DE102005036180B4 - Optische Positionsmesseinrichtung - Google Patents

Optische Positionsmesseinrichtung Download PDF

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Publication number
DE102005036180B4
DE102005036180B4 DE102005036180.3A DE102005036180A DE102005036180B4 DE 102005036180 B4 DE102005036180 B4 DE 102005036180B4 DE 102005036180 A DE102005036180 A DE 102005036180A DE 102005036180 B4 DE102005036180 B4 DE 102005036180B4
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DE
Germany
Prior art keywords
graduation
measuring
scanning
partial beams
boundary contour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102005036180.3A
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German (de)
English (en)
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DE102005036180A1 (de
Inventor
Dipl.-Phys. Hermann Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE102005036180.3A priority Critical patent/DE102005036180B4/de
Priority to US11/493,086 priority patent/US7404259B2/en
Priority to JP2006207397A priority patent/JP5106807B2/ja
Publication of DE102005036180A1 publication Critical patent/DE102005036180A1/de
Application granted granted Critical
Publication of DE102005036180B4 publication Critical patent/DE102005036180B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE102005036180.3A 2005-08-02 2005-08-02 Optische Positionsmesseinrichtung Expired - Fee Related DE102005036180B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102005036180.3A DE102005036180B4 (de) 2005-08-02 2005-08-02 Optische Positionsmesseinrichtung
US11/493,086 US7404259B2 (en) 2005-08-02 2006-07-26 Optical position measuring instrument
JP2006207397A JP5106807B2 (ja) 2005-08-02 2006-07-31 光学式エンコーダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005036180.3A DE102005036180B4 (de) 2005-08-02 2005-08-02 Optische Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
DE102005036180A1 DE102005036180A1 (de) 2007-02-08
DE102005036180B4 true DE102005036180B4 (de) 2020-08-27

Family

ID=37669905

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005036180.3A Expired - Fee Related DE102005036180B4 (de) 2005-08-02 2005-08-02 Optische Positionsmesseinrichtung

Country Status (3)

Country Link
US (1) US7404259B2 (https=)
JP (1) JP5106807B2 (https=)
DE (1) DE102005036180B4 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7608813B1 (en) * 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions
JP6032924B2 (ja) * 2011-04-13 2016-11-30 キヤノン株式会社 エンコーダ
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ
US10452025B2 (en) * 2013-11-04 2019-10-22 Luminit Llc Substrate-guided wave-based transparent holographic center high mounted stop light and method of fabrication thereof
JP6593868B2 (ja) * 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
ES2928745T3 (es) * 2018-02-14 2022-11-22 Hohner Automation S L Métodos para calcular la forma de rendijas de una máscara de un codificador incremental óptico
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
EP4421454B1 (de) * 2023-02-23 2025-04-30 Dr. Johannes Heidenhain GmbH Skalenelement für eine induktive positionsmesseinrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0387520B1 (de) * 1989-02-24 1993-05-12 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
EP0547270B1 (de) * 1991-12-20 1995-05-17 Dr. Johannes Heidenhain GmbH Fotoelektrische Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
DE10144659A1 (de) * 2000-09-14 2002-05-02 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
US20040135076A1 (en) * 2003-01-15 2004-07-15 Xerox Corporation Method and apparatus for obtaining a high quality sine wave from an analog quadrature encoder

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH669457A5 (https=) * 1986-02-18 1989-03-15 Mettler Instrumente Ag
US5237391A (en) * 1988-11-23 1993-08-17 The Boeing Company Multitrack multilevel sensing system
US4991125A (en) * 1989-04-19 1991-02-05 Mitutoyo Corporation Displacement detector
DE4040794A1 (de) * 1990-12-17 1992-06-25 Ems Technik Gmbh Verfahren und lagegeber zur lagebestimmung eines positionierkoerpers relativ zu einem bezugskoerper
US6178653B1 (en) * 1998-11-20 2001-01-30 Lucent Technologies Inc. Probe tip locator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0387520B1 (de) * 1989-02-24 1993-05-12 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
EP0547270B1 (de) * 1991-12-20 1995-05-17 Dr. Johannes Heidenhain GmbH Fotoelektrische Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
DE10144659A1 (de) * 2000-09-14 2002-05-02 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
US20040135076A1 (en) * 2003-01-15 2004-07-15 Xerox Corporation Method and apparatus for obtaining a high quality sine wave from an analog quadrature encoder

Also Published As

Publication number Publication date
JP5106807B2 (ja) 2012-12-26
US7404259B2 (en) 2008-07-29
JP2007040996A (ja) 2007-02-15
DE102005036180A1 (de) 2007-02-08
US20070028476A1 (en) 2007-02-08

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