DE10133013C2 - Closure for cavities or feedthroughs - Google Patents

Closure for cavities or feedthroughs

Info

Publication number
DE10133013C2
DE10133013C2 DE2001133013 DE10133013A DE10133013C2 DE 10133013 C2 DE10133013 C2 DE 10133013C2 DE 2001133013 DE2001133013 DE 2001133013 DE 10133013 A DE10133013 A DE 10133013A DE 10133013 C2 DE10133013 C2 DE 10133013C2
Authority
DE
Germany
Prior art keywords
membrane
closure
layer
heating wire
cavities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE2001133013
Other languages
German (de)
Other versions
DE10133013A1 (en
Inventor
Werner Schomburg
Zeno Rummler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Priority to DE2001133013 priority Critical patent/DE10133013C2/en
Publication of DE10133013A1 publication Critical patent/DE10133013A1/en
Application granted granted Critical
Publication of DE10133013C2 publication Critical patent/DE10133013C2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/025—Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/04—Closures and closing means
    • B01L2300/046—Function or devices integrated in the closure
    • B01L2300/049—Valves integrated in closure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/508—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • Temperature-Responsive Valves (AREA)
  • Sampling And Sample Adjustment (AREA)

Description

Die Erfindung betrifft einen Verschluss für Hohlräume oder Durchführungen, der durch einen elektrischen Strom geöffnet werden kann nach dem Oberbegriff des Patentanspruchs 1.The invention relates to a closure for cavities or Bushings that are opened by an electric current can be according to the preamble of claim 1.

Für die Handhabung kleiner flüssiger Proben in Kapillarsyste­ men ist es oft wünschenswert, die Probe in einem Volumen oder Reservoir dicht verschlossen zu halten, um sie dann im Moment einer Analyse synchron zu einem elektrischen Signal freizuge­ ben. Der klassische Weg zur Lösung dieser Fragestellung be­ steht darin, am Reservoir ein Ventil anzubringen, das aufgrund eines elektrischen Signales geöffnet wird. Wenn aber auf einer Grundplatte sehr viele Reservoirs nebeneinander angeordnet sind, wie dies z. B. bei biotechnologischen Anwendungen und in der Wirkstoffforschung üblich ist, ist der Aufwand, jedes der Reservoirs mit einem eigenen Ventil zu versehen, zu groß.For handling small liquid samples in capillary systems It is often desirable to place the sample in a volume or To keep the reservoir tightly closed, then at the moment an analysis synchronized with an electrical signal ben. The classic way to solve this problem be is to attach a valve to the reservoir that due to an electrical signal is opened. But if on one Base plate very many reservoirs arranged side by side are how this z. B. in biotechnological applications and in Drug research is common, the effort is each Too big reservoirs with their own valve.

In der DE 198 58 443 A1 ist ein Verfahren beschrieben, bei dem der Boden eines kleinen Reservoirs mit einem Laserstrahl geöffnet wird.DE 198 58 443 A1 describes a method described in which the bottom of a small reservoir with opened with a laser beam.

Nachteilig bei diesem Verfahren ist, dass ein Laser benötigt wird, der gezielt auf den Boden des jeweiligen Reservoirs aus­ gerichtet werden muss.The disadvantage of this method is that a laser is required is targeted to the bottom of the respective reservoir must be judged.

In der DE 196 10 293 C1 wird eine Membran als Verschluss für einen Hohlraum offenbart. Diese wird durch Erwärmung eines auf ihr angebrachten Heizdrahtes zerstört, um eine Öffnung im Hohlraum zu erzeugen.In DE 196 10 293 C1 a membrane is used as a closure for reveals a cavity. This is done by heating one up your attached heating wire destroyed to an opening in the To create cavity.

Weiterhin wird in der DE 197 16 683 C1 und in der DE 35 20 416 C2 eine Membran als Verschluss für eine Durchführung beschrie­ ben, die auf die gleiche Weise zerstört wird, um die Durchfüh­ rung zu öffnen. Furthermore, DE 197 16 683 C1 and DE 35 20 416 C2 described a membrane as a closure for an implementation ben who is destroyed in the same way to carry out opening.  

