DE102014201417B4 - Device and method for detecting a roughness and / or a profile of a surface of a test object - Google Patents

Abstract

Device for detecting a roughness and / or a profile of a surface (2) of a measuring object, comprising a static part (3), a moving part, at least one guiding device (10) for guiding a linear movement of the moving part and a device for generating a drive energy for driving the movable part, wherein at least a part of at least one probe system for detecting the roughness and / or the profile is arranged on the movable part, wherein via at least one energy transmission means the drive energy is transferable to the movable part, wherein the at least one energy transfer means is a mechanical Energy transfer means is, wherein the mechanical energy transfer means is designed such that during an energy transfer to the movable part at least in a direction different from the desired direction of movement no force acts on the movable part, wherein the at least one e energy transmission means is designed as a mechanical power transmission means, wherein a force is transmitted via a single contact point between a drive device side contact element (8) and a contact element (12) of the movable part, characterized in that the drive device side contact element (8) has a rounded contact surface and / or the contact element (12) of the movable part has a rounded contact surface, wherein the contact surfaces touch each other in the contact point for transmitting power.

Description

The invention relates to a method and a device for detecting a roughness and / or a profile of a surface of a test object.

In a variety of industrial applications, it is desirable to detect microscopic surface profiles, e.g. B. to make statements about a quality of a surface finish.

The DE 20 2008 011 629 U1 describes a roughness and / or profile measuring device with a probe with a sensing lever, which has a stylus with a stylus tip for detecting microscopic surface profiles of workpieces. The device comprises a drive device by means of which the stylus is movable along the surface profile of a workpiece. Further disclosed is a slide carrying the probe. Further described is a runner of the probe, which touches a reference plane. The document discloses a drive device which has a motor which drives the carriage by means of a spindle. Alternatively, it is disclosed that the drive device comprises a cable or belt drive with a drive cable or drive belt, on which the probe or the carriage carrying the probe is attached. However, the document discloses only force transmission means for transmitting the driving force, which allow a mechanical transmission of forces in both the direction of movement, but also in all directions different from the direction of movement. This is particularly the case because the carriage and a moving part of the means for generating the driving force are mechanically fixed.

Next is known the DE 20 2013 102 043 U1 , This also discloses a roughness or surface microstructure profile measuring device for measuring the roughness or a surface microstructure profile of a measurement object surface of a measurement object. Herein, the stylus is pulled by a motor over the workpiece surface, the motor z. B. a spindle, a cable, a belt or the like pushes a movable part.

Also the DE 20 2013 102 045 U1 discloses a roughness or surface microstructure profile measuring device designed in this way.

Next is known the DE 10 2006 011 904 A1 This document discloses a measuring system for measuring a workpiece surface on a workpiece with at least one measuring probe which can be moved to the workpiece, wherein the measuring probe has a probe body and at least one measuring sensor attached to the probe body. Further disclosed is a support device associated with the measuring sensor with at least one, with the aid of a Zustellantriebs deliverable towards the workpiece surface, supporting member for fixing the probe body to the workpiece in a measuring position by supporting the probe body on the workpiece surface. This document also discloses that a stylus tip is moved over a desired measuring path with the aid of a sensor drive and a roughness profile is recorded.

The DE 10 2006 050 838 A1 discloses a measuring system for measuring a workpiece surface on a workpiece having at least one probe to be moved to the workpiece, having a probe body and at least one probe attached to the probe body, wherein at least one probe is an optical probe and means for filling a gap between the probe and the workpiece surface to be measured is provided in the measuring area with a liquid transparent to measuring radiation.

The DE 10 2009 035 747 A1 discloses a roughness and / or profile measuring device with a probe with a feeler lever, which has a stylus with a stylus tip for detecting or measuring microscopic surface profiles of workpieces. Further disclosed is a, preferably designed as a feed device, drive device by means of which the wand is movable along the surface profile of a workpiece. In this case, the drive device may comprise a drive cable or a drive belt, on which the probe or the carriage carrying the probe is attached. Alternatively, the drive device has a motor which drives the carriage by means of a spindle.

The DE 199 29 648 A1 discloses a drive assembly for a measuring instrument having a body and a movable member that is movable relative to the body, wherein a measurement of an object to be measured is performed by movement of the movable member, comprising: drive and guide means attached to the body of the body Measuring instrument is mounted, wherein the drive and guide means comprises a drive cylinder having a piston received therein for axial movement, wherein the drive and guide means is operable so that the movable member is movable in synchronism with the axial movement of the piston; hydraulic fluid control means disposed at a location remote from the body of the meter for supplying hydraulic fluid to the drive cylinder of the drive and guide means to provide for the axial movement of the piston of the drive cylinder.

The JP 2006-313 102 A discloses a shape measuring system comprising a probe in contact with an object to be measured having a measuring part, a guide part for movably supporting the probe in an X-axis direction, a driving part for moving the probe relative to the object to be measured by moving the guide part in the X-axis direction, a driving force transmission part for transmitting force from the driving part to the guide part through a pair of impact absorbing elements.

In all of the above-mentioned references there is the problem that due to the coupling between the means for generating the driving force and the movable part undesirable forces, in particular not acting in or against the desired direction of movement forces can be transmitted to the movable part. These forces can adversely affect measurement accuracy.

The technical problem arises of providing a device for detecting a roughness and / or a profile of a surface of a measurement object and a corresponding method, which increase the accuracy of the detection.

The solution of the technical problem results from the objects with the features of claims 1 and 12. Further advantageous embodiments of the invention will become apparent from the dependent claims.

A device for detecting a roughness and / or a profile of a surface of a measurement object is proposed. The roughness here may designate a roughness of a surface height.

The device comprises a static part. In this case, the static part designates a part of the device which is arranged in a stationary manner during the detection, that is to say during a detection process, in particular on a surface of the measurement object.

The static part may in turn be attached to a positioning device which allows adjustment of a position and / or orientation of the proposed device. The positioning device can be, for example, a robot, a machine tool or another positioning device, which is preferably used in production processes. Also, the positioning device may be a coordinate measuring machine, wherein the proposed device z. B. is attached to a quill or a rotary-pivot joint of the coordinate measuring machine. The positioning device can also be referred to as a carrier system.

Furthermore, the proposed device comprises a movable part. In this case, the movable part designates a part which is moved along the surface for detecting the roughness and / or the profile, in particular is moved with a linear movement.

In the following, the term stator is used for the static part and the term runner for the moving part.

Furthermore, the device comprises at least one guide device for guiding a linear movement of the movable part and a device for generating a drive energy for driving the movable part in or against a desired direction of movement. The at least one guide device may in this case comprise stator-side guide means or elements and rotor-side guide means or elements. In particular, the at least one guide device can form a linear guide, wherein a linear guide ensures the most friction-free translational movement of the rotor while maintaining a straight direction of movement, ie along a linear path. Preferably, the at least one guide device is designed as a sliding guide. Of course, however, other forms of linear guide, z. B. linear roller guides or roller designs imaginable. The guide device is in this case preferably designed such that the Abbe principle is met.

In this case, the device for generating a drive energy designates any device which can transmit drive energy to the movable part via a power transmission means, which will be explained in more detail below. In particular, the device for generating a drive energy can be designed as a device for generating a drive force. The device for generating the drive energy may in this case be arranged at least partially on the stator.

At least part of a probe system for detecting the roughness and / or the profile is arranged on the movable part. The stylus system denotes a set of elements for generating an output signal representing the roughness and / or the profile, in particular an electrical output signal.

