CS266493B1 - Apparatus for arc discharge interrupting - Google Patents
Apparatus for arc discharge interrupting Download PDFInfo
- Publication number
- CS266493B1 CS266493B1 CS859731A CS973185A CS266493B1 CS 266493 B1 CS266493 B1 CS 266493B1 CS 859731 A CS859731 A CS 859731A CS 973185 A CS973185 A CS 973185A CS 266493 B1 CS266493 B1 CS 266493B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- transformer
- branch
- control pulse
- primary winding
- rectifier
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0203—Protection arrangements
- H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Generation Of Surge Voltage And Current (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
Description
- 1 - 266493
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Bbixofla κοτορογο coe«HHeHbi COOTBeTCTBeHHO c ýnpaBJiHiomnM aneKTpo-«ΟΜ H K3TO«OM THPHCTOpa 7 H C «ByMH BbIXO«aMH ĎJIOKa φορΜΗρΟΒΗΗΗΗ ynpaBJIHIOlUHX'.HMnyjibcOB 10. fleňcTBue ycTpoňcTBa «jih npeKpameHHH «yroBbix pa3pa«OB b ra3opa3pH«HOM co-cy«e «πη iipOBe«eHHH τθχηοπογηηθοκογο npoqecca b cooTBeTCTBHH c Η3θ6ρβτεΗΗβΜcne«yioinee: no« «eňcTBHeM ΒΜΠρΗΜΗτεππ 1 BO36yac«aeTCH sneKTpHHecKHří TneiotunňpaspH« b ra3opa3pn«HOM cocy«e 3, KOH«eHcaTop 6 HanunaeT 3ap.HxaTbCH, npuneMΜ3ΓΗΗΤΟΠΡΟΒΟ« HaCblIHaiomerOCH ΤρΒΗΟφορΜβΤΟρΗ 5 HaCbímaeTCH 33.BpeMH. 3apHXeHHHKOH«eHcaTopa 6 «o OTpH«aTenbHoň BenHHHHbí HH«yK«HH HacbímeHHH. Kor«a b raao-pa3pn«HOM cocy«e 3 3JieKTpHnecKHH TJietomnň pa3pn« οποητηηηο HanHeT nepexo«HThb «yroBoň, HanpHaceHHe Mea<«y aHó«OM h KaTo«oM ra3opa3pn«Horo cocy«a 3 naHH-naer yĎbiBaTb, h Ha nepBHHHoň οβΜΟτκε HacbímaiomerocH τρΗΗοφορΜβτορά 5 nojiyna-θτοη' HanpHKeHHe, paBHoe pa3HocTH Me»«y HanpHaceHHeM KOH«eHcaTopa 6 h Haiipn-riKeHMeM Me®«y ano«oM h KaTo«OM ra3opa3pH«Horo cocy«a 3. íÍH«yKTnpoBaHHoe boBTopHHHyro oĎMOTKy HacbímaiomerocH τρΗΗοφορΜβτορβ 5 HanpjWcenHe φopMHpyeτcH 6no-kom ynpaBjíHioinHX HMnyjibCOB 10, h BranonaeTCH thphctop 7. 3a bpgmh βκπιοηθηηογοCOCTOHHHH THpHCTOpa 7 TOK Hepe3 ΗβΓΟ 0Γρ3ΗΗΗΗΒ3ΘΤ0Η nepBblM «poccejieM 2. Ha-npHweHHe KOH«eHcaTopa 6 nepe3 ΒκπιοηβΗΗΜή thphctop 7 npHKJia«biBaeTCH Ha coot-BeTCTByioinyio nacTb nepBHHHoň očmotkh HacbímaiomeročH τρβΗοφορΜΗτορ.Η 5. Tor«aHa aHOfl h khto« ra3opa3pH«Horo cocy«a 3 npHKna«biBaeTCH oópaTHoe HanpnaceHHe,onpe«ejieHHoe cooTHomeHHeM Meac«y ο6μοτκημη «Byx nacTeň nepBHHHoň očmotkh HaCbi·inaromerocH τρ3ΗβφορΜ3Τορ3 5. 3το oópaTHoe HanpnweHHe BM3biBaeT Ha onpe«ejieHHoeBpeMH cMeHy HanpaBJíeHHH 3jieKTpHnecKoro íiójih b ra3opa3pn«HOM cocy«e 3, κοτο-poe co«eňcTByeT npo«eccy «eHOHH3a«HH b npocTpaHCTBe aHo«-KaTO« ra3opa3pH«Ho-fo čocy«á 3. 9epe3 thphctop 7 npoTexaeT pa3pH«HbiH tok KOH«eHcaTopa 6 h tokBbmpHMHTejiH 1 nepe3 nacTb κ KaTO«y ra3Ópa3pH«Horo co.cy«a 3 nepBHHHOH o6mot-KH HSCbHHaiOIUerOCH Τρ3ΗθφθρΜ3Τθρ3 5 H «poccenb 2, ΠρΗΗβΜ Μ3ΓΗΗΤΟΠΡΟΒΟ« HaCbl“ 266493
maromerocfl TpaHc<J)opMaTopa 5 nepéHaMarHHHHBaeTCH ot oTpHnaTejibHofi bgjihhhhm hh-ftyKUHH HachimeHHfi íxo ee ποποτκΗτβπι,Ηοϋ β6Πηηηημ. HacTb πθρβηηηοη oómotkh, coe-flHHGHHOH K KOHfleHCaTOpy 6 C HHflyKTHBHOCTbIO npH HaebímeHHOM COCTOHHHH MarHHTO-npoBojaa h KoHfleHcaTop 6 oópa3yiOT τρεπτΗίφιή Kpyr, b kotopom KOHfleHcaTop 6 ne-pesapmicaeTca ho ηηπρη^θηηη, uojihphtgt KOToporo oSpaTGH HcxonnoMy, ο3Ιιβηθηηο-My na φΗΓγρε b CKOčKax. Ποχι .hghctbhgm 3Toro nanpHJKeHHn μθγηητοπροβοα Hacbímaio-meroca Tpanc^iopMaTopa 5 HanunaeT nepGHaMarHHHHBaTbCH ot nono»HTenbHoři bcjim-HHHbl HHflyKUHH HaCblIHeHHH flO Ge OTPHUaTejlbHOfl BGJlHHHHbl. HaCTb nepBHHHoft o6mot-kh, coeflHiieHHoň κ KOHHGHcaTopy 6 c ηηαυκτηβηοοτβιο řípu nacbineHHOM coctohhhhMarHHTonpoBo,o;at h KOHflencaTop 6 o6pa3yioT ποβτορηο τρβπτΗίπΗΗ Kpyr, b kotopomKonnGHcaTop 6 HanHHaeT nepe3apH»aTbCH. Tok nepe3apaflKH KOHflGHcaTopa 6 προτβ-KaeT Mepe3 rapHCTop 7 b nanpaBneHHe, oĎpaTHoe ero HanpaBjíeHHio npoBe^eHHH, hnOCJie ΤΟΓΟ, ΚΒΚ 3TOT TOK /^OCTHrHGT H npeBblCHT BejIHHHHy TOKa Hepe3 THpHCTOp .7,·thphctop 7 BbiKjnoHaeTCH. B HanbHeňiueM npouecc nepe3apHflKH προτβκβετ c ποοτο-HHHOři npOflOJDKHTejIbHOCTblO, HG 3aBHCflmGH OT BeJIHHHHbl paspHflHOrO TOKa Ηβρβ3 ra-3opa3pHflHbiň cocyn 3, h onpeflanaeTca tojibko napaMeTpaMH< TpenTHmero Kpyra, coc-Toauiero H3 KOHflencaTopa 6, nacTH nepBHHHoii oSmotkh TpaHC(|)opMaTopa 5, coe,qn-ΗβΗΗοϋ κ KOH^eHcaTopy 6 c HnqyKTHBHOCTbio npH HaebímeHHOM coctohhhh μηγηητο-npoBojja, AHojja 8 η βτορογο flpoccenH 9. HocJie τογο, κθκ 3ΒΚοηήητοη nosTopHbiňnpouecc nepe3apnp;KH HanpHweHHe KotmeHcaTopa 6 npoflonxtaeT HapacTaTb c nonapH-τετοΜ, ofíHHaKOBMM c HcxoflHbíM nofl fleňcTBHeM TOKa, npoTeKaiomero c βμπρημητ&πη1 nepes KoupeHcaTop 6, nepBHHHyio oGMOTKy TpaHC$opMaTopa 5 h nepBbiň p;poccejib2» Ilponecc napacTaHHH HanpnweHHH npexpamaeTCH p;o BO36y^qeHHH Tneioiuero pa3pH-na b ra3opa3pHflHOM cocyqe 3. npH npeBbiiueHHH npeflBapHTenhHo 3aflaHHoft βθπηηη-Hbi HanpHweHHH Me5Kp,y anofloM h KaTOROM ra3opa3pH£Horo cocyna 3, H3MepneMoroflaTHHKOM 4, aBTOHOMHblň y3CJI fl-HH φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB 11 bkjho-naeT thphctop 7, nocjie aero b ycTpoňcTBe πρστβκβιοτ ppopeccbi, OflHnaKOBbie cnponeccaMH, Korná TjieioiuHň paspap; οποητηηηο nepexoflHT b nyroBoň, neM ra3opa3-PHflHbiři cocya 3amHmaeTcH οτ ηβπρη»6ηηη, β&πηηηηη κοτορογο 6oJibnie ηομηηηηβηοιιBenHHHHbí, na KOTopyw oh paccnHTaH. Πρκ ποβτορηομ cnoHTaHHOM nepexone TJieioiue-ro pa3pH,n;a b nyrosoň η ποβτορηομ npeBbiuieHHH npeflBapHTejibHo sanaHHoň βθηηηη-Hbi HanpflwenHH Mewny aHoflOM η κητοηομ ra’3opa3pHp;Horo cocyna 3 neňcTBHe ycT-pOHCTBa nOBTOpHeTCH.
$OpMyJia H3o6peT6HHH ycTpoňcTBo fljiH npexpamenHn flyroBbix pa3pHflOB b raaopaspHflHOM cocyne, ko-τοροβ coctoht H3 BbinpHMHTejiH, riapajuiejibHO KOTopoMy nepe3 npoccenb βκπκμθημraaopaapHflHbtfi cocyn h nocjiefloBaTejibnaH nenb, cocTaBjíeHHaH H3 nepBHHHoň o6mot~kh HacbitiíaioiuerocH TpaHc^iopMaTopa h KoiweHcaTopa, κ npoMewyTonHOMy abiBony,nepBHHHoň o6motkh HacbímaramerocH TpaHC<í>opMaTopa h nojiojKHTejibiioMy nojnocy bdi-ΠρΗΜΗΤΘΠΗ ΒΚΠΜΗβΗ THpHCTOp, KaTOfl ΚΟΤΟρΟΓΟ COeflHHeH C npOMejKyTOHHblM BblBOHOM,BXOP, 6noi<a φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB COeAHHeH C BTOpHHHOň O6MOTKOH ·.HacbunaioinerocH τρ3ΗθφορΜ3τορ3, o6a Bbixo.ua κοτορουο cboTseTCTBeuHo coenHHeHbíc flByMH BblXOflaMH ΗΒΤΟΗΟΜΗΟΓΟ ÓjIOKa φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIlIHX HMnyjIbCOB H CO“OTBeTCTBeHHO C ynpaBJIHtOlUHM SJíeKTpOflOM H KaTOfíOM THpHCTOpa, OTJIHHaiO-IH e e c h tgm, HTo napaJiJienbHo ra3opa3pnp;HOMy cocyny (3) ΒκπιοΗβΗ flaTHHK Ha-npHXeHHH (4) , o6a BblXOfta ΚΟΤΟΡΟΓΟ COOTBeTCTBeHHO COeaHHGHbl C flByMH BXOoaMHaBTOHOMHOrO &ΠΟΚ3 φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB (11), a K npOMeJKyŤOHHO-My BblBOfly nepBHHHOH oSmOTKH H nOJIOXOHTGJIbHOMy BblBOfly BbinpHMHTeJIH 1 BKHiOHGHanocjie/noBaTejibHaH nciib na nnona (8) η βτορογο «poccgjih (9), npHneM aHofl «ηο-fla (8) coeflHneH κ npoMescyTOHHOMy BbiBOfly. - 4 - 266493 IIpnjio>KeHne: 1 cburypa
JlHTepaTypa 1. AsTopcKoe CBHfleTenbCTBo HPE 22 590 AHHOTAUH8
yCTPOflCTBO flJlfl nPEKPAlHEHHH βΥΓΟΒΗΧ PA3PflflOB B rA30PA3PflflH0M COCYflE . yCTpOňCTBO COCTOHT H3 ΒΗΠρΗΜΗΤβΠΗ, napaJUieJIbHO KOTOpOMy Ηβρβ3 flpoccejlbcoeflHHeHM ra3opa3paflHbiň cocyq h nocneflOBaTeJiřHaH uenb, cocTaBnetmaa H3 nep-BHHHoň oGmotkh Hacbímaromer och TpaHCífcopMaTopa h KOHfleHcaTopa. K npoMewyTOHHOMyBbiBony nepBHUHoň o6motkh HacwmaiomerocH TpaHCifcopMaTopa h nonojKHTejibHOMy