Bei diesem Verfahren zerspringt die Membran in einzelne Stü­ cke, durch die die Probe kontaminiert wird, was bei einer An­ zahl von Anwendungen unerwünscht ist.In this process, the membrane breaks into individual pieces through which the sample is contaminated number of applications is undesirable.

Aufgabe der Erfindung ist es, einen weiteren Verschluss für Hohlräume anzugeben, der auf einfache Weise durch ein elektrisches Signal geöffnet werden kann, ohne dass ein zusätzliches Werkzeug benötigt würde. Gelöst wird diese Aufgabe durch einen Verschluss mit den Merkmalen des Patentanspruches 1. Die übrigen Ansprüche beschreiben vorteilhafte Ausgestaltungen des Verschlusses.The object of the invention is a further closure for To indicate cavities by a simple way through a electrical signal can be opened without a additional tools would be needed. This is solved Task by a closure with the features of claim 1. The rest Claims describe advantageous embodiments of the Closure.

Der Verschluss wird im folgenden anhand von den Fig. 1 bis 4 anhand von zwei Ausführungsbeispielen näher erläutert. Dabei zei­ gen die Figuren schematisch den Aufbau der gefertigten Vorrichtung bzw. einzelne Stadien während deren Herstellung. The closure is explained in more detail below with reference to FIGS. 1 to 4 using two exemplary embodiments. The figures show schematically the structure of the manufactured device or individual stages during their manufacture.

Die Figuren sind nicht maßstäblich gezeichnet, um sehr dünne bzw. kleine Strukturen neben vergleichsweise großen Strukturen deutlich werden zu lassen.The figures are not drawn to scale to be very thin or small structures in addition to comparatively large structures to make it clear.

Das erste Anwendungsbeispiel beschreibt einen Verschluss für Hohlräume, der von einer Membran mit einem darauf angebrachten Heizdraht gebildet wird. In den Figuren sind der Übersicht­ lichkeit wegen nur ein oder zwei Verschlüsse dargestellt. Es können aber viele Verschlüsse parallel nebeneinander ange­ bracht und so wesentlich Kosten gespart werden.The first application example describes a closure for Cavities by a membrane with one attached to it Heating wire is formed. In the figures are the overview shown for only one or two closures. It but many closures can be placed side by side in parallel brings and thus significantly save costs.

Wie in Fig. 1 auf der linken Seite dargestellt ist, ist eine 5 µm dicke Membran 1 aus Polytetrafluorethylen (PTFE) auf einem Substrat 2 aus Polyetheretherketon (PEEK) mit Hohlräu­ men 3 so angebracht, dass die Hohlräume 3 vollständig ver­ schlossen werden. Auf der Membran 1 sind ein Heizdraht 4 und eine weitere dünne Schicht 5 aus 100 nm dickem Gold ange­ bracht. Die Goldschicht 5 wird so auf der Membran 1 ange­ bracht, dass sie unter einer mechanischen Zugspannung steht.As shown in Fig. 1 on the left side, a 5 micron thick membrane 1 made of polytetrafluoroethylene (PTFE) on a substrate 2 made of polyether ether ketone (PEEK) with Cavities 3 is attached so that the cavities 3 are completely closed ver. On the membrane 1 , a heating wire 4 and a further thin layer 5 made of 100 nm thick gold are introduced. The gold layer 5 is placed on the membrane 1 so that it is under a mechanical tensile stress.

