CS266493B1 - Apparatus for arc discharge interrupting - Google Patents
Apparatus for arc discharge interrupting Download PDFInfo
- Publication number
- CS266493B1 CS266493B1 CS859731A CS973185A CS266493B1 CS 266493 B1 CS266493 B1 CS 266493B1 CS 859731 A CS859731 A CS 859731A CS 973185 A CS973185 A CS 973185A CS 266493 B1 CS266493 B1 CS 266493B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- transformer
- branch
- control pulse
- primary winding
- rectifier
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0203—Protection arrangements
- H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges
Description
- 1 - 266493
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BhinpHMHTejiH 1, napajuiejibHo KOTopóMý HepesnepBbiň «poccenb 2 ΒΚΠίΟΗβΗΜ ra3opa3pH«Hbiií cocy« 3, «aTHHK HanpHaceiiHH 4 h no-cne«oBaTejibHaH «enb, coCTaBneHHan H3 nepBHHHoň očmotkh HacbímaiomerocH TpaH-οφορΜπτορΗ 5 h KOH«eHcaTopa 6. K npoMewyTOHHOMy BbiBó«y nepBHHHoň oďmotkh Ha-CbímaiOnterOCH ΤρβΗΰφορΜΗΤΟρβ 5 H nOJIOJKHTejTbHOMy nOJltócy BbinpHMHTejIH 1 coe«Hiie-hh napajinejibHO thphctop 7 h nocne«oBaTenbHaH «enb H3 ««o«a 8 h BTOporo «poccena 9, npn«eM xaTO« mpncTopa 7 h ano« «H.o«a 8 coe«HHeHbi κ npoMewyTOHHOMyBbiBOfly. Bxo« 6noKa Φορμηροββηηη yrrpaBjtHioiuHx «MnyjibcoB 10 coe«HHeH c btophh-hoh oómotkoh HacbímaiomerocH τρβΗοφορΜβτορβ 5. 06a Bbixo«a «aTHHka ΗβπρπικβΗΗΗ 4coeflHHenbi c «ByMH βχο«ημη ηβτοηομηογο ójioxa Φορμηροβηηηη ynpaBJíHioiniix HMnyjib-cob 11, o6a. Bbixofla κοτορογο coe«HHeHbi COOTBeTCTBeHHO c ýnpaBJiHiomnM aneKTpo-«ΟΜ H K3TO«OM THPHCTOpa 7 H C «ByMH BbIXO«aMH ĎJIOKa φορΜΗρΟΒΗΗΗΗ ynpaBJIHIOlUHX'.HMnyjibcOB 10. fleňcTBue ycTpoňcTBa «jih npeKpameHHH «yroBbix pa3pa«OB b ra3opa3pH«HOM co-cy«e «πη iipOBe«eHHH τθχηοπογηηθοκογο npoqecca b cooTBeTCTBHH c Η3θ6ρβτεΗΗβΜcne«yioinee: no« «eňcTBHeM ΒΜΠρΗΜΗτεππ 1 BO36yac«aeTCH sneKTpHHecKHří TneiotunňpaspH« b ra3opa3pn«HOM cocy«e 3, KOH«eHcaTop 6 HanunaeT 3ap.HxaTbCH, npuneMΜ3ΓΗΗΤΟΠΡΟΒΟ« HaCblIHaiomerOCH ΤρΒΗΟφορΜβΤΟρΗ 5 HaCbímaeTCH 33.BpeMH. 3apHXeHHHKOH«eHcaTopa 6 «o OTpH«aTenbHoň BenHHHHbí HH«yK«HH HacbímeHHH. Kor«a b raao-pa3pn«HOM cocy«e 3 3JieKTpHnecKHH TJietomnň pa3pn« οποητηηηο HanHeT nepexo«HThb «yroBoň, HanpHaceHHe Mea<«y aHó«OM h KaTo«oM ra3opa3pn«Horo cocy«a 3 naHH-naer yĎbiBaTb, h Ha nepBHHHoň οβΜΟτκε HacbímaiomerocH τρΗΗοφορΜβτορά 5 nojiyna-θτοη' HanpHKeHHe, paBHoe pa3HocTH Me»«y HanpHaceHHeM KOH«eHcaTopa 6 h Haiipn-riKeHMeM Me®«y ano«oM h KaTo«OM ra3opa3pH«Horo cocy«a 3. íÍH«yKTnpoBaHHoe boBTopHHHyro oĎMOTKy HacbímaiomerocH τρΗΗοφορΜβτορβ 5 HanpjWcenHe φopMHpyeτcH 6no-kom ynpaBjíHioinHX HMnyjibCOB 10, h BranonaeTCH thphctop 7. 3a bpgmh βκπιοηθηηογοCOCTOHHHH THpHCTOpa 7 TOK Hepe3 ΗβΓΟ 0Γρ3ΗΗΗΗΒ3ΘΤ0Η nepBblM «poccejieM 2. Ha-npHweHHe KOH«eHcaTopa 6 nepe3 ΒκπιοηβΗΗΜή thphctop 7 npHKJia«biBaeTCH Ha coot-BeTCTByioinyio nacTb nepBHHHoň očmotkh HacbímaiomeročH τρβΗοφορΜΗτορ.Η 5. Tor«aHa aHOfl h khto« ra3opa3pH«Horo cocy«a 3 npHKna«biBaeTCH oópaTHoe HanpnaceHHe,onpe«ejieHHoe cooTHomeHHeM Meac«y ο6μοτκημη «Byx nacTeň nepBHHHoň očmotkh HaCbi·inaromerocH τρ3ΗβφορΜ3Τορ3 5. 3το oópaTHoe HanpnweHHe BM3biBaeT Ha onpe«ejieHHoeBpeMH cMeHy HanpaBJíeHHH 3jieKTpHnecKoro íiójih b ra3opa3pn«HOM cocy«e 3, κοτο-poe co«eňcTByeT npo«eccy «eHOHH3a«HH b npocTpaHCTBe aHo«-KaTO« ra3opa3pH«Ho-fo čocy«á 3. 9epe3 thphctop 7 npoTexaeT pa3pH«HbiH tok KOH«eHcaTopa 6 h tokBbmpHMHTejiH 1 nepe3 nacTb κ KaTO«y ra3Ópa3pH«Horo co.cy«a 3 nepBHHHOH o6mot-KH HSCbHHaiOIUerOCH Τρ3ΗθφθρΜ3Τθρ3 5 H «poccenb 2, ΠρΗΗβΜ Μ3ΓΗΗΤΟΠΡΟΒΟ« HaCbl“ 266493