The probe system may in this case comprise at least one probe element for scanning the surface. The stylus system can be designed here as a touching stylus system. The Probe system can z. As a button and / or a probe element, such as a probe ball, probe tip or needle include. In this case, part of the stylus system contacts the surface during roughness and / or profile detection.

Alternatively, the stylus system can also be designed as a contactless stylus system, which allows a non-contact, in particular optical, detection of the roughness and / or the profile.

Preferably, the probe system comprises the probe element and a probe arm, wherein the probe element is attached or mounted on the probe arm, in particular at a free end of the probe arm. The sensing arm can also be referred to as a feeler lever.

In the case of a touching probe system, the probe arm may be movably mounted on the rotor, in particular pivotally mounted about a rotation axis.

The probe element can be connected, for example via the following mechanical connections with the probe arm or the movable part: screw, clamped connection, spring-loaded connection or a spring-loaded connection with a rest stop, magnetic connection, Thermopassungsverbindung. In this case, a thermal connection can be produced, for example, by means of a shape memory alloy.

In a first closed state, a fixing portion with a shape memory alloy may be annealed to fix the closed state. In the closed state, the attachment portion z. B. a receiving volume, which is designed such that a corresponding attachment portion of a probe element force and / or positively arranged in the receiving volume. By a plastic deformation, for example by a mechanical actuation, the mounting portion with the shape memory alloy can be placed in a second, open state, wherein the receiving volume in the second state is formed such that a corresponding attachment portion of the probe element from the receiving volume removable or introduced into this is. In the second state, a probe element, in particular the fastening section of the probe element explained above, can then be arranged in the receiving volume. By re-heating and subsequent cooling, the shape memory alloy is returned to the first state, wherein the probe element is now attached to the mounting portion.

This results in an advantageous manner, a very compact mechanical attachment of sensing elements on the movable part or on the sensing arm.

Furthermore, the probe system may include a transducer or a measured value generator which generates an output signal in dependence of which the roughness and / or the profile can be determined. In the case of a touching probe element, for example, the transmitter may generate an output signal in response to a deflection of the probe element. For this purpose, the transmitter may for example be designed as a motion or position sensor. For example, the transmitter can be designed as an optical, capacitive, inductive or magnetic encoder, by means of the encoder, the movement and / or position of the probe element is directly or indirectly detected. A magnetic encoder can be designed here as a magnetic resonance transmitter. It is also conceivable that the transmitter detects a rotation of the pivotally mounted sensing arm, wherein in dependence on a length of the sensing arm and the detected rotation angle, the deflection of the probe element can be detected.

Preferably, the entire stylus system, but in particular the probe element, on the movable part, ie the rotor, arranged.

Furthermore, the drive energy explained above can be transmitted to the movable part via at least one energy transmission means. The at least one energy transfer means in this case denotes the means by which the driving force acting on the movable part is provided.

An energy transfer from the device for generating the drive energy to the moving part thus takes place at least partially via the energy transmission means. The energy transfer from the device for generating the drive energy to the moving part can be purely mechanical, at least partially mechanical or purely non-mechanical. However, the energy transfer means as part of the transmission path can only allow a mechanical transmission or a non-mechanical transmission. The at least one energy transmission means thus forms part of a transmission path for the drive energy from the device for generating the drive energy to the moving part, in particular the last part of the transmission path in one direction from the device for generating the drive energy to the moving part.

The at least one energy transmission means in this case comprises all elements which are used for Transmission of the drive power generated by the means for generating the drive energy to the movable part and / or to provide a force acting on the movable part driving force. Thus, a power transmission means may also comprise an energy conversion element, the z. B. converts a generated and possibly transmitted drive energy into a driving force. In this case, the at least one energy transmission means can be arranged between a movable element of the device for generating the drive energy, for example an output shaft of an actuator, and the movable part.

The at least one energy transfer agent may, for. B. be designed as a power transmission means.

According to the invention, the energy transfer means is a mechanical energy transfer means, wherein a mechanical energy transfer means is designed such that during an energy transfer to the movable part at least in a direction different from the desired direction of movement no force acts or can act on the movable part. By a mechanical energy transfer means, a mechanical energy transfer takes place, by a non-mechanical energy transfer means is a non-mechanical energy transfer.

In a mechanical energy transfer z. B. the energy transfer agent as a means of mechanical power transmission, z. B. as a shaft or as a transmission may be formed. Means for mechanical power transmission may be in particular mechanical components. In this case, the at least one energy transmission means may be designed such that a purely mechanical transmission of forces in at least one direction different from the desired direction of motion is not possible. This may mean that, via the at least one energy transmission means, a force which is directed in the at least one direction different from the desired direction of movement is not mechanically transferable and can not be generated within the framework of the transmission, for example from forces oriented in other directions. Thus, if at least part of the drive energy or the entire drive energy is transmitted mechanically, no force acts on the movable part, at least in a direction different from the desired direction of movement.

In summary, it follows that in one, in particular a pure, mechanical energy transfer no force is transmitted in at least one direction different from the desired direction of movement and / or acts on the movable part.

Preferably, in the case of an at least partial mechanical transmission of the drive energy, the at least one energy transmission means is designed in such a way that during transmission of drive energy a force is transmitted exclusively in or against a direction of movement and / or acts on the movable part.

In other words, this means that when the drive energy is generated, in particular when a drive force is generated by the device for generating the drive energy, a, in particular purely, mechanical transmission of the energy, in particular the force, is not possible or only possible in this way, that in the at least one direction different from the desired direction of movement no force acts on the runner. In one, especially pure, mechanical transmission can, for. B. a force component, which is directed in the direction different from the desired direction of movement, are filtered out.

This advantageously makes it possible, with an at least partial, but in particular purely mechanical, transmission of the drive energy to reduce forces that are not oriented in the direction of movement. For example, thus lateral forces can be effectively minimized. This, in turn, increases the accuracy of the detection, since no deviation from the desired linear movement and thus from a desired measurement path occurs due to the force minimization explained above.

In an at least partial non-mechanical energy transfer, the energy transfer means may be formed as a means for non-mechanical energy or power transmission. The energy transfer means may in this case, for example, enable a magnetic or electromagnetic transmission of forces. Here, the at least one energy transmission means may be designed such that such non-mechanically transmitted drive energy is converted into a force acting on the movable part driving force acting in or against the direction of movement.

Also, the non-mechanical energy transfer means may be formed such that during an energy transfer to the movable part at least in a direction different from the desired direction of movement no force acts. However, this is not mandatory. Thus, in the case of non-mechanical energy transfer, it can not be ruled out that forces which act in one or more directions, in particular all directions different from the direction of movement, also act and / or are transmitted to the moving part.

Thus, embodiments are conceivable in which a drive power partially mechanical, z. B. via mechanical energy transfer elements, as well as non-mechanical, z. B. via non-mechanical energy transfer element is transmitted.

If the drive energy is not or not completely transferred mechanically, then forces deviating from the direction of movement are not transmitted mechanically, this likewise improving a movement of the movable part along the desired measuring path.

Of course, the device may also include a housing, wherein at least a portion of the device may be disposed within the housing. The housing may for example be part of the stator or attached to the stator.

