DE102014201438B4 - Device and method for mounting a detection device for detecting properties of a measurement object - Google Patents

Abstract

Device for mounting a detection device (2) for detecting properties of a measurement object on a carrier device (11), the device (8) having at least one carrier fastening section (10) for fastening the device (8) to the carrier device (11), the The device (8) has at least one sensor attachment section (9, 9a, 9b) for attaching the device (8) to the detection device (2), the device (8) having at least one spring element, the spring element being arranged and/or designed in this way that the at least one carrier attachment section (10) is movable relative to the at least one sensor attachment section (9, 9a, 9b) at least in or counter to a direction of relative movement, the device (8) comprising at least one connecting section (17a, 17b, 17c), the Carrier attachment section (10) and the sensor attachment section (9, 9a, 9b) via the connecting section (17a, 17b, 17c), the connecting section (17a, 17b, 17c) having at least one torsion spring section (12a, 12b), the torsion spring section (12a, 12b) having an axis of rotation which is oriented orthogonally to the direction of relative movement, characterized in that the connecting section (17a, 17b, 17c) has two torsion spring sections (12a, 12b) with parallel axes of rotation.

Description

The invention relates to a method and a device for mounting a detection device for detecting properties of a measurement object on a carrier device. The invention also relates to an arrangement of the detection device and the proposed device.

Roughness sensors are known from the prior art, which are used to detect a roughness and/or a profile of a surface of a measurement object.

the DE 20 2008 011 629 U1 describes a roughness and/or profile measuring device with a measuring probe with a probe lever, which has a probe needle with a probe tip for detecting microscopic surface profiles of workpieces. The device includes a drive device, by means of which the wand can be moved along the surface profile of a workpiece. Also disclosed is a carriage carrying the probe. Also described is a skid of the probe touching a reference plane. The document discloses a drive device that has a motor that drives the carriage by means of a spindle. Alternatively, it is disclosed that the drive device comprises a cable or belt drive with a drive cable or drive belt, to which the probe or the carriage carrying the probe is fastened.

Further known is the DE 20 2013 102 043 U1 . This also discloses a roughness or surface microstructure profile measuring device for measuring the roughness or a surface microstructure profile of a measurement object surface of a measurement object. Here, the wand is pulled over the workpiece surface by means of a motor, the motor pushing a movable part, for example via a spindle, a cable pull, a belt or the like.

Also the DE 20 2013 102 045 U1 discloses such a roughness or surface microstructure profile gauge.

Further known is the DE 10 2006 011 904 A1 This publication discloses a measuring system for measuring a workpiece surface on a workpiece with at least one measuring probe that can be moved to the workpiece, the measuring probe having a probe body and at least one measuring sensor attached to the probe body. Also disclosed is a support device assigned to the measuring sensor with at least one support element, which can be advanced towards the workpiece surface with the aid of an infeed drive, for fixing the probe body on the workpiece in a measuring position by supporting the probe body on the workpiece surface. This publication also discloses that a probe tip is moved over a desired measurement path with the aid of a sensor drive and a roughness profile is recorded in the process.

the DE 10 2006 050 838 A1 discloses a measuring system for measuring a workpiece surface on a workpiece with at least one measuring probe that can be moved to the workpiece, which has a probe body and at least one measuring sensor attached to the probe body, wherein at least one measuring sensor is an optical measuring sensor and a device for filling a gap between the measuring sensor and the workpiece surface to be measured is provided in the measuring area with a liquid that is transparent to the measuring radiation.

the DE 10 2009 035 747 A1 discloses a roughness and/or profile measuring device with a measuring probe with a probe lever, which has a probe needle with a probe tip for detecting or measuring microscopic surface profiles of workpieces. Also disclosed is a drive device, preferably designed as a feed device, by means of which the wand can be moved along the surface profile of a workpiece. In this case, the drive device can comprise a drive cable or a drive belt, to which the probe or the carriage carrying the probe is fastened. Alternatively, the drive device has a motor which drives the carriage by means of a spindle.

Roughness sensors are usually set down on a surface of a workpiece to be measured, after which a moving part, e.g. with a probe element, is moved along a measurement path along the surface. Due to the high sensitivity of roughness sensors, it is desirable to carry out the setting down in such a way that a desired probing force is set in a desired position and/or with a desired orientation, but the sensor is not damaged.

Also known are coordinate measuring devices which, for example, use a feeler element to tactilely detect coordinates of a workpiece. That's how she describes it DE 10 2008 038 599 A1 a sensor joint for rotating a sensor, the sensor joint having a part which can be rotated about an axis of rotation and to which the sensor can be connected or is connected. Furthermore, the sensor joint has a fixed part, to which the rotatable part can be rotated relative to the axis of rotation. Next discloses the document sensors that touch objects to be measured mechanically, and sensors that as opti cal sensors are formed, these scanning surfaces by means of electromagnetic radiation, for example, or generating invasive measurement radiation that penetrates into the measurement object. The publication also discloses capacitive sensors.

the DE 101 31 160 A1 discloses a method for operating a coordinate measuring machine with a rotating-pivoting joint. The rotary pivot joint has a probe changing device which serves to hold a receiving plate with a probe pin, with the aid of which the workpiece is touched. However, no further details on the receiving plate are disclosed here.

the DE 10 2010 018 250 A1 discloses a method for measuring coordinates on workpieces on a coordinate measuring machine with a probe that contains a probe and a probe associated with the probe. The document also discloses an acceleration sensor which can be designed as a spring-mass system, it being possible to measure a change in an electrical capacitance as a result of the deflection during acceleration between a spring-mounted suspended part and a fixed reference electrode. Acceleration detection is used to minimize false detections.

