CS266493B1 - Apparatus for arc discharge interrupting - Google Patents

Apparatus for arc discharge interrupting Download PDF

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Publication number
CS266493B1
CS266493B1 CS859731A CS973185A CS266493B1 CS 266493 B1 CS266493 B1 CS 266493B1 CS 859731 A CS859731 A CS 859731A CS 973185 A CS973185 A CS 973185A CS 266493 B1 CS266493 B1 CS 266493B1
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CS
Czechoslovakia
Prior art keywords
transformer
branch
control pulse
primary winding
rectifier
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CS859731A
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English (en)
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CS973185A1 (en
Inventor
Minco S Ing Mincev
Svetoslav A Ing Savov
Emil I Krastev
Original Assignee
Mincev Minco S
Savov Svetoslav A
Emil I Krastev
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Application filed by Mincev Minco S, Savov Svetoslav A, Emil I Krastev filed Critical Mincev Minco S
Publication of CS973185A1 publication Critical patent/CS973185A1/cs
Publication of CS266493B1 publication Critical patent/CS266493B1/cs

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02Details
    • H01J2237/0203Protection arrangements
    • H01J2237/0206Extinguishing, preventing or controlling unwanted discharges

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)

Description

- 1 - 266493
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Kor«a b raao-pa3pn«HOM cocy«e 3 3JieKTpHnecKHH TJietomnň pa3pn« οποητηηηο HanHeT nepexo«HThb «yroBoň, HanpHaceHHe Mea<«y aHó«OM h KaTo«oM ra3opa3pn«Horo cocy«a 3 naHH-naer yĎbiBaTb, h Ha nepBHHHoň οβΜΟτκε HacbímaiomerocH τρΗΗοφορΜβτορά 5 nojiyna-θτοη' HanpHKeHHe, paBHoe pa3HocTH Me»«y HanpHaceHHeM KOH«eHcaTopa 6 h Haiipn-riKeHMeM Me®«y ano«oM h KaTo«OM ra3opa3pH«Horo cocy«a 3. íÍH«yKTnpoBaHHoe boBTopHHHyro oĎMOTKy HacbímaiomerocH τρΗΗοφορΜβτορβ 5 HanpjWcenHe φopMHpyeτcH 6no-kom ynpaBjíHioinHX HMnyjibCOB 10, h BranonaeTCH thphctop 7. 3a bpgmh βκπιοηθηηογοCOCTOHHHH THpHCTOpa 7 TOK Hepe3 ΗβΓΟ 0Γρ3ΗΗΗΗΒ3ΘΤ0Η nepBblM «poccejieM 2. Ha-npHweHHe KOH«eHcaTopa 6 nepe3 ΒκπιοηβΗΗΜή thphctop 7 npHKJia«biBaeTCH Ha coot-BeTCTByioinyio nacTb nepBHHHoň očmotkh HacbímaiomeročH τρβΗοφορΜΗτορ.Η 5. Tor«aHa aHOfl h khto« ra3opa3pH«Horo cocy«a 3 npHKna«biBaeTCH oópaTHoe HanpnaceHHe,onpe«ejieHHoe cooTHomeHHeM Meac«y ο6μοτκημη «Byx nacTeň nepBHHHoň očmotkh HaCbi·inaromerocH τρ3ΗβφορΜ3Τορ3 5. 3το oópaTHoe HanpnweHHe BM3biBaeT Ha onpe«ejieHHoeBpeMH cMeHy HanpaBJíeHHH 3jieKTpHnecKoro íiójih b ra3opa3pn«HOM cocy«e 3, κοτο-poe co«eňcTByeT npo«eccy «eHOHH3a«HH b npocTpaHCTBe aHo«-KaTO« ra3opa3pH«Ho-fo čocy«á 3. 9epe3 thphctop 7 npoTexaeT pa3pH«HbiH tok KOH«eHcaTopa 6 h tokBbmpHMHTejiH 1 nepe3 nacTb κ KaTO«y ra3Ópa3pH«Horo co.cy«a 3 nepBHHHOH o6mot-KH HSCbHHaiOIUerOCH Τρ3ΗθφθρΜ3Τθρ3 5 H «poccenb 2, ΠρΗΗβΜ Μ3ΓΗΗΤΟΠΡΟΒΟ« HaCbl“ 266493
