DE102005009064B4 - Systeme, die polarisationsmanipulierende Retroreflektoren verwenden - Google Patents

Systeme, die polarisationsmanipulierende Retroreflektoren verwenden Download PDF

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Publication number
DE102005009064B4
DE102005009064B4 DE102005009064A DE102005009064A DE102005009064B4 DE 102005009064 B4 DE102005009064 B4 DE 102005009064B4 DE 102005009064 A DE102005009064 A DE 102005009064A DE 102005009064 A DE102005009064 A DE 102005009064A DE 102005009064 B4 DE102005009064 B4 DE 102005009064B4
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DE
Germany
Prior art keywords
polarization
retroreflector
manipulating
polarization component
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102005009064A
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German (de)
English (en)
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DE102005009064A1 (de
Inventor
Miao San Jose Zhu
John J. Santa Clara Bockman
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Agilent Technologies Inc
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Agilent Technologies Inc
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Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE102005009064A1 publication Critical patent/DE102005009064A1/de
Application granted granted Critical
Publication of DE102005009064B4 publication Critical patent/DE102005009064B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02045—Interferometers characterised by particular imaging or detection techniques using the Doppler effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE102005009064A 2004-05-28 2005-02-28 Systeme, die polarisationsmanipulierende Retroreflektoren verwenden Expired - Fee Related DE102005009064B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/856,204 US7193721B2 (en) 2004-05-28 2004-05-28 Systems using polarization-manipulating retroreflectors
US10/856,204 2004-05-28

Publications (2)

Publication Number Publication Date
DE102005009064A1 DE102005009064A1 (de) 2005-12-22
DE102005009064B4 true DE102005009064B4 (de) 2008-06-26

Family

ID=35424830

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005009064A Expired - Fee Related DE102005009064B4 (de) 2004-05-28 2005-02-28 Systeme, die polarisationsmanipulierende Retroreflektoren verwenden

Country Status (4)

Country Link
US (1) US7193721B2 (enExample)
JP (1) JP2005338076A (enExample)
DE (1) DE102005009064B4 (enExample)
NL (1) NL1029115C2 (enExample)

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CN114114701B (zh) * 2021-11-16 2023-09-12 中国科学院上海技术物理研究所 一种通过角锥棱镜和分光棱镜实现偏振退化的方法及装置
CN117559219A (zh) * 2022-08-05 2024-02-13 青岛海信宽带多媒体技术有限公司 一种激光器及光模块

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US4930894A (en) * 1984-04-27 1990-06-05 Hewlett-Packard Company Minimum deadpath interferometer and dilatometer
US5106191A (en) * 1989-06-07 1992-04-21 Canon Kabushiki Kaisha Two-frequency distance and displacement measuring interferometer
US5408318A (en) * 1993-08-02 1995-04-18 Nearfield Systems Incorporated Wide range straightness measuring stem using a polarized multiplexed interferometer and centered shift measurement of beam polarization components
US6198574B1 (en) * 1999-08-27 2001-03-06 Zygo Corporation Polarization preserving optical systems

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US4930894A (en) * 1984-04-27 1990-06-05 Hewlett-Packard Company Minimum deadpath interferometer and dilatometer
US4693605A (en) * 1985-12-19 1987-09-15 Zygo Corporation Differential plane mirror interferometer
US4714339A (en) * 1986-02-28 1987-12-22 The United States Of America As Represented By The Secretary Of Commerce Three and five axis laser tracking systems
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US4912530A (en) * 1988-02-13 1990-03-27 Brother Kogyo Kabushiki Kaisha Optical heterodyne measuring apparatus
US5106191A (en) * 1989-06-07 1992-04-21 Canon Kabushiki Kaisha Two-frequency distance and displacement measuring interferometer
US5408318A (en) * 1993-08-02 1995-04-18 Nearfield Systems Incorporated Wide range straightness measuring stem using a polarized multiplexed interferometer and centered shift measurement of beam polarization components
US6198574B1 (en) * 1999-08-27 2001-03-06 Zygo Corporation Polarization preserving optical systems

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Publication number Priority date Publication date Assignee Title
RU2830848C1 (ru) * 2024-07-31 2024-11-26 Акционерное общество "Леоли Кэпитал Групп" Оптический микрофон

Also Published As

Publication number Publication date
NL1029115A1 (nl) 2005-11-30
NL1029115C2 (nl) 2007-06-01
US20050264823A1 (en) 2005-12-01
DE102005009064A1 (de) 2005-12-22
JP2005338076A (ja) 2005-12-08
US7193721B2 (en) 2007-03-20

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OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee