DE102008034299A1 - Licht emittierendes Bauelement auf Nitridbasis - Google Patents
Licht emittierendes Bauelement auf Nitridbasis Download PDFInfo
- Publication number
- DE102008034299A1 DE102008034299A1 DE102008034299A DE102008034299A DE102008034299A1 DE 102008034299 A1 DE102008034299 A1 DE 102008034299A1 DE 102008034299 A DE102008034299 A DE 102008034299A DE 102008034299 A DE102008034299 A DE 102008034299A DE 102008034299 A1 DE102008034299 A1 DE 102008034299A1
- Authority
- DE
- Germany
- Prior art keywords
- nitride
- type
- semiconductor layer
- layer
- based light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 87
- 239000004065 semiconductor Substances 0.000 claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000010410 layer Substances 0.000 description 90
- 238000000034 method Methods 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/815—Bodies having stress relaxation structures, e.g. buffer layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Led Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2007-0096081 | 2007-09-20 | ||
| KR1020070096081A KR20090030652A (ko) | 2007-09-20 | 2007-09-20 | 질화물계 발광소자 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102008034299A1 true DE102008034299A1 (de) | 2009-04-02 |
Family
ID=40384536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102008034299A Ceased DE102008034299A1 (de) | 2007-09-20 | 2008-07-23 | Licht emittierendes Bauelement auf Nitridbasis |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20090078961A1 (https=) |
| JP (1) | JP2009076864A (https=) |
| KR (1) | KR20090030652A (https=) |
| DE (1) | DE102008034299A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017224833A (ja) * | 2009-12-30 | 2017-12-21 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | オプトエレクトロニクス半導体チップおよびその製造方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102811157A (zh) * | 2011-06-01 | 2012-12-05 | 阿尔卡特朗讯公司 | 流量控制方法和流量控制装置 |
| US9159788B2 (en) | 2013-12-31 | 2015-10-13 | Industrial Technology Research Institute | Nitride semiconductor structure |
| US9112077B1 (en) | 2014-04-28 | 2015-08-18 | Industrial Technology Research Institute | Semiconductor structure |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980079320A (ko) * | 1997-03-24 | 1998-11-25 | 기다오까다까시 | 고품질 쥐에이엔계층의 선택성장방법, 고품질 쥐에이엔계층 성장기판 및 고품질 쥐에이엔계층 성장기판상에 제작하는 반도체디바이스 |
| JPH10326750A (ja) * | 1997-03-24 | 1998-12-08 | Mitsubishi Electric Corp | 高品質GaN系層の選択成長方法、高品質GaN系層成長基板および高品質GaN系層成長基板上に作製した半導体デバイス |
-
2007
- 2007-09-20 KR KR1020070096081A patent/KR20090030652A/ko not_active Ceased
-
2008
- 2008-07-15 US US12/173,319 patent/US20090078961A1/en not_active Abandoned
- 2008-07-15 JP JP2008183786A patent/JP2009076864A/ja active Pending
- 2008-07-23 DE DE102008034299A patent/DE102008034299A1/de not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017224833A (ja) * | 2009-12-30 | 2017-12-21 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | オプトエレクトロニクス半導体チップおよびその製造方法 |
| US10418355B2 (en) | 2009-12-30 | 2019-09-17 | Osram Opto Semiconductors Gmbh | Optoelectronic semiconductor chip and method for fabrication thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009076864A (ja) | 2009-04-09 |
| US20090078961A1 (en) | 2009-03-26 |
| KR20090030652A (ko) | 2009-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE10223797B4 (de) | Licht emittierende III-Nitrid-Anordnungen mit niedriger Ansteuerspannung und Herstellverfahren dafür | |
| DE19725578B4 (de) | Reduzierung der Rißbildung im Material von III-V-Nitrid-Halbleiterbauelementen bei gleichzeitiger Maximierung der elektrischen Dotierung | |
| DE69735078T2 (de) | Herstellungsverfahren einer Lichtemittierende Vorrichtung | |
