DE102008034948A1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
DE102008034948A1
DE102008034948A1 DE102008034948A DE102008034948A DE102008034948A1 DE 102008034948 A1 DE102008034948 A1 DE 102008034948A1 DE 102008034948 A DE102008034948 A DE 102008034948A DE 102008034948 A DE102008034948 A DE 102008034948A DE 102008034948 A1 DE102008034948 A1 DE 102008034948A1
Authority
DE
Germany
Prior art keywords
vacuum pump
gas
shaft
pump according
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102008034948A
Other languages
German (de)
English (en)
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE102008034948A priority Critical patent/DE102008034948A1/de
Priority to EP09008726.3A priority patent/EP2148094B1/de
Priority to JP2009161689A priority patent/JP5566636B2/ja
Priority to US12/460,738 priority patent/US20100021324A1/en
Publication of DE102008034948A1 publication Critical patent/DE102008034948A1/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE102008034948A 2008-07-26 2008-07-26 Vakuumpumpe Ceased DE102008034948A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102008034948A DE102008034948A1 (de) 2008-07-26 2008-07-26 Vakuumpumpe
EP09008726.3A EP2148094B1 (de) 2008-07-26 2009-07-03 Vakuumpumpe
JP2009161689A JP5566636B2 (ja) 2008-07-26 2009-07-08 真空ポンプ
US12/460,738 US20100021324A1 (en) 2008-07-26 2009-07-22 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008034948A DE102008034948A1 (de) 2008-07-26 2008-07-26 Vakuumpumpe

Publications (1)

Publication Number Publication Date
DE102008034948A1 true DE102008034948A1 (de) 2010-01-28

Family

ID=41221612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102008034948A Ceased DE102008034948A1 (de) 2008-07-26 2008-07-26 Vakuumpumpe

Country Status (4)

Country Link
US (1) US20100021324A1 (ja)
EP (1) EP2148094B1 (ja)
JP (1) JP5566636B2 (ja)
DE (1) DE102008034948A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9222478B2 (en) * 2012-02-22 2015-12-29 Asia Vital Components Co., Ltd. Bladeless fan structure
KR101454083B1 (ko) * 2012-12-28 2014-10-21 삼성전기주식회사 전동 송풍기
WO2014125238A1 (en) * 2013-02-15 2014-08-21 Edwards Limited Vacuum pump
CN104019043A (zh) * 2014-06-20 2014-09-03 李晨 鼠笼螺杆式复合分子泵

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3150822A (en) * 1961-02-09 1964-09-29 Commissariat Energie Atomique Sealing and centering device for rotary shaft
JPS6255498A (ja) * 1985-09-05 1987-03-11 Asahi Glass Co Ltd セラミツクス製翼車
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
JPS63255592A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
JPH0198316U (ja) * 1987-12-21 1989-06-30
JPH0216396A (ja) * 1988-06-30 1990-01-19 Shimadzu Corp ターボ分子ポンプ
US5017022A (en) * 1988-11-09 1991-05-21 Allied-Signal, Inc. High temperature bearing
US5273368A (en) * 1990-11-13 1993-12-28 Matsushita Electric Industrial Co., Ltd. Hydrodynamic gas bearing
JPH0510289A (ja) * 1991-07-05 1993-01-19 Hitachi Koki Co Ltd 複合形ドライ真空ポンプ
US5793561A (en) * 1994-10-14 1998-08-11 Canon Kabushiki Kaisha Rotary drum assembly having dynamic-pressure generating mechanism between rotary shaft and bearing
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
JP3252792B2 (ja) * 1998-04-27 2002-02-04 株式会社島津製作所 ターボ形真空排気装置
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000249093A (ja) * 1999-02-26 2000-09-12 Daikin Ind Ltd 軸流式真空ポンプ
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
US20100021324A1 (en) 2010-01-28
EP2148094B1 (de) 2018-09-19
JP5566636B2 (ja) 2014-08-06
JP2010031857A (ja) 2010-02-12
EP2148094A3 (de) 2016-04-13
EP2148094A2 (de) 2010-01-27

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Legal Events

Date Code Title Description
OR8 Request for search as to paragraph 43 lit. 1 sentence 1 patent law
R163 Identified publications notified
R163 Identified publications notified

Effective date: 20140923

R012 Request for examination validly filed
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final