Further, by means of the proposed device, the previously explained probe element can be moved along a measuring path, wherein the measuring path can have a predetermined length. The length can be adjustable here. By way of example, a control device can actuate the device for generating the drive energy, which can be designed, for example, as a motor, in such a way that the feeler element is moved along a measurement path having a specific length. The control can be z. B. depending on an already traveled path. The distance traveled can z. B. depending on a speed and time duration of the movement of the probe element or sensor-based are detected. For this purpose, for example, known displacement or position sensors can be used. Also, z. Example, an angle sensor for detecting an angle of an output shaft of an engine can be used, wherein a detected angle in response to a known transmission ratio of the rotational movement can be converted to a linear movement in a distance traveled.

It is also conceivable that the probe element has several probe tips, in particular a double tip. In this case, the probe element can be designed such that the tips point in different directions, preferably in opposite directions. Different sensing elements of the measuring device may, for example, have different stylus tip radii. This allows advantageously to be able to scan different surfaces without a change of the probe element.

The guide device or the guide means can / have in this case polished guide surfaces or guideways or train. These can be made of glass, ceramic, z. Example of alumina or Si / SiN ceramic or LTE (low thermal expansion) ceramic, or metal may be formed. The guide surfaces may in this case be arranged, for example, on the stator side. In this case, the rotor may have guide jaws, which may also have a polished surface. The guide jaws can thus form corresponding guide surfaces which slide along the stator-side guide surfaces. For example, a corresponding guide surface of the rotor may be made of polytetrafluoroethylene or of brass. The preferred material pairing is glass / polytetrafluoroethylene, steel / polytetrafluoroethylene, ceramic / polytetrafluoroethylene or steel / brass. The guide surfaces can in this case be provided by suitable coating methods, for example methods of thin-film technology, for example CVD methods.

Preferably, the runner is guided on at least three different sections. The interacting with the guide portions of the stator-side guide means and the rotor-side guide means may be formed point-like, linear or planar.

It is further described that the at least one energy transmission means is designed as a magnetic energy transmission means. Thus thus generated drive energy is magnetically transmitted to the moving part and z. B. converted there into a driving force. Thus, however, it is not excluded that the transmission path from the device for generating drive energy to the movable part also includes other, in particular mechanical, energy transmission means.

This includes an energy transfer in the form of a synchronous motor or asynchronous motor. Preferably, the device for generating a drive energy may be formed as a linear synchronous motor. Also, the device for generating a drive energy can be designed as an electrodynamic linear motor or as an asynchronous linear motor.

It is also conceivable that the device for generating the drive energy mechanically moves at least one device for generating a magnetic field, in particular a permanent magnet, along a predetermined trajectory, in particular a straight-line trajectory. The rotor may in this case comprise a corresponding device for generating a magnetic field, which may also be designed as a permanent magnet. Of course, a device for generating a magnetic field can also be designed as an electromagnet. The facilities for Generation of the magnetic fields can in this case be designed and / or arranged and / or controlled such that interacting magnetic fields are generated and a magnetic transmission of the drive energy takes place.

The at least one energy transmission means is designed as a mechanical force transmission means. In this case, therefore, a mechanical transmission of the drive energy, in particular the driving force. Thus, however, it is not excluded that the transmission path from the device for generating drive energy to the moving part also includes further, in particular non-mechanical, energy transmission means. Preferably, a purely mechanical transmission of the drive energy from the device for generating the drive energy to the moving part takes place. This advantageously makes it possible to transmit the drive energy as simply as possible.

Further, a force is transmitted through a single contact point between a driver side contact element and a contact element of the movable part. The drive device-side contact element in this case denotes a contact element, which by the means for generating a drive energy z. B. along a predetermined trajectory, in particular a rectilinear trajectory is moved. This drive device-side contact element can mechanically contact a corresponding contact element of the movable part, the contact elements only interacting with one another at one point, in particular touching each other. In particular, at least one of the portions of the drive device side contact element and the contact element of the movable part, which mechanically interact with each other, may be punctiform. Such a trained mechanical contact for power transmission advantageously reduces the directions in which forces can be transmitted. In particular, such a contact point allows no tangentially directed forces to be transmitted, with tangentially directed forces denoting those forces acting along a tangent to the point of contact of the movable part. Of course, this does not exclude that due to friction, in particular a sliding friction between the drive device side contact element and the corresponding contact element of the movable part forces can be transmitted.

Of course, a force can also be transmitted via a contact surface and / or a contact line between a drive device-side contact element and a contact element of the movable part, wherein the contact line or the contact surface can be oriented orthogonal to the desired direction of movement. This can mean that the drive device-side contact element can mechanically contact a corresponding contact element of the movable part, the contact elements interacting, in particular touching, only along the contact line or via the contact surface.

According to the invention, the drive device-side contact element has a rounded contact surface and / or the contact element of the movable part has a rounded contact surface, wherein the contact surfaces touch each other in the contact point for transmitting power.

The drive device-side contact element may be teilkugel-, spherical or cylindrical, for example, or have a teilkugel-, spherical or cylindrical portion. Accordingly, the contact element of the movable part may be formed.

It is conceivable that the at least one energy transmission means is designed such that both a mechanical and a non-mechanical energy transfer is possible. In particular, contact elements can also be in mechanical contact with a magnetic energy transfer. Also in this case, a force can mechanically z. B. transmitted via a single contact point between the drive device side contact element and the contact element of the movable part.

So it is conceivable, for example, that the above-described means for generating a magnetic field, in particular the permanent magnets, teilkugel-, spherical or cylindrical or have a teilkugel-, spherical or cylindrical section.

Due to the design with a rounded contact surface results in an advantageous manner that can be ensured only by the physical design that during an energy transfer in at least one direction different from the direction of movement in a mechanical energy transfer no force acts on the movable part.

In a further embodiment, the energy transmission means comprises at least one solid-body joint or is at least partially designed as a solid-body joint. It is also conceivable that the at least one solid-body joint is part of the device for generating the drive energy. In particular, the above-explained drive device-side contact element can be moved via the solid-body joint.

This results in an advantageous manner that a movement of the drive element takes place in only one plane and no further lateral forces are transmitted to the guideway.

Also, the energy transfer means may comprise one or more connecting portion (s), each having one or more, in particular two, solid-body joint (s). About the at least one connecting portion can, for. For example, an element moved by the means for generating the drive energy and the movable part or, preferably, the above-described drive device-side contact element may be mechanically connected. In particular, several, in particular two, connecting sections can also be arranged in the manner of a parallelogram.

It is also possible for a plurality of connecting sections, in particular a plurality of parallelogram-like connecting sections, to be designed and mechanically connected to one another so that the movable part or, preferably, the drive device-side contact element explained above can only be moved in or against a predetermined direction, in particular the desired direction of movement. However, it may be necessary for this that the energy transfer agent still at least one guide element, for. B. comprises a stop edge formed as a guide element, which allows the movement only in or against a predetermined direction.

Thus, z. B. even the movement in this one levels are minimized. Thus, a possible linear one-dimensional force transmission is achieved. Furthermore, it is advantageous that a solid-state joint in the directions in which it does not rebound, has a high stability, resulting in a high side guidance stability.

In a preferred embodiment, the at least one energy transmission means is designed such that a maximum acting on the movable part, for example, a maximum transferable, force is less than a predetermined force. Thus, it can be ensured in an advantageous manner by the energy transmission means that the driving force acting on the movable part is limited. This in turn advantageously improves the reliability of the proposed device, since a z. B. stuck probe element is not destroyed due to excessive forces. This can also be referred to as tear-off protection. In particular, the predetermined force can be selected smaller than the maximum of a fastening of the probe element on the movable part absorbable force.

