DE102007053296A1 - Halbleitervorrichtung mit Winkelreflektor - Google Patents

Halbleitervorrichtung mit Winkelreflektor Download PDF

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Publication number
DE102007053296A1
DE102007053296A1 DE102007053296A DE102007053296A DE102007053296A1 DE 102007053296 A1 DE102007053296 A1 DE 102007053296A1 DE 102007053296 A DE102007053296 A DE 102007053296A DE 102007053296 A DE102007053296 A DE 102007053296A DE 102007053296 A1 DE102007053296 A1 DE 102007053296A1
Authority
DE
Germany
Prior art keywords
semiconductor laser
laser device
angle
radiation
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007053296A
Other languages
German (de)
English (en)
Inventor
Hans Dr. Lindberg
Stefan Dr. Illek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram International GmbH
Original Assignee
Osram Opto Semiconductors GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Opto Semiconductors GmbH filed Critical Osram Opto Semiconductors GmbH
Priority to DE102007053296A priority Critical patent/DE102007053296A1/de
Priority to EP08013780A priority patent/EP2037549A3/de
Priority to JP2008231300A priority patent/JP2009071307A/ja
Priority to US12/208,814 priority patent/US7756188B2/en
Publication of DE102007053296A1 publication Critical patent/DE102007053296A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/041—Optical pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1071—Ring-lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1082—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
    • H01S5/1085—Oblique facets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H01S5/4056—Edge-emitting structures emitting light in more than one direction

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
DE102007053296A 2007-09-11 2007-11-08 Halbleitervorrichtung mit Winkelreflektor Withdrawn DE102007053296A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102007053296A DE102007053296A1 (de) 2007-09-11 2007-11-08 Halbleitervorrichtung mit Winkelreflektor
EP08013780A EP2037549A3 (de) 2007-09-11 2008-07-31 Halbleitervorrichtung mit Winkelreflektor
JP2008231300A JP2009071307A (ja) 2007-09-11 2008-09-09 コーナーリフレクタを有する半導体装置
US12/208,814 US7756188B2 (en) 2007-09-11 2008-09-11 Semiconductor device with corner reflector

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007043189 2007-09-11
DE102007043189.0 2007-09-11
DE102007053296A DE102007053296A1 (de) 2007-09-11 2007-11-08 Halbleitervorrichtung mit Winkelreflektor

Publications (1)

Publication Number Publication Date
DE102007053296A1 true DE102007053296A1 (de) 2009-03-12

Family

ID=40340185

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007053296A Withdrawn DE102007053296A1 (de) 2007-09-11 2007-11-08 Halbleitervorrichtung mit Winkelreflektor

Country Status (4)

Country Link
US (1) US7756188B2 (https=)
EP (1) EP2037549A3 (https=)
JP (1) JP2009071307A (https=)
DE (1) DE102007053296A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020075935A1 (en) * 2000-12-15 2002-06-20 Clayton Richard D. Lateral optical pumping of vertical cavity surface emitting laser
DE10241192A1 (de) * 2002-09-05 2004-03-11 Osram Opto Semiconductors Gmbh Optisch gepumpte strahlungsemittierende Halbleitervorrichtung und Verfahren zu deren Herstellung
US20040156413A1 (en) * 2000-06-01 2004-08-12 Henrichs Joseph R. Folded cavity surface-emitting laser
US20050008056A1 (en) * 2000-05-30 2005-01-13 Tony Albrecht Optically pumped, surface-emitting semiconductor laser device and method for the manufacture thereof
WO2005048423A1 (de) 2003-11-13 2005-05-26 Osram Opto Semiconductors Gmbh Optisch gepumpte halbleiterlaservorrichtung
US7035508B2 (en) 2003-04-18 2006-04-25 Metrophotonics Inc. Waveguide structure having improved reflective mirror features

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108384A (ja) 1982-12-13 1984-06-22 Matsushita Electric Ind Co Ltd 光帰還型半導体レ−ザ装置
US4851368A (en) * 1987-12-04 1989-07-25 Cornell Research Foundation, Inc. Method of making travelling wave semi-conductor laser
EP0598966B1 (en) * 1992-11-24 1999-02-10 International Business Machines Corporation Optical waveguide isolator
JP3559680B2 (ja) * 1997-04-25 2004-09-02 キヤノン株式会社 リング共振器型面発光半導体レーザ及びその製造法
JP3858367B2 (ja) 1997-06-09 2006-12-13 三菱電機株式会社 周波数混合器及びこの周波数混合器を用いた送信装置、受信装置、送受信装置
JP2002313783A (ja) * 2001-04-12 2002-10-25 Canon Inc 多角形半導体リングレーザの作製方法及び多角形半導体リングレーザ、多角形半導体リングレーザジャイロ
US6680961B2 (en) * 2001-08-01 2004-01-20 Binoptics, Inc. Curved waveguide ring laser
DE10214120B4 (de) * 2002-03-28 2007-06-06 Osram Opto Semiconductors Gmbh Optisch pumpbare oberflächenemittierende Halbleiterlaservorrichtung
TW595059B (en) * 2002-05-03 2004-06-21 Osram Opto Semiconductors Gmbh Optically pumped semiconductor laser device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050008056A1 (en) * 2000-05-30 2005-01-13 Tony Albrecht Optically pumped, surface-emitting semiconductor laser device and method for the manufacture thereof
US20040156413A1 (en) * 2000-06-01 2004-08-12 Henrichs Joseph R. Folded cavity surface-emitting laser
US20020075935A1 (en) * 2000-12-15 2002-06-20 Clayton Richard D. Lateral optical pumping of vertical cavity surface emitting laser
DE10241192A1 (de) * 2002-09-05 2004-03-11 Osram Opto Semiconductors Gmbh Optisch gepumpte strahlungsemittierende Halbleitervorrichtung und Verfahren zu deren Herstellung
US7035508B2 (en) 2003-04-18 2006-04-25 Metrophotonics Inc. Waveguide structure having improved reflective mirror features
WO2005048423A1 (de) 2003-11-13 2005-05-26 Osram Opto Semiconductors Gmbh Optisch gepumpte halbleiterlaservorrichtung

Also Published As

Publication number Publication date
US7756188B2 (en) 2010-07-13
US20090080481A1 (en) 2009-03-26
EP2037549A2 (de) 2009-03-18
JP2009071307A (ja) 2009-04-02
EP2037549A3 (de) 2011-05-18

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R005 Application deemed withdrawn due to failure to request examination
R005 Application deemed withdrawn due to failure to request examination

Effective date: 20141111