DE102007017212A1 - Verfahren und Vorrichtung zur Kühlung eines Gases - Google Patents
Verfahren und Vorrichtung zur Kühlung eines Gases Download PDFInfo
- Publication number
- DE102007017212A1 DE102007017212A1 DE102007017212A DE102007017212A DE102007017212A1 DE 102007017212 A1 DE102007017212 A1 DE 102007017212A1 DE 102007017212 A DE102007017212 A DE 102007017212A DE 102007017212 A DE102007017212 A DE 102007017212A DE 102007017212 A1 DE102007017212 A1 DE 102007017212A1
- Authority
- DE
- Germany
- Prior art keywords
- gas
- vacuum
- cooling medium
- nozzle
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000001816 cooling Methods 0.000 title claims abstract description 34
- 239000002826 coolant Substances 0.000 claims abstract description 52
- 239000007789 gas Substances 0.000 claims description 112
- 230000005855 radiation Effects 0.000 claims description 15
- 230000003993 interaction Effects 0.000 claims description 12
- 238000009835 boiling Methods 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 239000008188 pellet Substances 0.000 abstract description 54
- 239000007788 liquid Substances 0.000 abstract description 19
- 239000007787 solid Substances 0.000 abstract description 7
- 239000013077 target material Substances 0.000 abstract description 4
- 210000002381 plasma Anatomy 0.000 description 19
- 239000001257 hydrogen Substances 0.000 description 13
- 229910052739 hydrogen Inorganic materials 0.000 description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000012808 vapor phase Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 206010024264 Lethargy Diseases 0.000 description 1
- 208000025174 PANDAS Diseases 0.000 description 1
- 208000021155 Paediatric autoimmune neuropsychiatric disorders associated with streptococcal infection Diseases 0.000 description 1
- 240000000220 Panda oleosa Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/0002—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the fluid to be liquefied
- F25J1/0005—Light or noble gases
- F25J1/001—Hydrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0221—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process using the cold stored in an external cryogenic component in an open refrigeration loop
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0257—Construction and layout of liquefaction equipments, e.g. valves, machines
- F25J1/0275—Construction and layout of liquefaction equipments, e.g. valves, machines adapted for special use of the liquefaction unit, e.g. portable or transportable devices
- F25J1/0276—Laboratory or other miniature devices
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/11—Details
- G21B1/19—Targets for producing thermonuclear fusion reactions, e.g. pellets for irradiation by laser or charged particle beams
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/17—Re-condensers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/20—Processes or apparatus using other separation and/or other processing means using solidification of components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2210/00—Processes characterised by the type or other details of the feed stream
- F25J2210/42—Nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2240/00—Processes or apparatus involving steps for expanding of process streams
- F25J2240/40—Expansion without extracting work, i.e. isenthalpic throttling, e.g. JT valve, regulating valve or venturi, or isentropic nozzle, e.g. Laval
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
- F25J2290/12—Particular process parameters like pressure, temperature, ratios
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- X-Ray Techniques (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Particle Accelerators (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007017212A DE102007017212A1 (de) | 2007-04-12 | 2007-04-12 | Verfahren und Vorrichtung zur Kühlung eines Gases |
| EP08734447A EP2132507A2 (fr) | 2007-04-12 | 2008-04-02 | Procédé et dispositif pour refroidir un gaz |
| JP2010502411A JP2010533964A (ja) | 2007-04-12 | 2008-04-02 | ガスの冷却のための方法および装置 |
| US12/450,219 US20100140510A1 (en) | 2007-04-12 | 2008-04-02 | Method and device for cooling a gas |
| CN2008800111030A CN102066860A (zh) | 2007-04-12 | 2008-04-02 | 冷却气体的方法和设备 |
| PCT/DE2008/000557 WO2008125078A2 (fr) | 2007-04-12 | 2008-04-02 | Procédé et dispositif pour refroidir un gaz |
| DE112008000917T DE112008000917A5 (de) | 2007-04-12 | 2008-04-02 | Verfahren und Vorrichtung zur Kühlung eines Gases |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007017212A DE102007017212A1 (de) | 2007-04-12 | 2007-04-12 | Verfahren und Vorrichtung zur Kühlung eines Gases |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102007017212A1 true DE102007017212A1 (de) | 2008-10-16 |
Family
ID=39744194
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102007017212A Withdrawn DE102007017212A1 (de) | 2007-04-12 | 2007-04-12 | Verfahren und Vorrichtung zur Kühlung eines Gases |
| DE112008000917T Withdrawn DE112008000917A5 (de) | 2007-04-12 | 2008-04-02 | Verfahren und Vorrichtung zur Kühlung eines Gases |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112008000917T Withdrawn DE112008000917A5 (de) | 2007-04-12 | 2008-04-02 | Verfahren und Vorrichtung zur Kühlung eines Gases |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20100140510A1 (fr) |
| EP (1) | EP2132507A2 (fr) |
| JP (1) | JP2010533964A (fr) |
| CN (1) | CN102066860A (fr) |
| DE (2) | DE102007017212A1 (fr) |
| WO (1) | WO2008125078A2 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9336915B2 (en) * | 2011-06-17 | 2016-05-10 | General Electric Company | Target apparatus and isotope production systems and methods using the same |
| JP5864165B2 (ja) * | 2011-08-31 | 2016-02-17 | ギガフォトン株式会社 | ターゲット供給装置 |
| CN105814662B (zh) | 2013-12-13 | 2019-05-03 | Asml荷兰有限公司 | 辐射源、量测设备、光刻系统和器件制造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB912478A (en) * | 1962-12-04 | 1962-12-05 | Petrocarbon Dev Ltd | Improvements in methods and apparatus for liquefying gases |
| CH527398A (fr) * | 1966-04-01 | 1972-08-31 | Nautchno Izsledovatelski Sekto | Procédé de liquéfaction de néon, installation pour sa mise en oeuvre et application du procédé |
| US4765813A (en) * | 1987-01-07 | 1988-08-23 | Air Products And Chemicals, Inc. | Hydrogen liquefaction using a dense fluid expander and neon as a precoolant refrigerant |
| US5105305A (en) * | 1991-01-10 | 1992-04-14 | At&T Bell Laboratories | Near-field scanning optical microscope using a fluorescent probe |
| US5249424A (en) * | 1992-06-05 | 1993-10-05 | Astronautics Corporation Of America | Active magnetic regenerator method and apparatus |
| US5512106A (en) * | 1993-01-27 | 1996-04-30 | Sumitomo Heavy Industries, Ltd. | Surface cleaning with argon |
| JPH0882413A (ja) * | 1994-09-13 | 1996-03-26 | Toshiba Corp | 凝縮装置 |
| US6835944B2 (en) * | 2002-10-11 | 2004-12-28 | University Of Central Florida Research Foundation | Low vapor pressure, low debris solid target for EUV production |
| GB0406615D0 (en) * | 2004-03-24 | 2004-04-28 | Air Prod & Chem | Process and apparatus for liquefying hydrogen |
| JP5100990B2 (ja) * | 2004-10-07 | 2012-12-19 | ギガフォトン株式会社 | 極端紫外光源装置用ドライバーレーザ及びｌｐｐ型極端紫外光源装置 |
-
2007
- 2007-04-12 DE DE102007017212A patent/DE102007017212A1/de not_active Withdrawn
-
2008
- 2008-04-02 JP JP2010502411A patent/JP2010533964A/ja not_active Withdrawn
- 2008-04-02 US US12/450,219 patent/US20100140510A1/en not_active Abandoned
- 2008-04-02 DE DE112008000917T patent/DE112008000917A5/de not_active Withdrawn
- 2008-04-02 CN CN2008800111030A patent/CN102066860A/zh active Pending
- 2008-04-02 EP EP08734447A patent/EP2132507A2/fr not_active Withdrawn
- 2008-04-02 WO PCT/DE2008/000557 patent/WO2008125078A2/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| US20100140510A1 (en) | 2010-06-10 |
| JP2010533964A (ja) | 2010-10-28 |
| EP2132507A2 (fr) | 2009-12-16 |
| CN102066860A (zh) | 2011-05-18 |
| WO2008125078A2 (fr) | 2008-10-23 |
| WO2008125078A3 (fr) | 2012-01-26 |
| DE112008000917A5 (de) | 2010-01-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8181 | Inventor (new situation) |
Inventor name: BOUKHAROV, ALEXANDER, DR., MOSKAU, RU Inventor name: BUESCHER, MARKUS, DR., 52428 JUELICH, DE |
|
| 8143 | Lapsed due to claiming internal priority |