In particular, in a magnetic energy transfer, the maximum producible magnetic forces can be selected smaller than the predetermined force. If this force is exceeded, it results in an advantageous manner that, although a magnetic coupling is canceled or weakened, the risk of mechanical destruction of the means for generating the drive energy and / or the moving part is minimized.

In a further embodiment, the device comprises at least one device for setting or changing a position of a probe element in a vertical direction. The vertical direction here denotes a direction which is oriented perpendicular to the surface to be detected. The device may in this case be designed as a suitably designed actuator. For example, the previously explained probe arm with the probe element attached to it can be rotated in an actuator-supported manner about the likewise previously explained rotation axis. It is also conceivable to move by means of an actuator both probe arm and probe element in the vertical direction.

This advantageously serves to remove or lift off the probe element from the surface to be detected, for example before or after a detection process. In particular, a contact element designed as a touching probe element, for example as a stylus, can thus be brought from a contact state into a non-contact state, whereby interactions with the surface can be advantageously minimized before and after the detection process.

Alternatively or cumulatively, the device may comprise at least one device for setting an orientation of the probe element. This device can set, for example, a position and / or orientation of the guide device.

The device for adjusting a position of the probe element and the device for setting an orientation of the probe element can be designed here as structurally separate devices or as a common device.

The device for setting an orientation can also be designed as a pivoting unit, wherein by means of the pivoting unit at least one orientation, possibly also a position, at least of the movable part is changeable. In addition, an orientation and optionally position of the static part of the pivoting unit can be changed. As a result, an orientation and position of the measuring section relative to the surface can be adjusted in an advantageous manner. In particular, thus also differently oriented Surface sections are measured. Swing angles can be in the range of 0 ° to 180 °.

In a further embodiment, the device comprises at least one device for setting a sensing force. In this case, the stylus system is designed as a touching stylus system. The sensing force refers to a force that is on the workpiece surface, z. B. during detection, is applied. In an initial state, for example in a state in which no sensing force is generated, the probe system, in particular the probe element, may be in a balanced state. This means that by the stylus system (ideally) no force, so no weight, is applied to the surface to be detected.

Furthermore, the device for setting a sensing force can be designed such that the force generation is possible regardless of position. Thus, also differently oriented surface portions can be scanned with the same scanning force. The device may comprise, for example, a spring element, a magnetic element and / or a magnet coil arrangement for generating the sensing force.

Further, the device for setting a sensing force can be controlled such that a sensing force is set depending on one of a plurality of sensing elements of the stylus system. If the measuring device comprises, for example, two probe tips oriented in particular in opposite directions, then a first sensing force can be set if a surface is scanned with a first probe tip, whereby a sensing force different from the first sensing force can be set, if one surface with the other Probe tip is scanned.

Thus, for example, different tactile forces can be set for an internal or external scanning. An inside scan here denotes a scan, in which the feeler element is introduced into a volume encompassed by a surface to be scanned. Of course, the sensing force can also be adjusted depending on a Tastelementgeometrie.

Also, the probing force can be adjusted depending on characteristics of a surface to be detected.

Further preferably, the probing force is generated by the means for generating the probing force such that a hysteresis-free generation of the probing force takes place.

Preferably, the probing force is constant over the entire Auslenkweg of the probe element.

Preferably, the means for adjusting a sensing force comprise at least one spring element. It can be assumed that a deflection of the probe element during a detection is so small that a change of a spring force generated by the spring element due to the deflection is negligible, whereby z. B. a constant contact force can be provided. If the feeler element is fastened to a feeler arm, then a twist due to the deflection and the lever arm formed by the feeler arm can likewise be so small that the previously explained spring force change due to the deflection is negligible. It is also conceivable that the device for generating a tactile force as a pneumatic actuator, electrical actuator, hydraulic actuator, piezoelectric actuator or otherwise trained actuator may be formed. Also, the means for adjusting a sensing force may be formed as a combination of at least one of said actuators with a spring.

In this case, the device for setting a sensing force can be designed structurally separate from the device for setting a position and / or the device for setting an orientation of the probe element. Of course, however, all or individual of the previously explained devices may be designed as a common device.

In a further embodiment, the device comprises at least one device for detecting a position of the movable part. The device for detecting a position of the movable part may in particular be designed as a device independent of the device for generating the drive energy. Thus, therefore, by the means for detecting a position, a position of the movable member regardless of a z. B. depending on control signals of the device for generating the drive power certain position can be determined. The position-dependent output signal can then in turn be advantageously used to control the device for generating the drive energy, in particular such that a movement of the movable part takes place during the detection at a constant speed (linearized measurement procedure). The output signal of the device for detecting the position can also be used to assign measured values to correct positions along the measuring path after detection.

In a preferred embodiment, the device further comprises at least one device for detecting a relative position between the movable part and the probe element of the measuring device. In particular, a relative position between a reference point of the movable part, for example, a (geometric) center and a reference point of the probe element, in particular a contact point, for. B. a Tastspitze be detected. This advantageously allows a differential position measurement, resulting in a resulting position of the probe element in response to a superposition of the position of the movable part relative to the static part and the relative position between the movable part and the probe element.

This in turn advantageously allows a further improved linearization of a detection process or even more accurate assignment of measured values to positions along the measurement path.

In a further embodiment, the device comprises at least one support element for supporting the static part on a workpiece. In particular, the device may comprise exactly one support element for mounting the static part on a workpiece.

Here, the proposed device, as already explained above, be attached to a positioning device, wherein a position and / or orientation of the proposed device and thus a position and / or orientation of the measuring section is set and ensured by the positioning device. In this case, the support element can be used to set a reference distance between the device and the detected surface.

The at least one support element can in this case be fastened mechanically detachably to the static part. As a result, support elements with different geometries can be attached to the static part in an advantageous manner. This advantageously enables a storage of the static part on the workpiece adapted to different surface topologies. For example, the support element may have a flat support surface. Alternatively, a support element may have a convex or concave support surface. Further alternatively, a support member having a stepped support surface. Thus, a support member is generally described which has a support surface adapted to a surface topology of the workpiece with the surface to be detected.

Thus, the support element can preferably serve with a convex support surface for support on an outer circumferential surface of a cylinder. A concave support surface can be used for support on inner lateral surfaces of a hollow cylinder. Thus, the at least one support element can also be used as a centering or positioning aid with respect to the workpiece to be detected, in particular together with the stylus system used.

In a further embodiment, the device comprises at least one device for detecting a torsion of a probe arm of the stylus system. A torsion here refers to a deviation of a central center line or longitudinal axis of the scanning arm from a straight central center line and / or a rotation about the central center line or longitudinal axis.

If a touching probe element is deflected, for example, by elevations or depressions of the surface, then ideally no torsion and / or bending of the probe arm results, in particular if it is pivotally mounted. However, can, for. B. by tilting, give an undesirable deviation of the probe arm of this ideal state. By the means for detecting the torsion such a deviation can be detected in an advantageous manner. Thus, in an advantageous manner, for. B. after detection, an improved assignment of a measured value to a position carried out or torsion-prone measured values in the context of a later evaluation of the measured values are not taken into account.

The means for detecting the torsion may include, for example, an optical sensor. Here, a reflector, z. B. in the region of the probe element, are arranged on the probe arm. Furthermore, a beam source or light source can be arranged on the movable part and aligned on the reflector. Furthermore, the light reflected by the reflector can be detected by means of a suitable detection device, for example an optical detector. Depending on the deflection or torsion of the scanning arm, different intensity values, in particular different intensity values at different pixels of the detector, may result.

This allows a reliable and easy to implement detection of the torsion of the probe arm. Also, this can be determined in an advantageous manner information about a slope of the detected profile, for example, available rotary and / or Honriefen. Also, a measurement of a 2.5 D roughness in a measurement is made possible, since in addition to the pure height information, information on the inclination of the surface, in particular transversely to the direction of movement of the probe element, can also be detected.

In a further embodiment, elements of the guiding device of the static part and elements of the guiding device of the movable part are movable relative to each other in at least one direction, which is different from the desired direction of movement. This allows advantageously that z. B. unevenness of guideways can be compensated by a relative movement, whereby z. B. a snagging of the movable part is reduced in the movement. Furthermore, it is also achieved that the required driving force along the guideway is kept as constant as possible.

In a preferred embodiment, the movable part has two part sections or part bodies which are movably fastened to one another and are movably fastened to one another in at least one direction different from the desired direction of movement. The direction other than the desired direction of movement may be, for example, the previously explained vertical direction and / or a lateral direction. In particular, the subsections fixed to one another can be fastened to one another by at least one spring element, but preferably at least two spring elements. The spring elements can in this case be arranged and / or formed such that the subsections secured to one another are movable in the vertical direction and / or in lateral toward and away from one another. Here, the lateral direction may be oriented perpendicular to the vertical direction and perpendicular to a longitudinal direction, wherein the longitudinal direction corresponds to the direction of movement.

Wise z. B. guideways elevations or depressions in the vertical or lateral direction, it is thus possible in an advantageous manner that the movable part when passing such bumps or depressions in the vertical or lateral direction on or rebound. Thus, such elevations or depressions can be compensated for and the risk of sticking, which can falsify measurement results, be minimized.

Furthermore, the proposed device can have a power supply device, via which the device for generating the drive energy and / or the stylus system and / or further sensor elements and / or the means for adjusting a position and / or the device for setting an orientation and / or the device can be energized to generate a sensing force. In this case, the energy supply device can be designed, for example, as a capacitor or battery.

Furthermore, the device may comprise or form a calibration means, wherein the calibration means may be arranged in the measuring range of the stylus system. The calibration means may in this case in particular have or form a calibration surface which has a previously known roughness and / or a previously known profile. In a calibration process, the probe element of the stylus system can then be moved along the calibration surface. Depending on the detected roughness and / or the detected profile and the known roughness and / or the known profile then a calibration, for. As a determination of calibration parameters, done.

However, such a calibrating means does not necessarily have to be part of the proposed device. In particular, the proposed calibration means may be part of an arrangement comprising the previously described positioning device of the proposed device and the proposed device. If the positioning device is designed, for example, as a coordinate measuring machine, the calibration means can be arranged on a measuring table of the coordinate measuring machine. Preferably, the calibration means for calibrating the proposed device can be arranged on a calibration means for calibrating a measuring head system of the coordinate measuring machine, for example on a calibration ball holder.

Thus, the proposed calibration can be arranged in a measuring range of the coordinate measuring machine, which also a renewed and possibly also an automated calibration of the proposed device is possible.

Furthermore, the calibration means described can have a cover which serves to protect against damage and / or contamination. In this case, the cover z. B. be designed as a lid or hood. The cover can be closed or open actuator-supported. Here, in principle, any actuator, such as an electric actuator, in particular an electric motor, a stepper or linear motor, a pneumatic actuator or a hydraulic actuator conceivable. Also, the cover can be passively actuated. In particular, the cover may comprise or form a carrier element, wherein the cover can be opened or closed by a corresponding actuation of the carrier element. Preferably, the above-explained positioning device can be controlled such that an actuation of the driving element by a portion of the proposed device, in particular a part of the static part, in particular a housing takes place. Of course, such an operation by means of other elements of Positioning, for example, by a part of the positioning, done.

The calibration means can also be arranged in or on a magazine for measuring head systems or on a holding device for a plurality of such magazine locations of the coordinate measuring machine. In this case, such a magazine, z. B. actuator-supported, be movable, in particular with a linear movement. In this case, a passive actuation of the above-explained driving element of the cover by means of a relative movement between the magazine and the proposed device or a further part of the coordinate measuring machine can be made such that the cover is opened or closed.

Furthermore, the device can also comprise several, in particular two, probe systems for detecting the roughness and / or the profile. For example, a first stylus system may be a touching stylus system, with another stylus system being an optical stylus system. The probe systems can be designed as a combined measuring devices. For example, a part of an optical sensor can also be arranged on a sensing arm of the first probe system. Possible optical measuring methods for detecting the roughness and / or the profile may be, for example, a scatterometry method, a confocal microscopic method or an interferometric method. A confocal microscopic method can be carried out, for example, as a function of white-light illumination or point-type laser illumination or telecentric laser illumination (flying spot). Also, a so-called fringe projection method can be used.

This advantageously makes it possible to detect the surface quickly and non-destructively by the optical detection. Measurement results of touching detection can serve traceability to a standard. Also designed as an optical probe system further probe system can be used to detect a deflection of the touching probe element of the first probe system.

Furthermore, the device may comprise at least one means for signal / data transmission. Here, data z. B. transmitted by means of a CRC data protocol. The data transmission can take place, for example, wirelessly, in particular via a Bluetooth connection or a WLAN connection. Also, an optical data transmission can take place. Of course, however, a wired or wired data transmission is possible. Here, a line z. B. along a portion of the proposed device and then along a positioning device to which the proposed device is attached, are guided.

Furthermore, the proposed device can have a display and / or operating device which serves to display information, for example measurement data, and / or operation by a user.

Also, the movable part and / or the probe element can be moved to a predetermined change position, wherein the change position can be mechanically secured. This avoids damage to elements of the stylus system when changing the probe element. For example, the probe arm by means of a fastener, such as a clamping device or a slider, are attached to the static part. Also, the guide device or the proposed device may have or form an end stop, in which the movable part and optionally the sensing arm for changing the probe element can be moved. This can be avoided in an advantageous manner damage when changing the probe element and optionally the probe arm.

If the proposed device is attached to a positioning device, a roughness and / or a profile of a surface section of the surface to be detected can also be detected by means of the positioning device. For this purpose, for example, the positioning device, the proposed device after each measurement position offset such that the probe element in different measuring operations along different measuring paths, in particular parallel measuring tracks, is moved.

Further proposed is a method for detecting a roughness and / or a profile of a surface of a test object by means of one of the previously explained embodiments of the proposed device. Here, at least one arranged on a movable part of the device probe element is moved with a linear movement along the surface of the measurement object. The drive energy required for this purpose is generated by the previously explained device for generating the drive energy and transmitted to the movable part via the at least one energy transfer means. Next, the roughness and / or the profile of the surface is detected by means of a stylus system, wherein the stylus system comprises the at least one probe element. The drive energy is transmitted to the movable part via at least one energy transmission means, wherein the at least one energy transmission means is a mechanical, wherein during a mechanical energy transfer to the movable part at least in a direction different from the desired direction of movement, no force acts on the movable part.