maromerocfl TpaHc<J)opMaTopa 5 nepéHaMarHHHHBaeTCH ot oTpHnaTejibHofi bgjihhhhm hh-ftyKUHH HachimeHHfi íxo ee ποποτκΗτβπι,Ηοϋ β6Πηηηημ. HacTb πθρβηηηοη oómotkh, coe-flHHGHHOH K KOHfleHCaTOpy 6 C HHflyKTHBHOCTbIO npH HaebímeHHOM COCTOHHHH MarHHTO-npoBojaa h KoHfleHcaTop 6 oópa3yiOT τρεπτΗίφιή Kpyr, b kotopom KOHfleHcaTop 6 ne-pesapmicaeTca ho ηηπρη^θηηη, uojihphtgt KOToporo oSpaTGH HcxonnoMy, ο3Ιιβηθηηο-My na φΗΓγρε b CKOčKax. Ποχι .hghctbhgm 3Toro nanpHJKeHHn μθγηητοπροβοα Hacbímaio-meroca Tpanc^iopMaTopa 5 HanunaeT nepGHaMarHHHHBaTbCH ot nono»HTenbHoři bcjim-HHHbl HHflyKUHH HaCblIHeHHH flO Ge OTPHUaTejlbHOfl BGJlHHHHbl. HaCTb nepBHHHoft o6mot-kh, coeflHiieHHoň κ KOHHGHcaTopy 6 c ηηαυκτηβηοοτβιο řípu nacbineHHOM coctohhhhMarHHTonpoBo,o;at h KOHflencaTop 6 o6pa3yioT ποβτορηο τρβπτΗίπΗΗ Kpyr, b kotopomKonnGHcaTop 6 HanHHaeT nepe3apH»aTbCH. Tok nepe3apaflKH KOHflGHcaTopa 6 προτβ-KaeT Mepe3 rapHCTop 7 b nanpaBneHHe, oĎpaTHoe ero HanpaBjíeHHio npoBe^eHHH, hnOCJie ΤΟΓΟ, ΚΒΚ 3TOT TOK /^OCTHrHGT H npeBblCHT BejIHHHHy TOKa Hepe3 THpHCTOp .7,·thphctop 7 BbiKjnoHaeTCH. B HanbHeňiueM npouecc nepe3apHflKH προτβκβετ c ποοτο-HHHOři npOflOJDKHTejIbHOCTblO, HG 3aBHCflmGH OT BeJIHHHHbl paspHflHOrO TOKa Ηβρβ3 ra-3opa3pHflHbiň cocyn 3, h onpeflanaeTca tojibko napaMeTpaMH< TpenTHmero Kpyra, coc-Toauiero H3 KOHflencaTopa 6, nacTH nepBHHHoii oSmotkh TpaHC(|)opMaTopa 5, coe,qn-ΗβΗΗοϋ κ KOH^eHcaTopy 6 c HnqyKTHBHOCTbio npH HaebímeHHOM coctohhhh μηγηητο-npoBojja, AHojja 8 η βτορογο flpoccenH 9. HocJie τογο, κθκ 3ΒΚοηήητοη nosTopHbiňnpouecc nepe3apnp;KH HanpHweHHe KotmeHcaTopa 6 npoflonxtaeT HapacTaTb c nonapH-τετοΜ, ofíHHaKOBMM c HcxoflHbíM nofl fleňcTBHeM TOKa, npoTeKaiomero c βμπρημητ&amp;πη1 nepes KoupeHcaTop 6, nepBHHHyio oGMOTKy TpaHC$opMaTopa 5 h nepBbiň p;poccejib2» Ilponecc napacTaHHH HanpnweHHH npexpamaeTCH p;o BO36y^qeHHH Tneioiuero pa3pH-na b ra3opa3pHflHOM cocyqe 3. npH npeBbiiueHHH npeflBapHTenhHo 3aflaHHoft βθπηηη-Hbi HanpHweHHH Me5Kp,y anofloM h KaTOROM ra3opa3pH£Horo cocyna 3, H3MepneMoroflaTHHKOM 4, aBTOHOMHblň y3CJI fl-HH φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB 11 bkjho-naeT thphctop 7, nocjie aero b ycTpoňcTBe πρστβκβιοτ ppopeccbi, OflHnaKOBbie cnponeccaMH, Korná TjieioiuHň paspap; οποητηηηο nepexoflHT b nyroBoň, neM ra3opa3-PHflHbiři cocya 3amHmaeTcH οτ ηβπρη»6ηηη, β&amp;πηηηηη κοτορογο 6oJibnie ηομηηηηβηοιιBenHHHHbí, na KOTopyw oh paccnHTaH. Πρκ ποβτορηομ cnoHTaHHOM nepexone TJieioiue-ro pa3pH,n;a b nyrosoň η ποβτορηομ npeBbiuieHHH npeflBapHTejibHo sanaHHoň βθηηηη-Hbi HanpflwenHH Mewny aHoflOM η κητοηομ ra’3opa3pHp;Horo cocyna 3 neňcTBHe ycT-pOHCTBa nOBTOpHeTCH.