Further known is the DE 10 2010 054 973 A1 , which discloses a method for measuring a measurement object. Here, a sensor is brought to the measurement object and an entity of the measurement object is touched. A measuring transducer is arranged at one end of a quill, which can have, for example, a feeler shaft and a feeler head at its end. Furthermore, a measuring sensor with a rotating and swiveling functionality is disclosed.

the DE 10 2010 017 119 A1 discloses non-destructive inspection systems, particularly inspection systems having self-aligning probe assemblies.

the DE 27 12 181 A1 discloses a measuring head for determining the spatial coordinates of any points of a workpiece that is moved relative to the measuring head, consisting of a part that is fixed to the housing and a part that is movable relative to the housing and carries one or more styli.

the US 5,491,904A discloses a tactile sensor for a position determination device.

the DE 20 2008 011 629 U1 discloses a roughness and/or profile measuring device with a measuring probe with a probe lever that has a probe needle for detecting or measuring microscopic surface profiles.

The technical problem arises of creating a device and a method for mounting a detection device for detecting properties of a measurement object on a carrier device and an arrangement of a detection device and such a device for mounting that enables improved placement of the detection device on a surface of the measurement object enable.

The technical problem is solved by the objects with the features of claims 1, 9 and 13. Further advantageous configurations of the invention result from the dependent claims.

It is a basic idea of the invention to create a holder which comprises at least one spring element, this holding arrangement enabling the detection device to be set down in a cushioned manner on the surface to be detected.

A device for holding a detection device on a carrier device is proposed. The proposed device is therefore used for fastening or suspending the detection device on the carrier device.

The detection device is a device for detecting properties of a measurement object, in particular properties of a surface of the measurement object. The measurement object can also be referred to as a test body. The detection device can also be referred to as a sensor and can be any device by means of which measurement signals can be generated. Thus, the detection device can include at least one measurement signal generator.

The detection device is preferably a device for detecting a roughness and/or a profile of the surface of the measurement object (roughness sensor).

The detection device can have a set-down direction and/or a probing direction. The placement direction describes a direction in which the detection device, in particular a support element of the detection device, is to be placed on the measurement object. The settling direction can, for example, describe a direction in a reference coordinate system of the detection device, which is to be aligned relative to the measurement object, in particular relative to a surface of the measurement object, to a desired direction or a direction from a predetermined direction interval in order to enable the detection of the properties by the detection device . For example, the settling direction can be defined in such a way that a vertical axis of symmetry of the detection device is orthogonal is oriented towards at least a portion of a surface of the measurement object when the detection device is placed on the at least one portion of the measurement object with the predetermined placement direction. The placement direction can also be determined as a function of a desired alignment of the detection device placed on the measurement object, in particular a desired alignment of a support element or a probe element of the detection device relative to the measurement object.

The probing direction describes a direction in which the detection device, in particular a probe element of the detection device, is to be aligned relative to the measurement object. The probing direction can, for example, describe a direction in a reference coordinate system of the detection device, which is to be aligned relative to the measurement object, in particular relative to a surface of the measurement object, to a desired direction or a direction from a predetermined direction interval in order to enable the detection of the properties by the detection device . For example, the probing direction can be defined in such a way that a scanning direction of the detection device, in particular a scanning direction of a scanning element of a detection device, is oriented orthogonally to at least one section of a surface of the measurement object when the detection device with the predetermined probing alignment relative to the at least one section of the surface of the Measurement object is aligned. The probing direction can also be determined as a function of a desired orientation of the detection device, in particular a desired orientation of a probe element of the detection device, relative to the measurement object.

In particular, the placement direction and the probing direction can be oriented in the same way.

In particular, the detection device can be a device for touching the surface of the measurement object. For this purpose, the detection device can comprise at least one probe element, for example a probe element designed with a probe tip. In this case, the probing direction can be oriented, for example, parallel to a central center line, for example a central axis of symmetry, of a section of the probe element that forms the probing tip.

The detection device can also be used for non-contact, in particular optical, probing of the surface of the measurement object. In this case, the probing direction can be oriented along a central beam direction of a light source of an optical sensor and/or along a central detection direction of an optical detector of the optical sensor.

The detection device can also include a capacitive sensor for detecting the surface of the measurement object. In this case, the probing direction can be oriented parallel to a main direction of an electric field generated by the capacitive sensor.

If there are several possible setting down or scanning directions of the detection device, the setting down or scanning direction can be a reference scanning or reference setting down direction. For example, the direction in which the reference is set down or the direction in which the reference is touched can be a direction with which the properties of the measurement object can be optimally detected by the sensor. Thus, the reference touching or reference dropping direction can be a predetermined direction depending on detection device specifications. The reference touching or reference setting direction can also be a predetermined direction from an interval of possible directions, in particular a central or middle direction from such an interval.

The device has at least one carrier fastening section for fastening the device to the carrier device. In this case, the carrier fastening section can have at least one fastening means for fastening the device to the carrier device, with the carrier device having a corresponding fastening means, for example. The carrier attachment portion can preferably be detachably attached to the carrier device. Various types of connection are conceivable here, in particular an at least partially form-fitting connection, at least partially a force-fitting connection. The proposed device is preferably screwed to the carrier device in the region of the carrier attachment section.