The invention will be explained in more detail with reference to several embodiments. The figures show:

1 a schematic longitudinal section through a device according to the invention,

2 a drive device side contact element and a contact element of a movable part in a first embodiment,

3 a drive device side contact element and a contact element of a movable part in a further embodiment,

4a a support element in a first embodiment,

4b a support element in a second embodiment,

4c a support element in a third embodiment,

4d a support element in a fourth embodiment,

4e a support element in a fifth embodiment,

5a a fastening element for fastening a probe element in a first state,

5b this in 5a illustrated fastener in a second state,

5c this in 5a illustrated fastener with a part of a probe element,

6 a probe element with a double tip,

7 a schematic plan view of a movable part with a guide device,

8th a schematic side view of an opposing movable part,

9 a plan view of a movable part in a first embodiment,

10 a plan view of a movable part in a second embodiment,

11 a plan view of a movable part in a third embodiment,

12 a plan view of a movable part in a fourth embodiment,

13 a plan view of a movable part in a fifth embodiment,

14 a movable part in a guide device,

15 a movable part in a guide device in a further embodiment,

16 a guide rail and a rotor-side guide element,

17a a cross section through an armature-side guide element in a first embodiment,

17b a cross section through an armature-side guide element in a second embodiment,

17c a cross section through an armature-side guide element in a third embodiment,

17d a cross section through a rotor-side guide element in a fourth embodiment,

17e a cross section through an armature-side guide element in a fifth embodiment,

18a a guide rail in a first embodiment,

18b a guide rail in a second embodiment,

18c a guide rail in a third embodiment,

18d a guide rail in a fourth embodiment,

19a a cross section through an armature-side guide element in a sixth embodiment,

19b a cross section through a rotor-side guide element in a seventh embodiment and

20 a sensing arm and means for detecting a torsion of the sensing arm.

Hereinafter, like reference numerals designate elements having the same or similar technical features.

In 1 is a schematic longitudinal section through a device according to the invention 1 shown. Shown is a surface 2 of a measured object to be detected. The device 1 includes a static part 3 , the one housing 4 having. Inside the housing is an actuator 5 arranged over a spindle 6 a spindle runner 7 in or against a longitudinal direction x (direction of movement) drives. The spindle runner 7 has two drive device side contact elements 8th on, which are cylindrical.

Next, the device 1 a runner 9 moving on in leadership facilities 10 is stored. The leadership of the runner 9 by means of the guiding devices 10 is here designed such that the runner 9 is guided with a linear movement in or against the longitudinal direction x. The runner 9 has for this purpose corresponding guide elements 11 on, along guide surfaces 32 the management facilities 10 glide (see also 9 ).

Next, the rotor has a rotor-side contact element 12 which is likewise cylindrical in shape and extends into a gap of the drive device-side contact elements 8th extends. It is shown that the gap is dimensioned such that the rotor-side contact element 12 only with a drive device side contact elements 8th is in mechanical contact. Of course, the gap may also be dimensioned such that the rotor-side contact element 12 simultaneously with both drive device side contact elements 8th is in mechanical contact.

Next points the runner 9 a bearing element 13 on which a support arm 14 a probe system about a rotation axis R, which extends into the plane of the drawing, rotatably mounted. At a free end of the support arm 14 is a stylus with a stylus tip 15 arranged, wherein the probe tip in the detection of the roughness and / or the profile of the surface 2 in or against the longitudinal direction x on the surface 2 slides along a measuring section.

Schematically represented is a device 16 for detecting a deflection of the probe tip 15 , in particular a deflection in the vertical direction z, wherein the vertical direction z is perpendicular to the surface 2 is oriented. By means of the device 16 For example, a rotation angle about the axis of rotation R can be detected, depending on the angle of rotation and a distance between the axis of rotation R and the probe tip 15 , the deflection is determinable.

Further schematically shown is a device 17 for generating a predetermined sensing force. The device 17 can hereby z. B. a torque about the axis of rotation R on the sensing arm 14 exercise. Thus, the device serves 17 both for setting a position of the probe tip 15 in the vertical direction z as well as the adjustment of an orientation of the probe tip 15 , wherein an orientation, for example, by a rotation about a lateral axis y (see 3 ), wherein the lateral axis y is oriented perpendicular to the longitudinal direction x and vertical direction z.

Also shown is a device 18 for adjusting a position of the guide means 10 , the runner 9 and thus also the tip of the probe 15 in the vertical direction z. Thus, the Tastspitze 15 from the surface 2 by means of the device 18 be lifted off. This can, for example, to secure the probe tip 15 in a positioning of the device 1 respectively. Also, the stylus tip 15 through the device 18 for a return, so z. B. a movement against the longitudinal direction x, from the surface 2 be lifted in the vertical direction z. It is also conceivable that the probe tip 15 through the device 18 only then on the surface 2 is placed, if a desired measurement position of the device 1 is reached.

In 1 is further a support element 19 shown, wherein by the support element 19 the static part 3 , in particular the housing 4 , on the workpiece surface 2 can be stored.

2 shows a further embodiment of a drive device side contact element 8a and a rotor-side contact element 8b , Here are the contact elements 8a . 8b each formed as permanent magnets whose poles are formed partially spherical or have a part-spherical portion. Here are oppositely polarized poles of the contact elements 8a . 8b facing each other. In such an embodiment of the contact elements is a magnetic transmission of a force. For example, the drive device side contact element 8a at the in 1 shown spindle slide 7 be attached. The rotor-side contact element 8b can on the runner 9 be attached. Will now the drive device side contact element 8a by movement of the spindle carriage 7 along the longitudinal axis extending in the longitudinal direction x moves, then follows due to the magnetic attraction forces and the rotor 9 ,

3 shows a perspective view of the in 1 illustrated coupling of spindle slide 7 and the runner 9 However, only one drive device side contact element 8th is shown. Here, it is shown that the drive device side contact element 8th is cylindrical. Likewise, the rotor-side contact element 12 cylindrically shaped. A mechanical transmission of a force from the spindle slide 7 on the runner 9 occurs via a single point of contact between the drive device side contact element 8th and the rotor-side contact element 12 , Also shown is a lateral axis extending along a lateral direction y. Due to the cylindrical design of the contact elements 8th . 12 In particular, there is no power transmission from spindle traveler 7 on the runner 9 in the direction or counter to the lateral direction y possible. Thus, no lateral forces can be transmitted in an advantageous manner.

In 4a is a first embodiment of a support element 19 (see also 1 ). The support element 19 is in this case cylindrical, with a contact surface 20 corresponds to an end face of the cylinder and is an unbroken, flat surface.

In 4b is a second embodiment of the support element 19 shown. This is also cylindrical. A contact surface 20 However, it is not flat, but designed as a surface of a partial sphere. With respect to the cylindrical support element 19 is the contact surface 20 concave.

In 4c is a third embodiment of the support element 19 shown. This includes a cuboid part 21 and a triangular cylindrical part 22 where an edge 23 of the triangular cylindrical part for contacting the surface 2 serves.

In 4d is a fourth embodiment of the support element 19 shown. This includes a cylindrical part 24 and a cone-shaped part 25 , wherein a tip of the conical part 25 for contacting the surface 2 serves.

In 4e is a fifth embodiment of the support element 19 shown. This is cuboid and has a triangular cylindrical recess 26 on. This support element 19 is particularly suitable for storage on waves whose surface is to be measured.

In 5a is a mounting section 27 a support arm 14 shown. The attachment section 27 is at least partially designed as a shape memory alloy. In a first state, this has an (unopened) receiving slot 28 on. This first state can form a cryogenic form.

In 5b is a second state of the attachment portion 27 illustrated, wherein the second state by a plastic deformation, for example by bending with a tool, the attachment portion 27 established. This condition can form a high temperature form. It is shown that the receiving slot 28 is open. Thus, a corresponding attachment portion 29 a probe element, for example a stylus with a stylus tip 15 , in the receiving slot 28 be introduced.

In 5c is the attachment section 27 again shown in the first state, which sets when the attachment portion 27 in the second state (see 5b ), in particular heated above a transition temperature and thereafter cooled again. Here it is shown that the corresponding attachment portion 29 in the receiving slot 28 is clamped. This advantageously allows a simple, secure and releasable attachment of probe elements on the support arm 14 ,

In 6 a stylus is shown, which is a first stylus tip 30 and another probe tip 31 having. The stylus tips are oriented opposite to each other here. The stylus is here at a free end of a Tastarms 14 attached.

In 7 is a top view of a runner 9 shown. Shown is further a spindle 6 and a spindle runner 7 , the actuator side contact elements 8th having. Further illustrated are guide devices 10 that form guide surfaces along which the runner 9 slides with a linear motion. Also shown is a rotor-side coupling element 12 and a support arm 14 , As for 1 already explained, can with the illustrated embodiment of the rotor 9 be moved with a linear movement along a longitudinal axis, but no transverse forces can be transmitted.

In 8th is a schematic side view of a runner 9 shown. The runner 9 is on a guide surface 32 a leadership facility 10 arranged. Next is shown that the runner 9 thrust bearing 33 that has the runner 9 with the guide device 10 tense.

In 9 is a top view of a runner 9 shown. Shown is the rotor-side coupling element 12 which extends out of the plane of the drawing. Further illustrated are guide devices 10 , each guide surfaces 32 have, with guide jaws 33 of runner 9 along the guide surfaces 32 slide. Here, the runner points 9 two fixed guide jaws 33a and a movably mounted guide jaw 33b on.

The movably mounted guide jaw 33b is via a parallelogram suspension 34 on a base body 35 of the runner 9 attached. The parallelogram suspension 34 in this case comprises a first connection element 36a and a second connecting element 36b , each two solid joints 37 exhibit. About the fasteners 36a . 36b is a compensation body 38 at the base body 35 attached. At the compensation body 38 again, the movably mounted guide jaw 33b attached.

Further illustrated are setscrews 39 , in a thread, not shown, of the main body 35 are arranged. At the guide jaw 33b is a contact element 40 arranged, with the adjusting screws 39 are movable so that they with the contact element 40 can interact to a position of the movable guide jaw 33b in or against a longitudinal direction x and / or in or against a lateral direction y. This allows a vote of leadership.

10 shows a plan view of another runner 9 , Also shown are guide means 10 with guide surfaces 32 , The runner 9 again has a basic body 35 with fixed guide jaws 33a on that along a guide surface 32 slide. Next points the runner 9 a compensation body 38 on, over spring elements 41 at the base body 35 suspended or attached. The compensation body 38 has a movably mounted guide jaws 33b due to the spring suspension relative to the main body 35 are mobile. Slides the runner 9 in or against the longitudinal direction x on the guide surfaces 32 , so can surveys or depressions of the guide surfaces 32 , in particular along a lateral direction y, by the relative movability of the basic body 35 and the compensation body 38 be balanced with each other. This in turn minimizes the risk of slipping when sliding along the guide surfaces 32 ,

In 11 is a plan view of another runner 9 shown. This again has a basic body 35 with two guide jaws 33a on that along a guide surface 32 a leadership facility 10 slide. A compensation body 38 is about fasteners 36a . 36b on the body 35 attached. At the compensation body 38 are movable bearing guide jaws 33b arranged. The connecting elements 36a . 36b each have two solid state elements 37 on. Thus, the compensation body 38 again via a parallelogram suspension 34 on the body 35 attached. Thus, the main body 35 relative to the compensation body 38 movable. With a bias or a deflection, an orientation of the connecting elements changes 36a . 36b , Depending on the orientation, there may then exist a preferential movement direction in which the risk of tilting is minimized.

Is a central midline between the solid joints 37 arranged portion of the connecting elements 36a . 36b For example, oriented along a diagonal having both a portion in the longitudinal direction x and a portion in the lateral direction y, so a preferred direction along the longitudinal axis in the longitudinal direction x and not against the longitudinal direction x is oriented.

12 shows a plan view of a runner 9 in a further embodiment. Shown again are management facilities 10 with guide surfaces 32 , The runner 9 includes a main body 35 and a balancing body 38 that about fasteners 36a . 36b on the body 35 is attached. At the base body 35 are guide jaws 33a arranged.

Unlike the in 11 and 9 illustrated embodiments comprises a connecting element 36a . 36b three instead of two solid joints 37 , This increases the number of degrees of freedom in a relative movement of the compensation body 38 and the basic body 35 ,

In 12 are the fasteners 36a . 36b shown in a first biased state. In this first state are both fasteners 36a . 36b deformed such that a center line of the connecting elements 36a . 36b has a triangular or (part) trapezoidal course, wherein tips of the triangular center line or a shorter base side of the trapezoidal center line are oriented in the same direction, here in the longitudinal direction x.

In this first biased state, the runner points 9 a preferential movement direction oriented in the longitudinal direction x. Unevenness of the guide surfaces 32 can, however, by the relative mobility between the base body and balancing body 35 . 38 be compensated. However, stick-slip effects may occur when moving counter to the preferred direction of movement.

In 13 is the in 12 represented runner shown in a second biased state. In this second prestressed state are the peaks or the shorter bases of the triangular center line or trapezoidal center line of the connecting elements 36a . 36b oriented towards each other. This means that a tip or a shorter base side of the center line of a first connecting element 36a in the longitudinal direction x and a tip or shorter base side of a second connecting element 36b oriented against the longitudinal direction x.

Also in this configuration can be unevenness of the guide surfaces 32 by the relative mobility between basic body 35 and balancing body 38 be compensated, however, the runner points 9 no preferred direction of movement in the second prestressed state. Rather, the runner 9 be moved in and against the longitudinal direction, without stick-slip effects are to be feared.

In 14 is a cross section through a runner 9 and a guide device 10 shown. The runner 9 here has two guide jaws 33 on that along the guide surfaces 32 the management facility 10 slide. Also slides a bottom 39 of the runner 9 along a guide surface 32 the management facility 10 , The runner 9 is approximately trapezoidal in cross section, wherein the guide jaws 33 are arranged on a base or a longer base side of the trapezoidal cross-section and the underside 39 is formed by the shorter base side. In 14 is shown that also surface sections 40 the thigh of the runner 9 along guide surfaces 32 slide. Thus, the runner 9 in the vertical direction z and lateral direction y in a form-fitting manner in the guide device 10 attached. In the longitudinal direction x, however, a movement of the rotor 9 authorized.

15 shows a runner 9 and leadership facilities 10 in a further embodiment. This embodiment also permits a connection between guide device that is positive in the vertical direction z and lateral direction y 10 and runners 9 , The management device 10 in this case has guide body 41 on, each having in cross-section triangular recesses. Legs of the triangular-shaped recess in each case form the guide surfaces 32 out. The runner 9 is trapezoidal in cross-section (perpendicular to the longitudinal axis x) at both lateral ends. Thus, surface portions of the legs of this trapezoidal cross-section of the rotor slide 9 on the guide surfaces 32 , A width of the runner 9 is about a set screw 42 adjustable in and against the lateral direction y. This advantageously allows the runner 9 between the guide elements 41 clamp.