$OpMyJia H3o6peT6HHH ycTpoňcTBo fljiH npexpamenHn flyroBbix pa3pHflOB b raaopaspHflHOM cocyne, ko-τοροβ coctoht H3 BbinpHMHTejiH, riapajuiejibHO KOTopoMy nepe3 npoccenb βκπκμθημraaopaapHflHbtfi cocyn h nocjiefloBaTejibnaH nenb, cocTaBjíeHHaH H3 nepBHHHoň o6mot~kh HacbitiíaioiuerocH TpaHc^iopMaTopa h KoiweHcaTopa, κ npoMewyTonHOMy abiBony,nepBHHHoň o6motkh HacbímaramerocH TpaHC<í>opMaTopa h nojiojKHTejibiioMy nojnocy bdi-ΠρΗΜΗΤΘΠΗ ΒΚΠΜΗβΗ THpHCTOp, KaTOfl ΚΟΤΟρΟΓΟ COeflHHeH C npOMejKyTOHHblM BblBOHOM,BXOP, 6noi<a φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB COeAHHeH C BTOpHHHOň O6MOTKOH ·.HacbunaioinerocH τρ3ΗθφορΜ3τορ3, o6a Bbixo.ua κοτορουο cboTseTCTBeuHo coenHHeHbíc flByMH BblXOflaMH ΗΒΤΟΗΟΜΗΟΓΟ ÓjIOKa φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIlIHX HMnyjIbCOB H CO“OTBeTCTBeHHO C ynpaBJIHtOlUHM SJíeKTpOflOM H KaTOfíOM THpHCTOpa, OTJIHHaiO-IH e e c h tgm, HTo napaJiJienbHo ra3opa3pnp;HOMy cocyny (3) ΒκπιοΗβΗ flaTHHK Ha-npHXeHHH (4) , o6a BblXOfta ΚΟΤΟΡΟΓΟ COOTBeTCTBeHHO COeaHHGHbl C flByMH BXOoaMHaBTOHOMHOrO &amp;ΠΟΚ3 φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB (11), a K npOMeJKyŤOHHO-My BblBOfly nepBHHHOH oSmOTKH H nOJIOXOHTGJIbHOMy BblBOfly BbinpHMHTeJIH 1 BKHiOHGHanocjie/noBaTejibHaH nciib na nnona (8) η βτορογο «poccgjih (9), npHneM aHofl «ηο-fla (8) coeflHneH κ npoMescyTOHHOMy BbiBOfly. - 4 - 266493 IIpnjio>KeHne: 1 cburypa
JlHTepaTypa 1. AsTopcKoe CBHfleTenbCTBo HPE 22 590 AHHOTAUH8
yCTPOflCTBO flJlfl nPEKPAlHEHHH βΥΓΟΒΗΧ PA3PflflOB B rA30PA3PflflH0M COCYflE . yCTpOňCTBO COCTOHT H3 ΒΗΠρΗΜΗΤβΠΗ, napaJUieJIbHO KOTOpOMy Ηβρβ3 flpoccejlbcoeflHHeHM ra3opa3paflHbiň cocyq h nocneflOBaTeJiřHaH uenb, cocTaBnetmaa H3 nep-BHHHoň oGmotkh Hacbímaromer och TpaHCífcopMaTopa h KOHfleHcaTopa. K npoMewyTOHHOMyBbiBony nepBHUHoň o6motkh HacwmaiomerocH TpaHCifcopMaTopa h nonojKHTejibHOMy παπω-cy BbmpflMHTeJlfl COGflHHeH THpHCTOp, KaTOfl ΚΟΤΟΡΟΓΟ COeflHHeH C ΠρΟΜβΙΚγΤΟΗΗΜΜBblBOflQM. ynpaBJlHIOmaH ΗβΠΒ THpHCTOpa COCTOHT H3 COeňHHeHHblX BTOPHHHOÍÍ OČMOTKHHacwmaioinerocH TpaHcýopMaTopa, 6jioica Φορμηροβθηηη ynpaBnflwmHx HMňyjibcoB h as-ΤΟΗΟΜΗΟΓΟ 6nOKa. φθρΜΗρθΒ3ΗΗΗ ynpaBJIHIOlUHX HMnynbCOB, BXOfl ΚΟΤΟΡΟΓΟ COeflHHeHc Bbixo«OM «aTHHKa. HanpHJKeHHH, coeflHHeHHoro napajuiěnbHO rasopaapflflHOMy cocyflyK npOMeJKYTOHHOMy BblBOfly nepBHHHOÍÍ OČMOTKH Hacbímaromerocfl ΤρβΗΟφορΜΒΤΟρΒ H no-jioatHTejibHOMy ποπω βηπρημητ&amp;πη coenHHeHa nocneflOBaTejibHaH uenb H3 «Kosa hBToporo flpoccenH, πρκΗβΜ aHOfl fíHOfla coeflHHeH κ npoMewyTOHHOMy βμβοπυ. npeHMymecTBaMH ycTpoňcTBa «bjihiotch noBbJíuGHHaa 3φφεκτΗΒΗθοτΒ πρκ ηοποπββο-BaHHH, ΠρΗΊβΜ ΒρβΜΗ C ΜΟΜβΗΤΘ BblKJIKJH éHHfl THpHCTOpa flO MOMeHTa BO36y»aeHHflTJieiomero paapjwa HMeeT HocTOHHHyro β6πηπηηυ, hě 3aBHCflqyio οτ β&amp;πημηηη pa3pflfl-Horo' Ťoka, η HanHHHG aainHTHOH chocoShocth ot nepeHanpHMeHHH b ra3Opa3pnflHOMcocyne. IIpH3HaHO Η3θ6ρβτβΗΗβΜ no pesynbTaTaM 3KcnepTH3bi, ocymecTBneHHoň HhcthtyTomH3O6peT6HHň H paHHOHajIH3aHHH HPB„ 1 Ηβρτβ»

Claims (1)

  1. 266493
    PŘEDMĚT VYNÁLEZU Zapojení pro přerušení obloukového výboje, které seskládá z usměrňovače, ke kterému jsou paralelně přestlumivku zapojeny plynová výbojková nádoba a sériovýobvod, složený s primárního vinutí transformátoru a kon-denzátoru, přičemž k odbočce primárního vinutí transfor-mátoru a kladnému pólu usměrňovače je připojen tyristor,jehož katoda je spojena s odbočkou primárního vinutítransformátoru, vstup bloku tvarováni řídicích impulsůje spojen se sekundárním vinutím transformátoru, přičemžoba výstupy bloku tvarování řídicích impulsů jsou spoje-ny se dvěma výstupy autonomního bloku tvarování řídicíchimpulsů a s řídicí elektrodou a katodou tyristoru, vyzna-čující se tím, že paralelně k plynové výbojkové nádobě(3) je zapojen snímač napětí (4), jehož oba výstupy jsouspojeny se dvěma vstupy autonomního bloku tvarování ří-dicích impulsů (11), přičemž k odbočce primárního vinutítransformátoru (5) a ke kladnému vývodu usměrňovače (1)je připojena sériová kombinace diody (8) a druhé tlumiv-ky (9), přičemž anoda diody (8) je připojena k odbočceprimárního vinutí transformátoru (5)·
CS859731A 1984-12-29 1985-12-21 Apparatus for arc discharge interrupting CS266493B1 (en)

