DE102008027281A1 - Regulating valve has valve body with through hole on longitudinal axis, where through hole is limited by lateral area and valve disk, which is pivoted between closing position and opening position - Google Patents

Abstract

The regulating valve has a valve body (1) with a through hole (2) on a longitudinal axis (4). The through hole is limited by a lateral area (3). A valve disk (5) is pivoted between a closing position and an opening position around a rotational axis (7). The valve disk has a circulating groove provided at an external circumferential wall (11). A gasket (6) is arranged in the groove of the valve disk. The gasket has end sections applied to the circumferential direction of the gasket. The end sections are overlapped with each other. The gasket is made up of a plastic.

Description

The The invention relates to a control valve comprising a valve body with a longitudinal axis having through opening, which is bounded by a lateral surface, a valve plate, the between a closed position and an open position is rotatable about an axis of rotation and that on its outer Circumferential wall has a circumferential groove, and one in the groove of the Valve plate arranged sealing ring, which in the closed position the valve disk rests against the lateral surface of the valve body.

Such a control valve is out of WO 02/40903 A1 known. To open the vacuum valve, the valve stem, on which the valve disk is mounted, is rotated about its longitudinal axis, so that the valve disc located in the passage opening of the valve body comes to rest parallel to the longitudinal axis of the passage opening. To close the valve, the valve disk is set at right angles to the longitudinal axis of the passage opening. Such valves are also referred to as butterfly valves or flapper valves. That from the WO 02/40903 A1 known butterfly valve is used to control a gas flow, in particular a process gas in the semiconductor industry. In the circumferential groove of the valve disk, a sealing ring is arranged, which is formed circumferentially closed in one embodiment. This preferably made of metal, especially steel existing sealing ring is pressed in the closed position of the valve disk to the lateral surface of the passage opening, whereby it can be pressed deeper into the groove. To facilitate this indentation extending through the valve disc opening is provided which opens into the space between the sealing ring and the bottom of the groove. Nevertheless, only small tolerances can be accommodated by this construction, so that the production of the valve seat and the valve disc with the arranged in the groove sealing ring are correspondingly expensive. In a further embodiment, the sealing ring is formed circumferentially open, wherein the two ends of the sealing ring are spaced apart in the circumferential direction of the sealing ring and have a gap between them. This gap leads to a relatively large minimum conductance of the valve in the closed position of the valve disk.

Another butterfly valve for controlling a gas flow is from the WO 01/75341 A2 known. On the outer peripheral wall of the valve disk, a circumferential groove is formed, in which a circumferentially closed relatively complicated trained sealing ring is arranged. This comprises a toroidal resilient part made of steel and a part of this at least partially surrounding casing made of a plastic material.

From the DE 37 06 590 A1 a butterfly valve is known in which in a circumferential groove formed on the outer peripheral wall of the valve disk, a sealing ring is arranged, which is formed of an elastic material in the form of a hollow profile. For pressing the sealing ring against the valve seat, a working medium can be introduced into the interior of the sealing ring forming the hollow profile. The US 2,980,388 shows a particular for regulating the flow through hydraulic lines serving flap valve, wherein the valve disc is in turn attached to a surrounding seal. Other butterfly or flap valves are for example from the EP 0 459 509 B1 and DE 2 023 960 A known. Also in one embodiment of the US 6,698,719 B2 is shown a flap valve with a sealing ring surrounding the valve disc. Such butterfly valves are known in many different embodiments.

The US 6,902,145 B2 further shows a non-generic control slide valve, in particular pendulum slide, for controlling a gas flow. A valve plate can be displaced between an initial position in which it releases the valve opening and is arranged laterally of this and an end position in which it completely covers the valve opening, this displacement path forming the control range of the valve. On one of the two side surfaces of the valve plate, an abutment ring projecting axially over the side surface of the valve plate is arranged in a circular groove formed in the side surface of the valve plate. The abutment ring is pressed against the force of him axially acting spring elements. Without a force acting on the contact ring force, it is biased by the spring elements against a stop, by which the axial displacement of the contact ring is limited. The existing in particular PTFE (Teflon) abutment ring is designed to allow a thermal expansion divided, wherein it has circumferentially overlapping end portions.

task The invention is a for controlling gas flows provide suitable control valve of the type mentioned, which allows for a simple, reliable and long service life Training a small residual conductance in the closed state having. According to the invention, this is achieved by a Control valve with the features of claim 1.

