DD124091A1 - - Google Patents

Info

Publication number
DD124091A1
DD124091A1 DD18851275A DD18851275A DD124091A1 DD 124091 A1 DD124091 A1 DD 124091A1 DD 18851275 A DD18851275 A DD 18851275A DD 18851275 A DD18851275 A DD 18851275A DD 124091 A1 DD124091 A1 DD 124091A1
Authority
DD
German Democratic Republic
Application number
DD18851275A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD18851275A priority Critical patent/DD124091A1/xx
Priority to DE19762635356 priority patent/DE2635356C2/de
Priority to GB3538476A priority patent/GB1532862A/en
Priority to SU762399525A priority patent/SU1191980A1/ru
Priority to FR7628344A priority patent/FR2326030A1/fr
Publication of DD124091A1 publication Critical patent/DD124091A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DD18851275A 1975-09-24 1975-09-24 DD124091A1 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DD18851275A DD124091A1 (enrdf_load_stackoverflow) 1975-09-24 1975-09-24
DE19762635356 DE2635356C2 (de) 1975-09-24 1976-08-06 Rasterelektronenmikroskop zur Messung von Abständen zwischen Objektstrukturen
GB3538476A GB1532862A (en) 1975-09-24 1976-08-25 Scanning electron microscope system for investigation of specimen structures
SU762399525A SU1191980A1 (ru) 1975-09-24 1976-09-20 Растровый электронный микроскоп
FR7628344A FR2326030A1 (fr) 1975-09-24 1976-09-21 Microscope electronique a balayage pour le controle de structures d'objets

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18851275A DD124091A1 (enrdf_load_stackoverflow) 1975-09-24 1975-09-24

Publications (1)

Publication Number Publication Date
DD124091A1 true DD124091A1 (enrdf_load_stackoverflow) 1977-02-02

Family

ID=5501778

Family Applications (1)

Application Number Title Priority Date Filing Date
DD18851275A DD124091A1 (enrdf_load_stackoverflow) 1975-09-24 1975-09-24

Country Status (5)

Country Link
DD (1) DD124091A1 (enrdf_load_stackoverflow)
DE (1) DE2635356C2 (enrdf_load_stackoverflow)
FR (1) FR2326030A1 (enrdf_load_stackoverflow)
GB (1) GB1532862A (enrdf_load_stackoverflow)
SU (1) SU1191980A1 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
ATE70914T1 (de) * 1984-03-20 1992-01-15 Vickers Plc Verfahren zum praezisionsmessen mittels eines abtastelelektronenmikroskops.
US4677296A (en) * 1984-09-24 1987-06-30 Siemens Aktiengesellschaft Apparatus and method for measuring lengths in a scanning particle microscope
DE3802598C1 (enrdf_load_stackoverflow) * 1988-01-29 1989-04-13 Karl Heinz 3057 Neustadt De Stellmann

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876879A (en) * 1973-11-09 1975-04-08 Calspan Corp Method and apparatus for determining surface characteristics incorporating a scanning electron microscope

Also Published As

Publication number Publication date
SU1191980A1 (ru) 1985-11-15
DE2635356A1 (de) 1977-04-07
GB1532862A (en) 1978-11-22
FR2326030A1 (fr) 1977-04-22
FR2326030B1 (enrdf_load_stackoverflow) 1982-03-19
DE2635356C2 (de) 1984-08-16

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