DE10083431T1 - Temperaturausgleichsverfahren für Wellenmesser - Google Patents

Temperaturausgleichsverfahren für Wellenmesser

Info

Publication number
DE10083431T1
DE10083431T1 DE10083431T DE10083431T DE10083431T1 DE 10083431 T1 DE10083431 T1 DE 10083431T1 DE 10083431 T DE10083431 T DE 10083431T DE 10083431 T DE10083431 T DE 10083431T DE 10083431 T1 DE10083431 T1 DE 10083431T1
Authority
DE
Germany
Prior art keywords
temperature compensation
compensation method
wave meters
meters
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10083431T
Other languages
English (en)
Inventor
Juergen Kleinschmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lambda Physik AG
Original Assignee
Lambda Physik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lambda Physik AG filed Critical Lambda Physik AG
Publication of DE10083431T1 publication Critical patent/DE10083431T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0246—Measuring optical wavelength

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Spectrometry And Color Measurement (AREA)
DE10083431T 1999-10-12 2000-10-11 Temperaturausgleichsverfahren für Wellenmesser Withdrawn DE10083431T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15880899P 1999-10-12 1999-10-12
US09/686,483 US6667804B1 (en) 1999-10-12 2000-10-10 Temperature compensation method for wavemeters
PCT/IB2000/001541 WO2001027576A1 (en) 1999-10-12 2000-10-11 Temperature compensation method for wavemeters

Publications (1)

Publication Number Publication Date
DE10083431T1 true DE10083431T1 (de) 2002-01-10

Family

ID=26855404

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10083431T Withdrawn DE10083431T1 (de) 1999-10-12 2000-10-11 Temperaturausgleichsverfahren für Wellenmesser

Country Status (4)

Country Link
US (1) US6667804B1 (de)
JP (1) JP2003511688A (de)
DE (1) DE10083431T1 (de)
WO (1) WO2001027576A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003142758A (ja) * 2001-11-01 2003-05-16 Komatsu Ltd フッ素分子レーザ装置
JP2003214958A (ja) * 2002-01-21 2003-07-30 Gigaphoton Inc 波長検出装置、レーザ装置及び波長検出方法
US7054518B2 (en) * 2003-10-14 2006-05-30 Coronado Instruments, Inc. Etalon assembly tuned by applying counterbalanced compression forces
US20050286599A1 (en) * 2004-06-29 2005-12-29 Rafac Robert J Method and apparatus for gas discharge laser output light coherency reduction
US7317536B2 (en) * 2005-06-27 2008-01-08 Cymer, Inc. Spectral bandwidth metrology for high repetition rate gas discharge lasers
US9995890B2 (en) * 2010-09-27 2018-06-12 Finisar Corporation Thermal management of a locker etalon in a transmitter optical subassembly
JP6082557B2 (ja) * 2012-09-28 2017-02-15 グローリー株式会社 スペクトルセンサの光学系調整方法及び光学系調整装置並びに紙葉類識別装置
CN108507686B (zh) * 2018-02-02 2019-09-27 北京科益虹源光电技术有限公司 一种激光器中心波长测量的温漂反馈方法及装置
US10948356B1 (en) 2020-06-22 2021-03-16 Quantum Valley Ideas Laboratories Measuring wavelength of light
US11435234B1 (en) 2021-02-10 2022-09-06 Quantum Valley Ideas Laboratories Increasing the measurement precision of optical instrumentation using Kalman-type filters