maromerocfl TpaHc<J)opMaTopa 5 nepéHaMarHHHHBaeTCH ot oTpHnaTejibHofi bgjihhhhm hh-ftyKUHH HachimeHHfi íxo ee ποποτκΗτβπι,Ηοϋ β6Πηηηημ. HacTb πθρβηηηοη oómotkh, coe-flHHGHHOH K KOHfleHCaTOpy 6 C HHflyKTHBHOCTbIO npH HaebímeHHOM COCTOHHHH MarHHTO-npoBojaa h KoHfleHcaTop 6 oópa3yiOT τρεπτΗίφιή Kpyr, b kotopom KOHfleHcaTop 6 ne-pesapmicaeTca ho ηηπρη^θηηη, uojihphtgt KOToporo oSpaTGH HcxonnoMy, ο3Ιιβηθηηο-My na φΗΓγρε b CKOčKax. Ποχι .hghctbhgm 3Toro nanpHJKeHHn μθγηητοπροβοα Hacbímaio-meroca Tpanc^iopMaTopa 5 HanunaeT nepGHaMarHHHHBaTbCH ot nono»HTenbHoři bcjim-HHHbl HHflyKUHH HaCblIHeHHH flO Ge OTPHUaTejlbHOfl BGJlHHHHbl. HaCTb nepBHHHoft o6mot-kh, coeflHiieHHoň κ KOHHGHcaTopy 6 c ηηαυκτηβηοοτβιο řípu nacbineHHOM coctohhhhMarHHTonpoBo,o;at h KOHflencaTop 6 o6pa3yioT ποβτορηο τρβπτΗίπΗΗ Kpyr, b kotopomKonnGHcaTop 6 HanHHaeT nepe3apH»aTbCH. Tok nepe3apaflKH KOHflGHcaTopa 6 προτβ-KaeT Mepe3 rapHCTop 7 b nanpaBneHHe, oĎpaTHoe ero HanpaBjíeHHio npoBe^eHHH, hnOCJie ΤΟΓΟ, ΚΒΚ 3TOT TOK /^OCTHrHGT H npeBblCHT BejIHHHHy TOKa Hepe3 THpHCTOp .7,·thphctop 7 BbiKjnoHaeTCH. B HanbHeňiueM npouecc nepe3apHflKH προτβκβετ c ποοτο-HHHOři npOflOJDKHTejIbHOCTblO, HG 3aBHCflmGH OT BeJIHHHHbl paspHflHOrO TOKa Ηβρβ3 ra-3opa3pHflHbiň cocyn 3, h onpeflanaeTca tojibko napaMeTpaMH< TpenTHmero Kpyra, coc-Toauiero H3 KOHflencaTopa 6, nacTH nepBHHHoii oSmotkh TpaHC(|)opMaTopa 5, coe,qn-ΗβΗΗοϋ κ KOH^eHcaTopy 6 c HnqyKTHBHOCTbio npH HaebímeHHOM coctohhhh μηγηητο-npoBojja, AHojja 8 η βτορογο flpoccenH 9. HocJie τογο, κθκ 3ΒΚοηήητοη nosTopHbiňnpouecc nepe3apnp;KH HanpHweHHe KotmeHcaTopa 6 npoflonxtaeT HapacTaTb c nonapH-τετοΜ, ofíHHaKOBMM c HcxoflHbíM nofl fleňcTBHeM TOKa, npoTeKaiomero c βμπρημητ&πη1 nepes KoupeHcaTop 6, nepBHHHyio oGMOTKy TpaHC$opMaTopa 5 h nepBbiň p;poccejib2» Ilponecc napacTaHHH HanpnweHHH npexpamaeTCH p;o BO36y^qeHHH Tneioiuero pa3pH-na b ra3opa3pHflHOM cocyqe 3. npH npeBbiiueHHH npeflBapHTenhHo 3aflaHHoft βθπηηη-Hbi HanpHweHHH Me5Kp,y anofloM h KaTOROM ra3opa3pH£Horo cocyna 3, H3MepneMoroflaTHHKOM 4, aBTOHOMHblň y3CJI fl-HH φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB 11 bkjho-naeT thphctop 7, nocjie aero b ycTpoňcTBe πρστβκβιοτ ppopeccbi, OflHnaKOBbie cnponeccaMH, Korná TjieioiuHň paspap; οποητηηηο nepexoflHT b nyroBoň, neM ra3opa3-PHflHbiři cocya 3amHmaeTcH οτ ηβπρη»6ηηη, β&πηηηηη κοτορογο 6oJibnie ηομηηηηβηοιιBenHHHHbí, na KOTopyw oh paccnHTaH. Πρκ ποβτορηομ cnoHTaHHOM nepexone TJieioiue-ro pa3pH,n;a b nyrosoň η ποβτορηομ npeBbiuieHHH npeflBapHTejibHo sanaHHoň βθηηηη-Hbi HanpflwenHH Mewny aHoflOM η κητοηομ ra’3opa3pHp;Horo cocyna 3 neňcTBHe ycT-pOHCTBa nOBTOpHeTCH.
$OpMyJia H3o6peT6HHH ycTpoňcTBo fljiH npexpamenHn flyroBbix pa3pHflOB b raaopaspHflHOM cocyne, ko-τοροβ coctoht H3 BbinpHMHTejiH, riapajuiejibHO KOTopoMy nepe3 npoccenb βκπκμθημraaopaapHflHbtfi cocyn h nocjiefloBaTejibnaH nenb, cocTaBjíeHHaH H3 nepBHHHoň o6mot~kh HacbitiíaioiuerocH TpaHc^iopMaTopa h KoiweHcaTopa, κ npoMewyTonHOMy abiBony,nepBHHHoň o6motkh HacbímaramerocH TpaHC<í>opMaTopa h nojiojKHTejibiioMy nojnocy bdi-ΠρΗΜΗΤΘΠΗ ΒΚΠΜΗβΗ THpHCTOp, KaTOfl ΚΟΤΟρΟΓΟ COeflHHeH C npOMejKyTOHHblM BblBOHOM,BXOP, 6noi<a φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB COeAHHeH C BTOpHHHOň O6MOTKOH ·.HacbunaioinerocH τρ3ΗθφορΜ3τορ3, o6a Bbixo.ua κοτορουο cboTseTCTBeuHo coenHHeHbíc flByMH BblXOflaMH ΗΒΤΟΗΟΜΗΟΓΟ ÓjIOKa φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIlIHX HMnyjIbCOB H CO“OTBeTCTBeHHO C ynpaBJIHtOlUHM SJíeKTpOflOM H KaTOfíOM THpHCTOpa, OTJIHHaiO-IH e e c h tgm, HTo napaJiJienbHo ra3opa3pnp;HOMy cocyny (3) ΒκπιοΗβΗ flaTHHK Ha-npHXeHHH (4) , o6a BblXOfta ΚΟΤΟΡΟΓΟ COOTBeTCTBeHHO COeaHHGHbl C flByMH BXOoaMHaBTOHOMHOrO &ΠΟΚ3 φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB (11), a K npOMeJKyŤOHHO-My BblBOfly nepBHHHOH oSmOTKH H nOJIOXOHTGJIbHOMy BblBOfly BbinpHMHTeJIH 1 BKHiOHGHanocjie/noBaTejibHaH nciib na nnona (8) η βτορογο «poccgjih (9), npHneM aHofl «ηο-fla (8) coeflHneH κ npoMescyTOHHOMy BbiBOfly. - 4 - 266493 IIpnjio>KeHne: 1 cburypa
JlHTepaTypa 1. AsTopcKoe CBHfleTenbCTBo HPE 22 590 AHHOTAUH8
yCTPOflCTBO flJlfl nPEKPAlHEHHH βΥΓΟΒΗΧ PA3PflflOB B rA30PA3PflflH0M COCYflE . yCTpOňCTBO COCTOHT H3 ΒΗΠρΗΜΗΤβΠΗ, napaJUieJIbHO KOTOpOMy Ηβρβ3 flpoccejlbcoeflHHeHM ra3opa3paflHbiň cocyq h nocneflOBaTeJiřHaH uenb, cocTaBnetmaa H3 nep-BHHHoň oGmotkh Hacbímaromer och TpaHCífcopMaTopa h KOHfleHcaTopa. K npoMewyTOHHOMyBbiBony nepBHUHoň o6motkh HacwmaiomerocH TpaHCifcopMaTopa h nonojKHTejibHOMy παπω-cy BbmpflMHTeJlfl COGflHHeH THpHCTOp, KaTOfl ΚΟΤΟΡΟΓΟ COeflHHeH C ΠρΟΜβΙΚγΤΟΗΗΜΜBblBOflQM. ynpaBJlHIOmaH ΗβΠΒ THpHCTOpa COCTOHT H3 COeňHHeHHblX BTOPHHHOÍÍ OČMOTKHHacwmaioinerocH TpaHcýopMaTopa, 6jioica Φορμηροβθηηη ynpaBnflwmHx HMňyjibcoB h as-ΤΟΗΟΜΗΟΓΟ 6nOKa. φθρΜΗρθΒ3ΗΗΗ ynpaBJIHIOlUHX HMnynbCOB, BXOfl ΚΟΤΟΡΟΓΟ COeflHHeHc Bbixo«OM «aTHHKa. HanpHJKeHHH, coeflHHeHHoro napajuiěnbHO rasopaapflflHOMy cocyflyK npOMeJKYTOHHOMy BblBOfly nepBHHHOÍÍ OČMOTKH Hacbímaromerocfl ΤρβΗΟφορΜΒΤΟρΒ H no-jioatHTejibHOMy ποπω βηπρημητ&πη coenHHeHa nocneflOBaTejibHaH uenb H3 «Kosa hBToporo flpoccenH, πρκΗβΜ aHOfl fíHOfla coeflHHeH κ npoMewyTOHHOMy βμβοπυ. npeHMymecTBaMH ycTpoňcTBa «bjihiotch noBbJíuGHHaa 3φφεκτΗΒΗθοτΒ πρκ ηοποπββο-BaHHH, ΠρΗΊβΜ ΒρβΜΗ C ΜΟΜβΗΤΘ BblKJIKJH éHHfl THpHCTOpa flO MOMeHTa BO36y»aeHHflTJieiomero paapjwa HMeeT HocTOHHHyro β6πηπηηυ, hě 3aBHCflqyio οτ β&πημηηη pa3pflfl-Horo' Ťoka, η HanHHHG aainHTHOH chocoShocth ot nepeHanpHMeHHH b ra3Opa3pnflHOMcocyne. IIpH3HaHO Η3θ6ρβτβΗΗβΜ no pesynbTaTaM 3KcnepTH3bi, ocymecTBneHHoň HhcthtyTomH3O6peT6HHň H paHHOHajIH3aHHH HPB„ 1 Ηβρτβ»
