructure and the surface roughness. These instruments have a stylus made of diamond or, in the Trap of the Profilmess button, a metal or glass ball, with which the workpiece surface or is sampled by the button by means of a motorized Feed over the surface is pulled. The latter can be integrated as a separate device or in the push button be. There are usually no other features in today commercial Integrated buttons.

The Working principle is always similar: The stylus tip is attached to a lever which is suitably mounted is and can be deflected by a certain angle. By the workpiece surface over the Tip-induced deflection is measured by a measuring system usually inductive or optical, measured, digitized and connected to the PC output.

• – man das Profil auf einem schmalen Steg messen muss und die Tastnadel unter Kamerabeobachtung optimal positionieren könnte und/oder wenn
• – die Oberfläche porenbehaftet ist und man die Poren aus dem Linienprofil aussortieren könnte, wenn man sie mittels eines Kamerabildes als solche identifiziert hat und/oder wenn
• – man in einer Bohrung verdeckt misst und den Taster mittels eines Bildes geeignet ausrichten kann und/oder wenn
• – man mittels eines Oberflächenbildes zur Messung geeignete Stellen aussuchen möchte, z. B. solche mit Defekten.

Measured with such a button, a so-called Tastschnitt, ie a line profile. For some measurement tasks, it would be advantageous to be able to record other local workpiece properties together with the profile, for. As temperature, friction, magnetic property, conductivity or impedance or to gain a visual impression of the measuring surface. This is z. For example, if

• - You have to measure the profile on a narrow bridge and the camera could optimally position the camera under camera observation and / or if
• - The surface is porous and one could sort out the pores from the line profile, if they have identified by means of a camera image as such and / or if
• - One measures in a hole covered and the button can align by means of a picture and / or if appropriate
• - You want to choose suitable locations for measurement by means of a surface image, z. For example, those with defects.

It is an object of the invention, a probe of the aforementioned Kind available to provide extended application and / or application possibilities, especially advantageous possibilities for one extended assessment of the surface of a test object, in particular a workpiece surface, offers.

These The object is achieved in particular by the features of claim 1. The The invention particularly relates to a surface profile probe with additional sensors for the extended assessment of a surface of a measurement object, in particular a workpiece surface.

While with a conventional roughness or profile probe only the surface profile is detectable the additional sensor or allow the additional sensors provide more comprehensive quality assurance with regard to further Features such as corrosion, rust, structure, defects, color, contamination, Etc..

According to the invention, it is provided a conventional probe with at least one other sensor to provide, in addition to the surface profile one or more local physical, chemical, biological or geometric properties the workpiece surface detected. This can be a miniature temperature sensor, magnetic sensor, pressure sensor, an air nozzle for measuring the distance, a sensor for optical contrast measurement, z. For character recognition, a color sensor, a friction sensor, a chemical sensor and / or a biological sensor, e.g. B. a semiconductor with a certain sensitivity for a Substance, a chemical, a gas, a liquid, etc.

Around To make a measurable effect, it may be useful to examining surface with a reagent to moisten foreign matter or catalyst before or while she is scanned. This wetting can be done via a suitable device in or over done the button.

The further sensor may also be a miniature camera in order to gain a visual impression of the workpiece surface in the vicinity of the scanning location. However, it can also be a photodiode line as part of a miniature triangulation measurement system with which it is possible to carry out a distance and / or profile measurement without contact. The same goal can be also in a similar way with a differential photodiode reach.

Of the but optical sensor can also be part of a miniature spectrometer z. B. to capture material-specific features of the workpiece surface. Or act the other sensor is a simple color sensor for recording or measurement of color-specific surface features.

Of the further according to the invention Sensor or the further invention Sensors can do this at some suitable location more or less far away from the surface probing element, especially from the wand, be attached.

Finally is a targeted Lighting of crucial importance. This can be several suitable light sources, possibly different colors, at appropriate angles, optionally sequentially, the surface of the Illuminate the object to be measured.

Advantageous for some Application, for. B. a measurement of soft objects or Knife edges with a small radius, is the possibility of this with a wholly or partly in the button integrated optical measuring system perform. This can be z. B. a grid pattern on the surface of Projecting the object and the distortion of this pattern, conditional by the surface contour, suitable evaluate. Therefore can be suitable for the so-called triangulation method or the so-called "depth-from-focus" method. At least for the latter is a distance variation between the imaging optics and the Provide workpiece surface.