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4319843A (en) 1980-02-25 1982-03-16 Burleigh Instruments, Inc. Interferometer apparatus for the direct measurement of wavelength and frequency
US4404366A (en) 1980-05-06 1983-09-13 Miles Laboratories, Inc. Beta-galactosyl-umbelliferone-labeled hapten conjugates
FI75047C (sv) * 1982-05-11 1988-04-11 Scanoptics Oy Anordning för utförande av spektralanalys.
GB8625432D0 (en) 1986-10-23 1986-11-26 Super Pipe Int Corp Forming plastics coated tube
JP2657487B2 (ja) 1987-03-19 1997-09-24 株式会社小松製作所 レーザの波長制御装置および方法
DE3891284T1 (de) 1987-07-17 1990-04-26 Komatsu Mfg Co Ltd Laserwellenlaengen-regelvorrichtung
US5081635A (en) 1987-08-25 1992-01-14 Kabushiki Kaisha Komatsu Seisakusho Apparatus for controlling output from an excimer laser device
US4926428A (en) 1987-08-31 1990-05-15 Kabushiki Kaisha Komatsu Seisakucho Method and apparatus for sensing the wavelength of a laser beam
KR910006307B1 (ko) 1987-09-26 1991-08-19 미쓰비시덴기 가부시기가이샤 레이저 파장의 안정화 방법 및 파장 안정화 장치
US4823354A (en) 1987-12-15 1989-04-18 Lumonics Inc. Excimer lasers
DE3744323C2 (de) 1987-12-28 1999-03-11 Lambda Physik Forschung Verfahren und Vorrichtung zum Stabilisieren der Frequenz eines Laserstrahles
WO1989007353A1 (en) 1988-01-27 1989-08-10 Kabushiki Kaisha Komatsu Seisakusho Method and apparatus for controlling narrow-band oscillation excimer laser
JP2781987B2 (ja) 1989-05-23 1998-07-30 株式会社小松製作所 波長検出装置
US5025445A (en) 1989-11-22 1991-06-18 Cymer Laser Technologies System for, and method of, regulating the wavelength of a light beam
JP2631569B2 (ja) 1990-02-15 1997-07-16 株式会社小松製作所 波長検出装置
US5048031A (en) 1990-04-23 1991-09-10 Coherent, Inc. Laser with actively stabilized etalon for single frequency operation
US5144632A (en) 1990-04-23 1992-09-01 Coherent, Inc. Laser with actively stabilized etalon for single frequency operation
DE4114407A1 (de) 1991-05-03 1992-11-05 Zeiss Carl Fa Verfahren und anordnung zur bestimmung und fixierung der luftwellenlaenge einer lichtquelle
JPH05312646A (ja) 1992-05-15 1993-11-22 Mitsubishi Electric Corp 波長測定装置およびこれを搭載したレーザ装置
US5450207A (en) 1993-07-16 1995-09-12 Cymer Laser Technologies Method and apparatus for calibrating a laser wavelength control mechanism
US5420877A (en) 1993-07-16 1995-05-30 Cymer Laser Technologies Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby
JPH07120326A (ja) 1993-10-22 1995-05-12 Komatsu Ltd 波長検出装置
US5479431A (en) 1994-06-02 1995-12-26 Spectra-Physics Laserplane, Inc. Solid-state laser with active etalon and method therefor
JP2836566B2 (ja) 1995-12-08 1998-12-14 日本電気株式会社 波長安定化狭帯域エキシマレーザ装置
US5867514A (en) 1997-01-09 1999-02-02 Cymer, Inc. Laser wavelength control circuit having automatic DC offset and gain adjustment
GB9701627D0 (en) 1997-01-27 1997-03-19 Plessey Telecomm Wavelength manager
US5771094A (en) 1997-01-29 1998-06-23 Kla-Tencor Corporation Film measurement system with improved calibration
JP3385898B2 (ja) 1997-03-24 2003-03-10 安藤電気株式会社 可変波長半導体レーザ光源
US5835520A (en) 1997-04-23 1998-11-10 Cymer, Inc. Very narrow band KrF laser
US5991324A (en) 1998-03-11 1999-11-23 Cymer, Inc. Reliable. modular, production quality narrow-band KRF excimer laser
DE69706827T2 (de) 1997-05-02 2002-03-28 Agilent Technologies Inc Wellenlängenmessgerät und eine Einrichtung zur Regelung der Wellenlänge einer Lichtquelle
US5901163A (en) 1997-06-04 1999-05-04 Cymer, Inc. Narrow band laser with etalon based output coupler
US5856991A (en) 1997-06-04 1999-01-05 Cymer, Inc. Very narrow band laser
US5978391A (en) 1997-07-18 1999-11-02 Cymer, Inc. Wavelength reference for excimer laser
US6243163B1 (en) * 1998-09-21 2001-06-05 Komatsu Ltd. Wavelength detector
JP2001007007A (ja) 1999-06-23 2001-01-12 Ushio Sogo Gijutsu Kenkyusho:Kk 半導体露光用エキシマレーザ光のための波長モニタ装置

Also Published As

Publication number Publication date
WO2001027576A1 (en) 2001-04-19
JP2003511688A (ja) 2003-03-25
US6667804B1 (en) 2003-12-23

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee