DE10196864T1 - Dünnfilm-Metallhydrid-Wasserstoffsensor - Google Patents

Dünnfilm-Metallhydrid-Wasserstoffsensor

Info

Publication number
DE10196864T1
DE10196864T1 DE10196864T DE10196864T DE10196864T1 DE 10196864 T1 DE10196864 T1 DE 10196864T1 DE 10196864 T DE10196864 T DE 10196864T DE 10196864 T DE10196864 T DE 10196864T DE 10196864 T1 DE10196864 T1 DE 10196864T1
Authority
DE
Germany
Prior art keywords
thin
metal hydride
hydrogen sensor
hydride hydrogen
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10196864T
Other languages
English (en)
Inventor
Jennifer J Zink
Deborah J Kirby
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HRL Laboratories LLC
Original Assignee
HRL Laboratories LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HRL Laboratories LLC filed Critical HRL Laboratories LLC
Publication of DE10196864T1 publication Critical patent/DE10196864T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082—Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04089—Arrangements for control of reactant parameters, e.g. pressure or concentration of gaseous reactants
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/22—Hydrogen, per se

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Sustainable Development (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE10196864T 2000-11-10 2001-10-11 Dünnfilm-Metallhydrid-Wasserstoffsensor Withdrawn DE10196864T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/710,604 US6539774B1 (en) 2000-11-10 2000-11-10 Thin film metal hydride hydrogen sensor
PCT/US2001/032093 WO2002039103A1 (en) 2000-11-10 2001-10-11 Thin film metal hydride hydrogen sensor

Publications (1)

Publication Number Publication Date
DE10196864T1 true DE10196864T1 (de) 2003-11-20

Family

ID=24854737

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10196864T Withdrawn DE10196864T1 (de) 2000-11-10 2001-10-11 Dünnfilm-Metallhydrid-Wasserstoffsensor

Country Status (6)

Country Link
US (1) US6539774B1 (de)
JP (1) JP4195609B2 (de)
AU (1) AU2002211729A1 (de)
DE (1) DE10196864T1 (de)
GB (1) GB2385932B (de)
WO (1) WO2002039103A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005057214A1 (de) * 2005-11-29 2007-06-14 Justus-Liebig-Universität Giessen Erfindung betreffend Gassensoren
DE102014219633A1 (de) * 2014-09-29 2016-04-14 Robert Bosch Gmbh Vorrichtung zur Detektion von Substanzen in einer Probe

Families Citing this family (30)

* Cited by examiner, † Cited by third party
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AU2003287560A1 (en) * 2002-11-06 2004-06-03 Carnegie Mellon University Mems membrane based sensor
WO2004066415A2 (en) * 2003-01-23 2004-08-05 The Penn State Research Foundation Thin film semi-permeable membranes for gas sensor and catalytic applications
US20040173004A1 (en) * 2003-03-05 2004-09-09 Eblen John P. Robust palladium based hydrogen sensor
US20040223884A1 (en) * 2003-05-05 2004-11-11 Ing-Shin Chen Chemical sensor responsive to change in volume of material exposed to target particle
US7521252B2 (en) * 2004-02-04 2009-04-21 The Research Foundation Of State University Of New York Methods for forming palladium alloy thin films and optical hydrogen sensors employing palladium alloy thin films
US7514759B1 (en) * 2004-04-19 2009-04-07 Hrl Laboratories, Llc Piezoelectric MEMS integration with GaN technology
US7017386B2 (en) * 2004-08-20 2006-03-28 Honeywell International Inc. Self-testing and self-calibrating detector
US7791150B1 (en) 2004-09-25 2010-09-07 University Of Central Florida Research Foundation, Inc. Room temperature hydrogen sensor
US7152458B2 (en) * 2004-11-30 2006-12-26 Honeywell International Inc. Nano-crystalline and/or metastable metal hydrides as hydrogen source for sensor calibration and self-testing
US20060118416A1 (en) * 2004-12-08 2006-06-08 Honeywell International, Inc. Electrochemical sensor system
WO2006091756A2 (en) * 2005-02-24 2006-08-31 The Regents Of The University Of Colorado, A Body Corporate Mis-based sensors with hydrogen selectivity
DE102006005442B4 (de) * 2006-02-04 2008-08-14 Oppermann, Florian Sicherungsvorrichtung für Verkehrswege, insbesondere für Autobahnen und Fernstraßen
JP2008032458A (ja) * 2006-07-27 2008-02-14 Toyota Central Res & Dev Lab Inc 水素ガスセンサ
US7667369B2 (en) * 2006-11-01 2010-02-23 Delaware Capital Formation, Inc. High sensitivity microsensors based on flexure induced frequency effects
US7886575B2 (en) * 2006-11-01 2011-02-15 Delaware Capital Formation, Inc. High sensitivity acoustic wave microsensors based on stress effects
US9312545B2 (en) * 2009-07-17 2016-04-12 Danmarks Tekniske Universitet Platinum and palladium alloys suitable as fuel cell electrodes
US20110088456A1 (en) * 2009-10-16 2011-04-21 Fan Ren Normalized hydrogen sensing and methods of fabricating a normalized hydrogen sensor
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
KR101968999B1 (ko) * 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
US20150325861A1 (en) * 2012-07-06 2015-11-12 Denmarks Tekniske Universitet Platinum and palladium alloys suitable as fuel cell electrodes
CA2891134A1 (en) * 2012-11-21 2014-05-30 Danmarks Tekniske Universitet Platinum and palladium alloys suitable as fuel cell electrodes
US9985197B2 (en) * 2012-12-07 2018-05-29 University of Pittsburgh—of the Commonwealth System of Higher Education Flexible molecular piezoelectric device
CN103336092B (zh) * 2013-06-14 2015-06-17 浙江大学 基于涡街与压电薄膜的氢气传感器及其制备方法
JP6685839B2 (ja) * 2016-05-30 2020-04-22 株式会社東芝 ガス検出装置
JP6829181B2 (ja) * 2017-11-28 2021-02-10 株式会社東芝 ガスセンサ
JP6926040B2 (ja) * 2018-09-10 2021-08-25 株式会社東芝 水素センサ、水素検出方法およびプログラム
WO2020117472A2 (en) 2018-12-03 2020-06-11 Carrier Corporation Combustible gas sensor
BE1027365B1 (nl) * 2019-06-12 2021-01-21 Burssens Jan Willem Sensor voor het opmeten van een gehalte van een element in een fluïdum en/of een verandering van zulk gehalte in een fluïdum
CN114709469A (zh) * 2022-03-25 2022-07-05 宁德新能源科技有限公司 电化学装置及电子装置

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US3732076A (en) 1971-06-21 1973-05-08 Mc Donnell Douglas Corp Rare earth hydrogen detector
JPH01169338A (ja) 1987-09-18 1989-07-04 Agency Of Ind Science & Technol トンネル電流検出光音響分光装置
JPH02165034A (ja) * 1988-12-19 1990-06-26 Sanyo Electric Co Ltd 水素ガスセンサー
US5305714A (en) 1991-07-03 1994-04-26 Nippon Soken, Inc. Fuel supply system for an internal combustion engine
AU6770394A (en) 1993-05-25 1994-12-20 Rosemount Inc. Organic chemical sensor
DE19802909A1 (de) * 1998-01-27 1999-07-29 Herbert Dr Propfe Mittel zur Verbesserung der Bioverfügbarkeit von Bodennährstoffen für Pflanzen
US6006582A (en) 1998-03-17 1999-12-28 Advanced Technology Materials, Inc. Hydrogen sensor utilizing rare earth metal thin film detection element
US6029500A (en) 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
DE19828093C2 (de) * 1998-06-24 2003-09-11 Univ Dresden Tech Einrichtung zum Messen physikalischer Größen von ein- oder mehrkomponentigen Flüssigkeiten
JP2000097931A (ja) * 1998-09-25 2000-04-07 Toyota Autom Loom Works Ltd 水素吸蔵タンクの水素吸蔵量検出方法およびその装置
US6265222B1 (en) 1999-01-15 2001-07-24 Dimeo, Jr. Frank Micro-machined thin film hydrogen gas sensor, and method of making and using the same
US6405532B1 (en) 2000-07-21 2002-06-18 Environmental Robots, Inc. Metal hydride artificial muscles

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005057214A1 (de) * 2005-11-29 2007-06-14 Justus-Liebig-Universität Giessen Erfindung betreffend Gassensoren
US8491766B2 (en) 2005-11-29 2013-07-23 Justus-Liebig-Universitat Giessen Gas sensor for determining hydrogen or hydrogen compounds
DE102014219633A1 (de) * 2014-09-29 2016-04-14 Robert Bosch Gmbh Vorrichtung zur Detektion von Substanzen in einer Probe

Also Published As

Publication number Publication date
JP2004513366A (ja) 2004-04-30
GB2385932A (en) 2003-09-03
JP4195609B2 (ja) 2008-12-10
WO2002039103A1 (en) 2002-05-16
US6539774B1 (en) 2003-04-01
AU2002211729A1 (en) 2002-05-21
GB2385932B (en) 2005-05-11
WO2002039103A9 (en) 2003-01-30
WO2002039103A8 (en) 2002-07-11
GB0310484D0 (en) 2003-06-11

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination