DE10038288A1 - Electro-fluidic controller with components stacked in planes e.g. for microvalves, comprises interconnected distribution-, amplification-, actuation-, and electronics planes - Google Patents

Abstract

A distribution plane (2) includes the fluid distribution plate (6) with fluidic interfaces between internal- (7) and external fluid channels. Above this plane (2), adjacent fluidic amplifier units (8) form an amplification plane (3), fixed to a fluid distribution plate (6) with internal channels (7) coupling differing fluidic configurations. Above the amplifier plane, actuators (12) form an actuator plane (4), each with an electrically-activated microvalve (33a, 33b) for fluidic activation of the amplifiers. A further electronics plane (5) contacts the actuator plane, and includes the valve actuation electronics (13).

Description

The invention relates to an electro-fluidic control device tion, arranged in several superimposed levels components.

Such an electro-fluidic control device goes already out of WO 96/28664. Your components are layered in several superimposed levels arranges and combined into one unit. There is one lower level is designed as a distribution level, which is internal Fluid channels has, on the one hand, standardized Interfaces can be connected to external fluid channels and on the other hand are connected to microvalves that are in a placed above the distributor level actuator level are. Is between the actuator level and the distributor level an electronics level with that for the control of the micro valves required valve electronics. The micro valves each have a 2/2 valve function and are for Receiving a 3/2-switching function electrically and fluidically with linked together.

A disadvantage of the known control device is the rela tiv low fluid throughput, which is due to the micro valves can be controlled. The selected multilayer structure also hinders  the accessibility of the valve electronics. In the case of an elec tronic malfunction, the control device must com be dismantled to replace the valve electronics can.

It is the object of the present invention to provide an electronic to create fluidic control device, which at compact system allows high flow rates and very maintenance is friendly.

This object is achieved by an electro-fluidic control device with components arranged in several superimposed levels,

• - With a manifold level, the fluid distribution plate contains that via internal fluid channels as well as with the internal fluid channels communicating fluidic section places for connecting external fluid channels,
• - With a reinforcement arranged above the distributor level ker plane, which a plurality of arranged side by side fluidically activatable fluidic amplifiers contains units that are fixed on the fluid distribution plate are and with internal fluid channels the fluid distributor plate communicate, and which serve internal fluid channels of the fluid distribution plate in different con to fluidly link figures together,
• - With an actuator arranged above the amplifier level plane, which is a plurality of arranged side by side and actuator units fixed on the amplifier units ten contains, each at least one electrically activated  Have microvalve and for fluidic actuation serving the amplifier units,
• - And with an arranged above the actuator level Elek electronics level, the one with the micro valves of the actuator rebene contacted and was used to activate them Valve electronics contains.

This results in a control device for through Fluid power actuated consumers that have an extreme compact structure and yet high flow rates made possible. The fluidic pressure medium is controlled through the fluidic provided in the amplifier level Amplifier units, due to the close proximity very short flow paths to the distributor level can be realized can. The fluidic amplifier units are by Mi activated kroventile that merged in one actuator level are summarized, which lies above the amplifier level, so that too only very short fluid paths occur here. The micro valves, which are preferably micromechanically manufactured Valves or possibly also piezo valves to control only a small volume of fluid, which in turn the activation of the amplifier units, whereby by suitable area ratios of much larger flow rates are manageable. Above the actuator level, and thus in close proximity to the electrically activated microves tilen, an electronics level is placed, which the for the An Control of the micro-valves required valve electronics contains. Since it sits above the actuator level, it can be  replace in the event of a defect, without the other component levels disconnect and disassemble the control device.

Advantageous developments of the invention go from the Un claims.

Both the amplifier units and the actuator units can be integral parts of a suitable laminate his. However, a modular opening is much more advantageous construction in which the amplifier units of individual Ver amplifier modules and the actuator units of individual Actuator modules are formed. In this way you are at Structure of a control device very flexible and has in Scha The possibility falls only of the actually defective one exchange.

The arrangement is preferably made so that on each ver amplifier module an actuator module specially assigned to this sitting. This module assembly can be designed as a structural unit his.

The amplifier units are expediently each with equipped with a 3/2-valve function, so that one too a fluid channel leading the consumer optionally with fluidi can feed or vent the pressure medium.

The actuator units expediently contain at least partly two micro valves with 2/2-valve function, whereby there is a fluidic connection,  that a 3/2 switching function is also given here. The micro valve pairs jointly control the application of fluid to a Activation channel that with the associated amplifier connected and their activation state gives.

In order to optimally connect the microvalve pairs each to be able to make the actuator unit, they sit at the microvalves preferably in opposite directions Sides of an interposed fluid channel plate. About these the fluidic connection then takes place with the assigned one Amplifier unit.

The 3/2 valve function can also be used immediately realize with just one micro valve that corresponds to the appropriate functionality. Others, even more valuable Other valve functions are conceivable, e.g. B. 5/2 valve radio tions.

A control device with a particularly small floor plan lets realize that the microvalves in flat building be carried out wisely and upright on the amplifier sit so that their main plane of expansion is right extends at an angle to the component levels.

An arrangement in which a microvalve is also possible is also possible one of its larger base areas ahead on the assigned ten amplifier unit sits so that the main expansion plane extends parallel to the component levels.  

The electronics level expediently has one PCB extending over the actuator units, which on its underside with expediently all mic roventilen is electrically contacted. Above this lei terplatte can in parallel arrangement at least one more Printed circuit board can be provided with the former Lei terplatte is electrically linked, so that the required electronic components on the smallest possible floor plan op distribute timally.

The electronics level preferably has at least one electrical interface connected to the valve electronics for connecting external electrical conductors. In this way can the control device with an external electronic Control device and / or with other control devices be electrically linked. Contains the valve electronics ne own control software, can have at least one electrical interface if necessary a programming or Monitoring done.

The electronics level can, in particular, also be optical be equipped with the activation state of the amplifier units and / or actuator units. The electronics level can also be operated with manual actuation means be allowed to select a manual operation if necessary ter permit amplifier units, with a design selected that is not mechanically on the control element of the amplifier ker unit or acts on the valve member of a valve unit,  but which produce an electrical control signal can.

In the control channels leading to the actuator units expediently switched on at least one fine filter, blockages of the small flow cross-sections changed.

The entire control device is advantageously in one fixed grid, the ver stronger units, the assigned placement places the fluid distribution plate, the actuator units and the die sen assigned contacting zones of the electronics level are related.

The invention based on the accompanying drawing tion explained in more detail. In this show:

Fig. 1 a preferred embodiment of the inventive electro-fluidic control device SEN view in oblique, partly broken away and partly in exploded view,

FIG. 2 shows a detailed view of the control device from FIG. 1, with an oblique plan view from below onto the electronics level, a control module composed of an actuator module and an amplifier module being shown for clarification,

Fig. 3 is a more detailed view of the control device of FIG. 1 with a view obliquely from above onto the fluid distributor plate of the distributor level, again a STEU mounted thereon is ermodul visible for clarity,

Fig. 4 in a greatly enlarged illustration a section of the control device from Fig. 1 in section with egg ner in the vertical direction cutting plane in the area of a control module, and

Fig. 5 shows a preferred electrical and fluidic circuit construction of the control device.

The electro-fluidic control device, designated in its entirety by reference number 1 , has a layered structure with a plurality of levels lying one above the other and parallel to one another, in which the various device components are summarized under functional commonality aspects.

In relation to a preferred direction of use, the component level lying below is formed by a distributor level 2 which has a fluid distributor plate 6 which is parallel to the distributor level 2 and which is equipped with a large number of internal fluid channels 7 . Immediately above the distributor level 2 there is an amplifier level 3 parallel to this, which contains a plurality of fluidic amplifier units 8 arranged next to one another in the level.