Advantageous is it, the means to the usually necessary Calibration of the probe together with or without the additional sensor to be included in the stylus construction, so that no external Kalibrierstücke needed become.

As well It is advantageous means for motor or software-controlled Lift the stylus and / or the other sensor to provide z. B. grooves in the surface of the test object without damage to be able to.

Finally is it for Some applications are advantageous to provide means that without further external aids more than just a line profile can be measured. You can do that z. B. the lever arm with the stylus by means of a suitable actuator side by piece offset. In particular, a suitable correlation promises this thus obtained measurement lines with a camera image of the surface one Significant added value of profile measurement for the user.

One second measuring system, installed on / or in the probe housing with separate probe can be advantageous for the detection and subsequent compensation of external vibrations serve. This will be this feeler reasonably stationary executed, moved So not laterally, while the first probe tip over the surface guided becomes.

According to one advantageous embodiment of the invention may be provided means with which the described sensors parallel to the existing stylus can be brought into their measuring position. These can do this be lowered or swung suitable.

Similarly it is advantageous, alternatively or simultaneously with more than one Probe tip or a sensor to be able to scan the surface.

through Vibrationsbeaufschlagung the probe tip can be z. B. over surface sites to lead, Otherwise, possibly caused by static friction erroneous measurements come.

Of the Tasthebel represents a resonance system, which when scanning the rough surface if necessary is stimulated. This effect can be avoided by a suitable damping become. An increase the scanning speed can be if necessary, if the autocorrelation coefficients of Adjusts probe dynamics of the surface structure to be measured.

With built in the button means for the jerky movement of the stylus towards the surface you can achieve a small notch and its depth equal or measure by running over again. That's how it works the microhardness determine the surface.

Especially when used in production there is a risk of contamination of the button. This can be avoided that the probe with an overpressure clean air is applied, so that always a small amount of air emanates and keep the dirt away

The invention also relates to a roughness and / or profile and / or distance measuring device with a, preferably designed as a suffrage, probe that contains at least one formed as a surface probing sensor, preferably in the form of a stylus tip having a stylus and / or in the form of a spherical impact body, for touching detection or measurement of the microscopic or macroscopic surface profile of a measurement object, in particular a workpiece, and with a Meßsys tem for detecting or measuring the position of the surface-contact element relative to the surface of the measurement object, in particular according to claim 1 or 2, with a feed device by means of which the sensor along the surface profile of the measurement object is movable or is moved.

In the usual compact hand-held profilers are the essential components, namely feed, measuring electronics and Button firmly assembled. In a total device or larger devices are the three components feeder, display / evaluation electronics and probes present as separate devices and mechanical or electrically connected to each other and put together the meter Other functions than the micro or macro profile measurement are unavailable.

It is therefore also an object of the invention, a roughness and / or Profile and / or distance measuring device or a device to provide for micro or macroprofile measurement, which in particular cost-effective Way extended application and / or applications offers.

These Task may in particular by the features of claim 3, preferably solved by it be that the measuring device from at least one of the probe containing replaceable probe module and at least one the measuring system containing interchangeable measuring module and at least a replaceable feed module containing the feed device is modular.

All Individual components can be modular designed so that they form a complete device to let. This can be done, for example, with the help of suitable mechanical magnetic interfaces. For example, for the feed module Be sure to provide versions with different lengths of travel. ever according to the purpose then the suitable feed module can be selected. Likewise, you can touch elements with different Tastnadelversionen and / or lever lengths provide. After all can also or alternatively, further measuring modules are introduced, with which For example, other than geometric sizes can be measured.

One gauge let yourself thus composed of modular components so that it is simple or solve complex tasks can, without that several devices need to be purchased each only for a specific measurement task are designed. Such optional modules for example Temperature, hardness, Color, Reibkraft-, interface or reflection measurement modules. Furthermore, a camera module or any other kind be advantageous optical sensor.

According to one Further development can be provided that the measuring device at least another measuring module with at least one further sensor for Measurement or detection of one or more, in particular local, physical, chemical, biological and / or geometric Properties of the surface of the DUT contains. By Add modular components can in an advantageous manner in addition to the roughness and / or profile measurement Other features of the DUT are detected.

