DE102008008559A1 - Interferometer - Google Patents

Interferometer Download PDF

Info

Publication number
DE102008008559A1
DE102008008559A1 DE200810008559 DE102008008559A DE102008008559A1 DE 102008008559 A1 DE102008008559 A1 DE 102008008559A1 DE 200810008559 DE200810008559 DE 200810008559 DE 102008008559 A DE102008008559 A DE 102008008559A DE 102008008559 A1 DE102008008559 A1 DE 102008008559A1
Authority
DE
Germany
Prior art keywords
light source
pulse
interferometer
light
interferometer according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE200810008559
Other languages
German (de)
English (en)
Inventor
Jonathan Becker
Matthias Fleischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE200810008559 priority Critical patent/DE102008008559A1/de
Priority to PCT/EP2009/050716 priority patent/WO2009098126A1/fr
Publication of DE102008008559A1 publication Critical patent/DE102008008559A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069—Synchronization of light source or manipulator and detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G01B9/02014—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation by using pulsed light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02076—Caused by motion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE200810008559 2008-02-08 2008-02-08 Interferometer Withdrawn DE102008008559A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE200810008559 DE102008008559A1 (de) 2008-02-08 2008-02-08 Interferometer
PCT/EP2009/050716 WO2009098126A1 (fr) 2008-02-08 2009-01-22 Interféromètre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200810008559 DE102008008559A1 (de) 2008-02-08 2008-02-08 Interferometer

Publications (1)

Publication Number Publication Date
DE102008008559A1 true DE102008008559A1 (de) 2009-08-13

Family

ID=40410204

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200810008559 Withdrawn DE102008008559A1 (de) 2008-02-08 2008-02-08 Interferometer

Country Status (2)

Country Link
DE (1) DE102008008559A1 (fr)
WO (1) WO2009098126A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008001482A1 (de) 2008-04-30 2009-11-05 Robert Bosch Gmbh Interferometrische Anordnung sowie Verfahren zum Einstellen eines Gangunterschieds

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10321887A1 (de) 2003-05-07 2004-12-02 Universität Stuttgart Robuster optischer Sensor und Verfahren zur Hochgeschwindigkeits-Detektion

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6556305B1 (en) * 2000-02-17 2003-04-29 Veeco Instruments, Inc. Pulsed source scanning interferometer
US6889075B2 (en) * 2000-05-03 2005-05-03 Rocky Mountain Biosystems, Inc. Optical imaging of subsurface anatomical structures and biomolecules
EP1970694B1 (fr) * 2005-12-07 2014-05-14 Kabushiki Kaisha TOPCON Instrument de mesure d'image optique

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10321887A1 (de) 2003-05-07 2004-12-02 Universität Stuttgart Robuster optischer Sensor und Verfahren zur Hochgeschwindigkeits-Detektion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008001482A1 (de) 2008-04-30 2009-11-05 Robert Bosch Gmbh Interferometrische Anordnung sowie Verfahren zum Einstellen eines Gangunterschieds

Also Published As

Publication number Publication date
WO2009098126A1 (fr) 2009-08-13

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Legal Events

Date Code Title Description
R005 Application deemed withdrawn due to failure to request examination
R005 Application deemed withdrawn due to failure to request examination

Effective date: 20150210