Again above the amplifier level 3 there is an actuator level 4 which contains a plurality of actuator units 12 arranged next to one another in this level.

The upper end forms a parallel to the other levels and arranged immediately above the actuator level 4 electronics level 5th Its essential component is a valve electronics 13 schematically indicated in FIG. 1, which is used to activate microvalves 33 a, 33 b, which are contained in the actuator units 12 of the actuator level 4 .

The actuator units 12 and / or the amplifier units 8 could be made comparable to the fluid distribution plate 6 as an integral part of an actuator plate or an amplifier plate. In favor of a flexible structure, however, the amplifier units 8 are designed as individual amplifier modules 16 and the actuator units 12 as individual actuator modules 17 in the exemplary embodiment. These can be assembled and disassembled individually, whereby modules of different function types can be combined without further ado.

The fluid distribution plate 6 is provided on its top side facing the amplifier level 3 with a plurality of assembly zones 18 distributed in a predetermined basic grid. An amplifier module 16 is mounted on each of these assembly zones 18 . The amplifier modules communicate over the mounting zones 18 opening out openings 21 with certain of the internal fluid channels 7 and can be fluidically activated to these internal fluid channels 7 in predetermined Wei se in various configurations fluidically to each other.

In the exemplary embodiment, at least one internal Fluidka channel 7 is formed as a feed channel 22 , which is connected via outgoing branch feed channels 23 to each assembly zone 18 and thus to each amplifier module 16 . The feed channel 22 can be connected to a pressure source P via at least one first fluidic interface 24 a assigned to the outer surface of the fluid distributor plate 6 , the external fluid channel used for this purpose being able to run in a fluid line.

Further internal fluid channels 7 are formed as working channels 25 . Each of these working channels 25 opens at one end to an assembly zone 18 and at the other to a second fluidic interface 24 b on an outer surface of the fluid distributor plate 6 , where in turn external fluid channels can be connected, which lead to consumers to be actuated, for example to working cylinders or others by fluid force operable equipment. Here, too, the external fluid channels expediently run in fluid lines, although there is the possibility of carrying them out in one or more special channel components on which the control device is mounted.

Include the internal fluid channels 7 further at least one venting channel 26 into the lerplatte Fluidvertei 6 integrated or attached thereto muffler 29 opens to the environment. Alternatively, other flui dical interfaces can be provided in order to enable a ducted removal of the exhaust air via external fluid channels.

The venting channel 26 communicates with each assembly zone 18 via branch ventilation channels 27 . In this way, each amplifier module 16 is connected to a feed channel 22 , to a vent channel 26 and to a working channel 25 .

The amplifier modules 16 have a 3/2-valve functionality and contain a fluid-movable control member 28 , the switching position of which is influenced by the associated actuator module 17 . At this point, it should be mentioned that each amplifier module 16 is individually assigned its own actuator module 17 , the pair of modules preferably being firmly connected to one another and forming a structural unit hereinafter referred to as control module 32 .

Depending on the position of the control element 28 of an amplifier module 16 , the associated working channel 25 is fed with pressure medium from the feed channel 22 or vented via the venting channel 26 . Compressed air in particular is used as the pressure medium, but in principle a hydraulic pressure medium would also be usable.

In FIG. 5, the control modules 32 are indicated by encircled areas. According to the selected basic grid, a total of sixteen control modules 32 are present in the exemplary embodiment, the basic grid being a 4 × 4 grid.

In the exemplary embodiment, the actuator modules 17 of a respective control module 32 each contain two micro valves 33 a, 33 b produced by micromechanical structuring methods, for example by etching or impression techniques. Each of these micro valves 33 a, 33 b is equipped with a 2/2-valve function, with a fluidic connection of the micro-valve pairs taking place in such a way that a 3/2-valve function can be brought about overall. Within the scope of this 3/2-valve function, an activation channel 34 leading to the control element 28 of the assigned amplifier module 16 can optionally be acted upon with pressurized fluid or vented. Based on the selected area ratios of the application areas present on the control element 28 , the switching position of the control element 28 can be influenced as desired.