Prefers can the probe module, the measuring module or the measuring modules and the feed module be installed without tools and / or removable without tools or can These modules are assembled without tools and / or dismantled without tools become.

Further can Means be provided for jointly lifting a unit or arrangement, the probe module, the measuring module or the measuring modules and the feed module includes. For the detection of certain surface characteristics, it is advantageous that the entire device compared to raise the workpiece surface. For this purpose, a corresponding, motorized or controllable by an actuator Serve lifting mechanism. This can be the arrangement or the unit software controlled from the surface move away from the target.

Further can be provided that the probe module has a means for detecting or measurement of the friction between the sensor of the probe and the Measuring object includes. To determine the coefficient of friction of the material of a measurement object, in particular a workpiece, The stylus or alternatively another suitable one can determine sensing body using the feed module via the surface of the object to be measured. Is the suspension of the feeler lever designed that they act under the influence of the lateral pulling direction Frictional force stretches, so this strain can be measured. This stretching provides a measure of the friction force dar. The suspension For example, a spring parallelogram or a simple spring be.

Further Advantages, features and aspects of the invention will become apparent from the claims and from the following description part, in which a preferred embodiment the invention is described with reference to the drawings.

It demonstrate:

1 : a schematic longitudinal cross section of a roughness and / or profile and / or distance measuring device according to the invention;

2 : the measuring device after 1 in a side view from the left;

3 FIG. 3: shows a schematic longitudinal cross-section of a roughness and / or profile and / or distance measuring device according to an alternative embodiment. FIG.

The roughness and / or profile and / or distance measuring device comprises a trained as a free probe probe, a probe body 1 and a to this about a pivot bearing rotatably mounted sensing or measuring lever 2 having. At the probe body 1 is a protective tube 9 attached, in which the feeler or measuring lever is received protected against damage.

On the from the button body 1 outstanding free end of the feeler or measuring lever 2 is at least one designed as a surface sensing element sensor in the form of a stylus tip having a stylus 5 for touching detection or measurement of a microscopic surface profile 8th a measuring object, in particular a workpiece, arranged.

In the probe body 1 arranged or assigned to this is a measuring system 4 for detecting or measuring the position of the stylus 5 relative to the surface 8th of the measurement object.

In the field of the stylus or this are associated with a plurality of additional sensors 6 . 7 for detecting one or more local physical, optical, chemical, biological and / or geometric properties of the surface 8th of the measurement object and illumination means 6 . 7 for lighting the surface 8th the measured object arranged.

3 shows an alternative embodiment of a roughness and / or profile and / or distance measuring device, which is modular. This comprises an arrangement or unit consisting of an exchangeable feed module 11 , a replaceable measuring module 12 and a replaceable probe module 13 , Preferably, the probe module 13 , the measuring module 12 and the feed module 11 can be assembled and disassembled without tools and / or the modules can be 11 . 12 and 13 , assembled and disassembled without tools.

The probe module 13 contains a probe designed as a push button. The measuring probe comprises a sensor designed as a surface contact element. The sensor is a stylus 5 ' with a stylus tip for touching detection or measurement of the microscopic or macroscopic surface profile of a 3 not shown, in particular a workpiece.

The measuring module 12 includes a measuring system for detecting the position of the surface sensing element relative to the surface of the measurement object.

The feed module 11 contains a feed device, by means of which the sensor along the surface profile of the measurement object is movable or is moved. The measuring device here also includes a camera 15 comprehensive camera module.

All individual components have a modular design so that they can be assembled into a complete device. This can be done, for example, by means of one or more magnetic and / or mechanical interfaces 14 respectively.

The arrangement or unit can via support feet 16 on the in 3 not shown, or on another body, which is firmly connected to the measurement object supported. As a means for collectively raising the unit, the at least the stylus module 13 , the measuring module 12 and the feed module 11 may include a motorized or actuatable by an actuator lifting mechanism 17 serve. With the help of the lifting mechanism 17 the arrangement or the unit can be software controlled by the surface of the in 3 not shown measuring object to be moved away.

1

Probe body / probe

2

tactile or measuring lever

3

pivot bearing

4

measuring system

5

wand

5 '

wand

6

Sensors / Lighting

7

Sensors / camera / lighting

8th

Surface or surface profile a measurement object

9

thermowell

11

feed module

12

measurement module

13

Buttonmodul

14

mechanical interface

15

Camera / camera module

16

Outrigger

17

lifting mechanism

Claims (44)

Roughness and / or profile and / or distance measuring device with a, preferably designed as a suffrage, probe that contains at least one designed as a surface contact probe sensor, preferably in the form of a stylus tip having a stylus ( 5 ) and / or in the form of a spherical impact body, for touching detection or measurement of the microscopic surface profile ( 8th ) of a test object, in particular a workpiece, and with a measuring system ( 4 ) for detecting or measuring the position of the surface contact element relative to the surface ( 8th ) of the test object, characterized in that the measuring device has at least one further sensor ( 6 . 7 ) for detecting one or more local physical, chemical, biological and / or geometric properties of the surface ( 8th ) of the measurement object. Measuring device according to claim 1, characterized by an integrated, designed as a feed device, drive device, by means of which the surface contact element and / or the additional sensor or the other sensors along the surface profile the object to be measured is or are or is being moved. Roughness and / or profile and / or distance measuring device with a, preferably designed as a suffrage, probe that contains at least one designed as a surface contact probe sensor, preferably in the form of a stylus tip having a stylus ( 5 ' ) and / or in the form of a spherical impact body, for the touching detection or measurement of the microscopic or macroscopic surface profile of a test object, in particular a workpiece, and with a measuring system for detecting or measuring the position of the surface contact element relative to the surface of the test object, in particular according to claim 1 or 2, with a feed device, by means of which the sensor along the surface profile of the measurement object is movable or is moved, characterized in that the measuring device of at least one probe containing the interchangeable probe module ( 13 ) and at least one interchangeable measuring module containing the measuring system ( 12 ) and at least one interchangeable feed module containing the feed device ( 11 ) is modular. Measuring device according to claim 3, characterized that this at least one further measuring module with at least one another sensor for measuring or detecting one or more, in particular local, physical, chemical, biological and / or geometric Properties of the surface of the DUT contains. Measuring device according to claim 3 or 4, characterized in that the probe module ( 13 ), the measuring module ( 12 ) or the measuring modules and the feed module ( 11 ) can be removed without tools and / or dismantled without tools, or mounted without tools and / or disassembled without tools. Measuring device according to one of claims 3 to 5, characterized in that means ( 17 ) are provided for the common lifting of a unit or arrangement that the push button module ( 13 ), the measuring module ( 12 ) or the measuring modules and the feed module ( 11 ). Measuring device according to one of claims 3 to 6, characterized in that the probe module has a means for detecting or measurement of the friction between the sensor of the probe and includes the measurement object. Measuring device according to one of claims 1 to 7, characterized in that the further sensor ( 6 . 7 ) or the other sensors ( 6 . 7 ) on or in a housing of the measuring device and / or on or in the probe ( 1 ) is arranged or are. Measuring device according to one of claims 1 to 8, characterized in that it contains a straightness reference of the drive or feed movement forming reference plane, along which the probe or a carriage carrying this upon movement of the surface contact element and / or the other sensor or the other sensors along the surface profile of the workpiece ( 50 ) is moved. Measuring device according to one of claims 1 to 9, characterized in that it is in the further sensor ( 7 ) around a photosensitive sensor ( 7 ) or photosensor, preferably around a CCD / CMOS camera ( 7 ) containing at least two photosensitive surfaces or elements. Measuring device according to claim 10, characterized in that the photosensitive sensor is a photodiode array. Measuring device according to claim 10 or 11, characterized characterized in that the distance between the measuring object and the light-sensitive sensor is designed as a suitable fiber optic. Measuring device according to one of claims 1 to 12, characterized in that in front of the further sensor, or in front of the other sensors depending because, an imaging optics is arranged. Measuring device according to one of claims 1 to 13, characterized in that means ( 6 . 