Zum Öffnen des Verschlusses wird ein elektrischer Strom durch den Heizdraht 4 geleitet, sodass sich der Heizdraht 4 und der unmittelbar darunter liegende Teil der Membran 1 erwärmen, bis das Material der Membran 1 so weich wird, dass sich im Bereich des Heizdrahtes ein Spalt in der Membran 1 bildet. Daraufhin relaxiert die Zugspannung in der Schicht 5 und ein Teil 1a der Membran 1 wird, wie rechts in Fig. 1 dargestellt ist, zu­ sammen mit einem Teil 5a der Schicht 5 zum Rand hin aufge­ rollt, sodass der Hohlraum 3 geöffnet wird.To open the closure, an electrical current is passed through the heating wire 4 , so that the heating wire 4 and the part of the membrane 1 immediately below it heat up until the material of the membrane 1 becomes so soft that there is a gap in the area of the heating wire Membrane 1 forms. Then the tensile stress in layer 5 relaxes and part 1 a of membrane 1 is rolled up, as shown on the right in FIG. 1, together with part 5 a of layer 5 towards the edge, so that cavity 3 is opened.

Fig. 2 zeigt eine Aufsicht auf einen geschlossenen Verschluss mit dem Heizdraht 4 und seinen Zuleitungen und der Schicht 5. Die Lage des Randes 3a des Hohlraumes 3 unter der Membran 1 ist als gestrichelte Linie markiert. Fig. 2 shows a plan view of a closed bolt with the heating wire 4 and its supply lines and the layer 5. The position of the edge 3 a of the cavity 3 under the membrane 1 is marked as a dashed line.

Der Heizdraht 4 und/oder die Schicht 5 können auch auf der an­ deren Seite der Membran 1 im Innern des Hohlraumes 3 angeord­ net werden, wenn dies aus fertigungstechnischen Gründen oder in der Anwendung einen Vorteil darstellt. The heating wire 4 and / or the layer 5 can also be arranged on the other side of the membrane 1 inside the cavity 3 , if this is an advantage for manufacturing reasons or in application.

Aus fertigungstechnischen Gründen ist es in der Regel ein Vor­ teil, wenn die Schicht 5 und der Heizdraht 4 aus dem gleichen Material bestehen und die gleiche Dicke aufweisen. Es ist aber auch möglich, verschiedene Materialien für den Heizdraht 4 und die Schicht 5 zu wählen und/oder sie in unterschiedlicher Dicke zu fertigen.For technical reasons, it is usually a part before if the layer 5 and the heating wire 4 consist of the same material and have the same thickness. However, it is also possible to choose different materials for the heating wire 4 and the layer 5 and / or to manufacture them in different thicknesses.

Ein Verschluss, wie er hier beschrieben ist, kann nicht nur zum hermetischen Verschließen eines Hohlraumes eingesetzt werden, sondern auch ein nach oben offenes Reservoir ver­ schließen, oder zwei Kapillarsysteme von einander trennen, die durch ein elektrisches Signal miteinander verbunden werden sollen.A closure as described here can not only used for hermetically sealing a cavity be, but also a reservoir open at the top close, or separate two capillary systems from each other be connected to each other by an electrical signal should.

Es ist auch möglich, einen Heizdraht 4 innen oder außen an ei­ ner hinreichend dünnen Stelle einer Begrenzungswand 1 eines Hohlraumes anzubringen, wie es in Fig. 3 dargestellt ist.It is also possible to attach a heating wire 4 inside or outside to a sufficiently thin location of a boundary wall 1 of a cavity, as shown in FIG. 3.

Im zweiten Anwendungsbeispiel wird ein Verschluss beschrieben, bei dem eine Sollbruchstelle das Öffnen erleichtert.In the second application example, a closure is described where a predetermined breaking point makes opening easier.