- 1 - 266493
yCTPOÉCTBO flJM ΠΡΕΚΡΑΒΙΕΗΗΒ ΑΥΓΟΒΒΚ PA3PflflOB B ^ ΓΑ30ΡΑ3Ρ Η0Μ COCyflE H3o6peTeHHe KacaeTca ycTpoňcTBa λπη npeKpameHHH nyroBbix pa3pH, NOB-b Raso pa3paflHOM cocyfle, HcnonbšyeMOM ajih npoBeneHHH TexHonornnecKoro npoijecca npno6pa6oTKe noBepxHOCTeň fleraneří MaiuHHOCTpoeHHH b. H3BecTHO ycTpoňcTBo fljia npeKpameHHH jjyroBbix pa3pHflOB b rašopaspHUHOM co-cyqe, κοτοροβ coctoht βμπρημητ H3 & πη, napajnianbHo KoropoMy nepe3 flpoccenbΒκπιοηβΗΜ ra3opa3pHflHb] ii cocyfl h nocneflOBaTejibHaH nenb, cocTaBJíeHHaH «nepBHn 3 ~ ho # oSmotkh HacbímaiomerocH τρβΗβφορΜΗτορβ KOHfleHcaTOpa h. N T y T T OH ac ac ac ac ac w w w w w w w w w w w w w w w w w w w w w w w ef ef ef ef ef ef ef ef ef ef ef. BxOfl ĎJlOKa φορΜΗρΟΒΑΗΗΗ ynpaBJlHJOIUMX HMnyJIbCOB COefíHHeH C BTOpHHHOfto6motkoíí Hacbiinaiomeroca TpaHc <l> opMaTopa, o6a Bbixofla κοτορ'ογο cooTBeTCTBeHHo Coe - c ,, flHHenw flByMn BbixoflaMH aBToHOMHoro 6noKa φορΜΗροΒβΗΗΗ ynpaBJíHiomHX HMnyribcoBH, COOTB6TCTB6HHO) C ynpHBJIHK> MHM SJíeKTpOflOM KaTOflOM THpHCTOpa H [1].
HeftocTaTOK 3Toro ycTpoňcTBa 3aKniouaeTCH b HeflocTaTOHHoň βφφβκτΗΒΗΟβΤΗ er.oHCnOJIb3OBaHHH BCJieflCTBHe ΤΟΓΟ, UTO BpeMH C ΜΟΜΘΗΤΗ ΟΤΚΠΙΟΗβΗΗΗ THpHCTOpa flOMoMSHTa BosSyTKHeHHH TJieioinero paapHfla ΗΜββτ nepeMeHHyio BenHHHHy h 33Bhcht otΒβΠΗΗΗΗΜ pa3pHflHOrO TOK3, ΠρΗΗβΜ MajieHbKHM ΒβΠΗΗΗΗβΜ paspHflHOrO T0K3 COOTBeT "CTByiOT SonblUHe Β6ΠΗΗΗΗΜ Stor ΒρβΜβΗΗ H HaofíopOT.
Bapaqeň H3o6peTeHHH hbjih6Tch co3flaHHe ycTpoňcTBa απη npeicpameHHH nyroBbixpaepHflOB b ra3opa3PH / XH0M cocyfle flflH npoBefleHHH TexHonorHHeCKoro npoqecca, očnaflaiomero OflHHaKOBOH θφφβΚΤΗΒΗΟΟΤΒΚ) ΠΡΗ HCn0JIh30BaHHH FIM paSOTbl KHK He-ÓCfflblHHMH Taras 6HH3KHMH H K TOKA HOMHHaJIbHOň ΒΘΗΗΗΗΗβΜΗ Hepe3 ra3Opa3pHfl-HblH COCyfl. 3TA 3aflana pemaeTCH co3flaHHeM ycTpoňcTBa hjih npeKpameHHH «yroBbix pa3pHflóBb ra3opa3pH N; HOM cocyfle, κοτοροβ coctoht H3 BbinpaMHTejifl, riapajineJibHO xoTopoMy 1nepe3 nepBbJH flpoccenb ΒκηιοηβΗΗ ra3opa3pHflHbrtí [cocyfl, αητηηκ ΗΒπρηχβΗΗΠ h no-cjieflOBaTejibHyro flenb, cocTaBjíeHHyio of nepBHHHoří oSmotkh HacbímaiomerocH TPAH-εφορΜΒΤορβ h KomnGHcaTopa . K npoMeacyTouHOMy BbiBOfly nepBHWHoon ΟβΜΟΤΚΗ Hacbí-maiomerocH ΤρΗΗΟφορΜβΤΟρβ H nOJlOXHT & nbHOMy HOJHOCy BbinpHMHTeJIH COeflHHeHbl na-pannenbHO thphctop h nocnefloBaTenbHan flenb H3 flHOfla η βτορογο flpoccenn, npn-H6M Karofl. THpHCTOpa h awofl flHOfla noflKraoneHbí κ npoMeHtyTOHHOMy BbiBOfly. Bxofl6lIOKa φορΜΗρΟΒΘΗΗΗ ynpaBJIHKHUHX HMnyjlbCOB CBH33H C BTOpHHHOH OČMOTKOft HaCbl “- 2 26.6493 maroinerocfl · TpaHcýopMaTopa. Bbtxo 06a "and unsound HanpHxeHHH Coe« HneHbi c «ByMHBXO« 3MH aBTOHOMHOrO 6jIOI <φθρΜΗρθΒ3ΗΗΗ and ynpaBJlfliOIUHX HMnyJIbCOB, o6a BWXOfla co · Topór COOTBeTCTBeHHO Coe «HHeHbI ynpaBJIHIOIUHM 3JieKTp0 C« H Κ3Τ0 0M «0Μ THpHCTO - PA ,. HC« ByMH BbixoflaMH 6noKa . Nορμηροβηηηη ynpaBJiHioii # ix HMnyjibcoB. IIpeHMymecTBa ycTpoňcTBa «πη npeKpameHHH« yroBbix pa3pn «oB b ra3opa3pH« H0Mcocy «e« πη npoBe «ehhh TexiionormecKoro NPO" ECCA b οοοτβθτοτβηη c Η3ο6ρβτδΗΗ · 6M 3áKnKWai0TCn B ΠΟΒΜΙΙΙΘΗΗΟΗ 3φφθΚΤΗΒΗΟΟΤΗ NPH ero ΗΟΠΟΠΒ3ΟΒ3ΗΗΗ BCJieflCTBHeΤΟΓΟ, HTO BeJIHHHHa ΒρβΜβΗΗ C ΜΟΜβΗΤΒ ΒΜΚΠΙΟΗβΗΗΗ THpHCTOpa «Ο ΜΟΜβΗΤΒ B03 “hHH Tneiomero pa3pH.ua ποοτοηηηβη h He 33bhcht ot BenHHHHb pa3pH« Horo to-Ka, hb HanHHHH samHTHoň cnocoĎMocTH ot nepeHanpH3ceH «ft wa raaopaspftnubiň co-cy«. npHMepHoe ηοποπηθηηθ ycT leastcTBa «south npeKpameHHH« yroBbix pa3pn «OB b ra3Ó-pa3pn« HOM cocyge.flní! npoBefleHHH TexHOJionwecKoro npopecca b cooTBeTCTBHH cH3o6pereHneM noxasaHo na πρηποχθηηομ nepTeace, npeflCTasnaiomeM co6oň πρηη «ηπη-ajtbHyio cxeMy ycTidedcTBa. ycT at leastTBo «south npeKpameHHH« yroBbix pa3pn «0B b raaopaspHfMMOM cocy eb or co-oTBeTCTBHH c xepTexoM coctoht H3. BhinpHMHTejiH 1 napajuiejibHo KOTopóMý HepesnepBbiň «poccenb 2 ΒΚΠίΟΗβΗΜ ra3opa3pH« Hbiií Coca «3« aTHHK HanpHaceiiHH 4 h no-CNE «oBaTejibHaH« ENB coCTaBneHHan H3 nepBHHHoň očmotkh HacbímaiomerocH TPAH-οφορΜπτορΗ 5h KOH «eHcaTopa 6. npoMewyTOHHOMy BbiBó« y hHhh-CbimaiOnterOCH ΤρβΗΰφορΜΗΤΟρβ 5 H OJ J b T b b b b OJ h h h h h h h h h TO TO TO TO TO TO TO TO TO TO TO TO TO TO TO TO TO TO Ho «and 8 coe« HHeHbi κ npoMewyTOHHOMyBbiBOfly. BXO «6noKa Φορμηροββηηη yrrpaBjtHioiuHx« MnyjibcoB 10 coe «HHeH c btophh-Hoh oómotkoh HacbímaiomerocH τρβΗοφορΜβτορβ Bbixo fifth 06a" and "aTHHka ΗβπρπικβΗΗΗ 4coeflHHenbi c« ByMH βχο «ημη ηβτοηομηογο ójioxa Φορμηροβηηηη ynpaBJíHioiniix HMnyjib-cob 11 o6a. Bbixofla κοτορογο coe «HHeHbi COOTBeTCTBeHHO c ýnpaBJiHiomnM aneKTpo-« ΟΜ H K3TO «OM THPHCTOpa 7 HC« ByMH BbIXO «AMH ĎJIOKa φορΜΗρΟΒΗΗΗΗ ynpaBJIHIOlUHX'.HMnyjibcOB 10th fleňcTBue ycTpoňcTBa« South npeKpameHHH «yroBbix pa3pa« OB ra3opa3pH b "as HOM-cy" e «πη iipOBe« ehhh τθχηοπογηηθοκογο npoqecca b c cooTBeTCTBHH Η3θ6ρβτεΗΗβΜcne «yioinee: no« «1 eňcTBHeM ΒΜΠρΗΜΗτεππ BO36yac« aeTCH sneKTpHHecKHří TneiotunňpaspH «b ra3opa3pn« HOM Coca «e 3, KOH« eHcaTop 6 HanunaeT 3ap.HxaTbCH, npuneMΜ3ΓΗΗΤΟΠΡΟΒΟ «HaCblIHaiomerOCH ΤρΒΗΟφορΜβΤΟρΗ 5 HaCbímaeTCH 33.BpeMH. 3HHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHHH. Kor «ab raao-pa3pn« HOM cocy «e 3 3JieKTpHnecKHH TJietomn pa3pn« HanHeT nepexo «HThb« yroBoň, HanpHaceHHe Mea <«y aHó nepBHHHoň οβΜΟτκε HacbímaiomerocH τρΗΗοφορΜβτορά 5-nojiyna θτοη 'HanpHKeHHe, paBHoe pa3HocTH Me »« y HanpHaceHHeM KOH «eHcaTopa 6h Haiipn-riKeHMeM ME®« y yes «oM H Kato« OM ra3opa3pH «Horo Coca« IIH and 3 «yKTnpoBaHHoe boBTopHHHyro oĎMOTKy HacbímaiomerocH τρΗΗοφορΜβτορβ HanpjWcenHe φopMHpyeτcH 5 6 NO-COM ynpaBjíHioinHX HMnyjibCOB 10 h BranonaeTCH thphctop seventh 3a bpgmh βκπιοηθηηογοCOCTOHHHH THpHCTOpa 7 FLOW Hepe3 ΗβΓΟ 0Γρ3ΗΗΗΗΒ3ΘΤ0Η nepBblM «poccejieM second Ha-KOH npHweHHe« eHcaTopa 6 nepe3 ΒκπιοηβΗΗΜή thphctop 7 npHKJia «biBaeTCH Ha COOt BeTCTByioinyio nacTb 5. BH «aHa aHOfl h khto« ra3opa3pH «Horo cocy« and 3 npHKna «biBaeTCH oópa Thoe HanpnaceHHe, onpe «ejieHHoe