ATE226647T1 - TOOL WITH A PROTECTIVE LAYER SYSTEM - Google Patents

TOOL WITH A PROTECTIVE LAYER SYSTEM

Info

Publication number
ATE226647T1
ATE226647T1 AT97937765T AT97937765T ATE226647T1 AT E226647 T1 ATE226647 T1 AT E226647T1 AT 97937765 T AT97937765 T AT 97937765T AT 97937765 T AT97937765 T AT 97937765T AT E226647 T1 ATE226647 T1 AT E226647T1
Authority
AT
Austria
Prior art keywords
tool
layer system
layer
theta
mex
Prior art date
Application number
AT97937765T
Other languages
German (de)
Inventor
Hans Braendle
Nobuhiko Shima
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Priority claimed from PCT/IB1997/001090 external-priority patent/WO1999014392A1/en
Application granted granted Critical
Publication of ATE226647T1 publication Critical patent/ATE226647T1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Abstract

There is proposed a tool with a tool body and a wear resistant layer system, which layer system comprises at least one layer of MeX. Me comprises titanium and aluminium and X is a nitrogen or carbon. Thereby, in the MeX layer the quotient QI as defined by the ratio of the diffraction intensity I(200) to I(111) assigned respectively to the (200) and (111) plains in the X ray diffraction of the material using the THETA - THETA 2 method is selected to be. QI has a value QI <= 2. A tool is a solid carbide end mill or a solid carbide ball nose mill or a cemented carbide gear cutting tool. Further, the I(111) is at least twenty times larger than the intensity average noise value, both measured with a well-defined equipment and setting thereof.
AT97937765T 1997-09-12 1997-09-12 TOOL WITH A PROTECTIVE LAYER SYSTEM ATE226647T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001090 WO1999014392A1 (en) 1997-09-12 1997-09-12 Tool having a protective layer system

Publications (1)

Publication Number Publication Date
ATE226647T1 true ATE226647T1 (en) 2002-11-15

Family

ID=11004604

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97937765T ATE226647T1 (en) 1997-09-12 1997-09-12 TOOL WITH A PROTECTIVE LAYER SYSTEM

Country Status (8)

Country Link
JP (1) JP2001516655A (en)
KR (1) KR100470826B1 (en)
AT (1) ATE226647T1 (en)
CA (1) CA2303124C (en)
CZ (1) CZ301431B6 (en)
DE (1) DE69716651T2 (en)
SK (1) SK287369B6 (en)
TR (1) TR200000710T2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711107B2 (en) * 2004-04-08 2011-06-29 三菱マテリアル株式会社 Cutting tool made of surface-coated cubic boron nitride-based sintered material that exhibits excellent chipping resistance and heat-resistant plastic deformation in high-speed intermittent cutting of hardened steel
JP4711106B2 (en) * 2004-04-09 2011-06-29 三菱マテリアル株式会社 Cutting tool made of surface-coated cubic boron nitride-based sintered material that exhibits excellent chipping resistance in high-speed intermittent cutting of difficult-to-cut materials
KR101089528B1 (en) * 2004-04-19 2011-12-05 피보트 에이.에스. A hard, wear-resistant aluminum nitride based coating
CN109128391A (en) * 2018-11-22 2019-01-04 上海电气集团股份有限公司 A kind of gear working method

Also Published As

Publication number Publication date
SK287369B6 (en) 2010-08-09
SK3472000A3 (en) 2001-07-10
TR200000710T2 (en) 2000-09-21
JP2001516655A (en) 2001-10-02
CZ2000904A3 (en) 2001-01-17
DE69716651D1 (en) 2002-11-28
CA2303124A1 (en) 1999-03-25
CA2303124C (en) 2007-09-25
KR100470826B1 (en) 2005-03-07
CZ301431B6 (en) 2010-03-03
KR20010030596A (en) 2001-04-16
DE69716651T2 (en) 2003-06-18

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Legal Events

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