CS67792A3 - Process for producing patterned metallic surfaces - Google Patents
Process for producing patterned metallic surfaces Download PDFInfo
- Publication number
- CS67792A3 CS67792A3 CS92677A CS67792A CS67792A3 CS 67792 A3 CS67792 A3 CS 67792A3 CS 92677 A CS92677 A CS 92677A CS 67792 A CS67792 A CS 67792A CS 67792 A3 CS67792 A3 CS 67792A3
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- metal
- plasma
- polymer
- pulses
- film
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 75
- 230000008569 process Effects 0.000 title claims description 38
- 229920000642 polymer Polymers 0.000 claims description 58
- 239000000463 material Substances 0.000 claims description 47
- 239000002184 metal Substances 0.000 claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 150000002500 ions Chemical class 0.000 claims description 31
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 29
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 20
- -1 polyethylene terephthalate Polymers 0.000 claims description 13
- 239000004642 Polyimide Substances 0.000 claims description 10
- 229910044991 metal oxide Inorganic materials 0.000 claims description 10
- 229920001721 polyimide Polymers 0.000 claims description 10
- 229920006126 semicrystalline polymer Polymers 0.000 claims description 9
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- 229920000728 polyester Polymers 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000002679 ablation Methods 0.000 claims description 5
- 239000011358 absorbing material Substances 0.000 claims description 4
- 229920000098 polyolefin Polymers 0.000 claims description 2
- 229920005613 synthetic organic polymer Polymers 0.000 claims description 2
- 229910052755 nonmetal Inorganic materials 0.000 claims 2
- 229920000515 polycarbonate Polymers 0.000 claims 1
- 239000004417 polycarbonate Substances 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 132
- 239000010408 film Substances 0.000 description 54
- 238000000576 coating method Methods 0.000 description 43
- 239000000523 sample Substances 0.000 description 30
- 239000011248 coating agent Substances 0.000 description 28
- 239000010949 copper Substances 0.000 description 25
- 239000010410 layer Substances 0.000 description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 20
- 238000005530 etching Methods 0.000 description 20
- 239000010409 thin film Substances 0.000 description 15
- 230000000694 effects Effects 0.000 description 14
- 238000010894 electron beam technology Methods 0.000 description 14
- 239000000126 substance Substances 0.000 description 14
- 238000012545 processing Methods 0.000 description 12
- 229920002799 BoPET Polymers 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 239000011127 biaxially oriented polypropylene Substances 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 238000010884 ion-beam technique Methods 0.000 description 11
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 10
- 229920006378 biaxially oriented polypropylene Polymers 0.000 description 10
- 238000005468 ion implantation Methods 0.000 description 10
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 10
- 239000004810 polytetrafluoroethylene Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 8
- 239000002344 surface layer Substances 0.000 description 8
- 239000001307 helium Substances 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 229920006254 polymer film Polymers 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000000137 annealing Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 229910052809 inorganic oxide Inorganic materials 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004952 Polyamide Substances 0.000 description 4
- KSQXVLVXUFHGJQ-UHFFFAOYSA-M Sodium ortho-phenylphenate Chemical compound [Na+].[O-]C1=CC=CC=C1C1=CC=CC=C1 KSQXVLVXUFHGJQ-UHFFFAOYSA-M 0.000 description 4
- 239000011324 bead Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229920002647 polyamide Polymers 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 238000005280 amorphization Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 description 3
- ISPYQTSUDJAMAB-UHFFFAOYSA-N 2-chlorophenol Chemical compound OC1=CC=CC=C1Cl ISPYQTSUDJAMAB-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 229920006125 amorphous polymer Polymers 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000003851 corona treatment Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229920000592 inorganic polymer Polymers 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229920001684 low density polyethylene Polymers 0.000 description 2
- 239000004702 low-density polyethylene Substances 0.000 description 2
- 239000011104 metalized film Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 239000013612 plasmid Chemical group 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920002098 polyfluorene Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- ZFXYFBGIUFBOJW-UHFFFAOYSA-N theophylline Chemical compound O=C1N(C)C(=O)N(C)C2=C1NC=N2 ZFXYFBGIUFBOJW-UHFFFAOYSA-N 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 1
- 102000005572 Cathepsin A Human genes 0.000 description 1
- 108010059081 Cathepsin A Proteins 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 241001082241 Lythrum hyssopifolia Species 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 150000001241 acetals Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007844 bleaching agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920006284 nylon film Polymers 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920009441 perflouroethylene propylene Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000010094 polymer processing Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000001850 reproductive effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- OGFYIDCVDSATDC-UHFFFAOYSA-N silver silver Chemical compound [Ag].[Ag] OGFYIDCVDSATDC-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- PGAPATLGJSQQBU-UHFFFAOYSA-M thallium(i) bromide Chemical compound [Tl]Br PGAPATLGJSQQBU-UHFFFAOYSA-M 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
- B29C71/0063—After-treatment of articles without altering their shape; Apparatus therefor for changing crystallisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/24—Ablative recording, e.g. by burning marks; Spark recording
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
- B29C2035/0872—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using ion-radiation, e.g. alpha-rays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
- Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
- Y10T428/31692—Next to addition polymer from unsaturated monomers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31786—Of polyester [e.g., alkyd, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31786—Of polyester [e.g., alkyd, etc.]
- Y10T428/31794—Of cross-linked polyester
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Laminated Bodies (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Physical Vapour Deposition (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/665,694 US5178726A (en) | 1991-03-07 | 1991-03-07 | Process for producing a patterned metal surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS67792A3 true CS67792A3 (en) | 1992-09-16 |
Family
ID=24671190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS92677A CS67792A3 (en) | 1991-03-07 | 1992-03-06 | Process for producing patterned metallic surfaces |
Country Status (15)
| Country | Link |
|---|---|
| US (2) | US5178726A (pl) |
| EP (1) | EP0502632B1 (pl) |
| JP (1) | JPH04354869A (pl) |
| KR (1) | KR920017786A (pl) |
| CN (1) | CN1065297A (pl) |
| AU (1) | AU649518B2 (pl) |
| BR (1) | BR9200672A (pl) |
| CA (1) | CA2061490A1 (pl) |
| CS (1) | CS67792A3 (pl) |
| CZ (1) | CZ9800766A3 (pl) |
| DE (1) | DE69226107T2 (pl) |
| MX (1) | MX9200993A (pl) |
| MY (1) | MY108491A (pl) |
| PL (1) | PL169714B1 (pl) |
| ZA (1) | ZA921139B (pl) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5492761A (en) * | 1989-01-27 | 1996-02-20 | Sumitomo Electric Industries, Ltd. | Heat-resistant coated electrically conductive wire |
| US5389195A (en) * | 1991-03-07 | 1995-02-14 | Minnesota Mining And Manufacturing Company | Surface modification by accelerated plasma or ions |
| CA2097388A1 (en) * | 1992-07-16 | 1994-01-17 | Susan Nord Bohlke | Topographical selective patterns |
| US5468561A (en) * | 1993-11-05 | 1995-11-21 | Texas Instruments Incorporated | Etching and patterning an amorphous copolymer made from tetrafluoroethylene and 2,2-bis(trifluoromethyl)-4,5-difluoro-1,3-dioxole (TFE AF) |
| US5900443A (en) * | 1993-11-16 | 1999-05-04 | Stinnett; Regan W. | Polymer surface treatment with particle beams |
| CA2137632A1 (en) * | 1993-12-17 | 1995-06-18 | Douglas S. Dunn | Ablative flashlamp imaging |
| DE69407620T2 (de) * | 1993-12-17 | 1998-04-09 | Minnesota Mining & Mfg | Ablationsabbildung durch quasikontaktlithographie |
| AU682752B2 (en) * | 1993-12-22 | 1997-10-16 | Schering-Plough Healthcare Products, Inc. | Soft polysiloxanes having a pressure sensitive adhesive |
| WO1996023021A1 (en) * | 1995-01-23 | 1996-08-01 | Sandia Corporation | Polymer surface treatment with pulsed particle beams |
| JP3540047B2 (ja) * | 1995-03-31 | 2004-07-07 | 株式会社島津製作所 | 微細パターン作成方法 |
| US5712645A (en) * | 1995-10-06 | 1998-01-27 | Minnesota Mining And Manufacturing Company | Antenna adapted for placement in the window of a vehicle |
| WO1999025442A1 (en) | 1997-11-17 | 1999-05-27 | Minnesota Mining And Manufacturing Company | Toy having antenna |
| US6529139B1 (en) | 1997-11-17 | 2003-03-04 | 3M Innovative Properties Company | Toy having enclosed antenna |
| US6086726A (en) * | 1998-05-19 | 2000-07-11 | Sandia Corporation | Method of modifying a surface |
| DE29822122U1 (de) * | 1998-12-11 | 2000-04-20 | Vision Verpackungstechnik GmbH, 35305 Grünberg | Einrichtung zum Bearbeiten von kontinuierlich durchlaufendem Material |
| FR2811316B1 (fr) * | 2000-07-06 | 2003-01-10 | Saint Gobain | Substrat texture transparent et procedes pour l'obtenir |
| US6514449B1 (en) | 2000-09-22 | 2003-02-04 | Ut-Battelle, Llc | Microwave and plasma-assisted modification of composite fiber surface topography |
| DE50205771D1 (de) * | 2001-11-23 | 2006-04-13 | Univ Duisburg Essen | Implantat |
| WO2003106030A1 (en) * | 2002-06-13 | 2003-12-24 | National University Of Singapore | Selective area growth of aligned carbon nanotubes on a modified catalytic surface |
| US9318350B2 (en) | 2003-04-15 | 2016-04-19 | General Dynamics Advanced Information Systems, Inc. | Method and apparatus for converting commerical off-the-shelf (COTS) thin small-outline package (TSOP) components into rugged off-the-shelf (ROTS) components |
| BRPI0606486A2 (pt) * | 2005-01-24 | 2009-06-30 | Cinv Ag | materiais compósitos contendo metal |
| US7448125B2 (en) * | 2005-02-22 | 2008-11-11 | Hanita Coatings R.C.A. Ltd | Method of producing RFID identification label |
| US7274458B2 (en) | 2005-03-07 | 2007-09-25 | 3M Innovative Properties Company | Thermoplastic film having metallic nanoparticle coating |
| JP4967272B2 (ja) * | 2005-08-02 | 2012-07-04 | 株式会社ブリヂストン | Ｃｕ２Ｏ薄膜の結晶化方法及びＣｕ２Ｏ薄膜を有する積層体 |
| IL182371A0 (en) * | 2006-04-04 | 2007-07-24 | Hanita Coatings R C A Ltd | Patterns of conductive objects on a substrate and method of producing thereof |
| US7992293B2 (en) * | 2006-04-04 | 2011-08-09 | Hanita Coatings R.C.A. Ltd | Method of manufacturing a patterned conductive layer |
| US20090165296A1 (en) * | 2006-04-04 | 2009-07-02 | Yoash Carmi | Patterns of conductive objects on a substrate and method of producing thereof |
| US20100021720A1 (en) * | 2008-07-24 | 2010-01-28 | Shembel Elena M | Transparent coductive oxide and method of production thereof |
| TWI378733B (en) * | 2008-10-27 | 2012-12-01 | Htc Corp | Method for manufacturing electret diaphragm |
| US20120156780A1 (en) * | 2010-12-21 | 2012-06-21 | Cooper Kevin L | Polymer Substrates Having Improved Biological Response From HKDCS |
| CN106864152A (zh) * | 2017-03-02 | 2017-06-20 | 西藏中艺金像科技股份有限公司 | 一种黄金影像字画的制作方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4417948A (en) * | 1982-07-09 | 1983-11-29 | International Business Machines Corporation | Self developing, photoetching of polyesters by far UV radiation |
| DE3376889D1 (en) * | 1982-10-07 | 1988-07-07 | Ibm | A method for etching polyimides |
| US4414059A (en) * | 1982-12-09 | 1983-11-08 | International Business Machines Corporation | Far UV patterning of resist materials |
| US4615765A (en) * | 1985-02-01 | 1986-10-07 | General Electric Company | Self-registered, thermal processing technique using a pulsed heat source |
| US4877480A (en) * | 1986-08-08 | 1989-10-31 | Digital Equipment Corporation | Lithographic technique using laser for fabrication of electronic components and the like |
| US4879176A (en) * | 1987-03-16 | 1989-11-07 | Minnesota Mining And Manufacturing Company | Surface modification of semicrystalline polymers |
| US4756794A (en) * | 1987-08-31 | 1988-07-12 | The United States Of America As Represented By The Secretary Of The Navy | Atomic layer etching |
| GB2212974B (en) * | 1987-11-25 | 1992-02-12 | Fuji Electric Co Ltd | Plasma processing apparatus |
| US4842677A (en) * | 1988-02-05 | 1989-06-27 | General Electric Company | Excimer laser patterning of a novel resist using masked and maskless process steps |
| US4902378A (en) * | 1988-04-27 | 1990-02-20 | Minnesota Mining And Manufacturing Company | Polymer with reduced internal migration |
| US4822451A (en) * | 1988-04-27 | 1989-04-18 | Minnesota Mining And Manufacturing Company | Process for the surface modification of semicrystalline polymers |
| US4943346A (en) * | 1988-09-29 | 1990-07-24 | Siemens Aktiengesellschaft | Method for manufacturing printed circuit boards |
| US5061341A (en) * | 1990-01-25 | 1991-10-29 | Eastman Kodak Company | Laser-ablating a marking in a coating on plastic articles |
| US4985116A (en) * | 1990-02-23 | 1991-01-15 | Mint-Pac Technologies, Inc. | Three dimensional plating or etching process and masks therefor |
-
1991
- 1991-03-07 US US07/665,694 patent/US5178726A/en not_active Expired - Fee Related
-
1992
- 1992-02-17 ZA ZA921139A patent/ZA921139B/xx unknown
- 1992-02-19 AU AU11104/92A patent/AU649518B2/en not_active Ceased
- 1992-02-19 CA CA002061490A patent/CA2061490A1/en not_active Abandoned
- 1992-02-20 MY MYPI92000271A patent/MY108491A/en unknown
- 1992-02-21 EP EP92301454A patent/EP0502632B1/en not_active Expired - Lifetime
- 1992-02-21 DE DE69226107T patent/DE69226107T2/de not_active Expired - Fee Related
- 1992-02-27 BR BR929200672A patent/BR9200672A/pt not_active Application Discontinuation
- 1992-02-29 CN CN92101628A patent/CN1065297A/zh active Pending
- 1992-03-05 PL PL92293717A patent/PL169714B1/pl unknown
- 1992-03-06 MX MX9200993A patent/MX9200993A/es not_active IP Right Cessation
- 1992-03-06 JP JP4049032A patent/JPH04354869A/ja active Pending
- 1992-03-06 KR KR1019920003797A patent/KR920017786A/ko not_active Ceased
- 1992-03-06 CS CS92677A patent/CS67792A3/cs unknown
- 1992-12-03 US US07/985,838 patent/US5286550A/en not_active Expired - Fee Related
-
1998
- 1998-03-13 CZ CZ1998766A patent/CZ9800766A3/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR920017786A (ko) | 1992-10-21 |
| US5178726A (en) | 1993-01-12 |
| AU1110492A (en) | 1992-09-10 |
| EP0502632B1 (en) | 1998-07-08 |
| DE69226107T2 (de) | 1999-02-25 |
| BR9200672A (pt) | 1992-11-10 |
| DE69226107D1 (de) | 1998-08-13 |
| MY108491A (en) | 1996-09-30 |
| AU649518B2 (en) | 1994-05-26 |
| CN1065297A (zh) | 1992-10-14 |
| ZA921139B (en) | 1993-05-14 |
| US5286550A (en) | 1994-02-15 |
| EP0502632A1 (en) | 1992-09-09 |
| PL169714B1 (pl) | 1996-08-30 |
| PL293717A1 (en) | 1992-09-21 |
| MX9200993A (es) | 1992-09-01 |
| JPH04354869A (ja) | 1992-12-09 |
| CZ9800766A3 (cs) | 2000-11-15 |
| CA2061490A1 (en) | 1992-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5389195A (en) | Surface modification by accelerated plasma or ions | |
| US5286550A (en) | Process for producing a patterned metal surface | |
| EP0502634B1 (en) | A polymer with crosslinked surface zones | |
| HK1007709B (en) | A polymer with crosslinked surface zones | |
| US4877644A (en) | Selective plating by laser ablation | |
| US5035918A (en) | Non-flammable and strippable plating resist and method of using same | |
| Gritsenko et al. | Thin-film deposition of polymers by vacuum degradation | |
| US6743345B2 (en) | Method of metallizing a substrate part | |
| US5830376A (en) | Topographical selective patterns | |
| Gorbunov et al. | Ultrathin film deposition by pulsed laser ablation using crossed beams | |
| JP2008158549A (ja) | 干渉カラーフィルター | |
| US20080187683A1 (en) | Resonant infrared laser-assisted nanoparticle transfer and applications of same | |
| CA1332330C (en) | Surface treatment of polymers | |
| US6852985B2 (en) | Method and apparatus for nanometer-scale focusing and patterning of ultra-low emittance, multi-MeV proton and ion beams from a laser ion diode | |
| US5271890A (en) | Method for producing carbon allotrope | |
| Ahmed et al. | Surface, electrical and mechanical modifications of PMMA after implantation with laser produced iron plasma ions | |
| US4913762A (en) | Surface treatment of polymers for bonding by applying a carbon layer with sputtering | |
| US5708267A (en) | Processing method using fast atom beam | |
| Landström et al. | Single-step patterning and the fabrication of contact masks by laser-induced forward transfer | |
| Bartnik et al. | Physical and chemical modifications of PET surface using a laser-plasma EUV source | |
| EP0287216B1 (en) | Surface modification of semicrystalline polymers | |
| KR100839222B1 (ko) | 펄스파 레이저 박막 증착장치 및 이를 이용한혼성금속나노점배열 형성방법 | |
| Oleshko et al. | Explosive Effervescence and Ablation of Polymethyl Methacrylate Under Irradiation with a Self-Focusing High-Current Electron Beam | |
| Nakata | Generation of new nanomaterials by interfering femtosecond laser processing and its applications | |
| CA1308345C (en) | Heat sealing of semicrystalline polymers |