cooTHomeHHeM MEAC« y ο6μοτκημη «Byx loaded nepBHHHoň očmotkh HaCbi · inaromerocH τρ3ΗβφορΜ3Τορ3 fifth 3το oópaTHoe HanpnweHHe BM3biBaeT Ha onpe« ejieHHoeBpeMH cMeHy HanpaBJíeHHH 3jieKTpHnecKoro íiójih b ra3opa3pn «HOM Coca« e 3 κοτο-PEO as "NPO eňcTByeT Cy «H OH OH H H a H H b b b b 9 9 9 9 cy 9 ep ep 9 9 9 9 9 9 9 ep ep ep h h ep ep ep ep ep ep «A 3 nepBHHHOH o6mot-KH HSCbHHaiOIUerOCH Τρ3ΗθφθρΜ3Τθρ3 5 H« poccenb 2, ΠρΗΗβΜ Μ3ΓΗΗΤΟΠΡΟΒΟ «HaCbl» 266493
maromerocfl TpaHc <J) opMaTopa 5 nepéHaMarHHHHBaeTCH ot oTpHnaTejibHofi bgjihhhhm hh-ftyKUHH HachimeHHfi íxo ee ποποτκΗτβπι, Ηοϋ β6Πηηηημ. HacTb πθρβηηηοη oómotkh, Coe-flHHGHHOH K KOHfleHCaTOpy 6 C HHflyKTHBHOCTbIO NPH HaebímeHHOM COCTOHHHH MarHHTO-npoBojaa h KoHfleHcaTop 6 oópa3yiOT τρεπτΗίφιή Kpyr b kotopom KOHfleHcaTop 6 non-pesapmicaeTca it ηηπρη ^ θηηη, uojihphtgt KOToporo oSpaTGH HcxonnoMy, ο3Ιιβηθηηο-My to φΗΓγρε b CKOčKax. Ποχι .hghctbhgm 3Toro nanpHJKeHHn μθγηητοπροβοα Hacbímaio-meroca Tpanc ^ iopMaTopa 5 HanunaeT nepGHaMarHHHHBaTbCH ot nono »HTenbMo bcjim-HHHbl HHflyKUHH HaCblIHeHHH flO Ge OTPHUaTejlbHOfl BGJ1HHHHbl. HaCTb nepBHHHoft o6mot-kh, coeflHiieHHoň κ KOHHGHcaTopy 6 c ηηαυκτηβηοοτβιο υποστήριο nacbineHHOM coctohhhhMarHHTonpoBo, o; h KOHflencaTop 6 o6pa3yioT ποβτορηο τρβπτΗίπΗΗ Kpyr, b kotopomKonnGHcaTop 6 HanHHaeT nepe3apH »aTbCH. Nep 3 nep OH OH OH OH OH OH π OH OH OH OH OH OH OH OH b pa OH OH OH OH OH n T T T T T T n n n n n n n n n p p p p p,,, B HanbHeňiueM npouecc nepe3apHflKH προτβκβετ c ποοτο-HHHOři npOflOJDKHTejIbHOCTblO HG 3aBHCflmGH OT BeJIHHHHbl paspHflHOrO TOKAI Ηβρβ3 RA 3opa3pHflHbiň cocyn 3 h onpeflanaeTca tojibko napaMeTpaMH <TpenTHmero Kpyra COC-Toauiero H3 KOHflencaTopa 6 nacTH nepBHHHoii oSmotkh TpaHC (|) opMaTopa 5 Coe , qn-KOH ΗβΗΗοϋ κ ^ eHcaTopy 6 c HnqyKTHBHOCTbio NPH HaebímeHHOM coctohhhh μηγηητο-npoBojja, AHojja 8 η βτορογο flpoccenH ninth HocJie τογο, κθκ 3ΒΚοηήητοη nosTopHbiňnpouecc nepe3apnp; KH HanpHweHHe KotmeHcaTopa 6 npoflonxtaeT HapacTaTb c nonapH-τετοΜ, ofíHHaKOBMM c HcxoflHbíM nOFL fleňcTBHeM Tokai , npoTeKaiomero c βμπρημητ & πη1 nepes KoupeHcaTop 6 nepBHHHyio oGMOTKy TpaHC $ opMaTopa 5h nepBbiň p; poccejib2 »Ilponecc napacTaHHH HanpnweHHH npexpamaeTCH p o BO36y ^ qeHHH Tneioiuero pa3pH-on b ra3opa3pHflHOM cocyqe third NPH npeBbiiueHHH npeflBapHTenhHo 3aflaHHoft βθπηηη-HBI HanpHweHHH Me5Kp , y anofloM h KaTOROM ra3opa3pH £ Horo cocyna 3, H3MepneMoroflaTHHKOM 4, aBTOHOMHblň y3CJI fl-HH φορΜΗρΟΒΒΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB 11 bkjho-naeT thphctop 7; οποητηηηο nepexoflHT b nyroBoň, neM ra3opa3-PHflHbri cocya 3amHmaeTcH οτ ηβπρη »6ηηη, β & πηηηηη κοτορογο 6oJibnie ηομηηηηβηοιιBenHHHHbí, na KOTopyw oh paccnHTaH. Πρκ ποβτορηομ cnoHTaHHOM nepexone TJieioiue-ro pa3pH n ab nyrosoň η ποβτορηομ npeBbiuieHHH npeflBapHTejibHo sanaHHoň βθηηηη HBI-HanpflwenHH Mewny aHoflOM η κητοηομ ra'3opa3pHp; Horo cocyna 3 neňcTBHe YCT-pOHCTBa nOBTOpHeTCH.
