DE10085383T1 - Kontrollsystem mit schwingungsfester Bildaufnahme - Google Patents
Kontrollsystem mit schwingungsfester BildaufnahmeInfo
- Publication number
- DE10085383T1 DE10085383T1 DE10085383T DE10085383T DE10085383T1 DE 10085383 T1 DE10085383 T1 DE 10085383T1 DE 10085383 T DE10085383 T DE 10085383T DE 10085383 T DE10085383 T DE 10085383T DE 10085383 T1 DE10085383 T1 DE 10085383T1
- Authority
- DE
- Germany
- Prior art keywords
- vibration
- control system
- image recording
- resistant image
- resistant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/72—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors using frame transfer [FT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95646—Soldering
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Image Processing (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17504900P | 2000-01-07 | 2000-01-07 | |
US09/522,519 US6549647B1 (en) | 2000-01-07 | 2000-03-10 | Inspection system with vibration resistant video capture |
PCT/US2000/042764 WO2001050410A1 (en) | 2000-01-07 | 2000-12-12 | Inspection system with vibration resistant video capture |
Publications (1)
Publication Number | Publication Date |
---|---|
DE10085383T1 true DE10085383T1 (de) | 2003-04-17 |
Family
ID=26870812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10085383T Ceased DE10085383T1 (de) | 2000-01-07 | 2000-12-12 | Kontrollsystem mit schwingungsfester Bildaufnahme |
Country Status (6)
Country | Link |
---|---|
US (2) | US6549647B1 (de) |
JP (1) | JP2003524158A (de) |
KR (1) | KR100795761B1 (de) |
DE (1) | DE10085383T1 (de) |
GB (1) | GB2374233B (de) |
WO (1) | WO2001050410A1 (de) |
Families Citing this family (79)
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JP3922853B2 (ja) * | 1999-12-07 | 2007-05-30 | 松下電器産業株式会社 | 固体撮像装置 |
ATE412224T1 (de) * | 2000-05-16 | 2008-11-15 | Sicpa Holding Sa | Verfahren , vorrichtung und system zur authentifikation einer markierung |
US7555831B2 (en) * | 2001-11-13 | 2009-07-07 | Cyberoptics Corporation | Method of validating component feeder exchanges |
US7813559B2 (en) | 2001-11-13 | 2010-10-12 | Cyberoptics Corporation | Image analysis for pick and place machines with in situ component placement inspection |
US7239399B2 (en) * | 2001-11-13 | 2007-07-03 | Cyberoptics Corporation | Pick and place machine with component placement inspection |
US20050226490A1 (en) * | 2002-01-29 | 2005-10-13 | Phillips Brian S | Method and apparatus for improved vision detector image capture and analysis |
US9092841B2 (en) * | 2004-06-09 | 2015-07-28 | Cognex Technology And Investment Llc | Method and apparatus for visual detection and inspection of objects |
US7545949B2 (en) * | 2004-06-09 | 2009-06-09 | Cognex Technology And Investment Corporation | Method for setting parameters of a vision detector using production line information |
US7012631B2 (en) * | 2002-09-17 | 2006-03-14 | Bojko Vodanovic | Absolute position determination for a CCD-based acquisition unit |
US7559134B2 (en) * | 2003-11-04 | 2009-07-14 | Cyberoptics Corporation | Pick and place machine with improved component placement inspection |
US20050125993A1 (en) * | 2003-11-07 | 2005-06-16 | Madsen David D. | Pick and place machine with improved setup and operation procedure |
US7706595B2 (en) * | 2003-11-07 | 2010-04-27 | Cyberoptics Corporation | Pick and place machine with workpiece motion inspection |
US20050276445A1 (en) * | 2004-06-09 | 2005-12-15 | Silver William M | Method and apparatus for automatic visual detection, recording, and retrieval of events |
US8891852B2 (en) | 2004-06-09 | 2014-11-18 | Cognex Technology And Investment Corporation | Method and apparatus for configuring and testing a machine vision detector |
US8127247B2 (en) * | 2004-06-09 | 2012-02-28 | Cognex Corporation | Human-machine-interface and method for manipulating data in a machine vision system |
US8243986B2 (en) * | 2004-06-09 | 2012-08-14 | Cognex Technology And Investment Corporation | Method and apparatus for automatic visual event detection |
EP1612509A1 (de) * | 2004-07-01 | 2006-01-04 | Sick IVP AB | Optischer Profilometer |
US20060016066A1 (en) * | 2004-07-21 | 2006-01-26 | Cyberoptics Corporation | Pick and place machine with improved inspection |
US20060075631A1 (en) * | 2004-10-05 | 2006-04-13 | Case Steven K | Pick and place machine with improved component pick up inspection |
US7720315B2 (en) * | 2004-11-12 | 2010-05-18 | Cognex Technology And Investment Corporation | System and method for displaying and using non-numeric graphic elements to control and monitor a vision system |
US7636449B2 (en) * | 2004-11-12 | 2009-12-22 | Cognex Technology And Investment Corporation | System and method for assigning analysis parameters to vision detector using a graphical interface |
US9292187B2 (en) | 2004-11-12 | 2016-03-22 | Cognex Corporation | System, method and graphical user interface for displaying and controlling vision system operating parameters |
US20070003126A1 (en) * | 2005-05-19 | 2007-01-04 | Case Steven K | Method and apparatus for evaluating a component pick action in an electronics assembly machine |
US7508436B2 (en) * | 2005-06-29 | 2009-03-24 | Eastman Kodak Company | Method for capturing a sequence of images in close succession |
DE112006002473T5 (de) * | 2005-09-14 | 2008-08-14 | Cyberoptics Corp., Golden Valley | Bestückungsmaschine mit verbesserter Bauteil-Aufnahmebild-Identifizierungsverarbeitung |
US20070130755A1 (en) * | 2005-10-31 | 2007-06-14 | Duquette David W | Electronics assembly machine with embedded solder paste inspection |
WO2007058117A1 (ja) * | 2005-11-15 | 2007-05-24 | Omron Corporation | 半田材検査装置 |
DE102006002077A1 (de) * | 2006-01-13 | 2007-07-26 | GOM - Gesellschaft für Optische Meßtechnik mbH | Einrichtung und Verfahren zum dreidimensionalen optischen Vermessen |
DE102006002704A1 (de) * | 2006-01-19 | 2007-08-02 | Henkel Kgaa | Verfahren und Vorrichtung zur Überwachung einer Produktionslinie |
US20070276867A1 (en) * | 2006-05-23 | 2007-11-29 | David Fishbaine | Embedded inspection image archival for electronics assembly machines |
JP4917449B2 (ja) * | 2006-07-11 | 2012-04-18 | パナソニック株式会社 | 固体撮像装置の駆動方法、及び固体撮像装置 |
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US8269836B2 (en) * | 2008-07-24 | 2012-09-18 | Seiko Epson Corporation | Image capture, alignment, and registration |
CA2762038C (en) * | 2009-06-01 | 2017-04-25 | Gerd Haeusler | Method and device for three-dimensional surface detection with a dynamic reference frame |
JP5567908B2 (ja) * | 2009-06-24 | 2014-08-06 | キヤノン株式会社 | 3次元計測装置、その計測方法及びプログラム |
US8670031B2 (en) * | 2009-09-22 | 2014-03-11 | Cyberoptics Corporation | High speed optical inspection system with camera array and compact, integrated illuminator |
US8681211B2 (en) * | 2009-09-22 | 2014-03-25 | Cyberoptics Corporation | High speed optical inspection system with adaptive focusing |
US8894259B2 (en) * | 2009-09-22 | 2014-11-25 | Cyberoptics Corporation | Dark field illuminator with large working area |
US8872912B2 (en) * | 2009-09-22 | 2014-10-28 | Cyberoptics Corporation | High speed distributed optical sensor inspection system |
JP5124705B1 (ja) * | 2011-03-14 | 2013-01-23 | パナソニック株式会社 | はんだ高さ検出方法およびはんだ高さ検出装置 |
US9793673B2 (en) | 2011-06-13 | 2017-10-17 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
US8873596B2 (en) | 2011-07-22 | 2014-10-28 | Kla-Tencor Corporation | Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal |
US10197501B2 (en) | 2011-12-12 | 2019-02-05 | Kla-Tencor Corporation | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors |
US9651499B2 (en) | 2011-12-20 | 2017-05-16 | Cognex Corporation | Configurable image trigger for a vision system and method for using the same |
US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
US9151940B2 (en) | 2012-12-05 | 2015-10-06 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
JP2014115109A (ja) * | 2012-12-06 | 2014-06-26 | Canon Inc | 距離計測装置及び方法 |
US9426400B2 (en) | 2012-12-10 | 2016-08-23 | Kla-Tencor Corporation | Method and apparatus for high speed acquisition of moving images using pulsed illumination |
US8929406B2 (en) | 2013-01-24 | 2015-01-06 | Kla-Tencor Corporation | 193NM laser and inspection system |
US9529182B2 (en) | 2013-02-13 | 2016-12-27 | KLA—Tencor Corporation | 193nm laser and inspection system |
US9608399B2 (en) | 2013-03-18 | 2017-03-28 | Kla-Tencor Corporation | 193 nm laser and an inspection system using a 193 nm laser |
US9478402B2 (en) | 2013-04-01 | 2016-10-25 | Kla-Tencor Corporation | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor |
CN104755874B (zh) * | 2013-04-01 | 2018-08-28 | 松下知识产权经营株式会社 | 具有多个光源的运动传感器装置 |
US10126252B2 (en) | 2013-04-29 | 2018-11-13 | Cyberoptics Corporation | Enhanced illumination control for three-dimensional imaging |
US9347890B2 (en) | 2013-12-19 | 2016-05-24 | Kla-Tencor Corporation | Low-noise sensor and an inspection system using a low-noise sensor |
US9748294B2 (en) | 2014-01-10 | 2017-08-29 | Hamamatsu Photonics K.K. | Anti-reflection layer for back-illuminated sensor |
US9410901B2 (en) | 2014-03-17 | 2016-08-09 | Kla-Tencor Corporation | Image sensor, an inspection system and a method of inspecting an article |
US9804101B2 (en) | 2014-03-20 | 2017-10-31 | Kla-Tencor Corporation | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser |
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-
2000
- 2000-03-10 US US09/522,519 patent/US6549647B1/en not_active Expired - Fee Related
- 2000-12-12 JP JP2001550697A patent/JP2003524158A/ja active Pending
- 2000-12-12 DE DE10085383T patent/DE10085383T1/de not_active Ceased
- 2000-12-12 WO PCT/US2000/042764 patent/WO2001050410A1/en active Application Filing
- 2000-12-12 GB GB0215886A patent/GB2374233B/en not_active Expired - Fee Related
- 2000-12-12 KR KR1020027008790A patent/KR100795761B1/ko not_active IP Right Cessation
-
2002
- 2002-08-13 US US10/217,910 patent/US7027639B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB0215886D0 (en) | 2002-08-14 |
JP2003524158A (ja) | 2003-08-12 |
US6549647B1 (en) | 2003-04-15 |
US7027639B2 (en) | 2006-04-11 |
KR100795761B1 (ko) | 2008-01-21 |
KR20020067603A (ko) | 2002-08-22 |
US20020191834A1 (en) | 2002-12-19 |
GB2374233A (en) | 2002-10-09 |
GB2374233B (en) | 2004-08-25 |
WO2001050410A1 (en) | 2001-07-12 |
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