| DE69637304T2 (de) | Lichtemittierende Halbleitervorrichtung bestehend aus einer III-V Nitridverbindung | |
| DE102014115599A1 (de) | Halbleitervorrichtung und Verfahren zu deren Herstellung | |
| US9029832B2 (en) | Group III nitride semiconductor light-emitting device and method for producing the same | |
| DE112016004375T5 (de) | Lichtemittierendes nitrid-halbleiter-element | |
| DE102011114665B4 (de) | Verfahren zur Herstellung eines optoelektronischen Nitrid-Verbindungshalbleiter-Bauelements | |
| DE202004021874U1 (de) | Eine lichtemittierende Vorrichtung unter Verwendung eines Nitridhalbleiters | |
| DE102006000150B4 (de) | Verfahren zur Ausbildung einer bei einer niedrigen Temperatur gewachsenen Pufferschicht | |
| WO2011117056A1 (de) | Strahlungsemittierendes halbleiterbauelement und verfahren zur herstellung eines strahlungsemittierenden halbleiterbauelements | |
| DE112012001618T5 (de) | Gestapelter Halbleiterkörper, Verfahren zum Herstellen desselben und Halbleiterelement | |
| DE112005002133T5 (de) | Schichtstapelstruktur mit Gruppe-III-Nitridhalbleitern vom N-Typ | |
| DE112007000313T5 (de) | Verfahren zum Aufwachsenlassen von Halbleiter-Heterostrukturen auf der Basis von Galliumnitrid | |
| DE112015003419T5 (de) | Epitaxie-Struktur zur Verbesserung eines Wirkungsgradabfalls von GaN-basierten LEDs | |
| DE112011101156T5 (de) | Leuchtdiodenelement und Leuchtdiodenvorrichtung | |
| DE112005002319T5 (de) | Gruppe-III-V-Verbindungshalbleiter und Verfahren zur Herstellung desselben | |
| DE19932201A1 (de) | Photonische Halbleitervorrichtung | |
| DE112014002691B4 (de) | Anregungsbereich, der Nanopunkte (auch als "Quantenpunkte" bezeichnet) in einem Matrixkristall umfasst, der auf Si-Substrat gezüchtet wurde und aus AlyInxGa1-y-xN-Kristall (y ≧ 0, x > 0) mit Zinkblendestruktur (auch als "kubisch" bezeichnet) besteht, und lichtemittierende Vorrichtung (LED und LD), die unter Verwendung desselben erhalten wurde | |
| DE102008034299A1 (de) | Licht emittierendes Bauelement auf Nitridbasis | |
| DE102012215135A1 (de) | Lichtemittierendes Bauelement aus einem Nitridhalbleiter und Verfahren zur Herstellung desselben | |
| DE112004000936T5 (de) | Verbindungshalbleiter und Verfahren zur Herstellung desselben | |
| WO2010081754A1 (de) | Optoelektronisches halbleiterbauelement | |
| DE69522026T2 (de) | Lichtemittierende Halbleitervorrichtung mit Verbindung aus Stickstoff und Elementen der Gruppe III | |
| DE102004046788A1 (de) | Pufferschicht auf Basis eines ternären Nitrids eines Lichtemissions-Bauteils auf Nitridbasis, und Verfahren zum Herstellen derselben |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| R016 | Response to examination communication | ||
| R002 | Refusal decision in examination/registration proceedings | ||
| R006 | Appeal filed | ||
| R008 | Case pending at federal patent court | ||
| R082 | Change of representative |
Representative=s name: PATENTANWAELTE STOLMAR & PARTNER, DE |
|
| R081 | Change of applicant/patentee |
Owner name: SEOUL VIOSYS CO., LTD., ANSAN-SI, KR Free format text: FORMER OWNER: SEOUL OPTO DEVICE CO. LTD., ANSAN, KYONGGI, KR Effective date: 20140310 Owner name: SEOUL VIOSYS CO., LTD., KR Free format text: FORMER OWNER: SEOUL OPTO DEVICE CO. LTD., ANSAN, KR Effective date: 20140310 |
|
| R082 | Change of representative |
Representative=s name: STOLMAR & PARTNER PATENTANWAELTE PARTG MBB, DE Effective date: 20140310 Representative=s name: PATENTANWAELTE STOLMAR & PARTNER, DE Effective date: 20140310 |
|
| R003 | Refusal decision now final | ||
| R011 | All appeals rejected, refused or otherwise settled |