$ OpMyJia H3o6peT6HHH ycTpoňcTBo fljiH npexpamenHn flyroBbix pa3pHflOB b raaopaspHflHOM cocyne co-τοροβ coctoht H3 BbinpHMHTejiH, riapajuiejibHO KOTopoMy nepe3 npoccenb βκπκμθημraaopaapHflHbtfi cocyn h nocjiefloBaTejibnaH nenb, cocTaBjíeHHaH H3 nepBHHHoň o6mot ~ kh HacbitiíaioiuerocH TpaHc ^ iopMaTopa h KoiweHcaTopa, κ npoMewyTonHOMy Abibon, nepBHHHoň o6motkh HacbímaramerocH TpaHC <i> H opMaTopa nojiojKHTejibiioMy nojnocy BDI-ΠρΗΜΗΤΘΠΗ ΒΚΠΜΗβΗ THpHCTOp, KaTOfl ΚΟΤΟρΟΓΟ COeflHHeH C npOMejKyTOHHblM BblBOHOM, BXOP, 6noi <φορΜΗρΟΒΒΗΗΗ and ynpaBJIHlOIUHX HMnyjIbCOB COeAHHeH C BTOpHHHOň O6MOTKOH · .HacbunaioinerocH τρ3ΗθφορΜ3τορ3, o6a Bbixo.ua κοτορουο cboTseTCTBeuHo coenHHeHbíc flByMH BblXOflaMH ΗΒΤΟΗΟΜΗΟΓΟ ÓjIOKa φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIlIHX HMnyjIbCOB H CO e CT CT CT CT CT CT HO HO HO HO y pa pa t t t t t t t OM OM OM OM OM OM OM OM OM OM OM p p p p THpHCTOpa, OTJIHHaiO-IH ech tgm, οΗβΗ flaTHHK Ha-npHXeHHH (4) o6a BblXOfta ΚΟΤΟΡΟΓΟ COOTBeTCTBeHHO COeaHHGHbl C flByMH BXOoaMHaBTOHOMHOrO & ΠΟΚ3 φθρΜΗρθΒ3ΗΗΗ ynpaBJIHlOIUHX HMnyjIbCOB (11), and K npOMeJKyŤOHHO-My BblBOfly nepBHHHOH oSmOTKH H nOJIOXOHTGJIbHOMy BblBOfly BbinpHMHTeJIH 1 BKHiOHGHanocjie / noBaTejibHaH nciib on NNoN (8) η βτορογο «poccgjih (9), npHneM and Hofl« ηο-fla (8) coeflHneH κ npoMescyTOHHOMy BbiBOfly. - 4 - 266493 IIpnjio> KeHne: 1 cburypa
JlHTepaTypa 1. AsTopcKoe CBHfleTenbCTBo HPE 22 590 AHHOTAUH8
yCTPOflCTBO flJlfl nPEKPAlHEHHH βΥΓΟΒΗΧ PA3PflflOB B rA30PA3PflflH0M COCYflE. CT p BO BO BO BO 3 3 3 3 3 3 CT CT CT CT CT CT CT CT CT CT CT CT CT CT CT CT CT CT ρ ρ ρ ρ ρ ρ ρ ρ ρ ρ ρ ac ac ac ac ac ac ac. K npoMewyTOHHOMyBbiBony nepBHUHoň o6motkh HacwmaiomerocH TpaHCifcopMaTopa h nonojKHTejibHOMy παπω-cy BbmpflMHTeJlfl COGflHHeH THpHCTOp, KaTOfl ΚΟΤΟΡΟΓΟ COeflHHeH C ΠρΟΜβΙΚγΤΟΗΗΜΜBblBOflQM. ynpaBJlHIOmaH pβΠΒ THpHCTOpa COCTOHT H3 COHHHeHHblX BTOPHHHOÍÍ OČMOTKHHacwmaioinerocH TpaHcýopMaTopa, 6jioica Φορμηροβθηηη ynpaBnflwmHx HMňyjibcoB h as-ΤΟΗΟΜΗΟΓΟ 6nOKa. φθρΜΗρθΒ3ΗΗΗ ynpaBJIHIOlUHX HMnynbCOB, BXOfl ΚΟΤΟΡΟΓΟ COeflHHeHc Bbixo «OM« and THHKa. HanpHJKeHHH, coeflHHeHHoro napajuiěnbHO rasopaapflflHOMy cocyflyK npOMeJKYTOHHOMy BblBOfly nepBHHHOÍÍ OČMOTKH Hacbímaromerocfl ΤρβΗΟφορΜΒΤΟρΒ no H-jioatHTejibHOMy ποπω βηπρημητ & πη coenHHeHa nocneflOBaTejibHaH uenb H3 «Kosa hBToporo flpoccenH, πρκΗβΜ aHOfl fíHOfla coeflHHeH κ npoMewyTOHHOMy βμβοπυ. npeHMymecTBaMH ycTpoňcTBa «bjihiotch noBbJíuGHHaa 3φφεκτΗΒΗθοτΒ πρκ ηοποπββο-BaHHH, ΠρΗΊβΜ ΒρβΜΗ C ΜΟΜβΗΤΘ BblKJIKJH éHHfl THpHCTOpa Flo MOMeHTa BO36y» aeHHflTJieiomero paapjwa HMeeT HocTOHHHyro β6πηπηηυ HE 3aBHCflqyio οτ β & πημηηη pa3pflfl-Horo 'Tokai η HanHHHG aainHTHOH chocoShocth rpm nepeHanpHMeHHH b ra3Opa3pnflHOMcocyne. IIpH3HaHO Η3θ6ρβτβΗΗβΜ no pesynbTaTaM 3KcnepTH3bi, ocymecTBneHHon HhcthtyTomH3O6peT6HHn H paHHOHajIH3aHHH HPB “1 Ηβρτβ»
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BG8468215A BG41745A1 (en) | 1984-12-29 | 1984-12-29 | Device for discontinuing of arc dicharges in gas dicharge vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS973185A1 CS973185A1 (en) | 1988-11-15 |
| CS266493B1 true CS266493B1 (en) | 1990-01-12 |
Family
ID=3914865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS859731A CS266493B1 (en) | 1984-12-29 | 1985-12-21 | Apparatus for arc discharge interrupting |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4792730A (en) |
| EP (1) | EP0186865B1 (en) |
| JP (1) | JPS61198595A (en) |
| BG (1) | BG41745A1 (en) |
| CS (1) | CS266493B1 (en) |
| DE (1) | DE3579902D1 (en) |
| HU (1) | HU199324B (en) |
| IN (1) | IN166604B (en) |
| SU (1) | SU1536467A1 (en) |
| YU (1) | YU198085A (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2648001B1 (en) * | 1989-05-31 | 1991-09-27 | Breda Jean Pierre | DIRECT CURRENT SUPPLY OF PLASMA ELECTRODES AND METHOD FOR REGENERATING PLASMA |
| DE4127504A1 (en) * | 1991-08-20 | 1993-02-25 | Leybold Ag | DEVICE FOR SUPPRESSING ARCES |
| US5415757A (en) * | 1991-11-26 | 1995-05-16 | Leybold Aktiengesellschaft | Apparatus for coating a substrate with electrically nonconductive coatings |