The device also has at least one sensor attachment section for attaching the device to the detection device or for attaching the detection device to the device. With regard to the sensor attachment section and the attachment of the device to the detection device, reference is made to the statements made above regarding the carrier attachment section.

According to the invention, the device has at least one spring element. The spring element is arranged and/or designed in such a way that the at least one carrier attachment section can be moved relative to the at least one sensor attachment section at least in or counter to a relative movement direction. The relative movement can take place against a spring force generated by the at least one spring element. The direction of relative movement can also be described as a compression or rebound direction.

Thus, a device for mounting is described, which has a carrier attachment section and a sensor attachment section as well as a spring element, wherein the spring element is arranged and/or designed in such a way that the carrier attachment section is movable relative to the sensor attachment section at least in or counter to a relative movement direction.

It is thus advantageously possible for the measurement object to be set down and/or touched in a cushioned manner in the direction of relative movement.

In a preferred embodiment, the relative movement direction is oriented parallel to the previously explained placement direction and/or probing direction of a detection device to be fastened to the sensor fastening section.

For example, the sensor attachment section can be designed and/or arranged in such a way that a placement direction and/or probing direction of a detection device attached or to be attached to the sensor attachment section is parallel to the relative movement direction.

The sensor attachment section, in particular the design of the sensor attachment section, can determine an alignment of a detection device to be attached or attached to the sensor attachment section relative to the device, in particular relative to the sensor attachment section. This means that a detection device can only be attached to the proposed device with a predetermined orientation relative to it, in particular relative to the sensor attachment section. The sensor attachment section can therefore be used to determine an alignment of a detection device attached or to be attached to the device relative to the proposed device, in particular relative to the sensor attachment section, in such a way that the setting down direction and/or probing direction of a detection device attached or to be attached to the sensor attachment section is parallel to the relative direction of movement is.

Of course, the spring element can also be arranged and/or designed in such a way that a relative movement between the carrier attachment section and the sensor attachment section is also possible in other directions that differ from the probing direction.

In particular, the sensor attachment section can be arranged and/or designed in such a way that the detection device can be attached to the proposed device in such a way, in particular exclusively in such a way that the relative movement direction is oriented parallel to the probing direction of the detection device.

The proposed device results in an advantageous manner in that the detection device can be attached to the carrier device in a spring-loaded manner, at least in or counter to its setting-down and/or probing direction. This advantageously allows, for example, the detection device to be set down on a surface of the measurement object with a higher positioning and/or orientation tolerance, since there is a deviation from an ideal positioning and/or orientation, in which, for example, the detection device touches the surface with little or no force the relative movement can be compensated.

Furthermore, the proposed device makes it possible for the detection device to be placed on the surface with a desired placement and/or probing force. In this case, the setting force refers to a force acting in the setting direction, which is exerted by the detection device, for example via at least one support element of the detection device, on the surface of the measurement object when the detection device is in a desired setting position and/or with a desired setting orientation on the measuring object by the carrier device Measurement object is sold or arranged.

Accordingly, the probing force refers to a force acting in the probing direction, which is exerted by the detection device, for example a probe element of the detection device, on the surface of the measurement object when the detection device is positioned by the carrier device in a desired probing position and/or with a desired probing orientation relative to the surface is. In this case, the settling or probing force can be provided at least partially, preferably completely, by a spring force of the at least one spring element. This spring force can be generated, for example, if the spring element is compressed in the desired position and/or orientation of the detection device. In this case, the settling and/or contact force can be dependent in particular on a deflection of the spring element. A deflection refers here to a relative translational movement or relative rotational movement between the ends of the spring element.

In this case, the settling force can be equal to the probing force.

In a further embodiment, the device comprises a device for detecting a set-down and/or probing force. In this case, the device can generate an electrical signal which represents a set-down and/or contact force, in particular a direction and a magnitude of the set-down and/or contact force. The device can be designed as a force sensor, for example. Alternatively, however, the device can also comprise an (angular) position sensor, with a relative translational movement or relative rotational movement between the ends of the spring element being able to be detected by means of the (angular) position sensor. This relative translational or rotational movement can also be described as compression or rebound. In this case, the device can further comprise an evaluation device that determines the spring force (movement-dependent detection of the settling and/or contact force) as a function of the relative translational movement or relative rotational movement and properties of the spring element, in particular a spring constant. Depending on this spring force, the settling and/or probing force can in turn be determined.

The device can be connected to other devices in terms of signals and/or data technology. For this purpose, the device can have suitable interfaces, for example. In this way, the setting down force and/or contact force or a signal, as a function of which the setting down force and/or contact force can be determined, can be transmitted to internal evaluation devices.

For example, a position and/or orientation of the carrier device can be set, in particular regulated, as a function of the setting down and/or probing force.

This advantageously results in the detection device being able to be set down on the surface of the measurement object with a set-down and/or probing force that is set as precisely as possible.

In a further embodiment, the device for detecting a set-down and/or contact force comprises a device for detecting a deflection in or counter to the direction of relative movement. In this case, the deflection refers to a relative translational movement between the ends of the spring element. The movement-dependent detection of the setting down force and/or contact force has already been described above. This advantageously results in the simplest possible detection of the setting down force and/or contact force.

Furthermore, the device comprises at least one connection section, the carrier attachment section and the sensor attachment section being connected, in particular mechanically, via the connection section. The connecting section can also be referred to as a connecting element.

In an initial state of the connecting section, the connecting section can extend orthogonally to the direction of relative movement, in particular to the probing direction. The initial state is present in particular when the at least one spring element is in an initial position, that is to say is not compressed or rebounded. Thus, the initial state is present in particular if a detection device is attached to the proposed device, but no setting down and/or probing force is generated. In this case, the at least one spring element can be designed, in particular prestressed, in such a way that the orthogonal alignment of the connecting section to the relative direction of movement results even when a weight is exerted on the proposed device by the detection device. The initial state of the at least one spring element can thus designate a prestressed state or a non-prestressed state.

The connecting section has at least one torsion spring section. In this case, the at least one spring element can be designed, for example, as a torsion spring element or torsion spring element. The torsion spring section has an axis of rotation. For example, opposite ends of the torsion spring portion may be rotatable relative to each other about the axis of rotation.

The axis of rotation is oriented orthogonally to the direction of relative movement, in particular to the setting down and/or probing direction. The axis of rotation can also be oriented orthogonally to a plane in which a straight line defined by the direction of relative movement and a central center line, e.g. a central axis of symmetry, of the connecting section are arranged or run.

The axis of rotation can also be oriented orthogonally to the direction in which the connecting section extends in the initial state. In this case, the direction of extension can in particular describe a direction along which a central center line, for example a central axis of symmetry, of the connecting section extends in the initial state. In this case, the connecting section can in particular have a rectilinear course in the initial state.

In this case, the relative movement of the carrier attachment section and the sensor attachment section explained above is or against the relative direction of movement by a rotation about the axis of rotation and thus by the torsion spring section. In the proposed embodiment, the at least one connecting section can therefore be oriented parallel to the surface to be scanned or approximately parallel to the surface. This advantageously results in the least possible impairment of the positionability of the detection device by the proposed device.

According to the invention, the connecting section has two torsion spring sections with parallel axes of rotation. In this case, the torsion spring sections can be arranged adjacent to one another along the center line of the connecting section, in particular adjacent to one another at a predetermined distance.

This advantageously results in little or no change in the relative orientation between the carrier attachment section and the sensor attachment section when the detection device is set down on the surface of the measurement object, in particular with a desired set-down and/or probing force.

In a further embodiment, the device comprises two connecting sections arranged one above the other in the direction of relative movement, with the axes of rotation of the torsion spring sections of the at least two connecting sections being oriented in parallel. The device can thus have two support arms, each with at least one, but preferably each with at least two, torsion spring sections. This advantageously results in improved attachment of the detection device to the carrier device, with a change in the relative orientation between the carrier attachment section and the sensor attachment section being prevented or minimized when they are placed on the workpiece, in particular with a predetermined placement and/or probing force.

In a further embodiment, the device comprises at least two connecting sections arranged next to one another along an axis of rotation of a torsion spring section, with the axes of rotation of the torsion spring sections of the at least two connecting sections being oriented in parallel. In this embodiment, the detection means can be arranged between the connecting portions adjacent along the axis of rotation. The device preferably has two sensor attachment sections, each sensor attachment section being connected to a common carrier attachment section or to a respective carrier attachment section via two connection sections arranged one above the other in the direction of relative movement. In this case, the detection device can be arranged between the two sensor attachment sections.

This advantageously results in the most stable possible suspension of the detection device on a carrier device. The at least two sensor fastening sections, the at least one carrier fastening section and the connecting sections thus form a suspension frame which enables spring-loaded suspension of the detection device on the carrier device.

In a preferred embodiment, the at least one torsion spring section is designed as a flexure joint. In this case, the flexure joint can permit a relative movement, in particular a relative rotational movement, between two rigid body regions by means of a bend.

This advantageously results in the simplest possible design of the proposed device for holding the detection device.

Also proposed is an arrangement comprising a detection device for detecting properties of a measurement object, in particular properties of a surface of the measurement object. The arrangement further comprises a device according to one of the previously explained embodiments.

The detection device can have a setting down and/or a touching direction. The device can be fastened to a carrier device via at least one carrier fastening section. Furthermore, the device is attached to the detection device via at least one sensor attachment section.

The device also has at least one spring element, the spring element being arranged and/or designed in such a way that the at least one carrier attachment section can be moved relative to the at least one sensor attachment section at least in or counter to a relative movement direction. In particular, the direction of relative movement can be oriented parallel to a setting down and/or probing direction of the detection device.

In a further embodiment, the arrangement comprises a carrier device, the device being attached to the carrier device via the at least one carrier attachment section.

The carrier device can designate a device for setting a position and/or orientation of the detection device.

The carrier device can be, for example, a robot, a machine tool or another carrier device that is preferably used in production processes. The carrier device can also be referred to as a positioning device.

In a further embodiment, the carrier device has a rotary/pivoting joint, the device being fastened to the rotary/pivoting joint via the at least one carrier attachment section. A rotating and swiveling measuring head system is thus provided.

As already explained in more detail at the outset, the rotating/pivoting joint can have a part that can be rotated about an axis of rotation, with the device being attached to this rotatable part via the at least one carrier attachment section. Furthermore, the rotary pivot joint can have a fixed part, relative to which the rotatable part can be rotated about the axis of rotation. The stationary part can also be rotatable about a further axis of rotation.

The rotating-pivoting joint thus designates a joint which enables relative rotation between the ends of the joint about at least one axis of rotation. Preferably, the joint enables a relative rotation about at least two, preferably three, more preferably orthogonally oriented axes of rotation.

In a further embodiment, the carrier device is designed as a coordinate measuring machine. In this case, the coordinate measuring machine can be a coordinate measuring machine in a column or portal design. The proposed device can be attached to one or a rotating-pivoting joint of the coordinate measuring machine. The attachment can be a rigid attachment. It can also be attached via a suitable interchangeable interface.

