DE10046973B4 - Verfahren zur Herstellung eines CVD-Diamantwerkzeugs und Verwendung - Google Patents

Verfahren zur Herstellung eines CVD-Diamantwerkzeugs und Verwendung Download PDF

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Publication number
DE10046973B4
DE10046973B4 DE10046973A DE10046973A DE10046973B4 DE 10046973 B4 DE10046973 B4 DE 10046973B4 DE 10046973 A DE10046973 A DE 10046973A DE 10046973 A DE10046973 A DE 10046973A DE 10046973 B4 DE10046973 B4 DE 10046973B4
Authority
DE
Germany
Prior art keywords
diamond
tool
cvd
further characterized
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10046973A
Other languages
German (de)
English (en)
Other versions
DE10046973A1 (de
Inventor
Shin-Cheng Lin
Yang-Liang Pai
Chien-Min Sung
Chiu-Hsian Guan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kinik Co
Original Assignee
Kinik Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to GB0022947A priority Critical patent/GB2366804B/en
Application filed by Kinik Co filed Critical Kinik Co
Priority to DE10046973A priority patent/DE10046973B4/de
Priority to FR0013005A priority patent/FR2815045B1/fr
Publication of DE10046973A1 publication Critical patent/DE10046973A1/de
Application granted granted Critical
Publication of DE10046973B4 publication Critical patent/DE10046973B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE10046973A 2000-09-19 2000-09-22 Verfahren zur Herstellung eines CVD-Diamantwerkzeugs und Verwendung Expired - Fee Related DE10046973B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0022947A GB2366804B (en) 2000-09-19 2000-09-19 Cast diamond tools and their formation by chemical vapor deposition
DE10046973A DE10046973B4 (de) 2000-09-19 2000-09-22 Verfahren zur Herstellung eines CVD-Diamantwerkzeugs und Verwendung
FR0013005A FR2815045B1 (fr) 2000-09-19 2000-10-11 Produit diamante et son procede de fabrication

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0022947A GB2366804B (en) 2000-09-19 2000-09-19 Cast diamond tools and their formation by chemical vapor deposition
DE10046973A DE10046973B4 (de) 2000-09-19 2000-09-22 Verfahren zur Herstellung eines CVD-Diamantwerkzeugs und Verwendung
FR0013005A FR2815045B1 (fr) 2000-09-19 2000-10-11 Produit diamante et son procede de fabrication

Publications (2)

Publication Number Publication Date
DE10046973A1 DE10046973A1 (de) 2002-04-25
DE10046973B4 true DE10046973B4 (de) 2005-09-15

Family

ID=27214076

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10046973A Expired - Fee Related DE10046973B4 (de) 2000-09-19 2000-09-22 Verfahren zur Herstellung eines CVD-Diamantwerkzeugs und Verwendung

Country Status (3)

Country Link
DE (1) DE10046973B4 (fr)
FR (1) FR2815045B1 (fr)
GB (1) GB2366804B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007019933A1 (de) 2007-04-27 2008-10-30 Kennametal Inc. Schneidenträger mit aufgelötetem Schneidkörper und Fräsmesserkopf

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
DE102004052866A1 (de) * 2004-11-02 2006-05-11 Hnp Mikrosysteme Gmbh Diamantbeschichtung von Verdrängerkomponenten, wie Zahnkomponenten, für eine chemische Beständigkeit und tribologischen Verschleißschutz in einer Verdrängereinheit
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
TWI388402B (en) 2007-12-06 2013-03-11 Methods for orienting superabrasive particles on a surface and associated tools
EP2395125A1 (fr) 2010-06-08 2011-12-14 The Swatch Group Research and Development Ltd. Procédé de fabrication d'une pièce en métal amorphe revêtue
CN103329253B (zh) 2011-05-23 2016-03-30 宋健民 具有平坦化尖端的化学机械研磨垫修整器
GB201112325D0 (en) * 2011-07-18 2011-08-31 Element Six Abrasive Sa Inserts and method for making same
CN116121728A (zh) * 2023-01-30 2023-05-16 江苏开放大学（江苏城市职业学院） 一种制备新型金刚石复合厚膜刀具的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0400947A1 (fr) * 1989-05-31 1990-12-05 De Beers Industrial Diamond Division (Proprietary) Limited Croissance de diamant
EP0518591A1 (fr) * 1991-06-12 1992-12-16 General Electric Company Procédé de production des objects par dépôt chimique en phase vapeur et les objets produits
JPH0565645A (ja) * 1991-09-04 1993-03-19 Seiko Epson Corp ダイアモンド成形体
EP0541071A1 (fr) * 1991-11-07 1993-05-12 Sumitomo Electric Industries, Limited Outil de coupe en diamant polycristallin et procédé pour sa fabrication
DE19547571A1 (de) * 1994-12-21 1996-07-04 De Beers Ind Diamond Drahtziehwerkzeuge

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8519905D0 (en) * 1985-08-08 1985-09-18 Smit & Sons Diamond Tools Rotary grinding wheel dressers
EP0487292B1 (fr) * 1990-11-22 1996-02-14 Sumitomo Electric Industries, Limited Outil en diamant polycrystallin et méthode pour sa production
GB9100631D0 (en) * 1991-01-11 1991-02-27 De Beers Ind Diamond Wire drawing dies
US5365345A (en) * 1991-04-10 1994-11-15 Santa Barbara Research Center Infrared transmitting window and method of making same
CA2065724A1 (fr) * 1991-05-01 1992-11-02 Thomas R. Anthony Methode de production d'articles par depot chimique en phase vapeur et mandrins de support connexes
US5507987A (en) * 1994-04-28 1996-04-16 Saint Gobain/Norton Industrial Ceramics Corp. Method of making a free-standing diamond film with reduced bowing
FR2738832B1 (fr) * 1995-09-18 1997-12-12 Suisse Electronique Microtech Procede d'obtention d'une couche de diamant sur un support en matiere plastique et produit ainsi obtenu
US5660936A (en) * 1995-11-01 1997-08-26 General Electric Company Fine grain diamond tool and method of manufacture

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0400947A1 (fr) * 1989-05-31 1990-12-05 De Beers Industrial Diamond Division (Proprietary) Limited Croissance de diamant
EP0518591A1 (fr) * 1991-06-12 1992-12-16 General Electric Company Procédé de production des objects par dépôt chimique en phase vapeur et les objets produits
JPH0565645A (ja) * 1991-09-04 1993-03-19 Seiko Epson Corp ダイアモンド成形体
EP0541071A1 (fr) * 1991-11-07 1993-05-12 Sumitomo Electric Industries, Limited Outil de coupe en diamant polycristallin et procédé pour sa fabrication
DE19547571A1 (de) * 1994-12-21 1996-07-04 De Beers Ind Diamond Drahtziehwerkzeuge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007019933A1 (de) 2007-04-27 2008-10-30 Kennametal Inc. Schneidenträger mit aufgelötetem Schneidkörper und Fräsmesserkopf

Also Published As

Publication number Publication date
FR2815045B1 (fr) 2004-03-19
GB0022947D0 (en) 2000-11-01
DE10046973A1 (de) 2002-04-25
GB2366804B (en) 2003-04-09
FR2815045A1 (fr) 2002-04-12
GB2366804A (en) 2002-03-20

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20130403