CZ301431B6 - Tool provided with protective layer system and process for producing thereof - Google Patents

Abstract

In the present invention, there is disclosed a tool, such as a solid carbide end mill or a solid carbide ball nose mill or a cemented carbide gear cutting tool having a tool body and a wear resistant layer system, which layer system has at least one layer of MeX, wherein Me represents titanium and aluminum and X denotes nitrogen and/or carbon. In the MeX layer, the quotient QiI as defined by the ratio of the diffraction intensity I(200) to I(111) assigned respectively to the (200) and (111) plains in the X ray diffraction of the material using theta -2 theta method is selected to be >/=1.There is also disclosed a process for producing the above-described tool, said process comprising the steps of (a) reactive PVD depositing said at least one hard material layer on said tool body in a vacuum chamber, (b) adjusting a partial pressure of a reactive gas for said reactive PVD depositing, either alone or in combination with also adjusting a bias voltage of the tool body with respect to a predetermined reference potential, for said reactive PVD depositing so as to obtain a desired QiI value for said at least one hard material layer, said adjusting being performing based upon an interdependency of said bias voltage and of said partial pressure with respect to control of QI value of said at least one hard material layer as follows: (i) an increase of said bias voltage leads to a reduction of said QiI value and a decrease of said bias voltage leads to an increase of said QiI value and, (ii) a reduction of said partial pressure leads to a reduction of said QI value and an increase of said partial pressure leads to an increase of said QiI value.

Description

Tool equipped with protective layer system and method of its production

Technical field

The invention relates to a tool such as a solid carbide end milling cutter or a solid carbide milling cutter or a cemented carbide cutting tool having a tool body and a set of wear-resistant layers, the set of layers comprising at least one MeX layer, wherein Me represents titanium and aluminum, and X is nitrogen and / or carbon.

io

Definition:

• The expression Q 1 is defined as the ratio of the bending intensity 1 (200) to the bending intensity I (111), converted into X-ray bending planes (200) and (111) in the material using i 5 θ - 2Θ method. So, that

Q1 = 1 (200) / 1 (111).

The intensity values were measured using the following equipment and with the following settings or adjustments:

Diffractometer Siemens D500

Power input:

Hole aperture:

Detector orifice: Time constant: 29 angular speed: Radiation:

Operating voltage: 30 kV Operating current: 25 mA

Aperture I position: Γ Aperture II position: 0.1 °

Soller slit 4 s

0.05 ° / min

Cu-Ka (0.15406 nm)

If it is stated “measured in accordance with MS”, it is referred to this equipment and this setting or adjustment. Thus, all quantitative results for Qi and I in the description of this application were measured using MS.

• The term "tool body" refers to an uncoated tool.

• The term “hard material” refers to the material to which tools that are subjected to high mechanical and thermal loads during operation are coated for wear resistance. Preferred examples of such materials are listed below as MeX materials.

BACKGROUND OF THE INVENTION

It is generally known in the art of tool protection to employ wear resistant layer systems comprising at least one layer of hard material defined as MeX.

SUMMARY OF THE INVENTION

It is an object of the present invention to achieve a significant improvement in the life of such tools. This is solved by selecting for said at least one layer the value of Q _b to which it applies

Wherein the tool is a solid carbide end milling cutter or a spherical carbide milling cutter or a carbide cutting tool.

In addition, the value of 1 (111) is a factor of at least 20 greater than the average noise level measured in accordance with the MS.

In accordance with the present invention, a tool such as a solid carbide end milling cutter or solid carbide end milling cutter or a cemented carbide cutting tool having a tool body and a plurality of wear resistant layers is provided, the plurality of plies it comprises at least one layer of MeX, wherein Me represents titanium and aluminum, and X is nitrogen and / or carbon, the layer having a value of Q _b defined as the ratio of the diffraction intensity

1 (200) to a diffraction intensity of 1 (111), respectively transferred to planes (200) and (111) of X-ray diffraction of the new radiation in the material using the θ - 2θ method, wherein the value of Qi is chosen to be valid

QiSi, wherein the value of 1 (111) is at least 20 times the average noise intensity value.