Due to the formation of the sealing ring with circumferentially overlapping end portions which are mutually displaceable to change the diameter of the sealing ring, a relatively large change in diameter of the sealing ring can be made possible, yet a small Leit value is achievable in the closed position of the valve disk.

In an advantageous embodiment of the invention is a the radial expansion of the sealing ring limiting radial stop present, with the sealing ring in its passive position, he occupies in the open position of the valve disk, against this radial stop is biased. Preferably, this bias is at least a separate spring element caused, which the sealing ring acted upon against the radial stop. In an advantageous embodiment an elongated spring element is provided, which at least the majority (more than 50%) extends the circumference of the sealing ring. The long stretched Spring element, for example, as a split (slotted) ring be formed of spring wire. It is conceivable and possible it is also to design the sealing ring itself resilient.

Of the Radial stop can conveniently by a the valve plate at least a large part (more than 50%) of his Surround surrounding stop ring are formed.

Of the the radial expansion of the sealing ring limiting radial stop This may conveniently be a split stop ring be formed of a resilient material on the Valve plate is placed circumferentially and through its Spring elasticity is held on the valve disk. A simple one Assembly and disassembly is made possible.

Preferably If the sealing ring made of plastic, such as PTFE (Teflon). The sealing ring may, for example, only partially made of plastic, z. As PTFE (Teflon), be formed, advantageously at least in the area of its outer surface, with the he in the closed position of the valve disk on the passage opening limiting lateral surface the valve body rests.

Further Advantages and details of the invention are described below explained in the accompanying drawings. In this show:

1 an oblique view of a control valve according to the invention in the closed state;

2 a front view of the control valve of 1 , without the adjusting device for adjusting the rotational position of the valve disk;

3 a section along the line AA of 2 ;

4 an enlarged section of 3 ;

5 a section along the line BB of 2 ;

6 a front view of the control valve, without the adjusting device, in the open state of the control valve;

7 a section along the line CC of 6 ;

8th a section along the line DD of 5 ;

9 an enlarged detail E of the valve disk 8th ;

10 an enlarged detail F of the valve disk of 8th ;

11 a section along the line GG of 5 ;

12 an enlarged detail H of the valve disk 11 ;

13 an oblique view of the control valve (the adjusting device only partially shown) in the open state of the control valve;

14 an enlarged detail I off 13 ,

The Figures have different scales.

An embodiment of a control valve according to the invention is in the 1 to 14 shown. The control valve has a valve body 1 with a passage opening 2 from a lateral surface 3 of the valve body 1 is limited and a longitudinal axis 4 having.

In the passage opening 2 is a valve plate 5 arranged circumferentially with a sealing ring 6 is provided. In the closed state of the control valve covers the valve plate 5 with the sealing ring 6 the passage opening 2 , wherein the sealing ring 6 on the one valve seat forming lateral surface 3 is applied. When opening the control valve, the valve disc remains 5 in the passage opening 2 , But is opposite its closed position, which it occupies in the closed state of the control valve to a transversely, preferably at right angles, to the longitudinal axis 4 lying axis of rotation 7 turned. Preferably, the valve plate 5 in its open position, which it occupies in the widest possible open state of the valve, parallel to the longitudinal axis 4 the passage opening 2 aligned. Such a valve in which the valve disc 5 is rotated to close and open and this in its open position in the passage opening 2 remains as a butterfly valve or Flap valve referred to.