Also proposed is a method for mounting a detection device for detecting properties of a measurement object on a carrier device by means of a device according to one of the previously explained embodiments. In this case, at least one carrier fastening section of the device is fastened to the carrier device. Furthermore, at least one sensor attachment portion of the device is attached to the detection device. Furthermore, the fastening takes place in such a way that the at least one carrier fastening section can be moved relative to the at least one sensor fastening section at least in or counter to a relative movement direction. In particular, the direction of relative movement can be oriented parallel to a setting down and/or probing direction of the detection device. Furthermore, the fastening can take place in such a way that the relative movement is made possible by the at least one spring element.

This advantageously results in the detection device being attached to the carrier device in such a way that the detection device can be set down on a surface of the workpiece to be detected with a desired orientation and a desired probing force.

A method is also described in which a probing force is detected, with which the detection device is positioned on the surface. The probing force can be used for position and/or orientation control, e.g. B. the carrier device can be used.

In particular, the detection device can be a device for detecting a roughness and/or a profile of a surface of a measurement object. The roughness can denote an unevenness of a surface height.

The detection device can comprise a static part. In this context, the static part designates a part of the detection device that is arranged in a stationary manner during the detection, in particular is arranged on a surface of the measurement object. The static part can in turn be attached to the sensor attachment section. Furthermore, the detection device can comprise a movable part. In this case, the movable part designates a part that is moved along the surface in order to record the roughness and/or the profile, in particular is moved with a linear movement. In the following, the term stator is also used for the static part and the term rotor for the moving part.

Furthermore, the detection device can include at least one guide device for guiding a linear movement of the movable part and a device for generating drive energy for driving the movable part in or against a desired direction of movement. The at least one guide device can include guide means or elements on the stator side and guide means or elements on the rotor side. In particular, the at least one guide device can form a linear guide, with a linear guide enabling a translational movement of the runner that is as friction-free as possible while maintaining a straight direction of movement, i.e. ent long a linear path, guaranteed. The at least one guide device is preferably designed as a sliding guide. Of course, however, other forms of linear guides are also conceivable, for example linear roller guides or roller designs. The guide device is preferably designed in such a way that the Abbe principle is observed.

In this context, the device for generating drive energy refers to any device that can transmit drive energy to the moving part via an energy transmission means that will be explained in more detail below. In particular, the device for generating drive energy can be embodied as a device for generating drive force. The device for generating the drive energy can be arranged at least partially on the stator.

At least part of a probe system for detecting the roughness and/or the profile is arranged on the moving part. The stylus system designates a total of elements for generating an output signal, in particular an electrical output signal, representing the roughness and/or the profile.

The probe system can include at least one probe element for scanning the surface. The button system can be designed as a touching button system. The button system can e.g. B. include a button and / or a button element, such as a probe ball, probe tip or needle. In this case, part of the stylus system touches the surface during roughness and/or profile acquisition.

Alternatively, the probe system can also be designed as a non-contact probe system, which enables non-contact, in particular optical, detection of the roughness and/or the profile.

The probe system preferably comprises the probe element and a probe arm, the probe element being fastened or mounted on the probe arm, in particular on a free end of the probe arm. The probe arm can also be referred to as a probe lever.

In the case of a contacting probe system, the probe arm can be movably fastened to the runner, in particular pivoted about an axis of rotation.

Furthermore, the probe system can include a measured value transmitter or measured value generator that generates an output signal, depending on which the roughness and/or the profile can be determined. In the case of a touching touch element, the transmitter can, for example, generate an output signal as a function of a deflection of the touch element. For this purpose, the measured value transmitter can be designed as a movement or position sensor, for example. For example, the sensor can be designed as an optical, capacitive, inductive or magnetic sensor, the movement and/or position of the feeler element being able to be detected directly or indirectly by means of the sensor. A magnetic encoder can be designed as a magnetic resonance encoder. It is also conceivable that the sensor detects a rotation of the pivotally mounted probe arm, the deflection of the probe element being able to be detected as a function of a length of the probe arm and the detected angle of rotation.

The entire probe system, but in particular the probe element, is preferably arranged on the movable part, ie the runner.

Furthermore, the drive energy explained above can be transferred to the movable part via at least one energy transfer means. The at least one energy transmission means in this case designates the means by which the driving force acting on the movable part is provided. Energy is thus transmitted from the device for generating the drive energy to the movable part at least partially via the energy transmission means. The energy can be transmitted from the device for generating the drive energy to the moving part purely mechanically, at least partially mechanically or purely non-mechanically. However, the energy transmission means as part of the transmission path can only enable mechanical transmission or non-mechanical transmission. The at least one energy transmission means thus forms part of a transmission path for the drive energy from the device for generating the drive energy to the movable part, in particular the last part of the transmission path in a direction from the device for generating the drive energy to the movable part. The at least one energy transmission means here includes all elements that are used to transmit the drive energy generated by the device for generating the drive energy to the movable part and/or to provide a drive force acting on the movable part. Thus, an energy transmission means can also comprise an energy conversion element which, for example, converts generated and possibly transmitted drive energy into a drive force. Here, the at least one energy transfer means between a movable element of the device for generating the drive energy, for example an output shaft of an actuator, and the movable part can be arranged.

The at least one energy transfer device can be designed as a force transfer device, for example.