The value of Qi holds

In particular

Qi < 0.2, preferably

Qi £ 0.1.

The MeX material is preferably one of titanium and aluminum nitride, titanium, aluminum and carbon nitride 35, and titanium, aluminum and boron nitride.

Me preferably further comprises at least one other element from the group consisting of boron, zirconium, hafnium, yttrium, silicon, tungsten, chromium, preferably at least one of the group comprising yttrium and silicon and boron.

Preferably, the other element is contained in an i-containing Me, and is valid

0.05 atom% <i <60 atom%, the titanium and aluminum content being taken as 100 atom%.

The tool according to the invention preferably further comprises a further layer of titanium nitride located between the at least one layer and the tool body, the further layer having a thickness d for which the

0.05 pm <d <5.0 pm.

The stack of layers is preferably formed by at least one layer and another layer.

-2GB 301431 B6

For stress σ in at least one layer holds

2GPa ^ and <8GPa, in particular

4 GPa <σ <6 GPa.

For the titanium x content in Me, atomic%> x> 40 atomic%, in particular atomic%> x> 55 atomic%, applies.

! For the aluminum content of Me in Me, atomic% <y <60 atomic%, in particular atomic% <y <45 atomic%, applies.

In accordance with another aspect of the present invention, a method of making a tool comprising a tool body and a set of wear-resistant layers comprising at least one hard material layer, wherein at least one MeX layer is applied to the body by reactive vapor deposition PVD), selecting predetermined process parameter values for physical vapor deposition (PVD) except at least biasing the tool body relative to a predetermined reference potential, the layer being realized with a desired Q _h value defined as the ratio of intensity value 1 (200) to intensity value 1 (111), associated respectively to X-ray diffraction planes (200) and (111) in the material using the θ - 2Θ method, wherein the desired value Q 1 is realized by adjusting the bias, selecting a predetermined process parameter In addition to the bias and / or the partial pressure of the reactive gas under vacuum, said layer with a desired value of Qi is realized by reducing the partial pressure to reduce the value of Qi and vice versa, and / or at least one of intensity values 1 (200) and 1 (111) to be at least 20 times the average noise intensity values.

Preferably, the method of the present invention comprises the step of performing reactive physical vapor deposition (PVD) through reactive cathode arc evaporation.

The method of the invention preferably further comprises the step of magnetic arc evaporation control.

Preferably, the method of the invention comprises the step of depositing a MeX layer on the tool body, wherein Me is titanium and aluminum, and X is nitrogen and / or carbon that is fed to the vapor deposition (PVD) application by reactive gas.

The tool is preferably one of the group comprising a solid carbide end mill, a solid carbide end mill, or a cemented carbide cutting tool, wherein the value of Qi is selected such that

Q, šl

-3Cl 301431 B6 by adjusting at least one of the reactive pressure and bias values for reactive physical vapor deposition (PVD).

The value of Qi is preferably chosen to be valid

In particular

Qi <0.2.

The value of Qi is preferably so valid

Qi <0.1.

In accordance with the present invention, it has been found that the Qi values specified above result in a significantly high improvement in wear resistance and hence tool life when the tool is of the type described above.

Until now, the application of wear-resistant coating systems of hard MeX material has been performed independently of the interaction between the tool body material and the mechanical and thermal loads to which the tool is subjected during operation.

Accordingly, the present invention is based on the fact that it has been found that an excellent improvement in wear resistance is achieved when selectively combining a specific Qi value with a specific tool type, thereby realizing a value of 1 (111) higher by a factor of at least 20 than the average sound level, both values measured in accordance with MS.

The improvement achieved by the object of the invention is even increased if the value of Qi is chosen to be at most 1, and further improvement can be achieved if the value of Qi is at most 0.5 or even at most 0.2. The greatest improvement is achieved when Q _r is not more than 0.1.

It should be emphasized here that the value of Qi may fall to zero if the sheet material is made with a uniform crystalline orientation in accordance with the zero bending intensity 1 (200).

Therefore, there is no lower limit for the value of Q _Is, which is only set from a practical point of view.

As is well known to one of skill in the art, there is a correlation between the hardness of the layer and the stress or strain in that layer. The higher the stress or stress, the higher the hardness. However, with increasing stress, the adhesion to the tool body tends to decrease.

High hardness is more important for the tool of the invention than the highest possible adhesion. Therefore, the stress in the MeX layer is preferably chosen at the upper end of the following stress range.

In practice, these circumstances limit the usable value of Q _h

In a preferred embodiment of the tool of the present invention, the MeX tool material is titanium nitride 50 and aluminum, titanium nitride, aluminum and carbon, or titanium nitride, aluminum and boron, the first two of which are currently preferred over titanium nitride, aluminum and boron.

In another embodiment of the tool of the invention, the Me metal in the MeX sheet material may further comprise at least one of boron, zirconium, hafnium, yttrium, silicon,

Tungsten and chromium, of which preference is given to the use of yttrium and / or silicon and / or boron.

The aforementioned additional elements to titanium and aluminum are introduced into the layer material, preferably in the content i, to which it applies

0.05 at.% <I <60 at.%, With Me taken as 100 at.%,

Yet another improvement in all different embodiments of the at least one MeX layer is achieved by inserting an additional titanium nitride layer between the MeX layer and the tool body of thickness d, to which is also 0.05 μιη <d <5 pm.

In view of the general object of the present invention, which is to provide a new tool that can be manufactured at the lowest possible cost and thus as economically as possible, it has further been proposed that the tool is provided with only one MeX material layer and an additional layer which is located between the MeX layer and the tool body.

In addition, the stress σ in the MeX material is selected such that its magnitude is in the range of 1 GPa <σ <8 GPa, and more preferably in the range of

GPa <σ ΐ 6 GPa.

The x content of the titanium in the metal component Me of the MeX layer is preferably selected such that at%> x> 40 at% applies, so that in a further preferred embodiment the at%> x> 55 at% range is valid.

On the other hand, the aluminum content y in the metal component Me of the MeX material is preferably chosen such that at% <x <60 at% holds, with a further preferred embodiment

35 at% <x <45 at%.

In yet another preferred embodiment, both these ranges, i.e. the titanium-related ranges and the aluminum-related ranges, are met.

The deposition of the MeX layer in particular can be carried out by any known vacuum deposition technique, in particular by means of a reactive PVD coating technique, such as reactive cathodic arc evaporation or reactive sputtering. By suitably controlling the process parameters that affect the coating growth, advantageous use of the Q 1 range is achieved.

-5GB 301431 B6

In order to achieve excellent and repeatable adhesion of the layers to the tool body, argon plasma-based plasma etching technology, as described in US-A-5,709,784, has been used as a preparatory step, the disclosure of which is incorporated herein by reference, in terms of such etching and subsequent coating. This document is in accordance with patent application US 08/710 095 of the same inventor (two inventors) and the applicant as the present invention.

io Overview of the drawings

The invention will now be explained in more detail by way of examples of specific embodiments thereof, the description of which will be given with reference to the accompanying drawings, in which:

Fig. 1 is a graph showing the magnitude of the nitrogen partial pressure versus the bias of the tool body;

Fig. 2 is a graph of typical intensity versus 2 ° for a titanium-aluminum nitride hard material layer;

Fig. 3 is an analogous graph to that of Fig. 2, but the titanium and aluminum nitride deposition was controlled by preloading and partial nitrogen pressure to obtain a Qi < i result;

Fig. 4 shows a graph analogous to that of Fig. 2 and Fig. 3 and which applies to the operating point P) of Fig. 1.

DETAILED DESCRIPTION OF THE INVENTION

Example 1

The arc ion plating apparatus using magnetically controlled arc sources, as described in US-A-5,709,784, was used under the operating conditions shown in Table 1 to deposit a MeX layer as also disclosed in Table 1, for solid carbide end mills with a diameter of 10 mm, z = 6. The thickness of the applied MeX layer was always μπι. Thus, for samples Nos. 1 to 5, the Q _h values determined according to the present invention were used, whereas for samples Nos. 6 to 10 this condition was not met.

The value of 1 (111) was always significantly greater than 20 times the average noise value measured in accordance with the MS. The coated end mills were used for milling under the following conditions to determine the milling distance achievable up to wear of an average blade width of 0.20 mm. The resulting milling distance corresponding to the service life of such tools is also shown in Table 1.

Test cutting conditions:

- Tool: Solid carbide end mill with a diameter of 10 mm, z = 6

- Workpiece material: AISI D2 (DIN 1.2379)

-6GB 301431 B6

- Cutting conditions: v _c = 20 m / min f _t - 0.031 mm ap = 15 mm a <= 1 mm consecutive dry milling

From the data contained in Table 1, it can be clearly seen that end mills coated in accordance with the present invention are much more protected against chipping and wear than end mills coated under comparative conditions.

EXAMPLES 2 AND 5 The apparatus used for the coating in accordance with Example 1 was also used for coating samples 11 to 20 according to Table 2. The coated tools and test test conditions were the same as those of Example 1. The layer thickness is given. in Table 2.

It can be seen that in addition to the coating in accordance with Example 1, a titanium nitride intermediate layer was applied between the MeX layer and the tool body, and an outer layer of the respective material as shown in Table 2. Conditions of value 1 (111) and average noise levels, measured in accordance with MS, were richly met.

It should be noted here that the application of the intermediate layer between the MeX layer and the tool body has already resulted in further improvements. An additional improvement is achieved by the application of an outer layer of one of the materials, such as titanium nitride and carbon, titanium oxinitride and aluminum, and in particular an outer layer of aluminum oxide. Again, it can be seen that the application of the determined Qi values of the present invention in comparison to Comparative Samples 16 to 20 leads to a significant improvement.

An outer layer of 0.3 µm aluminum oxide was formed by plasma CVD.

As mentioned above, coated end mills were tested under the same cutting conditions as those of Example 1, wherein the Qi value was measured according to MS.

Example 3

The solid carbide end mills were again coated with the apparatus of Example 1

MeX as shown in Table 3, which still satisfies the conditions Q _b determined in accordance with the present invention and conditions 1 (111) regarding the average noise level measured in accordance with the MS. Thus, one of the elements of the group comprising zirconium, hafnium, yttrium, silicon, and chromium was included in the metal layer in the above amounts.

The coated end mills were placed in an air furnace at 750 ° C for thirty minutes for oxidation purposes. The resulting oxide layer thickness was then measured. These results are also shown in Table 3. For purposes of comparison, liners coated in accordance with the present invention with MeX material having different Me compositions were tested in the same manner. It will be appreciated that by adding any of the elements in accordance with samples 23 to 32 sec to Me, the thickness of the resulting oxide coating is greatly reduced. In terms of oxidation, the best results were achieved by adding silicon or yttrium.

-7EN 301431 B6

It will be appreciated here that one skilled in the art is well aware that the wear material of MeX layers is: The better the oxidation resistance, resulting in a thinner oxidation coating, the better the cutting performance .

Example 4

Again, a coating apparatus and method was used, which was also applied to the samples of Example 1.

Solid carbide end mills with a diameter of 10 mm with six teeth were coated with a 3.0 µm MeX layer, with an intermediate layer of titanium nitride TiN having a thickness of 0.08 µm arranged between the MeX layer and the tool body. End milling test conditions were as follows:

Tool:

Material:

Cutting parameters:

Solid carbide end milling cutter with 6 mm diameter, z = 6 AIS1D2 (DÍN 1.2379) 60 HRC at _c = 20 m / min f _t = 0.031 mm and _p = 15 mm = 1 mm consecutive dry milling

Solid carbide end mills were used until an average wear width of 0.20 mm was achieved. The results are shown in Table 4. Again, the value of 1 (111) noise conditions, measured in accordance with MS, was clearly met for Sample No. 35, whereas for Sample No. 34, the value of 1 (200) conditions in terms of noise fulfilled.

Example 5

Again, the coating apparatus and method of Example 1 were used.

The carbide milling cutters were coated with a 3.1 µm MeX layer and a titanium nitride TiN intermediate layer 0.07 µm thick. Coated tools were tested by milling hardened wrought steel.

The test conditions were as follows:

Tool:

Material;

Cutting parameters;

solid carbide ball end milling cutter J97 (Jabro), R4 (0 8 x 65 mm) wrought steel Η 11 (DIN 1.2343) HRC 49,5 v _c = 220 m / min and ap = 0,5 mm without coolant

The tool life was evaluated in minutes.

FIG. 1 is a graph depicting the amount of partial pressure of nitrogen versus bias of the tool body, which is applied for reactive cathode arc evaporation in the reactive PVD plating method used to carry out the above examples.

-8EN 301431 B6

All process parameters of the cathodic arc evaporation process, in particular

- arc current,

- operating temperature,

- plating intensity,

- vaporized material,

- strength and arrangement of the magnetic field near the source of the arc,

the geometry and dimensions of the process chamber and the metallized tool were kept constant.

The remaining process parameters, in particular the reactive gas partial pressure (or total pressure) and the tool body bias to be metallized as the workpiece, as well as the predetermined electrical reference potential, such as the chamber wall ground potential, have been varied.

Under these conditions, titanium and aluminum nitride were deposited. Due to the partial pressure of the reactive gas and to the bias of the tool body, different operating points were established, and the resulting Qi values for the layers of deposited hard material were measured in accordance with MS.

It should be noted here that in the graph of Figure 1 there is an area P that extends linearly from the at least adjacent origin of the graph coordinates at the first approximation, resulting in very low values of 1 (200) and 1 (111) intensity XRD. It is clear that a large number of measurements are required to accurately determine the limits of area P. So none of the values

1 (200) and 1 (111) of intensity are not as great as 20 times the average noise level measured in accordance with MS.

On one side of said region P, as shown in FIG. 1, Qt is greater than 1, while in the other region Qi is less than 1 in terms of region P. In both these regions, at least one of 1 is (200) and 1 (111) greater than 20 times the average noise level measured in accordance with the MS.

As shown by the arrows in FIG. 1, decreasing the reactive gas partial pressure (or total pressure when practically equal to said partial pressure 35 k) and / or increasing the bias of the metallized tool body results in a reduction of Qi.

Thus, a method of manufacturing a tool comprising a tool body and a wear resistant coating system according to the present invention, wherein the coating system comprises at least one hard material layer, comprises the steps of reactive PVD deposition of at least one hard material layer in a vacuum chamber; parameters for the PVD storage process step in addition to one or both of the two process parameters, in particular the reactive gas partial pressure and the tool body bias.

It is one of these two parameters or both of these parameters are then adjusted in order to achieve required values of Q _r, so in accordance with the present invention, reducing preload and / or increased partial pressure of reactive gas in order to achieve the values Qi, which as mentioned above, they have a value of at most 1, preferably at most 0.5 or even at most 0.2. Most preferred is a value

Qi <0.1.

-9EN 301431 B6

In addition to the Qi value used in the present invention, there is a value in the "right" region with respect to the P value

1 (111) greater, and usually much greater than 20 times the average noise intensity level measured in accordance with MS.

FIG. 2 is a graph of typical intensity versus 2Θ for a titanium-aluminum nitride hard material layer deposited in the region Qi> 1 of the present invention and FIG. 1, resulting in a Q _f value of 5 , 4. The average N-level is much less than 1 (200) / 20. The measurement was performed in accordance with MS.

Fig. 3 shows an analogous graph to Fig. 2, but the titanium and aluminum nitride deposition was controlled by biasing and partial nitrogen pressure to obtain a Qi <1 result. The resulting Qi value is 0, 03 / Here, the value of 1 (111) is greater than 20 times the average noise level measured in accordance with the MS,

It should be noted here that in Figure 1, the respective Qi values in the respective regions are indicated at each duty point, measured in accordance with the MS.

Fig. 4 shows a graph analogous to Fig. 2 and Fig. 3 for the working point P _t of Fig. 1. It can be seen that intensities 1 (200) and (111) are significantly reduced compared to the intensities in the area outside P. None of 1 (200) and 1 (111) are 20 times the average N * noise level.

Thus, by simply adjusting at least one of the two parameters Qj controlling the reactive ones

PVD processes, in particular reactive gas partial pressure and of workpiece bias voltage is controlled by the Q value _T used according to the present invention.

In the figure of FIG. 1, the setting direction for decreasing Qi is generically shown for & Qi <

- 10GB 301431 B6

Table

« > 0 0!> Rt JJ 0 XJ 0 XJ ac β fc > 0 au Ad m 1 NJJ C 1_1l2_1 O 0 * _ 1 6'2 I 1-5 d rt _ O Pt ffi • * 1 d Pl j | and AND j G 1 (B) CM CM 6 cm ' « Pl - E N R CM O O * O O O d O θ ’ E rt C rt C rt C d C rt with d C 0 rt C 0 C 0 > rt E rt C Φ X ¥ jj with > > 0 0 X in n 0 C 41 rt AND IN * J XJ 2. 0 AND 0 Ή XJ 0 & wear XJ & 0 * J XJ 0 and 0 2. MB XJ « 0 and « XJ 0 Ό 0 and "AND XJ 0 Ό 0 AND IN rt XJ 2. 0 01 44 XJ 0 and. 0 0 Ό M > Ή C r-t H C H rt C rt d AND rt d C rt jh 0 rt 0 rt 0 rt C rt β rt rt C rt 'WITH 11 * 3 2 E E C 0 * 2 0 C M 8 0 8 0 1 (B) G at O 0 0 > G E O E H 0 01 «X C C. 5 C C m 0 (B) 0 rt £ C. E £ E E ε rt >. 1—1 > 1 > G ε with rt tŇ β in > > O O PJ Pt Pt d Pt d ε ε E d Pt in H d O O O O r-1 P> Pt O O ct -β ct Of pt - O ct O Pt d and and • Γ d - w H WITH of OF OF of OF OF OF OF OF OF »» > > > > »» > > > > ct rM d rt > β XJ ta < -with, with Si -and n R <4 d »Rt • rt w • rt • w • rt • rt • rt u _L > X * d fr- h fr- t- fr * fr * fr- fr * fr- fr- and O O O O O O O O O JC rt cl rt rt d d d d rt cf and if X X x κ κ κ X X X X 0 and £ l O rt O Pt O cl O Pt m O O n O d O Pt E d in • ct rt O St (t) (B) and of O 9 O O O O O O O O £ O m O O O Pt 01 P- p · Pt rt d d d of rt Pt rt * in U> P · O σι O d 0 rt n d it JJ 3 U N d WITH ot 0 0 M « at 0 § d □ «0 1 1 = > H > r 1 J 0 at C li> 1 0 Ch

II

CM

Table

j •at « 0 C 4! * 0 Ό N 40 C M ti tt 3 They (normal wear 0.2 mra) CM % O C »» at JJ AND rt E rt 1 0 C and « n G CJ O H-1 C in and at <4 jj 1 Ή (B) rt 1 0 C E what n CJ O * 4 C 0) Λ 0) * 4 jj O and 0 rt C rt 4 « E at 0 (B) Ř Hive m and CJ O* -4 C 4> AND 41 > b in 1 (B) rt the E n. 0 c E cn n 12m (normal wear 0.2 mm) -4 (B) it rt > > E 00 AND CJ O * 4 C O Λ 4) * 4 AND rt Β <-1 1 O ε E cl »4 PJ O -4 (B) IN AND Φ * 4 4J Q D. 0 Ή C r — 1 it £ O C E O and (M O t4 C « YEAH in * 4 JJ 0 & -rl C H 0 with 6 O •-AND H t-l cn rt tn tn O O 00 1Λ rt m X. * » rS rt O O rt Π tn 5Γ O rt O O rt ** Η O ~ About - 1 = ? 2 É E Έ Ή z ε -4 5 5 * 1> Ό JJ 2 X CJ 2 X U θ ’* n * s = δ ^s pX «·) -rt w -rt l * i <n rt n -Η n —I n td n 5 t? fr · · frt · · 4 · Ě- · H · 4 * >> O O H 2 O O O Him O in * - * tn • O 2 ~ 2 - 2 ΐ 2 - 2 ~ 2 ~ 2 - 2 _n of - OF < - ε - ε “E - g ~ E - ε - e ϊ E ε ε s ^x M = ¹ 4 * ^a >. - ». - trt ^- ' x - rl K ϋ H * ► - rt ** «“ 5 ««> < ^W in * Ίι * s * O S rt with* > tn • rt · Ή * • rt. • rt · rt · • H " • rt * -H * M · rt ' v. 2 ° h rt hf π £ rt H H rt rt ř- rt η <m H <M f- « h rt ». X « > ε ε E ε E E ε ' ε E E «) - * 2 " 2 - OF " z ^a s ^a From X OF - z ^a «Μ 2 * 2 - 3l rt Η T e = S “ΐ with- • d n h · H ® WITH"! H_ + * H * ? « sn H * di O ΓΪ rl O O rt rd O O O X H « rt ift it r- 00 σι O rl rt H rt rt rt i — 1 rl rd rt 0 rt n rt M « 1 rt b and row 1 C 0 Λ « 1 it tt 1 C > α to v c O «4>, AT o ·> O fc

- 12GB 301431 B6

Table

> 1 , χ "AT Sí h - X rt «0 9 0 rt F- 0.7 fr O <L ·! _ _ ce O ° JL [I’O O., 1 0.05 I 1 i, g 1 1 ^s * 1 1 ^{t £} H N O O « O O rt O O in rt O m « O O O Whose O O rt O O fr4 t O r4 O m O lA O ďt O in O u-i O in O Hive O SA and tr, * O LfS O tt O ift O tfl Q X fr O 0 w O O fr O in « O in Whose O * O fr O β fr O fr O n O fr O in O fr O 3 O Layer composition of M > ► < H -4 h 2 «* at irt < rt h of F· fcí N rt < M • rt h OF * r * 4 «. rt of at N »» rt •• 4 H of M of »» rt rt h OF M —1 n rt rt rt H OF M -H ► < H of « 44 »» < rt H of Λ rt fr tt > tt rt μ rt H OF > ri rt h OF 1 2 at M h OF M rt H rt fltf • rt H 0 rt « rt « X in h 0 N > N rt rt n rt * rt m M tt n t * rt and rt fr rt O n rt Cl rt Cl Cl Cl 9 rt N ? 3 «E u> o>> rt ± D M 0

- 13GB 301431 B6

Table

4J « 0 Λ G 4) ~ n rt E Φ ** í «C TJ N > = r- rt E ru m W > rt 0 JJ * Aí Λ) «In CU & > <0 O xi c - N IN Γ » in O O in m O O > in O in O UJ O X O O IQ rt n w > 2 » h with M -4 -and • H Interlayer F 2 * rt O H o β £ OF - * B Him O and TJ * 3 3 0 0 Λ PH - fk a 0 O O ru O O n of X tJ <e 3 fl w - □ T3 F· O rt X O rt O rt X O rt rt rt OJ fi. - TJ> V 1 * 4 - Oi and * O ΙΛ rt in n in rt -4 C <4 P 3 rt H e e Ě rt TI «Α > 0 at OF u c rt> ft. >

- 14GB 301431 B0

Table

P n 0 <4 C c (JN r-1 β • z n N E and fft «4 E Γ » Pi »1 O > p 0 P - í-4 and -M 4) q * * P ftfl. ΙΛ * < > 10 Δ C - ei O Γ- O O ΙΑ * * with with > · \ 0 O O O X 2 of M > 5 with p -rt π E O > E E P X n OF of at - r * --I p. > • H t- o K o N 0) O E X □ Ό * O O □ 9 * O O o o rt For iM - B. A M rt 0 * * O O OF ^ 4 P < P M and 3 < H X Δ TO N E O β »1 - 3 Pt Ό H P Ι- with m O Ό> II 1 •C . IM On w 9 β P N · < «1 O C i ’ -1 > Ό 0 0 • C H F 0 Bl > Bi

Claims (17)

PATENT CLAIMS 1. A tool, such as a solid carbide end milling cutter or solid carbide milling cutter or a cemented carbide cutting tool having a tool body and a set of wear-resistant layers, the set of layers comprising at least one MeX layer, where Me represents titanium and aluminum, and X is nitrogen and / or carbon, the layer having a value of Q ₍ defined as the ratio of the diffraction intensity 1 (200) to the diffraction intensity 1 (111)), also converted to planes (200) and ( 111) X-ray diffraction in the material using the Θ 20 method, where Qi is chosen such that Qi <b 15 wherein the value of 1 (111) is at least 20 times the average noise intensity value. Tool according to claim 1, characterized in that the value of Q _t is valid Qi <0.5, 20 in particular Qi < 0.2, preferably Qi w0.1 25 The tool of claim 1, wherein the MeX material is one of titanium nitride and aluminum; titanium, aluminum and carbon nitride; and titanium, aluminum and boron nitride. Tool according to one of claims 1 or 3, characterized in that it further comprises at least one other element from the group consisting of boron, zirconium, hafnium, yttrium, silicon, tungsten, chromium, preferably at least one of the group comprising yttrium and silicon and boron. Tool according to claim 4, characterized in that the other element is contained in the Me containing i, which is valid 0.05 atom% <i <60 atom%, the titanium and aluminum content being taken as 100 atom%. 40 The tool of claim 1, further comprising a further layer of titanium nitride disposed between the at least one layer and the tool body, the further layer having a thickness d to which it applies. 0.05 pm <d <5.0 pm. Tool according to claim 6, characterized in that the layer system is formed by at least one layer and another layer. Tool according to claim 1 or 2 or 3 or 5 or 6 or 7, characterized in that 50 that for the stress σ in at least one layer holds - 16GB 301431 B6 2 GPa w σ <8 GPa, in particular 4 GPa <σ <6 GPa. Tool according to claim 1 or 2 or 3 or 5 or 6 or 7, characterized in that the content of x titanium in Me is 70 atomic%> x> 40 atomic%, in particular 65 atomic%> x> 55 atomic%. ! 5 Tool according to one of Claims 1 or 2 or 3 or 5 or 6 or 7, characterized in that the y content of Me in Me is 30 atomic% <y <60 atomic%, 20 in particular 35 atomic% <y <45 atomic%. A method of manufacturing a tool comprising a tool body and an array of layers resistant to 25, wherein at least one MeX layer is applied to the body by reactive physical vapor deposition (PVD), the predetermined process parameter values for physical vapor deposition (PVD) are selected in addition to at least the bias of the tool body with respect to a predetermined reference potential, the layer is realized with a desired value Qi, defined as a ratio of value 30 of intensity 1 (200) to intensity value 1 (111) associated respectively to X-ray diffraction planes (111) in the material using the θ - 2Θ method, wherein the desired value Qi is realized by setting the bias while selecting predetermined process parameters in addition to the bias and / or partial pressure of the reactive gas under vacuum, said layer having a desired Qi value is realized by decreasing the partial pressure to reduce the Q35 note value and vice versa, and / or wherein at least one of intensity values 1 (200) and 1 (111) is further realized to be at least 20 times the average noise intensity value. 12. The method of claim 11 including the step of performing 40 reactive physical vapor deposition (PVD) through reactive cathode arc evaporation. The method of claim 12, comprising the step of magnetic arc evaporation control. Method according to claim 11 or 12 or 13, characterized in that it comprises the step of depositing a MeX layer on the tool body, wherein Me represents titanium and aluminum, and X is nitrogen and / or carbon which is fed for vapor deposition (PVD) ) through reactive gas. Method according to claim 14, characterized in that the tool is one of the group comprising a solid carbide end milling cutter, a solid carbide end milling cutter or a cemented carbide cutting tool, wherein the Qi value is selected such that that is true -17EN 301431 B6 Nastaveníι <1 by setting at least one value of the reactive pressure and bias values for 5 reactive physical vapor deposition (PVD). 16. The method of claim 15, wherein the value of Q1 is selected to be valid Oi £ 0 _t 5, in particular Qi <0.2. 17. The method of claim 16, wherein the value of Qi is selected to be valid 15 Qi <0.1.