In the exemplary embodiment, each of the micro valves 33 a, 33 b has a housing 35 which defines an interior in which a diaphragm-like valve member 36 extends. The activation channel 34 opens out via controllable openings 37 a, 37 b simultaneously into the interiors of both microvalves 33 a, 33 b, the controllable openings 37 a, 37 b being closed or released depending on the position of the valve member 36 .

The interior of a micro-valve 33 a is connected via a control channel 38 continuously connected with a pressure source. In the exemplary embodiment, this is realized in that the control channel 38 is guided through the adjacent amplifier module 16 into the fluid distribution plate 6 and is connected there to the feed channel 22 .

The interior of the other microvalve 33 b is continuously vented from an air duct 42 , the outlet opening 43 advantageously being provided on the adjacent amplifier module 16 .

The lying within the actuator module 16 Längenabschnit te of the activation channel 34 , the control channel 38 and the Ab air duct 42 , in particular in a between the two micro valves 33 a, 33 b seated fluid channel plate 43rd It thus practically forms an adapter between the micro valves 33 a, 33 b and the actuator module 17 carrying the amplifier module 16 . In favor of a compact arrangement of the micro valves 33 a, 33 b in flat running and upright placed on the associated amplifier modules 16, so that their coinciding with the plane of extension of the membrane-like valve members 36 main extension plane extending perpendicular to the planes of components 2-5.

The micro valves 33 a, 33 b are activated electrically. For this purpose, they each contain, in the exemplary embodiment, at least one housing-fixed electrode 44 , which is opposite a counter electrode 45 provided in the valve member 36 or formed directly by the latter, wherein an electrical field can be built up by applying a voltage, which pulls the two electrodes towards one another and thereby The valve member is displaced in the direction of the associated controllable opening 37 a, 37 b until the same is closed. By removing the voltage and discharging the electrodes 44 or counter electrodes 45 , the valve members 36 can be moved back to the starting position.

The starting position is in the exemplary embodiment with both micro valves 33 a, 33 b an open position, the activation channel 34 via the one micro valve 32 a with the control channel 38 and the other micro valve 33 b with the exhaust air channel 42 being connected. The micro valves 33 a, 33 b are of the "normally closed" type.

In operation, you will activate the microvalves 33 a, 33 b by electrical control of the electrodes 44 and counter electrodes 45 so that the two controllable openings 37 a, 37 b are alternately opened and closed so that the activation channel 34 either with pressure is pressurized or vented.

Instead of the electrostatic actuators to be composed of the electrodes and counter electrodes, the micro valves 33 a, 33 b can also be equipped with other electrical actuators. However, the electrostatic design enables particularly compact dimensions.

In order to obtain the desired 3/2-valve function, only a single microvalve can be used, which immediately has the corresponding functionality. If necessary, other micro valves with even higher functionality can be used, for example micro valves with 5/2 valve function. Especially if only one microvalve is provided per amplifier unit, which is designed in a flat design, it is recommended that the arrangement that the corresponding microvalve with one of its larger base area sits on the assigned amplifier unit 8 . This results in an arrangement in which the main expansion plane of the microvalve in question extends parallel to the component planes.

The micro valves 33 a, 33 b of the individual actuator modules 17 he keep their electrical actuation signals from the valve electronics 13 of the electronics level 5th This valve electronics 13 is constructed in the exemplary embodiment on two printed circuit boards 46 , 47 which are spaced apart in mutually parallel planes and which extend over the actuator modules 17 . The actuator modules 17 immediately adjacent first circuit board 46 is contacted with the micro valves 33 a, 33 b of all actuator modules 17 . For this purpose, it has on its underside first electrical contact means 48 which are in electrical connection with second electrical contact means 49 provided on the microvalves 33 a, 33 b. These con tact means 48 , 49 are preferably designed as touch contact means.