7 ) are present in order to illuminate a surface element of the measurement object uniformly or in a structured manner. Measuring device according to one of claims 1 to 14, characterized in that means are provided to a surface element of the test object on the other sensor or on the other sensors map. Measuring device according to one of claims 1 to 15, characterized in that means are provided to a in contrast to the Environment contrasting point or in contrast to the Environment contrasting line or in contrast to the Environment contrasting line grid or in contrast to the Surrounding free selectable pattern on the surface project the object to be measured. Measuring device according to claim 16, characterized that means are present on the surface of the DUT projected patterns on the other sensor, in particular to image on the photosensitive sensor. Measuring device according to one of claims 1 to 17, characterized in that the further sensor ( 6 . 7 ), in particular the photosensitive sensor ( 7 ) and / or the imaged or projected pattern of the movement of the surface contact element, in particular the stylus ( 5 ), is tracked or become. Measuring device according to one of claims 1 to 18, characterized in that means for focusing the sample surface on the further sensor, in particular the photosensitive sensor, available. Measuring device according to one of claims 1 to 19, characterized in that the further sensor, in particular the photosensitive sensor that is part of a spectrometer. Measuring device according to one of claims 1 to 20, characterized in that the further sensor, in particular the photosensitive sensor is part of a color sensor. Measuring device according to one of claims 1 to 21, characterized in that means for detecting the surface material of the test object are present or that it is in the other Sensor around a sensor to detect the surface material of the DUT is. Measuring device according to one of claims 1 to 22, characterized in that means are provided to not only one tactile section but sequentially several parallel Tastschnitte take. Measuring device according to one of claims 1 to 23, characterized in that a second separate Abstandsmeßsystem with sensor is integrated. Measuring device according to one of claims 1 to 24, characterized in that it is an actuator for the controlled or controlled lifting of the surface contact element, in particular the stylus, contains. Measuring device according to one of claims 1 to 25, characterized in that mounted directly on the probe Means are provided to connect the probe using the Surface probe contact, especially the stylus, to calibrate. Measuring device according to one of claims 1 to 26, characterized in that, preferably arranged on the probe or fastened, means for adjusting the measuring force over a Actuator are provided. Measuring device according to one of claims 1 to 27, characterized in that means ( 6 . 7 ) for the defined illumination of the surface ( 8th ) of the DUT are present. Measuring device according to one of claims 1 to 28, characterized in that means for defined loading the surface of the test object with a contaminant or with a contaminant gas available. Measuring device according to one of claims 1 to 29, characterized in that at least one sensor for detecting or measurement of local chemical properties of the surface of the DUT is present. Measuring device according to one of claims 1 to 30, characterized in that at least one sensor for detecting or measurement of the local temperature of the surface of the object to be measured is. Measuring device according to one of claims 1 to 31, characterized in that at least one sensor for detecting or measurement of local hardness the surface of the DUT is present. Measuring device according to one of claims 1 to 32, characterized in that at least one sensor for detecting or measurement of the local elastic properties of the surface of the DUT is present. Measuring device according to one of claims 1 to 33, characterized in that at least one sensor for detecting or measurement of the local friction properties of the surface of the DUT is present. Measuring device according to one of claims 1 to 34, characterized in that at least one sensor for detecting or measurement of local biological properties of the surface of the DUT is present. Measuring device according to one of claims 1 to 35, characterized in that at least one sensor for measuring local magnetic properties of the DUT is present. Measuring device according to one of claims 1 to 36, characterized in that at least one sensor for measuring of the local electrical resistance or the impedance or the electrical conductivity is available. Measuring device according to one of claims 1 to 37, characterized in that means for the impact-like application of force to the stylus ( 5 ) available. Measuring device according to one of claims 1 to 38, characterized in that means for vibrating the stylus ( 5 ) available. Measuring device according to one of claims 1 to 39, characterized in that at least two to a certain Angle against each other rotated styli are available. Measuring device according to one of claims 1 to 40, characterized in that means for damping the Tasthebelbewegung available. Measuring device according to claim 41, characterized in that the damping is adjustable so that an autocorrelation function of the probe of an autocorrelation function of the surface structure ( 8th ) corresponds to the measurement object. Measuring device according to one of claims 1 to 42, characterized in that more than one sensor and more than one feeler and more than one deflection measuring Measuring system are available. Measuring device according to one of claims 1 to 43, characterized in that the probe with an air pressure can be applied.