Furthermore, the energy transmission means is a mechanical or a non-mechanical energy transmission means, wherein a mechanical energy transmission means is designed in such a way that during an energy transmission to the movable part, at least in a direction different from the desired direction of movement, no force acts or cannot act on the movable part. A mechanical energy transfer takes place through a mechanical energy transfer means, and a non-mechanical energy transfer takes place through a non-mechanical energy transfer means.

In the case of mechanical energy transmission, for example, the energy transmission means can be in the form of means for mechanical power transmission, e.g. shafts, gears. Means for mechanical power transmission can be mechanical components in particular. In the case of purely mechanical energy transmission, for example, only means for mechanical power transmission can be used. In this case, the at least one energy transmission means can be designed in such a way that a purely mechanical transmission of forces in at least one direction that differs from the desired direction of movement is not possible. This can mean that a force that is directed in the at least one direction that differs from the desired direction of movement cannot be mechanically transmitted via the at least one energy transmission means. If at least part of the drive energy or the entire drive energy is transmitted mechanically, no force acts on the movable part at least in a direction that differs from the desired direction of movement.

In summary, the result is that when energy is transmitted, in particular purely mechanically, no force is transmitted in at least one direction that differs from the desired direction of movement and/or does not act on the movable part.

In the case of at least partial mechanical transmission of the drive energy, the at least one energy transmission means is preferably designed in such a way that when drive energy is transmitted, a force is transmitted exclusively in or against a direction of movement and/or acts on the movable part.

In other words, this means that when the drive energy is generated, in particular when a drive force is generated, by the device for generating the drive energy, an, in particular purely, mechanical transmission of the energy, in particular the force, is not possible or is only possible in such a way that no force acts on the runner in the at least one direction that differs from the desired direction of movement. In the case of one, in particular purely mechanical transmission, e.g. B. a force component that is directed in the direction different from the desired direction of movement can be filtered out.

This advantageously allows a reduction of forces that are not oriented in the direction of movement with an at least partial, but in particular purely, mechanical transmission of the drive energy. For example, transverse forces can thus be effectively minimized. This in turn increases the accuracy of the detection, since the force minimization explained above does not result in any deviation from the desired linear movement and thus from a desired measurement path.

However, the proposed device can also be used for non-mechanical, in particular purely non-mechanical, energy transmission. This means, for example, that a magnetic or electromagnetic transmission of forces is possible. In this case, the at least one energy transmission means can be designed in such a way that such a non-mechanically transmitted drive energy is converted into a drive force acting on the movable part, which acts in or against the direction of movement.

In the case of at least partial non-mechanical energy transmission, the energy transmission means can be designed as a means for non-mechanical energy or force transmission. In this case, the energy transmission means can, for example, enable a magnetic or electromagnetic transmission of forces. In this case, the at least one energy transmission means can be designed in such a way that such a non-mechanically transmitted drive energy is converted into a drive force acting on the movable part, which acts in or against the direction of movement.

The non-mechanical energy transmission means can also be designed in such a way that no force acts on the movable part during energy transmission, at least in a direction that differs from the desired direction of movement. However, this is not mandatory. In the case of non-mechanical energy transmission, it cannot be ruled out that In addition to the energy transfer, there are also forces that act and/or are transferred in one or more, in particular all, directions different from the direction of movement.

Thus, embodiments are also conceivable in which drive energy is transmitted partly mechanically, e.g. via mechanical energy transmission elements, and non-mechanically, e.g. via non-mechanical energy transmission elements.

If the drive energy is not mechanically transmitted or is not completely transmitted mechanically, then forces oriented in a direction deviating from the direction of movement are not mechanically transmitted, and this also improves a movement of the moving part along the desired measurement path.

Of course, the detection device can also include a housing, in which case at least part of the detection device can be arranged inside the housing. The housing can, for example, be part of the stator or be attached to the stator.

As explained above, the detection device can have at least one support element for setting down the static part on a measurement object. In the removed state, the static part is mounted on the measurement object via the at least one support element. The static part can thus be in mechanical contact with the measurement object, in particular a surface of the measurement object, via the at least one support element. In this case, the detection device can exclusively comprise a support element for mounting the static part on a workpiece.

The support element can be used to set a reference distance between the detection device, in particular a button and/or feeler element of the detection device, and the surface. The at least one support element can be attached to the detection device, in particular to the static part, in a mechanically detachable manner. As a result, support elements with different geometries can be attached to the static part in an advantageous manner. This advantageously allows the static part to be mounted on the workpiece in a way that is adapted to different surface topologies. For example, the support element can have a flat support surface. Alternatively, a support element can have a convex or concave support surface. As a further alternative, a support element can have a stepped support surface. Thus, in general, a support element is described that has a support surface that is adapted to a surface topology of the workpiece with the surface to be detected. In this case, the support surface describes a part of a surface of the support element which, in the removed state, is in mechanical contact with the measurement object, in particular a surface of the measurement object. Thus, the support element with a convex support surface can preferably be used for support on an outer lateral surface of a cylinder. A concave support surface can be used for support on the inner surface of a hollow cylinder. Thus, the at least one support element can also be used as a centering or positioning aid in relation to the workpiece to be detected, in particular together with the probe system used.

• 1 ein schematisches Blockschaltbild einer erfindungsgemäßen Anordnung,
• 2 eine perspektivische Ansicht einer erfindungsgemäßen Anordnung,
• 3 eine Seitenansicht der in 2 dargestellten Anordnung und
• 4 eine Draufsicht auf die in 2 dargestellte Anordnung.