16 shows another example of a guide element of a guide device 10 , The guide element is here as a guide cylinder 42 educated. The runner 9 this can be a guide jaw 33 have a cross-sectionally triangular recess 43 having. To a movement of the runner 9 To guide, the guide jaw 33 so relative to the guide cylinder 42 be arranged that this guide cylinder 42 is arranged in the triangular-shaped recess.

17a shows a cross section through another guide jaw 33 , Also this guide jaw 33 has a cross-sectionally triangular recess 43 on. Next, the guide jaw 33 a free end section 44 and a fixing portion 45 on, wherein the attachment portion 45 on a base body 35 of the runner 9 is attached. Between the free end section 44 and the attachment portion becomes the triangular-shaped recess 43 educated.

In 17b is another embodiment of a guide jaw 33 shown. In contrast to 17a forms the guide jaw 33 Here, a semi-circular in cross section recess 46 out.

In 17c is another embodiment of a guide jaw 33 shown. This forms the guide jaw 33 a rectangular or trapezoidal in cross-section recess 47 out.

In 17d is another embodiment of a guide jaw 33 shown. This forms a trapezoidal cross-section recess 48 out.

In 17e is another embodiment of a guide jaw 33 shown. This forms a recess which, in cross-section of two concave sections of the free end portion 44 and the attachment section 45 is enclosed.

In the recesses 43 . 46 . 47 . 48 . 49 the in 17a to 17e illustrated guide jaws 33 can each guide facilities 10 can be arranged to allow the previously described linear motion.

In 18a is a cuboid guide rail 50 a leadership facility 10 shown. In such a cuboid guide rail 50 For example, the in 17c illustrated guide jaw 33 be used.

In 18b is a triangular cylindrical guide rail 51 a leadership facility 10 shown. This can, for example, with the in 17a illustrated guide jaw 33 be used.

In 18c is a hexagonal cylindrical guide rail 52 a leadership facility 10 shown.

In 18d is a cross-sectionally oval guide rail 53 a leadership facility 10 shown.

In 19a is another embodiment of a guide jaw 33 shown. This also has a fastening portion 45 on, on a body 35 of the runner 9 is attached. Next, the guide jaw 33 a free end section 44 on, over a spring element 54 at the attachment section 45 is attached. Will a guide rail in between the free end section 44 and the attachment portion 45 formed recess, so the free end portion 44 be deflected from an equilibrium position, whereby the spring element 54 generates a spring force and the guide jaw 33 braced with the guide rail.

In 19b a guide jaw is shown in a further embodiment. This also has a free end section 44 on, over a spring element 54 with a fixing section 45 connected is. Here, the attachment portion form 45 and the free end section 44 a triangular-shaped in cross-section recess, in particular for receiving the in 18b illustrated guide rail 51 suitable is. Also in this embodiment, the guide jaw 33 with the guide rail 51 be tense.

In 20 is a probe arm 14 with a stylus tip 15 shown. On the probe arm 14 is a reflector 55 arranged. The device 1 has a light source 56 on, for example, on the static part 3 is arranged. The light source 56 is here on the reflector 55 aligned. Next, the device 1 a detector 57 on, that of the reflector 55 reflected light from the light source 56 detected. The detector 57 may for example be formed in a matrix, for example as a CCD chip or CMOS chip. Alternatively, position sensitive detectors, eg. B. so-called PSD can be used. The probe arm 14 is rotatably mounted about a rotation axis R. By means of the reflector 45 and the detector 57 can hereby on the one hand deflections of the probe arm 14 are detected, which occur during rotation about the axis of rotation R and thus unevenness of the surface 2 represent. However, also torsions of the probe arm can 14 be detected, for example, torsions about a central center line or longitudinal axis of the probe arm 14 , Includes the device 1 (please refer 1 For example, another device for detecting the rotation angle about the rotation axis R, so by means of the optical detection system, which by the light source 56 , the reflector 55 and the detector 57 is also determined, whether a central centerline or longitudinal axis of the probe arm 14 is curved.

Claims (12)

Device for detecting a roughness and / or a profile of a surface ( 2 ) of a measurement object comprising a static part ( 3 ), a movable part, at least one guide device ( 10 ) for guiding a linear movement of the movable part and a device for generating a drive energy for driving the movable part, wherein at least a part of at least one probe system for detecting the roughness and / or the profile is arranged on the movable part, wherein at least one energy transfer means the Drive energy to the movable part is transferable, wherein the at least one energy transfer means is a mechanical energy transfer means, wherein the mechanical energy transfer means is designed such that during an energy transfer to the movable part at least in a direction different from the desired direction of movement no force acts on the movable part wherein the at least one energy transmission means is designed as a mechanical force transmission means, wherein a force is transmitted via a single contact point between a drive device side contact element ( 8th ) and a contact element ( 12 ) of the movable part, characterized in that the drive device side contact element ( 8th ) a rounded contact surface and / or the contact element ( 12 ) of the movable part has a rounded contact surface, wherein the contact surfaces touch each other in the contact point for transmitting power. Apparatus according to claim 1, characterized in that the energy transfer means comprises at least one solid-body joint or is at least partially designed as a solid-body joint. Device according to one of claims 1 to 2, characterized in that the at least one energy transmission means is designed such that a maximum force acting on the movable member is less than a predetermined force. Device according to one of claims 1 to 3, characterized in that the device ( 1 ) comprises at least one means for adjusting a position of a probe element in a vertical direction (z) and / or means for adjusting an orientation of the probe element. Device according to one of claims 1 to 4, characterized in that the device ( 1 ) comprises at least one means for adjusting a sensing force. Device according to one of claims 1 to 5, characterized in that the device ( 1 ) comprises at least one device for detecting a position of the movable part. Device according to one of claims 1 to 6, characterized in that the device ( 1 ) comprises at least one device for detecting a relative position between the movable part and a probe element of the stylus system. Device according to one of claims 1 to 7, characterized in that the device comprises at least one support element ( 19 ) for the storage of the static part ( 3 ) on a workpiece. Device according to one of claims 1 to 8, characterized in that the device ( 1 ) at least one device for detecting a torsion of a probe arm ( 14 ) of the stylus system. Device according to one of claims 1 to 9, characterized in that elements of a guide device of the static part ( 3 ) and elements of a guide means of the movable member are movable relative to each other in at least one direction, which is different from the desired direction of movement. Device according to one of claims 1 to 10, characterized in that the movable part has two movably attached to each other part body, which are movably attached to each other in at least one direction which is different from the desired direction of movement. Method for detecting a roughness and / or a profile of a surface ( 2 ) of a measuring object by means of a device according to one of claims 1 to 11, wherein a scanning element arranged on a movable part of the device has a linear movement along the surface ( 2 ) of the measurement object is moved, wherein a device for generating a drive energy generates a drive energy for driving the movable part, wherein by means of a stylus system, the roughness and / or the profile of the surface ( 2 ), wherein the drive energy is transmitted to the movable part via at least one energy transfer means, wherein the at least one energy transfer means is a mechanical energy transfer means, wherein during a mechanical energy transfer to the movable part at least in a direction different from the desired direction of movement no force on the movable part acts, wherein the at least one energy transmission means is designed as a mechanical power transmission means, wherein a force via a single contact point between a drive device side contact element ( 8th ) and a contact element ( 12 ) of the movable part, characterized in that the drive device side contact element ( 8th ) a rounded contact surface and / or the contact element ( 12 ) of the movable part has a rounded contact surface, wherein the contact surfaces touch each other in the contact point for transmitting power.

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