The extending over the first printed circuit board 47 second Lei terplatte 47 is contacted via suitable electrical connection means 52 with the first circuit board 46th This electrical cal link allows distribution of the components of the valve electronics 13 on several floors, so that circuit boards with a small floor plan can be used, the realization of a control device with a small floor plan.

The valve electronics 13 can have their own intelligence and memory means in which a control program is stored, which specifies the actuation of the actuator modules 17 according to a desired sequence. As an alternative or in addition, however, there may be the possibility of connecting the valve electronics 13 to an external electronic control device not shown in the drawing, wherein in the electronics level 5 at least one electrical interface 53 connected to the valve electronics 13 can be present, which can be the Appropriate external electrical conductors can be connected. These can be part of a preferably serial bus.

Usually, the microvalves 33 a, 33 b require a relatively high activation voltage. In order to generate this, the valve electronics 13 is expediently equipped with a voltage adjustment circuit. It also contains a la de-discharge circuit for the electrostatic actuation medium. In addition, other electronic components can also be present in order to obtain the desired logical connections.

As is apparent from Fig. 2, the first contact means 48 on the first circuit board 46 in individual Kontaktierungszo NEN 51 are summarized. Their distribution, like the distribution of the amplifier modules 16 and the actuator modules 17 , corresponds to the distribution or basic grid of the assembly zones 18 . In this way, the control device is based on construction with a continuous fixed grid, including at least the electronics level, the actuator level and the amplifier level.

The components of the electronics level 5 , the actuator level 4 and the amplifier level 3 are housed together in the interior of a housing formed by the fluid distribution plate 6 , a top frame 54 attached to the top of the fluid distribution plate 6 and a lid 55 attached to the top of the top frame 54 is.

The height of the top frame 54 suitably corresponds at least substantially to the overall height of the individual control modules 32 , which are thus protected on the circumference even when the cover 55 is removed.

The cover 55 has on the fluid distribution plate 6 facing inside a recess in which the valve electronics 13 including the existing circuit boards 46 , 47 is housed. The circuit boards 46 , 47 are fixed on the cover 55 and can thus be easily removed or attached together with the cover 55 . The Ausgestal device of the contact means 48 , 49 as touch contact means it facilitates the contacting and de-contacting processes taking place here.

The electronics level 5 further contains optical display means 56 , which are able to display certain activation states of the control modules 32 or their components. You are expediently seen on the top of the cover 55 .

Furthermore, the electronics level 5 is equipped with manual actuating means 57 which, if necessary, enable manual actuation of one or more selected actuator modules 16 , which is independent of a possibly existing control program. Each actuator module 17 are assigned their own manual actuation means 57 , which can be formed, for example, by buttons which, when actuated, generate an electrical signal that activates the micro valves 33 a, 33 b of the associated actuator module 17 .

In order to ensure reliable operation of the micro valves 33 a, 33 b, 38 fine filter means 58 are switched into the control channels leading to the actuator modules 17 . These can be integrated in the fluid distribution plate 6 , for example, according to the schematic illustration in FIG. 4. In practice, however, an accommodation in the amplifier level 3 and / or in the actuator level 4 is recommended, which may be cartridge-like fine filter media 58 according to FIG. 1.

Claims (18)