The valve plate 5 is at one out of the vacuum region of the valve through a rotary feedthrough valve stem 8th attached, which is rotatable about its longitudinal axis, which is the axis of rotation 7 of the valve disk 5 forms to open and close the valve, as is known. For this purpose, an actuator of an actuating device is used 10 , which may be formed in a conventional manner and will not be explained in detail. By means of the adjusting device 10 can the valve plate 5 in defined rotational positions with respect to its axis of rotation 7 to be brought.

In 5 is the direction of rotation of the valve disk 5 starting from its closed position in the direction of its open position indicated by arrows.

The valve plate 5 is on its outer peripheral wall 11 , which is the longitudinal center axis of the valve disk 5 surrounds and the narrow side of the valve disk 5 forms, with a circumferential, ie annular groove 12 Mistake. The outer peripheral wall 11 of the valve disk 5 can also be used as the lateral surface of the valve disk 5 be designated.

The sealing ring 6 is in the groove 12 arranged, wherein he, based on the radial direction of the valve disk 5 , from the groove 12 protrudes. The outer circumference of the sealing ring 6 So has a larger radial extent than the valve plate 5 , Furthermore, the inner circumference of the sealing ring has 6 a greater radial extent than the bottom of the groove 12 (if the sealing ring 6 at the radial stop described below 19 is applied), so that between the sealing ring 6 and the bottom of the groove 12 a gap 9 present to a pressing in of the sealing ring 6 to reduce its diameter.

The sealing ring 6 is by a circumferential direction of the sealing ring 6 elongated spring element 13 acted upon, which is formed in the embodiment shown by a spring wire. This is in the form of a divided, preferably circumferentially open ring and extends, in the case of the peripheral open training apart from a gap 14 (see. 9 ), over which its two ends are spaced apart, over the entire circumference of the sealing ring 6 and is located on an inner, ie the center of the valve disk 5 facing surface of the sealing ring 6 at. For example, how best 4 visible on this inner surface of the sealing ring 6 a circumferentially extending groove may be present in which the spring element 13 lies (see eg 4 ).

By the at least one spring element 13 becomes the sealing ring 6 in its passive position, which he in the open position of the valve disk 5 and when closing the valve disk 5 up to the position of the valve disk 5 occupies, in which the sealing ring 6 for contact with the lateral surface 3 reached, against the radial stop described below 19 biased. The at least one spring element 13 acts in the sense of a circumferential enlargement of the sealing ring 6 on this one.

The sealing ring 6 does not rigidly connected but rather mutually displaceable ends 15 . 16 on. This overlap at the ends 15 . 16 subsequent end sections 17 . 18 based on the circumferential direction of the sealing ring 6 , The end sections 17 . 18 are against each other in the circumferential direction of the sealing ring 6 displaceable, so that the diameter of the sealing ring 6 under displacement of the end sections 17 . 18 is changeable, wherein the overlap length of the end portions in a change in the diameter of the sealing ring 6 changes.

The sealing ring can thus also as a divided, but by the overlapping end portions 17 . 18 total circumferentially closed ring can be referred to.

To limit the increase in the diameter of the sealing ring 6 serves a radial stop 19 , This is in the illustrated embodiment of a resilient stop ring 20 formed on the outer peripheral wall 11 of the valve disk 5 snapped and partly over the groove 12 protrudes. This is followed by the side wall of the groove 12 a recess in the peripheral wall 11 which has a smaller depth than the groove 12 has and in the stop ring 20 is arranged. The sealing ring 6 has one under the stop ring 20 protruding projection 21 on, its outer surface with the radial stop 19 interacts.

To enable the insertion of the stop ring 20 to the at the groove 12 adjacent recess is the stop ring 20 divided, in the illustrated embodiment circumferentially open, formed (see 23 in 12 ) so that it can be increased in diameter.

It would be conceivable and possible, for example, instead of using a stop ring 20 the valve plate 5 to form a plurality of parts, to a radial stop for limiting the radial extent of the sealing ring 6 train.