In einem Kanalsystem aus Polysulfon (PSU) mit einem quadrati­ schen, 4.4 mm2 großen Querschnitt wird der Zustrom eines Ga­ ses durch den in Fig. 4 in Aufsicht gezeigten Verschluss im wesentlichen unterbunden. Der Verschluss wird durch eine 2 µm dicke Membran aus Polyimid (PI) gebildet in der zur Perfora­ tion kreisförmige Öffnungen 7 mit einem Durchmesser von 200 µm angebracht sind. Im Zentrum der Membran ist ein Heizdraht 4 und Schichten 5 aus 100 nm dickem Wolfram angebracht. Ein elektrischer Strom erwärmt den Heizdraht 4 so sehr, dass die Membran in diesem Bereich unterbrochen wird. Die Perforation führt dazu, dass die Membran entlang der Öffnungen 7 einreißt, auch wenn der Druckunterschied über der Membran nicht sehr groß ist. Ferner führt eine mechanische Vorspannung in der Wolframschicht 5 und in den Zuleitungen zum Heizdraht 4 dazu, dass sich die Membran zum Rand hin aufrollt und so die Öffnung im wesentlichen freigibt.In a channel system made of polysulfone (PSU) with a square, 4.4 mm 2 cross-section, the inflow of a gas is substantially prevented by the closure shown in FIG. 4 in top view. The closure is formed by a 2 µm thick membrane made of polyimide (PI) in which circular openings 7 with a diameter of 200 µm are provided for perforation. A heating wire 4 and layers 5 made of 100 nm thick tungsten are attached in the center of the membrane. An electric current heats the heating wire 4 so much that the membrane is interrupted in this area. The perforation causes the membrane to tear along the openings 7 , even if the pressure difference across the membrane is not very great. Furthermore, a mechanical prestress in the tungsten layer 5 and in the feed lines to the heating wire 4 leads to the membrane rolling up towards the edge and thus essentially opening up the opening.

Ein Verschluss in dieser Art hat den Vorteil, dass nur ein ganz kleiner Teil, einer sehr dünnen Membran soweit erwärmt zu werden braucht, dass er weich wird und der mechanischen Span­ nung in der Membran bzw. in der Schicht 5 und den Zuleitungen zum Heizdraht nachgibt. Deshalb ist nur eine ganz kleine elektrische Energiemenge notwendig, um die den Verschluss zu öffnen.A closure of this type has the advantage that only a very small part, a very thin membrane, needs to be heated to such an extent that it becomes soft and yields to the mechanical tension in the membrane or in layer 5 and the leads to the heating wire , Therefore, only a very small amount of electrical energy is required to open the closure.

Es ist auch möglich, statt der durchgehenden Öffnungen 7 in der Membran verjüngte Bereiche vorzusehen, entlang derer die Membran leicht einreißen kann. Dies hat den Vorteil, dass die Membran das Kanalsystem dichter verschließen kann.Instead of the through openings 7 in the membrane, it is also possible to provide tapered regions along which the membrane can easily tear. This has the advantage that the membrane can close the channel system more tightly.

Claims (4)

1. Verschluss für Hohlräume oder Durchführungen bestehend aus einer dünnen Schicht (1), der mit einem elektrischen Strom geöffnet werden kann, dadurch ge­ kennzeichnet, dass die dünne Schicht (1) mit einem Heiz­ element (4) versehen ist und dass eine Schicht (5) auf der dün­ nen Schicht (1) angebracht ist, wobei die Schicht (5) unter einer mechanischen Zugspannung steht.1. Closure for cavities or bushings consisting of a thin layer ( 1 ) that can be opened with an electric current, characterized in that the thin layer ( 1 ) is provided with a heating element ( 4 ) and that a layer ( 5 ) is attached to the thin layer ( 1 ), the layer ( 5 ) being under mechanical tensile stress. 2. Verschluss nach Anspruch 1, dadurch gekennzeichnet, dass die dünne Schicht (1) eine Membran ist.2. Closure according to claim 1, characterized in that the thin layer ( 1 ) is a membrane. 3. Verschluss nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass in der dünnen Schicht (1) eine Perforation (7) ange­ bracht ist.3. Closure according to claim 1 or 2, characterized in that a perforation ( 7 ) is introduced in the thin layer ( 1 ). 4. Verschluss nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die dünne Schicht (1) an vorgegebenen Stellen (7) dünner ausgeführt ist.4. Closure according to claim 1 or 2, characterized in that the thin layer ( 1 ) is made thinner at predetermined points ( 7 ).
DE2001133013 2001-07-06 2001-07-06 Closure for cavities or feedthroughs Expired - Fee Related DE10133013C2 (en)

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