1. electro-fluidic control device with components arranged in several superimposed levels,
with a distributor level ( 2 ), which contains a fluid distributor plate ( 6 ), which has internal fluid channels ( 7 ) and with the internal fluid channels ( 7 ) communicating fluid interfaces ( 24 a, 24 b) for connecting external fluid channels,
With an amplifier level ( 3 ) arranged above the distributor level ( 2 ), which contains a plurality of fluidically activatable fluidic amplifier units ( 8 ) arranged next to one another, which are fixed on the fluid distributor plate ( 6 ) and with internal fluid channels ( 7 ) the fluid distributor plate ( 6 ) communicate, and they serve to fluidly link internal fluid channels ( 7 ) of the fluid distributor plate ( 6 ) in different configurations,
With an actuator level ( 4 ) arranged above the amplifier level ( 3 ), which contains a plurality of actuator units ( 12 ) arranged next to one another and fixed on the amplifier units ( 8 ), each of which has at least one electrically activatable microvalve ( 33 a, 33 b) have and serve for the fluidic activation of the amplifier units ( 8 ),
and with an electronics level ( 5 ) arranged above the actuator level, which contains a valve electronics ( 13 ) that contacts the micro-valves ( 33 a, 33 b) of the actuator level ( 4 ) and serves to activate them. 2. Control device according to claim 1, characterized in that the amplifier units ( 8 ) of the amplifier level ( 3 ) of individual amplifier modules ( 16 ) are formed. 3. Control device according to claim 1 or 2, characterized in that the actuator units ( 12 ) are formed by individuel len actuator modules ( 17 ). 4. Control device according to claim 3 in conjunction with claim 2, characterized in that an actuator module ( 17 ) sits on each amplifier module ( 16 ). 5. Control device according to one of claims 1 to 4, there characterized in that the amplifier units each egg ne 3/2 valve function. 6. Control device according to one of claims 1 to 5, characterized in that the actuator units ( 12 ) at least partially contain two micro-valves ( 33 a, 33 b) with 2/2-valve function, leading to a 3/2-control function are linked and jointly control the application of fluid to an activation channel ( 34 ) which is connected to the associated amplifier unit ( 8 ). 7. Control device according to claim 6, characterized in that each actuator unit ( 12 ) has a fluid channel plate ( 43 ) between the two micro valves ( 33 a, 33 b). 8. Control device according to one of claims 1 to 7, characterized in that the actuator units ( 12 ) at least partially contain at least only a microvalve that has a 3/2-valve function or an even higher-quality valve function. 9. Control device according to one of claims 1 to 8, characterized in that the microvalves ( 33 a, 33 b) are of flat construction and at least partially sit on edge on the amplifier units ( 8 ). 10. Control device according to one of claims 1 to 9, characterized in that the microvalves are of flat construction and at least partially sit with one of their larger base areas on the amplifier units ( 8 ). 11. Control device according to one of claims 1 to 10, characterized in that the electronic level ( 5 ) has an over the actuator units ( 12 ) extending conductor plate ( 46 ) on the underside with preferably all micro valves ( 33 a, 33rd b) is electrically contacted. 12. Control device according to claim 11, characterized by at least one above the with the microvalves ( 33 a, 33 b) contacted first printed circuit board ( 46 ) te, to the first printed circuit board ( 46 ) parallel further printed circuit board ( 47 ) with the first Printed circuit board ( 46 ) is electrically linked. 13. Control device according to one of claims 1 to 12, characterized in that the valve electronics ( 13 ) at least one in the electronics level ( 5 ) located conductor plate ( 46 , 47 ) is provided. 14. Control device according to one of claims 1 to 13, characterized in that the electronics level ( 5 ) at least one with the electronics level ( 5 ) connected electrical interface ( 53 ) for connecting external electrical Lei ter. 15. Control device according to one of claims 1 to 14, characterized in that the valve electronics ( 13 ) contains or forms a voltage adjustment circuit and / or a charge-discharge circuit. 16. Control device according to one of claims 1 to 15, characterized in that the electronics level ( 5 ) via optical display means ( 56 ) and / or manual actuation means ( 57 ) for the actuator units ( 12 ). 17. Control device according to one of claims 1 to 16, characterized in that in the leading to the actuator units ( 12 ) leading control channels ( 38 ) fine filter means ( 58 ) are switched on. 18. Control device according to one of claims 1 to 17, characterized in that the amplifier units ( 8 ) sit on assembly stations ( 15 ) of the fluid distributor plate ( 6 ) and that the electronics level ( 5 ) with the individual actuator units ( 12 ) associated contact zones ( 51 ) is equipped, the assembly stations ( 15 ), the amplifier units ( 8 ), the actuator units ( 12 ) and the contact zones ( 51 ) have the same fixed distribution grid.