| DE4138794A1 (en) * | 1991-11-26 | 1993-05-27 | Leybold Ag | Process and appts. for coating substrate - uses current source connected to cathodes in evacuated coating chamber |
| DE69322404T2 (en) * | 1992-09-30 | 1999-04-29 | Advanced Energy Ind Inc Fort C | TOPOGRAPHICALLY ACCURATE THIN FILM COATING SYSTEM |
| US5718813A (en) * | 1992-12-30 | 1998-02-17 | Advanced Energy Industries, Inc. | Enhanced reactive DC sputtering system |
| US6217717B1 (en) | 1992-12-30 | 2001-04-17 | Advanced Energy Industries, Inc. | Periodically clearing thin film plasma processing system |
| WO1996031899A1 (en) | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| US5576939A (en) * | 1995-05-05 | 1996-11-19 | Drummond; Geoffrey N. | Enhanced thin film DC plasma power supply |
| US5917286A (en) | 1996-05-08 | 1999-06-29 | Advanced Energy Industries, Inc. | Pulsed direct current power supply configurations for generating plasmas |
| JP3153483B2 (en) * | 1996-11-19 | 2001-04-09 | 旭光学工業株式会社 | Control method of SLR camera with preview function |
| JP3153482B2 (en) * | 1996-11-19 | 2001-04-09 | 旭光学工業株式会社 | SLR camera preview device |
| CN1124913C (en) * | 2000-01-11 | 2003-10-22 | 三菱电机株式会社 | Power supply device for discharge surface treatment and discharge surface treatment method |
| US7305311B2 (en) * | 2005-04-22 | 2007-12-04 | Advanced Energy Industries, Inc. | Arc detection and handling in radio frequency power applications |
| US8217299B2 (en) * | 2007-02-22 | 2012-07-10 | Advanced Energy Industries, Inc. | Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch |
| US8044594B2 (en) * | 2008-07-31 | 2011-10-25 | Advanced Energy Industries, Inc. | Power supply ignition system and method |
| US8395078B2 (en) | 2008-12-05 | 2013-03-12 | Advanced Energy Industries, Inc | Arc recovery with over-voltage protection for plasma-chamber power supplies |
| EP2648209B1 (en) | 2009-02-17 | 2018-01-03 | Solvix GmbH | A power supply device for plasma processing |
| DE102010031568B4 (en) | 2010-07-20 | 2014-12-11 | TRUMPF Hüttinger GmbH + Co. KG | Arclöschanordnung and method for erasing arcs |
| US8552665B2 (en) | 2010-08-20 | 2013-10-08 | Advanced Energy Industries, Inc. | Proactive arc management of a plasma load |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2297927A1 (en) * | 1975-01-17 | 1976-08-13 | Anvar | Thermochemical treatment of metal with ion bombardment - using a sealed discharge chamber, an electrode support and an arc detecting generator |
| BG22590A1 (en) * | 1975-10-10 | 1977-04-20 | ||
| US4329627A (en) * | 1976-02-02 | 1982-05-11 | Esquire, Inc. | High frequency thyristor circuit for energizing a gaseous discharge lamp |
| BG29362A1 (en) * | 1979-03-11 | 1980-11-14 | Minchev | Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge |
-
1984
- 1984-12-29 BG BG8468215A patent/BG41745A1/en unknown
-
1985
- 1985-12-10 IN IN996/MAS/85A patent/IN166604B/en unknown
- 1985-12-18 YU YU01980/85A patent/YU198085A/en unknown
- 1985-12-19 DE DE8585116262T patent/DE3579902D1/en not_active Expired - Fee Related
- 1985-12-19 EP EP85116262A patent/EP0186865B1/en not_active Expired - Lifetime
- 1985-12-20 SU SU857774058A patent/SU1536467A1/en active
- 1985-12-21 CS CS859731A patent/CS266493B1/en unknown
- 1985-12-24 JP JP60289510A patent/JPS61198595A/en active Pending
- 1985-12-28 HU HU855016A patent/HU199324B/en not_active IP Right Cessation
- 1985-12-30 US US06/814,683 patent/US4792730A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0186865A2 (en) | 1986-07-09 |
| IN166604B (en) | 1990-06-09 |
| SU1536467A1 (en) | 1990-01-15 |
| EP0186865A3 (en) | 1988-05-18 |
| EP0186865B1 (en) | 1990-09-26 |
| HU199324B (en) | 1990-02-28 |
| CS973185A1 (en) | 1988-11-15 |
| DE3579902D1 (en) | 1990-10-31 |
| US4792730A (en) | 1988-12-20 |
| BG41745A1 (en) | 1987-08-14 |
| HUT39276A (en) | 1986-08-28 |
| YU198085A (en) | 1988-10-31 |
| JPS61198595A (en) | 1986-09-02 |
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