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BG8468215A BG41745A1 (en) 1984-12-29 1984-12-29 Device for discontinuing of arc dicharges in gas dicharge vessel

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CS (1) CS266493B1 (cs)
DE (1) DE3579902D1 (cs)
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DE4127504A1 (de) * 1991-08-20 1993-02-25 Leybold Ag Einrichtung zur unterdrueckung von lichtboegen
DE4138794A1 (de) * 1991-11-26 1993-05-27 Leybold Ag Verfahren und vorrichtung zum beschichten eines substrats, insbesondere mit elektrisch nichtleitenden schichten
US5415757A (en) * 1991-11-26 1995-05-16 Leybold Aktiengesellschaft Apparatus for coating a substrate with electrically nonconductive coatings
EP0663019B1 (en) * 1992-09-30 1998-12-02 Advanced Energy Industries, Inc. Topographically precise thin film coating system
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US6217717B1 (en) 1992-12-30 2001-04-17 Advanced Energy Industries, Inc. Periodically clearing thin film plasma processing system
WO1996031899A1 (en) * 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
US5576939A (en) * 1995-05-05 1996-11-19 Drummond; Geoffrey N. Enhanced thin film DC plasma power supply
US5917286A (en) 1996-05-08 1999-06-29 Advanced Energy Industries, Inc. Pulsed direct current power supply configurations for generating plasmas
JP3153483B2 (ja) * 1996-11-19 2001-04-09 旭光学工業株式会社 プレビュー機能付き一眼レフカメラの制御方法
JP3153482B2 (ja) * 1996-11-19 2001-04-09 旭光学工業株式会社 一眼レフカメラのプレビュー装置
US6501232B1 (en) * 2000-01-11 2002-12-31 Mitsubishi Denki Kabushiki Kaisha Electric power unit for electric discharge surface treatment and method of electric discharge surface treatment
US7305311B2 (en) * 2005-04-22 2007-12-04 Advanced Energy Industries, Inc. Arc detection and handling in radio frequency power applications
US8217299B2 (en) * 2007-02-22 2012-07-10 Advanced Energy Industries, Inc. Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
US8044594B2 (en) * 2008-07-31 2011-10-25 Advanced Energy Industries, Inc. Power supply ignition system and method
US8395078B2 (en) * 2008-12-05 2013-03-12 Advanced Energy Industries, Inc Arc recovery with over-voltage protection for plasma-chamber power supplies
EP2648209B1 (en) 2009-02-17 2018-01-03 Solvix GmbH A power supply device for plasma processing
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
US8552665B2 (en) 2010-08-20 2013-10-08 Advanced Energy Industries, Inc. Proactive arc management of a plasma load

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BG29362A1 (en) * 1979-03-11 1980-11-14 Minchev Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge

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HUT39276A (en) 1986-08-28
YU198085A (en) 1988-10-31
US4792730A (en) 1988-12-20
EP0186865B1 (de) 1990-09-26
IN166604B (cs) 1990-06-09
BG41745A1 (en) 1987-08-14
DE3579902D1 (de) 1990-10-31
CS973185A1 (en) 1988-11-15
HU199324B (en) 1990-02-28
EP0186865A3 (en) 1988-05-18
SU1536467A1 (ru) 1990-01-15
JPS61198595A (ja) 1986-09-02
EP0186865A2 (de) 1986-07-09

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