The end sections 17 . 18 of the sealing ring 6 lie in the axial direction of the valve disk 5 or, if the valve disk 5 in its closed position, in the direction of the longitudinal axis 4 the passage opening 2 side by side. In this case, they are adjacent to each other or have only a very small gap between them in order to keep the smallest possible ver in the closed state of the control valve to achieve a constant conductance.

The end sections 17 . 18 each have one in the axial direction of the valve disk 5 or, if the valve disk 5 in its closed position, in the direction of the longitudinal axis 4 the passage opening 2 measured width, which is smaller than the width of the sealing ring 6 in a middle area between its end sections 17 . 18 , Here, the end sections 17 . 18 in a groove 12 can be used, which is formed over its entire extent with a constant width.

When the valve plate 5 located in its closed position and the sealing ring 6 to the valve seat forming lateral surface 3 the passage opening 2 is applied, so the sealing ring 6 be somewhat depressed over its entire circumference or part of its circumference, ie it is in this peripheral region of the radial stop 19 spaced (not shown in the 3 to 5 ). As a result, tolerances can be effectively absorbed, while still a small minimum conductance in the closed position of the valve disk 5 can be achieved.

The sealing ring 6 consists in the embodiment shown throughout of plastic. It is preferably a non-rubbery material. For example, the sealing ring 6 be formed of PTFE (Teflon). It is also conceivable and possible, the sealing ring 6 only partially, in particular at least in the region of its outer surface 22 of the sealing ring 6 , which in the closed position of the valve disk 5 in contact with the lateral surface 3 the passage opening 2 passes, from a plastic, preferably non-rubbery plastic, for example, PTFE (Teflon) form.

The spring element 13 and the stop ring 20 may be formed, for example, spring steel.

The remaining conductance of the valve in its closed state, ie in the closed position of the valve disk 5 , may for example be in the range between 0.2 l / sec and 3 l / sec (for nitrogen). It can be achieved by a very small minimum controllable conductance of the valve.

In the embodiment shown, the axis of rotation 7 of the valve stem 8th perpendicular to the longitudinal axis 4 the passage opening 2 and parallel to the median plane of the sealing ring 6 or is aligned parallel to the plane of the valve seat, from the median plane of the sealing ring 6 or plane of the valve seat spaced (distance a in 5 ). Furthermore, the axis of rotation runs 7 at a distance b at the longitudinal axis 4 the passage opening 2 over, ie the axis of rotation 7 and the longitudinal axis 4 have no point in common and are not in a plane, but these straight lines approach their course only to a minimum distance b. The valve stem 8th is thus "double eccentric" on the valve plate 5 appropriate. When the control valve, starting from the closed position of the valve disk 5 is opened, so the valve plate rises 5 very quickly from the lateral surface 3 of the valve body 1 from.

The outer surface 22 of the sealing ring 6 and the lateral surface 3 in the contact area of the outer surface 22 of the sealing ring 6 in the closed position of the valve disk 5 (ie the valve seat) are conical in the embodiment shown.

Conceivable and possible are other than the described "double eccentric" attachment of the valve stem 8th on the valve plate 5 , for example, just "eccentric". Other than conical designs of the outer sealing surface 22 and the sealing seat are conceivable and possible.

One Inventive control valve is used for control of gas streams in vacuum technology, in particular It is used to control process gases in the semiconductor industry. Such process gases can be chemically aggressive, with a inventive control valve with a high resistance can be formed against aggressive process gases.

Instead of a spring wire could also other elongated spring elements 13 for preloading the sealing ring 6 against the radial stop 19 be provided, which is preferably at least over most of the circumference of the sealing ring 6 extend. Such spring elements could also be at the bottom of the groove 12 support. Instead of a single elongate spring element 13 could also be several, optionally elongated, spring elements may be present.

The sealing ring 6 could also be formed even resilient, for example, by an embedded in a plastic material part of spring steel.

1

valve body

2

Through opening

3

lateral surface

4

longitudinal axis

5

valve disc

6

seal

7

axis of rotation

8th

valve stem

9

gap

10

setting device

11

peripheral wall

12

groove

13

spring element

14

gap

15

The End

16

The End

17

end

18

end

19

radial stop

20

stop ring

21

head Start

22

outer surface

23

gap

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited patent literature

• WO 02/40903 A1 [0002, 0002]
• WO 01/75341 A2 [0003]
• - DE 3706590 A1 [0004]
• - US 2980388 [0004]
• EP 0459509 B1 [0004]
• - DE 2023960 A [0004]
• - US 6698719 B2 [0004]
• - US 6902145 B2 [0005]

Claims (13)

Control valve comprising a valve body ( 1 ) with a longitudinal axis ( 4 ) having passage opening ( 2 ), which from a lateral surface ( 3 ) is limited, a valve disc ( 5 ), which between a closed position and an open position about a rotation axis ( 7 ) is rotatable and on its outer peripheral wall ( 11 ) a circumferential groove ( 12 ), and one in the groove ( 12 ) of the valve disk ( 5 ) arranged sealing ring ( 6 ), which in the closed position of the valve disc ( 5 ) on the lateral surface ( 3 ) of the valve body ( 1 ) is applied, characterized in that the sealing ring ( 6 ) relative to the circumferential direction of the sealing ring ( 6 ) overlapping end sections ( 17 . 18 ), which are mutually displaceable. Control valve according to claim 1, characterized in that the overlapping end sections ( 17 . 18 ) with respect to the direction of the longitudinal axis ( 4 ) of the passage opening ( 2 ) and the closed position of the valve disk ( 5 ) are next to each other. Control valve according to claim 2, characterized in that in a respective end section ( 17 . 18 ) of the sealing ring ( 6 ) the width of the sealing ring ( 6 ), which in the closed position of the valve disk ( 5 ) in the direction of the longitudinal axis ( 4 ) of the passage opening ( 2 ) is measured against one between the end sections ( 17 . 18 ) lying middle section of the sealing ring ( 6 ) is reduced. Control valve according to one of claims 1 to 3, characterized in that a radial stop ( 19 ), which increases the diameter of the sealing ring ( 6 ) limited. Control valve according to claim 4, characterized in that in a passive position of the sealing ring ( 6 ), this in the open position of the valve disc ( 5 ), the sealing ring ( 6 ) against the radial stop ( 19 ) is biased. Control valve according to claim 5, characterized in that at least one in the radial direction of the sealing ring ( 6 ) on this acting spring element ( 13 ) is available. Control valve according to claim 6, characterized in that the spring element ( 13 ) of at least a majority of the circumference of the sealing ring ( 6 ) and on an inner surface of the sealing ring ( 6 ) on this adjacent longitudinally extending spring element ( 13 ) is formed. Control valve according to claim 7, characterized in that the longitudinally extended spring element ( 13 ) is formed by a spring wire. Control valve according to one of claims 4 to 8, characterized in that the radial stop ( 19 ) of a the valve plate ( 5 ) at least over a large part of its circumference surrounding stop ring ( 20 ) is formed. Control valve according to claim 9, characterized in that the split stop ring ( 20 ) on the peripheral wall ( 11 ) of the valve disk ( 5 ) is arranged, wherein it over an edge region of the groove ( 12 protrudes. Control valve according to claim 10, characterized in that the stop ring ( 20 ) in one the peripheral wall ( 11 ) of the valve disk ( 5 ) is arranged surrounding recess. Control valve according to one of claims 1 to 10, characterized in that the sealing ring ( 6 ) comprises a plastic material or consists entirely of plastic. Control valve according to claim 12, characterized in that the sealing ring ( 6 ) at least in the region of an outer surface ( 22 ), with which he in the closed position on the lateral surface ( 3 ) of the valve body ( 1 ) is applied, is formed of plastic.