The invention is explained in more detail using an exemplary embodiment. The figures show:

• 1 a schematic block diagram of an arrangement according to the invention,
• 2 a perspective view of an arrangement according to the invention,
• 3 a side view of the in 2 shown arrangement and
• 4 a top view of the in 2 arrangement shown.

1 shows a schematic block diagram of an arrangement 1 according to the invention. The sensor 2 comprises a probe arm 3 and a probe tip 4 which is arranged at a free end of the probe arm 3 . The probe tip 4 is conical in this case. In 1 shows that the sensor 2 has a support element 5 and is placed on a surface 6 of a measurement object (not shown). Here the probe tip 4 rests on the surface 6 .

In this case, the probe tip 4 can be moved along a longitudinal axis x along a preferably linear measurement path. Here, the probe tip 4 and thus also the probe arm 3 can be deflected. The deflection takes place at least partially in a vertical direction, which is indicated by an arrowhead of a vertical axis z. Also shown is a center line 7 of the probe tip 4, with a probing direction AR of the sensor 2 being oriented along the center line 7 and opposite to the previously explained vertical direction when the sensor 2 is not deflected. The probing direction AR can also be oriented perpendicular to the surface 6 to be detected.

The probing direction AR here corresponds to a settling direction of the sensor 2, the Settling direction is oriented perpendicular to a contact surface 19 of the sensor 2. In this case, the contact surface 19 designates a surface which is in contact with the surface 6 of the measurement object when the sensor 2 is set down.

The arrangement 1 also includes a device 8 for holding the sensor 2. The device 8 has a sensor attachment section 9, the sensor 2, in particular a housing of the sensor 2, being attached to the sensor attachment section 9. The device 8 also has a carrier attachment section 10 , with a carrier device 11 being attached to the carrier attachment section 10 .

A first spring element, which is embodied as a first torsion spring section 12a, and a further spring element, which is embodied as a second torsion spring section 12b, are shown schematically. The spring elements are designed here as solid joints. The torsion spring sections 12a, 12b are each designed in particular as a narrowing of the connecting section 13

Here, the spring elements make it possible for the carrier attachment section 10 to be movable relative to the sensor attachment section 9 in or counter to a relative movement direction. In the exemplary embodiment shown, the direction of relative movement is oriented parallel to the probing direction AR of sensor 2 . In particular, the spring elements 12a, 12b thus allow a relative movement with a relative direction of movement along the vertical direction z.

In 1 it is shown that the carrier device 11 comprises a rotating/pivoting joint 14 and a coordinate measuring machine 15 . The rotating/pivoting joint 14 can be fastened, for example, to a free end of a quill (not shown) of the coordinate measuring device 15 .

In 2 a perspective view of an arrangement 1 according to the invention is shown. The arrangement 1 comprises a sensor 2, only a sensor housing 16 and no further elements of the sensor 2 being shown. Also shown is a vertical axis z, a longitudinal axis x and a lateral axis y oriented orthogonally to both axes x, z. A device for holding the sensor 2 has a first connecting section 17a and a further connecting section 17b. A first sensor attachment section 9a is connected to a carrier attachment section 10 via the connection sections 17a, 17b. Each connecting section 17a, 17b has a first torsion spring section 12a and a further torsion spring section 12b, which are each designed as solid-state joints. The first sensor fastening section 9a is connected to a rigid intermediate section 18a, 18b via the first torsion spring section 12a. The rigid intermediate section 18a, 18b is connected to the carrier attachment section 10 via the respective second torsion spring section 12b. The connecting sections 17a, 17b are here in the probing direction AR (see 1 ) and thus arranged one above the other in particular in the vertical direction. The axes of rotation of the torsion spring sections 12a, 12b extend parallel to the lateral axis y.

When the sensor 2 is set down on the surface 6, a relative movement between the sensor 2 and a rotating/pivoting joint 14 is made possible by the connecting sections 17a, 17b shown. In this case, only one fastening plate of the pivoting joint 14 is shown.

The rotary pivot joint 14 enables rotation about the longitudinal axis x and the vertical axis z. The rotating/pivoting joint can preferably also allow rotation about the lateral axis y.

In 3 FIG. 1 is a side view of assembly 1. FIG 2 shown. In contrast to 2 a support element 5 of the sensor 2 is shown here, with a static part of the sensor 2 being arranged or set down on the surface 6 by means of the support element 5 . Also shown is a feeler element designed as a feeler tip 4 which is movable along the longitudinal axis x and is used for touching or scanning the surface 6 . as well as in 2 a first and a second connecting section 17a, 17b are shown, each comprising a first and a further torsion spring section 12a, 12b and a rigid intermediate section 18a, 18b. A common sensor attachment section 9a is mechanically connected to a carrier attachment section 10 via connection sections 17a, 17b.

4 shows a plan view of the in 2 Arrangement 1 shown. Here, in particular, a third connecting section 17c is shown, which also includes a first torsion spring section 12a, a second torsion spring section 12b and a rigid intermediate section 18c. A second sensor attachment section 9b is connected to the common carrier attachment section 10 via the third connection section 17c. It is shown here that the first connection section 17a is spaced apart from the third connection along the lateral axis y and thus also along the axes of rotation of the torsion spring sections 12, 12b tion section 17c is arranged. Thus, the third connection section 17c is arranged adjacent to the first connection section 17a along the axes of rotation of the rotary sections 12a, 12b. In this case, the sensor 2 is arranged between the first sensor attachment section 9a and the second sensor attachment section 9b.

In 4 not shown is a fourth connection section, which in turn can have a first and a second torsion spring section and a rigid intermediate section and can be arranged in the vertical direction below the third connection section 17c. Here, the fourth connecting section also connects the second sensor attachment section 9b to the common carrier attachment section 10. The sensor 2 is thus suspended in a spring-loaded frame, which prevents a relative movement between the sensor 2 and the carrier device 14 along the vertical axis z (see 2 ) allows.

A probing force of the sensor 2 on the surface 6 can also be adjusted by means of the torsion spring sections 12a, 12b of the connecting sections 17a, 17b, 17c.

Claims (13)

Device for mounting a detection device (2) for detecting properties of a measurement object on a carrier device (11), the device (8) having at least one carrier fastening section (10) for fastening the device (8) to the carrier device (11), the The device (8) has at least one sensor attachment section (9, 9a, 9b) for attaching the device (8) to the detection device (2), the device (8) having at least one spring element, the spring element being arranged and/or designed in this way that the at least one carrier attachment section (10) is movable relative to the at least one sensor attachment section (9, 9a, 9b) at least in or counter to a direction of relative movement, the device (8) comprising at least one connecting section (17a, 17b, 17c), the Carrier attachment section (10) and the sensor attachment section (9, 9a, 9b) via the connecting section (17a, 17b, 17c), the connecting section (17a, 17b, 17c) having at least one torsion spring section (12a, 12b), the torsion spring section (12a, 12b) having an axis of rotation which is oriented orthogonally to the direction of relative movement, characterized in that the connecting section (17a, 17b, 17c) has two torsion spring sections (12a, 12b) with parallel axes of rotation. device after claim 1 , characterized in that the detection device (2) has a placement direction and/or contact direction (AR), the relative movement direction being oriented parallel to the placement direction and/or contact direction (AR) of a detection device (2) to be attached to the sensor attachment section. device after claim 1 or 2 , characterized in that the device (8) comprises a device for detecting a settling and / or probing force. device after claim 3 , characterized in that the device for detecting a set-down and/or probing force comprises a device for detecting deflection in or counter to the direction of relative movement. Device according to one of the preceding claims, characterized in that the device (8) comprises two connecting sections (17a, 17b) arranged one above the other in the direction of relative movement, the axes of rotation of the torsion spring sections (12a, 12b) of the at least two connecting sections (17a, 17b) being oriented in parallel . Device according to one of the preceding claims, characterized in that the device (8) comprises at least two connecting sections (17a, 17c) arranged next to one another along an axis of rotation of a torsion spring section (12a, 12b), the axes of rotation of the torsion spring sections (12a, 12b) of the at least two Connecting sections (17a, 17c) are oriented in parallel. Device according to one of the preceding claims, characterized in that the at least one torsion spring section (12a, 12b) is designed as a flexure joint. Device according to one of the preceding claims, characterized in that the detection device (2) is a device for detecting a roughness and/or a profile of the surface of the measurement object. Arrangement comprising a detection device (2) for detecting properties of a measurement object and a device (8) according to one of Claims 1 until 8th , wherein the device (8) can be fastened to a carrier device (11) via at least one carrier fastening section (10), the device (8) being fastened to the detection device (2) via at least one sensor fastening section (9a, 9b, 9c), wherein the device (8) has at least one spring element has, wherein the spring element is arranged and/or designed in such a way that the at least one carrier attachment section (10) is movable relative to the at least one sensor attachment section (9, 9a, 9b) at least in or counter to a relative movement direction, the device (8) having at least one Connection section (17a, 17b, 17c), wherein the carrier attachment section (10) and the sensor attachment section (9, 9a, 9b) are connected via the connection section (17a, 17b, 17c), the connection section (17a, 17b, 17c) at least has a torsion spring section (12a, 12b), the torsion spring section (12a, 12b) having an axis of rotation which is oriented orthogonally to the direction of relative movement, characterized in that the connecting section (17a, 17b, 17c) has two torsion spring sections (12a, 12b) with parallel Has axes of rotation. arrangement according to claim 9 , characterized in that the arrangement (1) further comprises a carrier device (11), wherein the device (8) via the at least one carrier attachment section (10) is attached to the carrier device (11). arrangement according to claim 10 , characterized in that the carrier device (11) has a rotary pivot joint (14), the device (8) being attached to the rotary pivot joint (14) via the at least one carrier attachment section (10). arrangement according to claim 10 or 11 , characterized in that the carrier device (11) is designed as a coordinate measuring device. Method for mounting a detection device (2) for detecting properties of a measurement object on a carrier device (11) by means of a device (8) according to one of Claims 1 until 8th , wherein at least one carrier attachment section (10) of the device (8) is attached to the carrier device (11), wherein at least one sensor attachment section (9a, 9b, 9c) of the device (8) is attached to the detection device (2), the attachment takes place in such a way that the at least one carrier attachment section (10) is movable relative to the at least one sensor attachment section (9a, 9b, 9c) at least in or counter to a relative movement direction, the device (8) comprising at least one connecting section (17a, 17b, 17c), wherein the carrier attachment section (10) and the sensor attachment section (9, 9a, 9b) are connected via the connection section (17a, 17b, 17c), the connection section (17a, 17b, 17c) having at least one torsion spring section (12a, 12b), wherein the torsion spring section (12a, 12b) has an axis of rotation which is oriented orthogonally to the direction of relative movement, characterized in that the V connection section (17a, 17b, 17c) has two torsion spring sections (12a, 12b) with parallel axes of rotation.

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