παπω-cy BbmpflMHTeJlfl COGflHHeH THpHCTOp, KaTOfl ΚΟΤΟΡΟΓΟ COeflHHeH C ΠρΟΜβΙΚγΤΟΗΗΜΜBblBOflQM. ynpaBJlHIOmaH ΗβΠΒ THpHCTOpa COCTOHT H3 COeňHHeHHblX BTOPHHHOÍÍ OČMOTKHHacwmaioinerocH TpaHcýopMaTopa, 6jioica Φορμηροβθηηη ynpaBnflwmHx HMňyjibcoB h as-ΤΟΗΟΜΗΟΓΟ 6nOKa. φθρΜΗρθΒ3ΗΗΗ ynpaBJIHIOlUHX HMnynbCOB, BXOfl ΚΟΤΟΡΟΓΟ COeflHHeHc Bbixo«OM «aTHHKa. HanpHJKeHHH, coeflHHeHHoro napajuiěnbHO rasopaapflflHOMy cocyflyK npOMeJKYTOHHOMy BblBOfly nepBHHHOÍÍ OČMOTKH Hacbímaromerocfl ΤρβΗΟφορΜΒΤΟρΒ H no-jioatHTejibHOMy ποπω βηπρημητ&πη coenHHeHa nocneflOBaTejibHaH uenb H3 «Kosa hBToporo flpoccenH, πρκΗβΜ aHOfl fíHOfla coeflHHeH κ npoMewyTOHHOMy βμβοπυ. npeHMymecTBaMH ycTpoňcTBa «bjihiotch noBbJíuGHHaa 3φφεκτΗΒΗθοτΒ πρκ ηοποπββο-BaHHH, ΠρΗΊβΜ ΒρβΜΗ C ΜΟΜβΗΤΘ BblKJIKJH éHHfl THpHCTOpa flO MOMeHTa BO36y»aeHHflTJieiomero paapjwa HMeeT HocTOHHHyro β6πηπηηυ, hě 3aBHCflqyio οτ β&πημηηη pa3pflfl-Horo' Ťoka, η HanHHHG aainHTHOH chocoShocth ot nepeHanpHMeHHH b ra3Opa3pnflHOMcocyne. IIpH3HaHO Η3θ6ρβτβΗΗβΜ no pesynbTaTaM 3KcnepTH3bi, ocymecTBneHHoň HhcthtyTomH3O6peT6HHň H paHHOHajIH3aHHH HPB„ 1 Ηβρτβ»
Claims (1)
- 266493PŘEDMĚT VYNÁLEZU Zapojení pro přerušení obloukového výboje, které seskládá z usměrňovače, ke kterému jsou paralelně přestlumivku zapojeny plynová výbojková nádoba a sériovýobvod, složený s primárního vinutí transformátoru a kon-denzátoru, přičemž k odbočce primárního vinutí transfor-mátoru a kladnému pólu usměrňovače je připojen tyristor,jehož katoda je spojena s odbočkou primárního vinutítransformátoru, vstup bloku tvarováni řídicích impulsůje spojen se sekundárním vinutím transformátoru, přičemžoba výstupy bloku tvarování řídicích impulsů jsou spoje-ny se dvěma výstupy autonomního bloku tvarování řídicíchimpulsů a s řídicí elektrodou a katodou tyristoru, vyzna-čující se tím, že paralelně k plynové výbojkové nádobě(3) je zapojen snímač napětí (4), jehož oba výstupy jsouspojeny se dvěma vstupy autonomního bloku tvarování ří-dicích impulsů (11), přičemž k odbočce primárního vinutítransformátoru (5) a ke kladnému vývodu usměrňovače (1)je připojena sériová kombinace diody (8) a druhé tlumiv-ky (9), přičemž anoda diody (8) je připojena k odbočceprimárního vinutí transformátoru (5)·
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG8468215A BG41745A1 (en) | 1984-12-29 | 1984-12-29 | Device for discontinuing of arc dicharges in gas dicharge vessel |
Publications (2)
Publication Number | Publication Date |
---|---|
CS973185A1 CS973185A1 (en) | 1988-11-15 |
CS266493B1 true CS266493B1 (en) | 1990-01-12 |
Family
ID=3914865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CS859731A CS266493B1 (en) | 1984-12-29 | 1985-12-21 | Apparatus for arc discharge interrupting |
Country Status (10)
Country | Link |
---|---|
US (1) | US4792730A (cs) |
EP (1) | EP0186865B1 (cs) |
JP (1) | JPS61198595A (cs) |
BG (1) | BG41745A1 (cs) |
CS (1) | CS266493B1 (cs) |
DE (1) | DE3579902D1 (cs) |
HU (1) | HU199324B (cs) |
IN (1) | IN166604B (cs) |
SU (1) | SU1536467A1 (cs) |
YU (1) | YU198085A (cs) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2648001B1 (fr) * | 1989-05-31 | 1991-09-27 | Breda Jean Pierre | Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma |
DE4127504A1 (de) * | 1991-08-20 | 1993-02-25 | Leybold Ag | Einrichtung zur unterdrueckung von lichtboegen |
DE4138794A1 (de) * | 1991-11-26 | 1993-05-27 | Leybold Ag | Verfahren und vorrichtung zum beschichten eines substrats, insbesondere mit elektrisch nichtleitenden schichten |
US5415757A (en) * | 1991-11-26 | 1995-05-16 | Leybold Aktiengesellschaft | Apparatus for coating a substrate with electrically nonconductive coatings |
EP0663019B1 (en) * | 1992-09-30 | 1998-12-02 | Advanced Energy Industries, Inc. | Topographically precise thin film coating system |
US5718813A (en) * | 1992-12-30 | 1998-02-17 | Advanced Energy Industries, Inc. | Enhanced reactive DC sputtering system |
US6217717B1 (en) | 1992-12-30 | 2001-04-17 | Advanced Energy Industries, Inc. | Periodically clearing thin film plasma processing system |
WO1996031899A1 (en) * | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
US5576939A (en) * | 1995-05-05 | 1996-11-19 | Drummond; Geoffrey N. | Enhanced thin film DC plasma power supply |
US5917286A (en) | 1996-05-08 | 1999-06-29 | Advanced Energy Industries, Inc. | Pulsed direct current power supply configurations for generating plasmas |
JP3153483B2 (ja) * | 1996-11-19 | 2001-04-09 | 旭光学工業株式会社 | プレビュー機能付き一眼レフカメラの制御方法 |
JP3153482B2 (ja) * | 1996-11-19 | 2001-04-09 | 旭光学工業株式会社 | 一眼レフカメラのプレビュー装置 |
US6501232B1 (en) * | 2000-01-11 | 2002-12-31 | Mitsubishi Denki Kabushiki Kaisha | Electric power unit for electric discharge surface treatment and method of electric discharge surface treatment |
US7305311B2 (en) * | 2005-04-22 | 2007-12-04 | Advanced Energy Industries, Inc. | Arc detection and handling in radio frequency power applications |
US8217299B2 (en) * | 2007-02-22 | 2012-07-10 | Advanced Energy Industries, Inc. | Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch |
US8044594B2 (en) * | 2008-07-31 | 2011-10-25 | Advanced Energy Industries, Inc. | Power supply ignition system and method |
US8395078B2 (en) * | 2008-12-05 | 2013-03-12 | Advanced Energy Industries, Inc | Arc recovery with over-voltage protection for plasma-chamber power supplies |
EP2648209B1 (en) | 2009-02-17 | 2018-01-03 | Solvix GmbH | A power supply device for plasma processing |
DE102010031568B4 (de) | 2010-07-20 | 2014-12-11 | TRUMPF Hüttinger GmbH + Co. KG | Arclöschanordnung und Verfahren zum Löschen von Arcs |
US8552665B2 (en) | 2010-08-20 | 2013-10-08 | Advanced Energy Industries, Inc. | Proactive arc management of a plasma load |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2297927A1 (fr) * | 1975-01-17 | 1976-08-13 | Anvar | Perfectionnements aux |
BG22590A1 (cs) * | 1975-10-10 | 1977-04-20 | ||
US4329627A (en) * | 1976-02-02 | 1982-05-11 | Esquire, Inc. | High frequency thyristor circuit for energizing a gaseous discharge lamp |
BG29362A1 (en) * | 1979-03-11 | 1980-11-14 | Minchev | Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge |
-
1984
- 1984-12-29 BG BG8468215A patent/BG41745A1/xx unknown
-
1985
- 1985-12-10 IN IN996/MAS/85A patent/IN166604B/en unknown
- 1985-12-18 YU YU01980/85A patent/YU198085A/xx unknown
- 1985-12-19 DE DE8585116262T patent/DE3579902D1/de not_active Expired - Fee Related
- 1985-12-19 EP EP85116262A patent/EP0186865B1/de not_active Expired - Lifetime
- 1985-12-20 SU SU857774058A patent/SU1536467A1/ru active
- 1985-12-21 CS CS859731A patent/CS266493B1/cs unknown
- 1985-12-24 JP JP60289510A patent/JPS61198595A/ja active Pending
- 1985-12-28 HU HU855016A patent/HU199324B/hu not_active IP Right Cessation
- 1985-12-30 US US06/814,683 patent/US4792730A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
HUT39276A (en) | 1986-08-28 |
YU198085A (en) | 1988-10-31 |
US4792730A (en) | 1988-12-20 |
EP0186865B1 (de) | 1990-09-26 |
IN166604B (cs) | 1990-06-09 |
BG41745A1 (en) | 1987-08-14 |
DE3579902D1 (de) | 1990-10-31 |
CS973185A1 (en) | 1988-11-15 |
HU199324B (en) | 1990-02-28 |
EP0186865A3 (en) | 1988-05-18 |
SU1536467A1 (ru) | 1990-01-15 |
JPS61198595A (ja) | 1986-09-02 |
EP0186865A2 (de) | 1986-07-09 |
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